GB1250544A - - Google Patents

Info

Publication number
GB1250544A
GB1250544A GB1250544DA GB1250544A GB 1250544 A GB1250544 A GB 1250544A GB 1250544D A GB1250544D A GB 1250544DA GB 1250544 A GB1250544 A GB 1250544A
Authority
GB
United Kingdom
Prior art keywords
chamber
coating
material
valve
shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US70937668A priority Critical
Application filed filed Critical
Publication of GB1250544A publication Critical patent/GB1250544A/en
Application status is Expired legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
GB1250544D 1968-02-29 1969-02-25 Expired GB1250544A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US70937668A true 1968-02-29 1968-02-29

Publications (1)

Publication Number Publication Date
GB1250544A true GB1250544A (zh) 1971-10-20

Family

ID=24849612

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1250544D Expired GB1250544A (zh) 1968-02-29 1969-02-25

Country Status (13)

Country Link
US (1) US3524426A (zh)
JP (1) JPS494156B1 (zh)
AT (1) AT286738B (zh)
BE (1) BE729026A (zh)
CH (1) CH501064A (zh)
DE (1) DE1911198A1 (zh)
FR (1) FR2002902A1 (zh)
GB (1) GB1250544A (zh)
IE (1) IE33433B1 (zh)
LU (1) LU58110A1 (zh)
NL (1) NL6903181A (zh)
NO (1) NO123939B (zh)
SE (1) SE347024B (zh)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3649339A (en) * 1969-09-05 1972-03-14 Eugene C Smith Apparatus and method for securing a high vacuum for particle coating process
US3648654A (en) * 1970-03-16 1972-03-14 Bell Telephone Labor Inc Vertical liquid phase crystal growth apparatus
US3641973A (en) * 1970-11-25 1972-02-15 Air Reduction Vacuum coating apparatus
US3915118A (en) * 1973-09-17 1975-10-28 Etec Corp Specimen coating device for an SEM
US3921572A (en) * 1974-02-25 1975-11-25 Ibm Vacuum coating apparatus
JPS5130965A (ja) * 1974-09-09 1976-03-16 Matsushita Electric Ind Co Ltd Atsumakushusekikairo no seizohoho
US4179530A (en) * 1977-05-20 1979-12-18 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for the deposition of pure semiconductor material
US4173944A (en) * 1977-05-20 1979-11-13 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Silverplated vapor deposition chamber
EP0008807A1 (de) * 1978-09-13 1980-03-19 Elektroschmelzwerk Kempten GmbH Vorrichtung und Verfahren zum diskontinuierlichen oder kontinuierlichen thermischen Bedampfen von Formteilen oder Bandmaterial
DE2940064A1 (de) * 1979-10-03 1981-04-16 Leybold Heraeus Gmbh & Co Kg Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer
JPS5769797A (en) * 1980-10-17 1982-04-28 Matsushita Electric Ind Co Ltd Method of producing hybrid thick film integrated circuit
JPS57193249U (zh) * 1981-06-03 1982-12-07
JPS5851594A (en) * 1981-09-22 1983-03-26 Nippon Electric Co Thick film hybrid ic board
JPS5885378U (zh) * 1981-12-04 1983-06-09
US4478174A (en) * 1983-02-25 1984-10-23 Canadian Patents & Development Limited Vacuum coating vessel with movable shutter plate
JPS61164076U (zh) * 1986-03-20 1986-10-11
KR101373266B1 (ko) * 2006-09-11 2014-03-11 가부시키가이샤 알박 진공 증기 처리 장치
KR101066033B1 (ko) * 2009-07-28 2011-09-20 엘아이지에이디피 주식회사 화학기상 증착장치 및 기판 처리장치
CN106947944A (zh) * 2017-05-23 2017-07-14 京东方科技集团股份有限公司 一种蒸镀坩埚、蒸镀源、蒸镀装置及蒸镀方法

Also Published As

Publication number Publication date
US3524426A (en) 1970-08-18
CH501064A (de) 1970-12-31
NO123939B (zh) 1972-02-07
DE1911198A1 (de) 1969-09-18
BE729026A (zh) 1969-08-01
IE33433L (en) 1969-08-29
FR2002902A1 (zh) 1969-10-31
JPS494156B1 (zh) 1974-01-30
NL6903181A (zh) 1969-09-02
IE33433B1 (en) 1974-06-26
AT286738B (de) 1970-12-28
SE347024B (zh) 1972-07-24
LU58110A1 (zh) 1969-06-03

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees