GB1052517A - - Google Patents
Info
- Publication number
- GB1052517A GB1052517A GB1052517DA GB1052517A GB 1052517 A GB1052517 A GB 1052517A GB 1052517D A GB1052517D A GB 1052517DA GB 1052517 A GB1052517 A GB 1052517A
- Authority
- GB
- United Kingdom
- Prior art keywords
- vessel
- source
- gallium
- diffusion
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES0084444 | 1963-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1052517A true GB1052517A (US06826419-20041130-M00005.png) |
Family
ID=7511712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1052517D Active GB1052517A (US06826419-20041130-M00005.png) | 1963-03-29 |
Country Status (5)
-
0
- GB GB1052517D patent/GB1052517A/en active Active
- NL NL302761D patent/NL302761A/xx unknown
-
1963
- 1963-11-13 AT AT907663A patent/AT240917B/de active
- 1963-11-18 CH CH1408863A patent/CH412822A/de unknown
-
1964
- 1964-03-26 BE BE645737D patent/BE645737A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| AT240917B (de) | 1965-06-25 |
| BE645737A (US06826419-20041130-M00005.png) | 1964-09-28 |
| NL302761A (US06826419-20041130-M00005.png) | |
| CH412822A (de) | 1966-05-15 |
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