GB1007031A - Improvements in or relating to strain gauges - Google Patents

Improvements in or relating to strain gauges

Info

Publication number
GB1007031A
GB1007031A GB1239462A GB1239462A GB1007031A GB 1007031 A GB1007031 A GB 1007031A GB 1239462 A GB1239462 A GB 1239462A GB 1239462 A GB1239462 A GB 1239462A GB 1007031 A GB1007031 A GB 1007031A
Authority
GB
United Kingdom
Prior art keywords
semi
surface layer
conductor
boron
resistivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1239462A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of GB1007031A publication Critical patent/GB1007031A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge

Abstract

1,007,031. Semi-conductor devices. HONEYWELL Inc. March 30, 1962 [April 3, 1961], No. 12394/62. Drawings to Specification. Heading H1K. An element for a semi-conductor strain gauge comprises a crystal of high resistivity semi-conductor having a surface layer thereon highly doped with an N or P-type impurity substance, the surface layer thus having a comparatively low resistivity and having ohmic electrodes attached thereto at points remote from one another. Silicon, germanium, and other semi-conductors such as the intermetallic compounds may be used. Suitable doping agents include phosphorus, arsenic, antimony, aluminium, gallium, indium or boron. The surface layer may be provided by vapour diffusion techniques or, less desirably, by the direct alloying of electroplated or vacuum deposited films. The production of the particular embodiment starts with a silicon filament having a resistivity greater than 10 ohm. cm. and which is cut so as to have the (111) axis along the filament and so as to have a substantially square cross-section. After polishing the surface with a chemical etch, such as 1: 1 :1 H 2 O/HF/HNO 3 containing 1% by weight of silver nitrate, boron is diffused into the surface using known inert carrier gas techniques. To complete the element electrical contacts are made to the surface layer using an electroless nickel bath.
GB1239462A 1961-04-03 1962-03-30 Improvements in or relating to strain gauges Expired GB1007031A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10043361A 1961-04-03 1961-04-03

Publications (1)

Publication Number Publication Date
GB1007031A true GB1007031A (en) 1965-10-13

Family

ID=22279758

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1239462A Expired GB1007031A (en) 1961-04-03 1962-03-30 Improvements in or relating to strain gauges

Country Status (1)

Country Link
GB (1) GB1007031A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3577884A (en) * 1968-07-31 1971-05-11 Matsushita Electric Ind Co Ltd Pressure-measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3577884A (en) * 1968-07-31 1971-05-11 Matsushita Electric Ind Co Ltd Pressure-measuring device

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