GB1248564A - Improvements in or relating to copying apparatus - Google Patents

Improvements in or relating to copying apparatus

Info

Publication number
GB1248564A
GB1248564A GB1874668A GB1874668A GB1248564A GB 1248564 A GB1248564 A GB 1248564A GB 1874668 A GB1874668 A GB 1874668A GB 1874668 A GB1874668 A GB 1874668A GB 1248564 A GB1248564 A GB 1248564A
Authority
GB
United Kingdom
Prior art keywords
slice
carrier
arm
master
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1874668A
Inventor
Douglas Favel Horne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hilger and Watts Ltd
Original Assignee
Hilger and Watts Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hilger and Watts Ltd filed Critical Hilger and Watts Ltd
Priority to DE19681804923 priority Critical patent/DE1804923A1/en
Priority to US770250A priority patent/US3657545A/en
Publication of GB1248564A publication Critical patent/GB1248564A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691Handling of masks or workpieces
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/0016Technical microscopes, e.g. for inspection or measuring in industrial production processes

Abstract

1,248,564. Photo-copying apparatus. HILGER & WATTS Ltd. Oct.24, 1968 [Oct. 27, 1967, April 19, 1968], Nos.49009/67 and 18746/68. Heading G2A. [Also in Division G1] In a method and apparatus for reproducing a pattern from one planar element, e.g. a master mask plate, on to a second planar element, e.g. a silicon slice, using a collimated beam of light, photo-electric microscopes 24 are used to sense fiducial marks on the two elements and, if the marks are not correctly aligned, photo-cells 34 and vibratory screens 32 emit signals which correct the position of the master before an exposure is made. Sequence of operations A slice Fig.4, (not shown) is placed on a station 12 and correctly positioned against stops 54, 56 by a feeler 52. An arm 8 is then swung over the station 12, lowered to pick up the slice by suction, raised and pivoted to overlie carriers 6, (4), Fig.2 (not shown). The arm 8 is lowered to be held against pads (42) on the carrier 6 by suction, the slice being coaxially spaced from its carrier (4). The latter is now raised to contact the underside of the slice, air being supplied to the carrier (4) so that it can align itself against the bottom face of the slice. The slice is then held against its carrier by suction supplied through a line (68), the suction to the arm 8 is cut off, the carrier (4) and slice are lowered to a pre-set position and the arm 8 swung away. A master mask plate, bearing fiducial marks on its bottom surface and previously correctly positioned on a station 16a or 16b, is similarly positioned over the carrier 6 by an arm 10, which then lowers the mask plate to rest on the carrier 6 where it is held by suction. No alignment of the first mask plate is required, hence the exposure is immediately effected, the fiducial marks of the mask plate being exposed as well as its pattern. During exposure a flow of nitrogen is provided between the slice and the master. After exposure they are removed, the slice being prepared for a second exposure. Then the slice and a second master are positioned as described above, the initial correct positioning on stations 12, 16a or 16b ensuring approximate alignment when on the carriers (4), 6. Microscope Operation Before the arm 8 is swung away from over the carrier (4), the fiducial marks now present on the upper surface of the slice are illuminated with non-actinic light from sources 28 (only one shown) through projecting units (26) of the microscopes, which units have now been positioned over the carriers (4), 6. The light is reflected back from the slice fiducial marks to a beam splitter 30 where the vibrating screens 32 are provided in each of two exit paths. Any misalignment between the screen mean position and the slice fiducial marks is sensed by the photo-cells 34 and the signal emitted operates servomotors 36a, (36b) Fig.3, (now shown) to move refractor blocks 38a, 38b to centre the marks on the screens. The arm 8 is swung away and the second master mask plate positioned on the carrier 6. The refractor blocks remain in their pre-set positions, any misalignment between the fiducial marks of the master and slice causing the photo-cells 34 to operate servomotors 40a, 40b, 40c to displace the carrier 6. The projecting units (26) are then removed from the exposing light path, and an exposure is made as before. The sequence of operations may be automatically controlled.
GB1874668A 1967-10-27 1967-10-27 Improvements in or relating to copying apparatus Expired GB1248564A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19681804923 DE1804923A1 (en) 1967-10-27 1968-10-24 Method and device for reproducing a pattern from one flat body to a second flat body
US770250A US3657545A (en) 1967-10-27 1968-10-24 Method and apparatus for reproducing a pattern from one planar element upon another planar element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4900967 1967-10-27

Publications (1)

Publication Number Publication Date
GB1248564A true GB1248564A (en) 1971-10-06

Family

ID=10450787

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1874668A Expired GB1248564A (en) 1967-10-27 1967-10-27 Improvements in or relating to copying apparatus

Country Status (1)

Country Link
GB (1) GB1248564A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3771872A (en) * 1971-12-08 1973-11-13 Rank Organisation Ltd Mask and apparatus used for alignment purposes in photolithography
US9117149B2 (en) 2011-10-07 2015-08-25 Industrial Technology Research Institute Optical registration carrier

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3771872A (en) * 1971-12-08 1973-11-13 Rank Organisation Ltd Mask and apparatus used for alignment purposes in photolithography
US9117149B2 (en) 2011-10-07 2015-08-25 Industrial Technology Research Institute Optical registration carrier

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