GB0620288D0 - Electron beam influencing in an electron beam lithography machine - Google Patents

Electron beam influencing in an electron beam lithography machine

Info

Publication number
GB0620288D0
GB0620288D0 GB0620288A GB0620288A GB0620288D0 GB 0620288 D0 GB0620288 D0 GB 0620288D0 GB 0620288 A GB0620288 A GB 0620288A GB 0620288 A GB0620288 A GB 0620288A GB 0620288 D0 GB0620288 D0 GB 0620288D0
Authority
GB
United Kingdom
Prior art keywords
electron beam
lithography machine
influencing
beam lithography
beam influencing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0620288A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vistec Lithography Ltd
Original Assignee
Vistec Lithography Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vistec Lithography Ltd filed Critical Vistec Lithography Ltd
Priority to GB0620288A priority Critical patent/GB0620288D0/en
Publication of GB0620288D0 publication Critical patent/GB0620288D0/en
Ceased legal-status Critical Current

Links

GB0620288A 2006-10-12 2006-10-12 Electron beam influencing in an electron beam lithography machine Ceased GB0620288D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0620288A GB0620288D0 (en) 2006-10-12 2006-10-12 Electron beam influencing in an electron beam lithography machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0620288A GB0620288D0 (en) 2006-10-12 2006-10-12 Electron beam influencing in an electron beam lithography machine

Publications (1)

Publication Number Publication Date
GB0620288D0 true GB0620288D0 (en) 2006-11-22

Family

ID=37491421

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0620288A Ceased GB0620288D0 (en) 2006-10-12 2006-10-12 Electron beam influencing in an electron beam lithography machine

Country Status (1)

Country Link
GB (1) GB0620288D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)