GB1301286A - - Google Patents
Info
- Publication number
- GB1301286A GB1301286A GB1301286DA GB1301286A GB 1301286 A GB1301286 A GB 1301286A GB 1301286D A GB1301286D A GB 1301286DA GB 1301286 A GB1301286 A GB 1301286A
- Authority
- GB
- United Kingdom
- Prior art keywords
- nov
- headings
- concerned
- division
- matter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
- H01L21/6779—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks the workpieces being stored in a carrier, involving loading and unloading
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Formation Of Insulating Films (AREA)
- Silicon Compounds (AREA)
- Weting (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Feeding Of Workpieces (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US77903368A | 1968-11-26 | 1968-11-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1301286A true GB1301286A (US07122547-20061017-C00115.png) | 1972-12-29 |
Family
ID=25115107
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1301285D Expired GB1301285A (US07122547-20061017-C00115.png) | 1968-11-26 | 1969-11-25 | |
GB1301286D Expired GB1301286A (US07122547-20061017-C00115.png) | 1968-11-26 | 1969-11-25 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1301285D Expired GB1301285A (US07122547-20061017-C00115.png) | 1968-11-26 | 1969-11-25 |
Country Status (4)
Country | Link |
---|---|
US (1) | US3645581A (US07122547-20061017-C00115.png) |
JP (1) | JPS549027B1 (US07122547-20061017-C00115.png) |
DE (1) | DE1959093C2 (US07122547-20061017-C00115.png) |
GB (2) | GB1301285A (US07122547-20061017-C00115.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1984001084A1 (en) * | 1982-08-24 | 1984-03-15 | Edward Bok | Apparatus for processing of substrates |
Families Citing this family (82)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6076652A (en) | 1971-04-16 | 2000-06-20 | Texas Instruments Incorporated | Assembly line system and apparatus controlling transfer of a workpiece |
US3731823A (en) * | 1971-06-01 | 1973-05-08 | Ibm | Wafer transport system |
US3930684A (en) * | 1971-06-22 | 1976-01-06 | Lasch Jr Cecil A | Automatic wafer feeding and pre-alignment apparatus and method |
US3947236A (en) * | 1971-11-29 | 1976-03-30 | Lasch Jr Cecil A | Fluid bearing transfer and heat treating apparatus and method |
US3730595A (en) * | 1971-11-30 | 1973-05-01 | Ibm | Linear carrier sender and receiver |
US3822025A (en) * | 1973-03-16 | 1974-07-02 | Gerber Scientific Instr Co | Pressurized gas selector mechanism |
JPS501639A (US07122547-20061017-C00115.png) * | 1973-05-07 | 1975-01-09 | ||
US3823836A (en) * | 1973-05-22 | 1974-07-16 | Plat General Inc | Vacuum apparatus for handling sheets |
JPS5013948U (US07122547-20061017-C00115.png) * | 1973-06-01 | 1975-02-13 | ||
JPS5013949U (US07122547-20061017-C00115.png) * | 1973-06-01 | 1975-02-13 | ||
US3982979A (en) * | 1973-06-28 | 1976-09-28 | Western Electric Company, Inc. | Methods for mounting an article on an adherent site on a substrate |
US3948564A (en) * | 1974-01-17 | 1976-04-06 | Gca Corporation | Fluid bearing apparatus and method utilizing selective turntable diverter structure |
US3923342A (en) * | 1974-06-10 | 1975-12-02 | Motorola Inc | Apparatus and method for handling frangible objects |
GB1513444A (en) * | 1974-09-06 | 1978-06-07 | Chemical Reactor Equip As | Pick-up devices for lifting and moving semiconductor wafers |
US4047627A (en) * | 1974-09-30 | 1977-09-13 | Gca Corporation | Mask plate handling method |
US3960277A (en) * | 1974-09-30 | 1976-06-01 | Flint Alan G | Mask plate handling apparatus |
US4009785A (en) * | 1974-10-02 | 1977-03-01 | Motorola, Inc. | Fixture and system for handling plate like objects |
US4030622A (en) * | 1975-05-23 | 1977-06-21 | Pass-Port Systems, Inc. | Wafer transport system |
US4014576A (en) * | 1975-06-19 | 1977-03-29 | International Business Machines Corporation | Article carrier |
US4024944A (en) * | 1975-12-24 | 1977-05-24 | Texas Instruments Incorporated | Semiconductor slice prealignment system |
US4062463A (en) * | 1976-05-11 | 1977-12-13 | Machine Technology, Inc. | Automated single cassette load mechanism for scrubber |
US4315705A (en) * | 1977-03-18 | 1982-02-16 | Gca Corporation | Apparatus for handling and treating wafers |
US4278366A (en) * | 1977-03-18 | 1981-07-14 | Gca Corporation | Automatic wafer processing system and method |
US4178113A (en) * | 1977-12-05 | 1979-12-11 | Macronetics, Inc. | Buffer storage apparatus for semiconductor wafer processing |
US4190015A (en) * | 1977-12-08 | 1980-02-26 | Machine Technology, Inc. | Apparatus for dispensing liquid to spinning workpieces |
US4236851A (en) * | 1978-01-05 | 1980-12-02 | Kasper Instruments, Inc. | Disc handling system and method |
US4313266A (en) * | 1980-05-01 | 1982-02-02 | The Silicon Valley Group, Inc. | Method and apparatus for drying wafers |
US4495399A (en) * | 1981-03-26 | 1985-01-22 | Cann Gordon L | Micro-arc milling of metallic and non-metallic substrates |
US4600471A (en) * | 1981-08-26 | 1986-07-15 | Integrated Automation, Limited | Method and apparatus for transport and processing of substrate with developing agent |
US4392915A (en) * | 1982-02-16 | 1983-07-12 | Eaton Corporation | Wafer support system |
US4462796A (en) * | 1982-05-19 | 1984-07-31 | Micro Component Technology, Inc. | Integrated circuit component handler movement and heating system |
US4983093A (en) * | 1982-05-24 | 1991-01-08 | Proconics International, Inc. | Wafer transfer apparatus |
DE3219502C2 (de) * | 1982-05-25 | 1990-04-19 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Vorrichtung zum automatischen Transport scheibenförmiger Objekte |
US4554814A (en) * | 1982-10-13 | 1985-11-26 | The Minster Machine Company | Air transfer system and method for a shell press |
CA1226764A (en) * | 1982-10-13 | 1987-09-15 | Arthur L. Grow | Air transfer system for a shell press |
US4502215A (en) * | 1982-12-20 | 1985-03-05 | At&T Technologies, Inc. | Feeding articles to successive stations for treatment |
US4627264A (en) * | 1983-01-03 | 1986-12-09 | The Minster Machine Company | Cam actuated ejector for a shell press |
US4513600A (en) * | 1983-01-03 | 1985-04-30 | The Minster Machine Company | Cam actuated ejector for a shell press |
US4555630A (en) * | 1983-02-28 | 1985-11-26 | Tamarack Scientific Co., Inc. | Automatic system for exposing and handling double-sided printed circuit boards |
US4539479A (en) * | 1983-02-28 | 1985-09-03 | Sheets Ronald E | Automatic apparatus and method for exposing, registering, and handling double-sided printed circuit boards |
US4534695A (en) * | 1983-05-23 | 1985-08-13 | Eaton Corporation | Wafer transport system |
JPS6074626A (ja) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | ウエハー処理方法及び装置 |
JPS59171121A (ja) * | 1984-01-30 | 1984-09-27 | Hitachi Ltd | マスク取り扱い装置 |
US4724621A (en) * | 1986-04-17 | 1988-02-16 | Varian Associates, Inc. | Wafer processing chuck using slanted clamping pins |
US4924890A (en) * | 1986-05-16 | 1990-05-15 | Eastman Kodak Company | Method and apparatus for cleaning semiconductor wafers |
US4817556A (en) * | 1987-05-04 | 1989-04-04 | Varian Associates, Inc. | Apparatus for retaining wafers |
US5040484A (en) * | 1987-05-04 | 1991-08-20 | Varian Associates, Inc. | Apparatus for retaining wafers |
US4862578A (en) * | 1987-08-20 | 1989-09-05 | Holcomb Gregory W | Tube magazine component feeder |
DE3732113C1 (de) * | 1987-09-24 | 1988-10-20 | Convac Gmbh | Einrichtung zur Inline-Belackung von Compact-Discs |
US4815601A (en) * | 1987-09-29 | 1989-03-28 | Fluoroware, Inc. | Carrier for flat panel displays |
US4930634A (en) * | 1987-09-29 | 1990-06-05 | Fluoroware, Inc. | Carrier for flat panel displays |
US4949848A (en) * | 1988-04-29 | 1990-08-21 | Fluoroware, Inc. | Wafer carrier |
EP0385934A1 (de) * | 1989-02-27 | 1990-09-05 | SPT AG, SPANLOSE PRODUKTIONSTECHNIK i.K. | Vorrichtung zur Aufnahme eines Coil sowie Verfahren zu dessen Lagerung |
DE3912589A1 (de) * | 1989-04-17 | 1990-10-25 | Ekkehard Ueberreiter | Einrichtung zum testen von elektronischen bauelementen mit einer ladestation, einer teststation und eine entladestation fuer die bauelemente |
JPH0727957B2 (ja) * | 1989-10-09 | 1995-03-29 | 株式会社東芝 | 半導体製造装置 |
US5111936A (en) * | 1990-11-30 | 1992-05-12 | Fluoroware | Wafer carrier |
DE4100526A1 (de) * | 1991-01-10 | 1992-07-16 | Wacker Chemitronic | Vorrichtung und verfahren zum automatischen vereinzeln von gestapelten scheiben |
US5271706A (en) * | 1991-10-31 | 1993-12-21 | Hkm Corporation | Self-loading paper transport system |
US5788425A (en) * | 1992-07-15 | 1998-08-04 | Imation Corp. | Flexible system for handling articles |
DE4308276C2 (de) * | 1993-03-16 | 1997-09-04 | Heidelberger Druckmasch Ag | Leiteinrichtung für einen Bogen |
US5432653A (en) * | 1993-06-22 | 1995-07-11 | Minnesota Mining And Manufacturing Company | Loop-shaped pneumatic drive |
US5485325A (en) * | 1994-04-04 | 1996-01-16 | Minnesota Mining And Manufacturing Company | Magazine storage system for recording strips |
US5745946A (en) * | 1994-07-15 | 1998-05-05 | Ontrak Systems, Inc. | Substrate processing system |
US5762084A (en) * | 1994-07-15 | 1998-06-09 | Ontrak Systems, Inc. | Megasonic bath |
US5548505A (en) * | 1994-07-15 | 1996-08-20 | Oktrak Systems, Inc. | Scrubber control system |
US5692873A (en) * | 1995-03-31 | 1997-12-02 | Motorola, Inc. | Apparatus for holding a piece of semiconductor |
KR100191268B1 (ko) * | 1996-06-11 | 1999-06-15 | 윤종용 | 반도체 제조 장치 |
US5924154A (en) * | 1996-08-29 | 1999-07-20 | Ontrak Systems, Inc. | Brush assembly apparatus |
US6039059A (en) * | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
DE19649488A1 (de) * | 1996-11-29 | 1997-11-06 | Schott Glaswerke | Vorrichtung zur Handhabung von dünnen Glasscheiben |
SE509367C2 (sv) * | 1997-05-16 | 1999-01-18 | Cetelab Ab | Förfarande och anordning för hantering av kretsar |
US6415804B1 (en) * | 1999-12-23 | 2002-07-09 | Lam Research Corporation | Bowl for processing semiconductor wafers |
US20030115214A1 (en) * | 2001-12-17 | 2003-06-19 | Nir Essar | Medical reporting system and method |
WO2004004926A1 (en) * | 2002-07-08 | 2004-01-15 | Dimension Bond Corporation | Apparatus and method for simultaneously coating and measuring parts |
US6998147B2 (en) * | 2002-07-08 | 2006-02-14 | Dimension Bond Corporation | Method for simultaneously coating and measuring parts |
US6832577B2 (en) | 2002-07-08 | 2004-12-21 | Dimension Bond Corporation | Apparatus and method for simultaneously coating and measuring parts |
US6860947B2 (en) * | 2002-07-08 | 2005-03-01 | Dimension Bond Corporation | Apparatus for simultaneously coating and measuring parts |
TWI352628B (en) * | 2006-07-21 | 2011-11-21 | Akrion Technologies Inc | Nozzle for use in the megasonic cleaning of substr |
JP4751460B2 (ja) * | 2009-02-18 | 2011-08-17 | 東京エレクトロン株式会社 | 基板搬送装置及び基板処理システム |
CN101875036A (zh) * | 2009-04-30 | 2010-11-03 | 深圳富泰宏精密工业有限公司 | 转动装置 |
JP5316689B1 (ja) * | 2012-10-31 | 2013-10-16 | 千住金属工業株式会社 | 位置出し治具及び位置調整方法 |
US10788762B2 (en) * | 2019-02-25 | 2020-09-29 | Applied Materials, Inc. | Dynamic cooling control for thermal stabilization for lithography system |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3103388A (en) * | 1963-09-10 | High speed pneumatic conveyor | ||
US2801884A (en) * | 1955-03-31 | 1957-08-06 | Nat Machinery Co | Pneumatic elevating and handling means |
US2778691A (en) * | 1955-06-07 | 1957-01-22 | Melpar Inc | Stapling machines |
US2842923A (en) * | 1956-06-18 | 1958-07-15 | Rca Corp | Light element transport apparatus |
NL281857A (US07122547-20061017-C00115.png) * | 1961-08-11 | |||
US3160443A (en) * | 1962-10-23 | 1964-12-08 | Western Electric Co | Apparatus for pneumatically conveying articles |
US3222110A (en) * | 1964-03-11 | 1965-12-07 | American Tobacco Co | Cigarette transfer apparatus |
US3318640A (en) * | 1965-04-23 | 1967-05-09 | Pitney Bowes Inc | Pneumatic sheet handling apparatus and method of making same |
-
1968
- 1968-11-26 US US779033A patent/US3645581A/en not_active Expired - Lifetime
-
1969
- 1969-11-25 GB GB1301285D patent/GB1301285A/en not_active Expired
- 1969-11-25 GB GB1301286D patent/GB1301286A/en not_active Expired
- 1969-11-25 DE DE1959093A patent/DE1959093C2/de not_active Expired
- 1969-11-25 JP JP9459169A patent/JPS549027B1/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1984001084A1 (en) * | 1982-08-24 | 1984-03-15 | Edward Bok | Apparatus for processing of substrates |
US4587002A (en) * | 1982-08-24 | 1986-05-06 | Edward Bok | Apparatus for floating transport and processing of substrate or tape |
Also Published As
Publication number | Publication date |
---|---|
DE1959093C2 (de) | 1984-02-23 |
DE1959093A1 (de) | 1970-06-11 |
US3645581A (en) | 1972-02-29 |
JPS549027B1 (US07122547-20061017-C00115.png) | 1979-04-20 |
GB1301285A (US07122547-20061017-C00115.png) | 1972-12-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |