GB1069435A - Electromechanical transducer device - Google Patents

Electromechanical transducer device

Info

Publication number
GB1069435A
GB1069435A GB2010963A GB2010963A GB1069435A GB 1069435 A GB1069435 A GB 1069435A GB 2010963 A GB2010963 A GB 2010963A GB 2010963 A GB2010963 A GB 2010963A GB 1069435 A GB1069435 A GB 1069435A
Authority
GB
Grant status
Application
Patent type
Prior art keywords
tube
support
films
pressure
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2010963A
Inventor
Donald Fulton Alexa Maclachlan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
G V PLANER Ltd
Original Assignee
G V PLANER Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0026Transmitting or indicating the displacement of flexible, deformable tubes by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0027Transmitting or indicating the displacement of flexible, deformable tubes by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0002Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance

Abstract

1,069,435. Pressure-sensitive resistors. G. V PLANER Ltd. Aug. 18, 1964 [May 21, 1963; Nov. 19, 1963], Nos. 20109/63 and 45582/63. Heading H1K. [Also in Division G1] A pressure transducer comprises an elastic support, such as a vitreous silica tube 1 (Fig. 1), of elliptical section and closed at one end, having terminal strips 2 . . . 6 deposited longitudinally on the exterior surface of the tube, and thin films 7, 8 of strain-sensitive semi-conductor material, such as intrinsic or doped germanium, deposited around the circumference of the tube, as shown. The pressure to be measured is introduced into the tube, and tends to distort the latter towards a circular cross-section, thus differentially stressing areas X and Y of film 7. X and Y are connected in a bridge circuit, Fig. 2 (not shown), with resistances (A, B), the reading on a meter (V) being indicative of the test pressure; film 8 (forming resistance Z), is connected in series with the meter to compensate for variation of temperature. Alternatively, film 8 may be shunted across a potentiometer (C, Fig. 3, not shown), in a balanced-bridge arrangement. Further temperature compensating films may be added to the circuit. The support may alternatively be made of sapphire, glass, ceramic, glazed metal, or plastics. The strain-sensitive material may alternatively be silicon, and is preferably deposited on the support by evaporation in a vacuum, although other methods such as sputtering may be used. A layer of protective material, e.g. silicon monoxide, silicon nitride, or silica, may be applied between the support and the films of strainsensitive material, and a similar layer may be applied over the films. Reference has been directed by the Comptroller to Specification 757,597.
GB2010963A 1963-05-21 1963-05-21 Electromechanical transducer device Expired GB1069435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2010963A GB1069435A (en) 1963-05-21 1963-05-21 Electromechanical transducer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2010963A GB1069435A (en) 1963-05-21 1963-05-21 Electromechanical transducer device

Publications (1)

Publication Number Publication Date
GB1069435A true true GB1069435A (en) 1967-05-17

Family

ID=10140538

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2010963A Expired GB1069435A (en) 1963-05-21 1963-05-21 Electromechanical transducer device

Country Status (1)

Country Link
GB (1) GB1069435A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0074574A1 (en) * 1981-09-14 1983-03-23 The Perkin-Elmer Corporation Flow-through fluid pressure transducer
GB2129565A (en) * 1982-10-29 1984-05-16 Flopetrol Services Inc Pressure and temperature transducer
FR2598804A1 (en) * 1986-05-14 1987-11-20 Bosch Gmbh Robert Sensor for the determination of physical phenomena in the combustion chamber of an internal combustion engine
FR2638524A1 (en) * 1988-10-27 1990-05-04 Schlumberger Prospection use pressure sensor in the oil wells
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0074574A1 (en) * 1981-09-14 1983-03-23 The Perkin-Elmer Corporation Flow-through fluid pressure transducer
GB2129565A (en) * 1982-10-29 1984-05-16 Flopetrol Services Inc Pressure and temperature transducer
FR2598804A1 (en) * 1986-05-14 1987-11-20 Bosch Gmbh Robert Sensor for the determination of physical phenomena in the combustion chamber of an internal combustion engine
FR2638524A1 (en) * 1988-10-27 1990-05-04 Schlumberger Prospection use pressure sensor in the oil wells
EP0373010A1 (en) * 1988-10-27 1990-06-13 Societe De Prospection Electrique Schlumberger Pressure sensor usable in oil wells
US5024098A (en) * 1988-10-27 1991-06-18 Schlumberger Technology Corporation Pressure sensor useable in oil wells
US6089097A (en) 1995-02-28 2000-07-18 Rosemount Inc. Elongated pressure sensor for a pressure transmitter
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US6079276A (en) 1995-02-28 2000-06-27 Rosemount Inc. Sintered pressure sensor for a pressure transmitter
US6082199A (en) 1995-02-28 2000-07-04 Rosemount Inc. Pressure sensor cavity etched with hot POCL3 gas
US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier

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