FR2933625B1 - Device including a cavity under vacuum sensor, corresponding sensor and method of manufacture - Google Patents

Device including a cavity under vacuum sensor, corresponding sensor and method of manufacture

Info

Publication number
FR2933625B1
FR2933625B1 FR0854649A FR0854649A FR2933625B1 FR 2933625 B1 FR2933625 B1 FR 2933625B1 FR 0854649 A FR0854649 A FR 0854649A FR 0854649 A FR0854649 A FR 0854649A FR 2933625 B1 FR2933625 B1 FR 2933625B1
Authority
FR
Grant status
Grant
Patent type
Prior art keywords
sensor
manufacture
method
under vacuum
device including
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0854649A
Other languages
French (fr)
Other versions
FR2933625A1 (en )
Inventor
Vincent Lena
Serge Alperine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Safran Electronics and Defense SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry
    • G01J5/02Details
    • G01J5/04Casings Mountings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry
    • G01J5/02Details
    • G01J5/04Casings Mountings
    • G01J5/041Mountings in enclosures or in a particular environment
    • G01J5/045Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/16Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
    • H01L23/18Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
    • H01L23/26Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device including materials for absorbing or reacting with moisture or other undesired substances, e.g. getters
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
FR0854649A 2008-07-08 2008-07-08 Device including a cavity under vacuum sensor, corresponding sensor and method of manufacture Active FR2933625B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0854649A FR2933625B1 (en) 2008-07-08 2008-07-08 Device including a cavity under vacuum sensor, corresponding sensor and method of manufacture

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0854649A FR2933625B1 (en) 2008-07-08 2008-07-08 Device including a cavity under vacuum sensor, corresponding sensor and method of manufacture
PCT/EP2009/058702 WO2010003989A1 (en) 2008-07-08 2009-07-08 Device comprising a cavity under vacuum, and corresponding detector, sensor and method of manufacture
EP20090793951 EP2334977A1 (en) 2008-07-08 2009-07-08 Device comprising a cavity under vacuum, and corresponding detector, sensor and method of manufacture

Publications (2)

Publication Number Publication Date
FR2933625A1 true FR2933625A1 (en) 2010-01-15
FR2933625B1 true FR2933625B1 (en) 2012-01-20

Family

ID=40377246

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0854649A Active FR2933625B1 (en) 2008-07-08 2008-07-08 Device including a cavity under vacuum sensor, corresponding sensor and method of manufacture

Country Status (3)

Country Link
EP (1) EP2334977A1 (en)
FR (1) FR2933625B1 (en)
WO (1) WO2010003989A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
GB2231716A (en) * 1989-05-10 1990-11-21 Philips Electronic Associated Producing and maintaining a vacuum space in an infrared detector or other device with a getter
US5111049A (en) * 1990-12-21 1992-05-05 Santa Barbara Research Center Remote fired RF getter for use in metal infrared detector dewar
DE19740848A1 (en) * 1997-09-17 1999-03-18 Sgi Prozess Technik Gmbh Oxygen absorbed from air by fine-grained zeolite and abstracted by vacuum pump

Also Published As

Publication number Publication date Type
FR2933625A1 (en) 2010-01-15 application
WO2010003989A1 (en) 2010-01-14 application
EP2334977A1 (en) 2011-06-22 application

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 9

CA Change of address

Effective date: 20161223

CD Change of name or company name

Owner name: SAFRAN ELECTRONICS & DEFENSE, FR

Effective date: 20161223

CJ Change in legal form

Effective date: 20161223

PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11