FR2846096B1 - DEVICE FOR DETECTING, ANALYZING AND LOCATING DEFECTS PRESENTED ON TRANSPARENT AND / OR REFLECTIVE SURFACE - Google Patents

DEVICE FOR DETECTING, ANALYZING AND LOCATING DEFECTS PRESENTED ON TRANSPARENT AND / OR REFLECTIVE SURFACE

Info

Publication number
FR2846096B1
FR2846096B1 FR0212845A FR0212845A FR2846096B1 FR 2846096 B1 FR2846096 B1 FR 2846096B1 FR 0212845 A FR0212845 A FR 0212845A FR 0212845 A FR0212845 A FR 0212845A FR 2846096 B1 FR2846096 B1 FR 2846096B1
Authority
FR
France
Prior art keywords
analyzing
transparent
detecting
reflective surface
locating defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0212845A
Other languages
French (fr)
Other versions
FR2846096A1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to FR0212845A priority Critical patent/FR2846096B1/en
Publication of FR2846096A1 publication Critical patent/FR2846096A1/en
Application granted granted Critical
Publication of FR2846096B1 publication Critical patent/FR2846096B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501Semiconductor wafers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens
FR0212845A 2002-10-16 2002-10-16 DEVICE FOR DETECTING, ANALYZING AND LOCATING DEFECTS PRESENTED ON TRANSPARENT AND / OR REFLECTIVE SURFACE Expired - Fee Related FR2846096B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0212845A FR2846096B1 (en) 2002-10-16 2002-10-16 DEVICE FOR DETECTING, ANALYZING AND LOCATING DEFECTS PRESENTED ON TRANSPARENT AND / OR REFLECTIVE SURFACE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0212845A FR2846096B1 (en) 2002-10-16 2002-10-16 DEVICE FOR DETECTING, ANALYZING AND LOCATING DEFECTS PRESENTED ON TRANSPARENT AND / OR REFLECTIVE SURFACE

Publications (2)

Publication Number Publication Date
FR2846096A1 FR2846096A1 (en) 2004-04-23
FR2846096B1 true FR2846096B1 (en) 2005-02-11

Family

ID=32050427

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0212845A Expired - Fee Related FR2846096B1 (en) 2002-10-16 2002-10-16 DEVICE FOR DETECTING, ANALYZING AND LOCATING DEFECTS PRESENTED ON TRANSPARENT AND / OR REFLECTIVE SURFACE

Country Status (1)

Country Link
FR (1) FR2846096B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104502363A (en) * 2014-12-30 2015-04-08 湘潭大学 Sapphire microdefect nondestructive testing device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0610148D0 (en) 2006-05-23 2006-06-28 Pilkington Automotive D Gmbh Glazing inspection method
WO2014059240A1 (en) * 2012-10-12 2014-04-17 Abbvie Biotechnology Ltd. Characterization and/or detection of structural characteristics associated with syringes and/or automatic injection devices based on acoustics
WO2015149851A1 (en) * 2014-04-03 2015-10-08 Vertu Corporation Limited Method and system for optical inspection of sapphire element

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58219441A (en) * 1982-06-15 1983-12-20 Hajime Sangyo Kk Apparatus for detecting defect on surface of convex object
BR8907064A (en) * 1988-08-26 1991-01-02 Libbey Owens Ford Co PROCESS OF INSPECTING CURVED TRANSPARENT GLASS SHEETS AND APPARATUS TO INSPECT FITTED SHEETS OF TRANSPARENT MATERIAL AND FITTED GLASS SHEETS
JPH02113375A (en) * 1988-10-24 1990-04-25 Asahi Eng Co Ltd Flaw detecting device
JP3386269B2 (en) * 1995-01-25 2003-03-17 株式会社ニュークリエイション Optical inspection equipment
JPH095251A (en) * 1995-06-23 1997-01-10 Sumitomo Metal Ind Ltd Defect-inspecting equipment
JPH1154040A (en) * 1997-08-05 1999-02-26 Toshiba Corp Inspection of shadow mask and its device
GB9812091D0 (en) * 1998-06-05 1998-08-05 Glaverbel Defect detecting unit
JP3544323B2 (en) * 1998-08-31 2004-07-21 セントラル硝子株式会社 Method and apparatus for inspecting surface roughness of transparent plate
JP2000298102A (en) * 1999-02-08 2000-10-24 Nkk Corp Surface inspecting device
JP2001201429A (en) * 2000-01-18 2001-07-27 Mitsubishi Chemicals Corp Method and device for inspecting defect in inspected base body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104502363A (en) * 2014-12-30 2015-04-08 湘潭大学 Sapphire microdefect nondestructive testing device

Also Published As

Publication number Publication date
FR2846096A1 (en) 2004-04-23

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Legal Events

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CL Concession to grant licenses
ST Notification of lapse

Effective date: 20060630