GB1176673A - Etching Process. - Google Patents

Etching Process.

Info

Publication number
GB1176673A
GB1176673A GB4088067A GB4088067A GB1176673A GB 1176673 A GB1176673 A GB 1176673A GB 4088067 A GB4088067 A GB 4088067A GB 4088067 A GB4088067 A GB 4088067A GB 1176673 A GB1176673 A GB 1176673A
Authority
GB
United Kingdom
Prior art keywords
tank
sept
etching process
etching
boveri
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4088067A
Inventor
Horst Riese
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BBC Brown Boveri AG Switzerland
Original Assignee
BBC Brown Boveri AG Switzerland
Brown Boveri und Cie AG Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BBC Brown Boveri AG Switzerland, Brown Boveri und Cie AG Switzerland filed Critical BBC Brown Boveri AG Switzerland
Publication of GB1176673A publication Critical patent/GB1176673A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

1,176,673. Etching. BROWN, BOVERI & CO. Ltd. 7 Sept., 1967 [9 Sept., 1966], No. 40880/67. Heading B6J. [Also in Division H1] A semi-conductor member 100 is etched in apparatus comprising a cylindrical tank 4 containing etchant 5 and rotatable by a motor 6 about its axis 8, which is inclined to the vertical, the member 100 rolling on the inner cylindrical surface of the tank and bubbles forming during etching being removed therefrom by projecting rods 7, fitted to the tank.
GB4088067A 1966-09-09 1967-09-07 Etching Process. Expired GB1176673A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEB0088843 1966-09-09

Publications (1)

Publication Number Publication Date
GB1176673A true GB1176673A (en) 1970-01-07

Family

ID=6984494

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4088067A Expired GB1176673A (en) 1966-09-09 1967-09-07 Etching Process.

Country Status (4)

Country Link
CH (1) CH495433A (en)
DE (1) DE1521692A1 (en)
FR (1) FR1567049A (en)
GB (1) GB1176673A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104878387A (en) * 2015-06-16 2015-09-02 成都虹华环保科技股份有限公司 Device for storing etching liquid

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104878387A (en) * 2015-06-16 2015-09-02 成都虹华环保科技股份有限公司 Device for storing etching liquid

Also Published As

Publication number Publication date
DE1521692A1 (en) 1969-10-02
FR1567049A (en) 1969-05-16
CH495433A (en) 1970-08-31

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