GB0408169D0 - Micromachining process and apparatus - Google Patents

Micromachining process and apparatus

Info

Publication number
GB0408169D0
GB0408169D0 GB0408169A GB0408169A GB0408169D0 GB 0408169 D0 GB0408169 D0 GB 0408169D0 GB 0408169 A GB0408169 A GB 0408169A GB 0408169 A GB0408169 A GB 0408169A GB 0408169 D0 GB0408169 D0 GB 0408169D0
Authority
GB
Grant status
Application
Patent type
Prior art keywords
apparatus
micromachining process
micromachining
process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0408169A
Other versions
GB2404454B (en )
GB2404454A (en )
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LIU WAI Y
Original Assignee
LIU WAI Y
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/40Treatment after imagewise removal, e.g. baking
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • G03F7/168Finishing the coated layer, e.g. drying, baking, soaking
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2022Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
GB0408169A 2003-07-30 2004-04-13 Micromachining process for forming microstructures having sloping and/or profiled side walls or substructures. Expired - Fee Related GB2404454B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0317830A GB0317830D0 (en) 2003-07-30 2003-07-30 Micromachining process and apparatus

Publications (3)

Publication Number Publication Date
GB0408169D0 true true GB0408169D0 (en) 2004-05-19
GB2404454A true GB2404454A (en) 2005-02-02
GB2404454B GB2404454B (en) 2005-06-22

Family

ID=27799474

Family Applications (4)

Application Number Title Priority Date Filing Date
GB0317830A Ceased GB0317830D0 (en) 2003-07-30 2003-07-30 Micromachining process and apparatus
GB0406058A Ceased GB0406058D0 (en) 2003-07-30 2004-03-18 Micromachining process and apparatus
GB0406725A Ceased GB0406725D0 (en) 2003-07-30 2004-03-25 A system for fabrication of microstructures with non-vertical sidewalls
GB0408169A Expired - Fee Related GB2404454B (en) 2003-07-30 2004-04-13 Micromachining process for forming microstructures having sloping and/or profiled side walls or substructures.

Family Applications Before (3)

Application Number Title Priority Date Filing Date
GB0317830A Ceased GB0317830D0 (en) 2003-07-30 2003-07-30 Micromachining process and apparatus
GB0406058A Ceased GB0406058D0 (en) 2003-07-30 2004-03-18 Micromachining process and apparatus
GB0406725A Ceased GB0406725D0 (en) 2003-07-30 2004-03-25 A system for fabrication of microstructures with non-vertical sidewalls

Country Status (1)

Country Link
GB (4) GB0317830D0 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6713238B1 (en) * 1998-10-09 2004-03-30 Stephen Y. Chou Microscale patterning and articles formed thereby
KR100335070B1 (en) * 1999-04-21 2002-05-03 백승준 Method for forming micro pattern on substrate by using compression patterning technique

Also Published As

Publication number Publication date Type
GB2404454B (en) 2005-06-22 grant
GB2404454A (en) 2005-02-02 application
GB0317830D0 (en) 2003-09-03 application
GB0406725D0 (en) 2004-04-28 application
GB0406058D0 (en) 2004-04-21 application

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