GB0018520D0 - Micromechanical devices - Google Patents

Micromechanical devices

Info

Publication number
GB0018520D0
GB0018520D0 GB0018520A GB0018520A GB0018520D0 GB 0018520 D0 GB0018520 D0 GB 0018520D0 GB 0018520 A GB0018520 A GB 0018520A GB 0018520 A GB0018520 A GB 0018520A GB 0018520 D0 GB0018520 D0 GB 0018520D0
Authority
GB
United Kingdom
Prior art keywords
micromechanical devices
micromechanical
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0018520A
Other versions
GB2369436A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne UK Ltd
Original Assignee
Marconi Applied Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Applied Technologies Ltd filed Critical Marconi Applied Technologies Ltd
Priority to GB0018520A priority Critical patent/GB2369436A/en
Publication of GB0018520D0 publication Critical patent/GB0018520D0/en
Priority to AU2001275701A priority patent/AU2001275701A1/en
Priority to PCT/GB2001/003331 priority patent/WO2002010065A1/en
Publication of GB2369436A publication Critical patent/GB2369436A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0015—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
GB0018520A 2000-07-28 2000-07-28 Chemical sensing micro-mechanical cantilever Withdrawn GB2369436A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0018520A GB2369436A (en) 2000-07-28 2000-07-28 Chemical sensing micro-mechanical cantilever
AU2001275701A AU2001275701A1 (en) 2000-07-28 2001-07-24 Micromechanical devices
PCT/GB2001/003331 WO2002010065A1 (en) 2000-07-28 2001-07-24 Micromechanical devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0018520A GB2369436A (en) 2000-07-28 2000-07-28 Chemical sensing micro-mechanical cantilever

Publications (2)

Publication Number Publication Date
GB0018520D0 true GB0018520D0 (en) 2000-09-13
GB2369436A GB2369436A (en) 2002-05-29

Family

ID=9896494

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0018520A Withdrawn GB2369436A (en) 2000-07-28 2000-07-28 Chemical sensing micro-mechanical cantilever

Country Status (3)

Country Link
AU (1) AU2001275701A1 (en)
GB (1) GB2369436A (en)
WO (1) WO2002010065A1 (en)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4762426A (en) * 1986-12-19 1988-08-09 Honeywell Inc. Remote passive temperature sensor
US4740410A (en) * 1987-05-28 1988-04-26 The Regents Of The University Of California Micromechanical elements and methods for their fabrication
US5374792A (en) * 1993-01-04 1994-12-20 General Electric Company Micromechanical moving structures including multiple contact switching system
US5618760A (en) * 1994-04-12 1997-04-08 The Board Of Trustees Of The Leland Stanford, Jr. University Method of etching a pattern on a substrate using a scanning probe microscope
US5771902A (en) * 1995-09-25 1998-06-30 Regents Of The University Of California Micromachined actuators/sensors for intratubular positioning/steering
US5563341A (en) * 1995-06-07 1996-10-08 Fenner; Ralph L. Vapor pressure sensor and method
DE19536228B4 (en) * 1995-09-28 2005-06-30 Infineon Technologies Ag Microelectronic integrated sensor and method of manufacturing the sensor
KR100207410B1 (en) * 1995-12-19 1999-07-15 전주범 Fabrication method for lightpath modulation device
WO1998050773A2 (en) * 1997-05-08 1998-11-12 University Of Minnesota Microcantilever biosensor
US5870007A (en) * 1997-06-16 1999-02-09 Roxburgh Ltd. Multi-dimensional physical actuation of microstructures
US6261494B1 (en) * 1998-10-22 2001-07-17 Northeastern University Method of forming plastically deformable microstructures

Also Published As

Publication number Publication date
GB2369436A (en) 2002-05-29
AU2001275701A1 (en) 2002-02-13
WO2002010065A1 (en) 2002-02-07

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)