FR2965975B1 - Transistor a effet de champ sur ilot de matériau semi-conducteur auto-assemble - Google Patents
Transistor a effet de champ sur ilot de matériau semi-conducteur auto-assembleInfo
- Publication number
- FR2965975B1 FR2965975B1 FR1058246A FR1058246A FR2965975B1 FR 2965975 B1 FR2965975 B1 FR 2965975B1 FR 1058246 A FR1058246 A FR 1058246A FR 1058246 A FR1058246 A FR 1058246A FR 2965975 B1 FR2965975 B1 FR 2965975B1
- Authority
- FR
- France
- Prior art keywords
- semiconductor material
- soil
- self
- field effect
- effect transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 230000005669 field effect Effects 0.000 title 1
- 239000002689 soil Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 2
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/456—Ohmic electrodes on silicon
- H01L29/458—Ohmic electrodes on silicon for thin film silicon, e.g. source or drain electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66643—Lateral single gate silicon transistors with source or drain regions formed by a Schottky barrier or a conductor-insulator-semiconductor structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7839—Field effect transistors with field effect produced by an insulated gate with Schottky drain or source contact
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78681—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising AIIIBV or AIIBVI or AIVBVI semiconductor materials, or Se or Te
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78684—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising semiconductor materials of Group IV not being silicon, or alloys including an element of the group IV, e.g. Ge, SiN alloys, SiC alloys
- H01L29/78687—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising semiconductor materials of Group IV not being silicon, or alloys including an element of the group IV, e.g. Ge, SiN alloys, SiC alloys with a multilayer structure or superlattice structure
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
L'invention concerne un dispositif à au moins un transistor sur un substrat (1) en un premier matériau semiconducteur, chaque transistor (20, 20') comportant une électrode de grille (5), dite grille, deux électrodes conductrices (3, 4), un îlot (2) en second matériau semiconducteur, incrusté dans le substrat (1), définissant une région apte à former un canal, dite région de canal, et une couche isolante (6) séparant la grille (5) des deux électrodes (3, 4) et de la région de canal, caractérisé en ce que la région de canal est à l'intérieur de l'îlot (2) et est en contact électrique direct avec au moins une des deux électrodes conductrices (3, 4).
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1058246A FR2965975B1 (fr) | 2010-10-11 | 2010-10-11 | Transistor a effet de champ sur ilot de matériau semi-conducteur auto-assemble |
CN2011800597182A CN103262224A (zh) | 2010-10-11 | 2011-10-06 | 自组装半导体阱上的场效应晶体管 |
JP2013532211A JP2013543264A (ja) | 2010-10-11 | 2011-10-06 | 自己組織化された半導体井戸(半導体ウェル)上の電界効果トランジスタ |
KR1020137011414A KR20130101075A (ko) | 2010-10-11 | 2011-10-06 | 자체 조립된 반도체 우물 상의 전계 효과 트랜지스터 |
EP11769841.5A EP2628172A1 (fr) | 2010-10-11 | 2011-10-06 | Transistor a effet de champ sur ilot de materiau semiconducteur auto-assemble |
PCT/EP2011/067504 WO2012049071A1 (fr) | 2010-10-11 | 2011-10-06 | Transistor a effet de champ sur ilot de materiau semiconducteur auto-assemble |
US13/878,501 US20130193484A1 (en) | 2010-10-11 | 2011-10-06 | Field-effect transistor on a self-assembled semiconductor well |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1058246A FR2965975B1 (fr) | 2010-10-11 | 2010-10-11 | Transistor a effet de champ sur ilot de matériau semi-conducteur auto-assemble |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2965975A1 FR2965975A1 (fr) | 2012-04-13 |
FR2965975B1 true FR2965975B1 (fr) | 2012-12-21 |
Family
ID=43823725
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1058246A Expired - Fee Related FR2965975B1 (fr) | 2010-10-11 | 2010-10-11 | Transistor a effet de champ sur ilot de matériau semi-conducteur auto-assemble |
Country Status (7)
Country | Link |
---|---|
US (1) | US20130193484A1 (fr) |
EP (1) | EP2628172A1 (fr) |
JP (1) | JP2013543264A (fr) |
KR (1) | KR20130101075A (fr) |
CN (1) | CN103262224A (fr) |
FR (1) | FR2965975B1 (fr) |
WO (1) | WO2012049071A1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI611582B (zh) * | 2013-04-10 | 2018-01-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
US10340220B2 (en) * | 2015-08-26 | 2019-07-02 | Intel Corporation | Compound lateral resistor structures for integrated circuitry |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69121629T2 (de) * | 1990-04-27 | 1997-02-13 | Nippon Electric Co | Dünnfilmtransistor mit Schottky-Sperrschicht |
DE10025264A1 (de) * | 2000-05-22 | 2001-11-29 | Max Planck Gesellschaft | Feldeffekt-Transistor auf der Basis von eingebetteten Clusterstrukturen und Verfahren zu seiner Herstellung |
US6515335B1 (en) * | 2002-01-04 | 2003-02-04 | International Business Machines Corporation | Method for fabrication of relaxed SiGe buffer layers on silicon-on-insulators and structures containing the same |
JP2003264290A (ja) * | 2002-03-08 | 2003-09-19 | Fujitsu Ltd | 半導体装置及びその製造方法 |
US6927414B2 (en) * | 2003-06-17 | 2005-08-09 | International Business Machines Corporation | High speed lateral heterojunction MISFETs realized by 2-dimensional bandgap engineering and methods thereof |
US7029964B2 (en) * | 2003-11-13 | 2006-04-18 | International Business Machines Corporation | Method of manufacturing a strained silicon on a SiGe on SOI substrate |
JP2006210854A (ja) * | 2005-01-31 | 2006-08-10 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2007158300A (ja) * | 2005-12-07 | 2007-06-21 | Korea Electronics Telecommun | 低いショットキー障壁貫通トランジスタ及びその製造方法 |
FR2897202B1 (fr) * | 2006-02-08 | 2008-09-12 | St Microelectronics Crolles 2 | Transistor mos a barriere de schottky sur film semi-conducteur entierement appauvri et procede de fabrication d'un tel transistor. |
US7781801B2 (en) * | 2006-09-25 | 2010-08-24 | Alcatel-Lucent Usa Inc. | Field-effect transistors whose gate electrodes are over semiconductor heterostructures and parts of source and drain electrodes |
US8106381B2 (en) * | 2006-10-18 | 2012-01-31 | Translucent, Inc. | Semiconductor structures with rare-earths |
-
2010
- 2010-10-11 FR FR1058246A patent/FR2965975B1/fr not_active Expired - Fee Related
-
2011
- 2011-10-06 EP EP11769841.5A patent/EP2628172A1/fr not_active Withdrawn
- 2011-10-06 US US13/878,501 patent/US20130193484A1/en not_active Abandoned
- 2011-10-06 WO PCT/EP2011/067504 patent/WO2012049071A1/fr active Application Filing
- 2011-10-06 CN CN2011800597182A patent/CN103262224A/zh active Pending
- 2011-10-06 KR KR1020137011414A patent/KR20130101075A/ko not_active Application Discontinuation
- 2011-10-06 JP JP2013532211A patent/JP2013543264A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
KR20130101075A (ko) | 2013-09-12 |
JP2013543264A (ja) | 2013-11-28 |
EP2628172A1 (fr) | 2013-08-21 |
WO2012049071A1 (fr) | 2012-04-19 |
CN103262224A (zh) | 2013-08-21 |
FR2965975A1 (fr) | 2012-04-13 |
US20130193484A1 (en) | 2013-08-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 6 |
|
ST | Notification of lapse |
Effective date: 20170630 |