GB1313342A - Semiconductor chip bonding - Google Patents
Semiconductor chip bondingInfo
- Publication number
- GB1313342A GB1313342A GB2998070A GB2998070A GB1313342A GB 1313342 A GB1313342 A GB 1313342A GB 2998070 A GB2998070 A GB 2998070A GB 2998070 A GB2998070 A GB 2998070A GB 1313342 A GB1313342 A GB 1313342A
- Authority
- GB
- United Kingdom
- Prior art keywords
- stage
- substrate
- heater
- chip
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 4
- 239000010931 gold Substances 0.000 abstract 4
- 229910052737 gold Inorganic materials 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 3
- 239000011261 inert gas Substances 0.000 abstract 2
- 238000005275 alloying Methods 0.000 abstract 1
- 238000003466 welding Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67138—Apparatus for wiring semiconductor or solid state device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Die Bonding (AREA)
- Wire Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US83569469A | 1969-06-23 | 1969-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1313342A true GB1313342A (en) | 1973-04-11 |
Family
ID=25270224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2998070A Expired GB1313342A (en) | 1969-06-23 | 1970-06-19 | Semiconductor chip bonding |
Country Status (8)
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3717743A (en) * | 1970-12-07 | 1973-02-20 | Argus Eng Co | Method and apparatus for heat-bonding in a local area using combined heating techniques |
| US3710432A (en) * | 1971-03-30 | 1973-01-16 | Gen Electric | Method for removing a metalized device from a surface |
| US3797100A (en) * | 1971-04-12 | 1974-03-19 | L Browne | Soldering method and apparatus for ceramic circuits |
| US3740521A (en) * | 1971-08-16 | 1973-06-19 | M Bullard | Soldering apparatus for saw cutting teeth |
| US3722072A (en) * | 1971-11-15 | 1973-03-27 | Signetics Corp | Alignment and bonding method for semiconductor components |
| US3791018A (en) * | 1971-11-16 | 1974-02-12 | Western Electric Co | Heating method and apparatus for securing a member to an article |
| US3765590A (en) * | 1972-05-08 | 1973-10-16 | Fairchild Camera Instr Co | Structure for simultaneously attaching a plurality of semiconductor dice to their respective package leads |
| US3846905A (en) * | 1973-07-09 | 1974-11-12 | Texas Instruments Inc | Assembly method for semiconductor chips |
| US3920949A (en) * | 1974-03-13 | 1975-11-18 | Mallory & Co Inc P R | Beam leaded device welding machine |
| US3883945A (en) * | 1974-03-13 | 1975-05-20 | Mallory & Co Inc P R | Method for transferring and joining beam leaded chips |
| US4315128A (en) * | 1978-04-07 | 1982-02-09 | Kulicke And Soffa Industries Inc. | Electrically heated bonding tool for the manufacture of semiconductor devices |
| CH647908A5 (de) * | 1979-06-05 | 1985-02-15 | Siemens Ag Albis | Verfahren und anordnung zum kontaktieren der leiterbahnen von leiterplatten mit kontaktstiften. |
| US4320865A (en) * | 1980-03-21 | 1982-03-23 | National Semiconductor Corporation | Apparatus for attachment of die to heat sink |
| US4583676A (en) * | 1982-05-03 | 1986-04-22 | Motorola, Inc. | Method of wire bonding a semiconductor die and apparatus therefor |
| JPS58192999A (ja) * | 1982-05-06 | 1983-11-10 | Akaishi Kinzoku Kogyo Kk | 円筒形多翼フアン及びその製法 |
| US4607779A (en) * | 1983-08-11 | 1986-08-26 | National Semiconductor Corporation | Non-impact thermocompression gang bonding method |
| EP0169574B1 (en) * | 1984-07-27 | 1990-04-25 | Kabushiki Kaisha Toshiba | Apparatus for manufacturing semiconductor device |
| US4638938A (en) * | 1984-09-07 | 1987-01-27 | Rockwell International Corporation | Vapor phase bonding for RF microstrip line circuits |
| DE3722730A1 (de) * | 1987-07-09 | 1989-01-19 | Productech Gmbh | Geheizter stempel |
| FR2618606B1 (fr) * | 1987-07-24 | 1990-02-16 | Thomson Composants Militaires | Four de soudure de puces de circuit integre |
| EP0349756A3 (en) * | 1988-05-30 | 1991-03-20 | Canon Kabushiki Kaisha | Method of making electric circuit device |
| US4937006A (en) * | 1988-07-29 | 1990-06-26 | International Business Machines Corporation | Method and apparatus for fluxless solder bonding |
| EP0434135B1 (en) * | 1989-12-20 | 1994-06-01 | Koninklijke Philips Electronics N.V. | Method of positioning and soldering of SMD components |
| US5057969A (en) * | 1990-09-07 | 1991-10-15 | International Business Machines Corporation | Thin film electronic device |
| JP3290632B2 (ja) * | 1999-01-06 | 2002-06-10 | 株式会社アルテクス | 超音波振動接合装置 |
| DE10133217A1 (de) * | 2001-07-09 | 2003-01-23 | Seho Systemtechnik Gmbh | Verfahren und Vorrichtung zum Verlöten von elektrischen Bauteilen auf Kunststofffolie |
| JP4206320B2 (ja) | 2003-09-19 | 2009-01-07 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法 |
| US20050127144A1 (en) * | 2003-12-10 | 2005-06-16 | Atuhito Mochida | Method of mounting a semiconductor laser component on a submount |
| FR2938724B1 (fr) * | 2008-11-19 | 2012-08-10 | Valeo Equip Electr Moteur | Procede et dispositif de soudage selectif par thermodes pour puces electroniques |
| CN114429927B (zh) * | 2022-01-26 | 2022-09-27 | 深圳市锐博自动化设备有限公司 | 一种半导体芯片用自动共晶机 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US379822A (en) * | 1888-03-20 | Electric heater | ||
| US236972A (en) * | 1881-01-25 | Soldering-iron | ||
| NL175652B (nl) * | 1952-02-07 | Krings Josef | Glijschoen voor een spaninrichting van een greppelbouwinrichting. | |
| US3070683A (en) * | 1960-01-27 | 1962-12-25 | Joseph J Moro-Lin | Cementing of semiconductor device components |
| NL261280A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1960-02-25 | 1900-01-01 | ||
| US3006122A (en) * | 1960-04-06 | 1961-10-31 | Weishans Albert | Heat sealing apparatus and method |
| US3165818A (en) * | 1960-10-18 | 1965-01-19 | Kulicke & Soffa Mfg Co | Method for mounting and bonding semiconductor wafers |
| NL283249A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1961-09-19 | 1900-01-01 | ||
| US3095492A (en) * | 1961-12-26 | 1963-06-25 | Northrop Corp | Controlled resistance spot heating device |
| US3197608A (en) * | 1962-01-23 | 1965-07-27 | Sylvania Electric Prod | Method of manufacture of semiconductor devices |
| US3294951A (en) * | 1963-04-30 | 1966-12-27 | United Aircraft Corp | Micro-soldering |
| US3353263A (en) * | 1964-08-17 | 1967-11-21 | Texas Instruments Inc | Successively stacking, and welding circuit conductors through insulation by using electrodes engaging one conductor |
| US3369954A (en) * | 1964-11-12 | 1968-02-20 | Fener Alfred | Heat sealing machine and sealing member therefor |
| US3271555A (en) * | 1965-03-29 | 1966-09-06 | Int Resistance Co | Handling and bonding apparatus |
| FR1524295A (fr) * | 1967-03-29 | 1968-05-10 | Perfectionnements aux machines à scuder par thermocompression pour la fabrication de diodes à jonction abrupte |
-
1969
- 1969-06-23 US US835694A patent/US3617682A/en not_active Expired - Lifetime
-
1970
- 1970-06-15 IE IE775/70A patent/IE34305B1/xx unknown
- 1970-06-18 DE DE19707022778U patent/DE7022778U/de not_active Expired
- 1970-06-18 DE DE19702029915 patent/DE2029915A1/de active Pending
- 1970-06-19 NL NL7009064A patent/NL7009064A/xx unknown
- 1970-06-19 GB GB2998070A patent/GB1313342A/en not_active Expired
- 1970-06-22 BE BE752344D patent/BE752344A/xx unknown
- 1970-06-23 JP JP45054127A patent/JPS4840807B1/ja active Pending
- 1970-06-23 FR FR7023240A patent/FR2047079B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4840807B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-12-03 |
| FR2047079B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-05-03 |
| US3617682A (en) | 1971-11-02 |
| DE7022778U (de) | 1972-04-20 |
| BE752344A (fr) | 1970-12-22 |
| FR2047079A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1971-03-12 |
| DE2029915A1 (de) | 1971-01-07 |
| NL7009064A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1970-12-28 |
| IE34305B1 (en) | 1975-04-02 |
| IE34305L (en) | 1970-12-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |