FR2682400A1 - Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche. - Google Patents
Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche. Download PDFInfo
- Publication number
- FR2682400A1 FR2682400A1 FR9112616A FR9112616A FR2682400A1 FR 2682400 A1 FR2682400 A1 FR 2682400A1 FR 9112616 A FR9112616 A FR 9112616A FR 9112616 A FR9112616 A FR 9112616A FR 2682400 A1 FR2682400 A1 FR 2682400A1
- Authority
- FR
- France
- Prior art keywords
- multilayer material
- tungsten
- material according
- manufacturing
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 76
- 238000000576 coating method Methods 0.000 title claims abstract description 54
- 239000011248 coating agent Substances 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 238000000034 method Methods 0.000 title abstract description 31
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 47
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 47
- 239000010937 tungsten Substances 0.000 claims abstract description 47
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 39
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 39
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 239000006104 solid solution Substances 0.000 claims abstract description 19
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 32
- 238000000151 deposition Methods 0.000 claims description 20
- 230000008021 deposition Effects 0.000 claims description 14
- 238000004544 sputter deposition Methods 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 8
- AXGTXDWPVWSEOX-UHFFFAOYSA-N argon methane Chemical compound [Ar].[H]C[H].[H]C[H] AXGTXDWPVWSEOX-UHFFFAOYSA-N 0.000 claims description 7
- 238000005299 abrasion Methods 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 229910000838 Al alloy Inorganic materials 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 239000000243 solution Substances 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 3
- 230000003628 erosive effect Effects 0.000 description 42
- 239000002245 particle Substances 0.000 description 16
- 235000019589 hardness Nutrition 0.000 description 12
- 229910000831 Steel Inorganic materials 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 239000010959 steel Substances 0.000 description 9
- 239000007787 solid Substances 0.000 description 8
- 230000006399 behavior Effects 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 102100022052 Cyclin N-terminal domain-containing protein 1 Human genes 0.000 description 5
- 101000900815 Homo sapiens Cyclin N-terminal domain-containing protein 1 Proteins 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- MEOSMFUUJVIIKB-UHFFFAOYSA-N [W].[C] Chemical compound [W].[C] MEOSMFUUJVIIKB-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 235000019362 perlite Nutrition 0.000 description 2
- 239000010451 perlite Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- WIGAYVXYNSVZAV-UHFFFAOYSA-N ac1lavbc Chemical compound [W].[W] WIGAYVXYNSVZAV-UHFFFAOYSA-N 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- AWNBGWWVMCBBST-UHFFFAOYSA-N chromium;cumene Chemical group [Cr].CC(C)C1=CC=CC=C1.CC(C)C1=CC=CC=C1 AWNBGWWVMCBBST-UHFFFAOYSA-N 0.000 description 1
- GETQUXSKPMRGCK-UHFFFAOYSA-N chromium;methane Chemical compound C.C.C.[Cr].[Cr].[Cr].[Cr].[Cr].[Cr].[Cr] GETQUXSKPMRGCK-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000005501 phase interface Effects 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910000601 superalloy Inorganic materials 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0073—Reactive sputtering by exposing the substrates to reactive gases intermittently
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
- C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9112616A FR2682400A1 (fr) | 1991-10-14 | 1991-10-14 | Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche. |
| EP92923834A EP0562108B1 (fr) | 1991-10-14 | 1992-10-14 | Materiau multicouche pour revetement anti-erosion et anti-abrasion |
| US08/075,519 US5547767A (en) | 1991-10-14 | 1992-10-14 | Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material and process for producing said multilayer material |
| DE69216218T DE69216218T2 (de) | 1991-10-14 | 1992-10-14 | Erosionsbeständiges und abrasionsbeständiges Mehrschichtenmaterial |
| PCT/FR1992/000969 WO1993008316A1 (fr) | 1991-10-14 | 1992-10-14 | Materiau multicouche pour revetement anti-erosion et anti-abrasion |
| US08/634,899 US5702829A (en) | 1991-10-14 | 1996-04-26 | Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9112616A FR2682400A1 (fr) | 1991-10-14 | 1991-10-14 | Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2682400A1 true FR2682400A1 (fr) | 1993-04-16 |
| FR2682400B1 FR2682400B1 (enrdf_load_stackoverflow) | 1995-03-03 |
Family
ID=9417872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR9112616A Granted FR2682400A1 (fr) | 1991-10-14 | 1991-10-14 | Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche. |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2682400A1 (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4343041A1 (de) * | 1993-12-16 | 1995-06-22 | Fraunhofer Ges Forschung | Korrosionsgeschütztes Metall |
| FR2764310A1 (fr) * | 1997-06-10 | 1998-12-11 | Commissariat Energie Atomique | Materiau multicouches a revetement anti-erosion, anti-abrasion, et anti-usure sur substrat en aluminium, en magnesium ou en leurs alliages |
| DE10005614A1 (de) * | 2000-02-09 | 2001-08-16 | Hauzer Techno Coating Europ B | Verfahren zur Herstellung von Beschichtungen sowie Gegenstand |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321902A (en) * | 1976-08-11 | 1978-02-28 | Fujitsu Ltd | Formation of carbonized protective film for magnetic recording medium |
| EP0106638A1 (en) * | 1982-10-12 | 1984-04-25 | National Research Development Corporation | Method and apparatus for growing material in a glow discharge |
| JPS60221565A (ja) * | 1984-04-19 | 1985-11-06 | Matsushita Electric Ind Co Ltd | ダイヤモンド部品およびその製造方法 |
| EP0186266A1 (en) * | 1984-11-19 | 1986-07-02 | Avco Corporation | Erosion-resistant coating system |
-
1991
- 1991-10-14 FR FR9112616A patent/FR2682400A1/fr active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321902A (en) * | 1976-08-11 | 1978-02-28 | Fujitsu Ltd | Formation of carbonized protective film for magnetic recording medium |
| EP0106638A1 (en) * | 1982-10-12 | 1984-04-25 | National Research Development Corporation | Method and apparatus for growing material in a glow discharge |
| JPS60221565A (ja) * | 1984-04-19 | 1985-11-06 | Matsushita Electric Ind Co Ltd | ダイヤモンド部品およびその製造方法 |
| EP0186266A1 (en) * | 1984-11-19 | 1986-07-02 | Avco Corporation | Erosion-resistant coating system |
Non-Patent Citations (3)
| Title |
|---|
| J. OF VACUUM SCIENCE AND TECHNOLOGY, A vol. 6, no. 3, 1 Mai 1988, NEW YORK pages 1646 - 1649; H.Y.YANG ET AL.: 'investigation of cosputtered W-C thin films as diffusion barriers' * |
| PATENT ABSTRACTS OF JAPAN vol. 10, no. 90 (C-337)(2147) 8 Avril 1986 & JP-A-60 221 565 ( MATSUSHITA DENKI SANGYO KK ) 6 Novembre 1985 * |
| PATENT ABSTRACTS OF JAPAN vol. 2, no. 56 (E)(1489) 24 Avril 1978 & JP-A-53 021 902 ( FUJITSU KK ) 28 Février 1978 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4343041A1 (de) * | 1993-12-16 | 1995-06-22 | Fraunhofer Ges Forschung | Korrosionsgeschütztes Metall |
| FR2764310A1 (fr) * | 1997-06-10 | 1998-12-11 | Commissariat Energie Atomique | Materiau multicouches a revetement anti-erosion, anti-abrasion, et anti-usure sur substrat en aluminium, en magnesium ou en leurs alliages |
| US6159618A (en) * | 1997-06-10 | 2000-12-12 | Commissariat A L'energie Atomique | Multi-layer material with an anti-erosion, anti-abrasion, and anti-wear coating on a substrate made of aluminum, magnesium or their alloys |
| DE10005614A1 (de) * | 2000-02-09 | 2001-08-16 | Hauzer Techno Coating Europ B | Verfahren zur Herstellung von Beschichtungen sowie Gegenstand |
| US6599400B2 (en) | 2000-02-09 | 2003-07-29 | Hauzer Techno Coating Europe Bv | Method for the manufacture of coatings and an article |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2682400B1 (enrdf_load_stackoverflow) | 1995-03-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0562108B1 (fr) | Materiau multicouche pour revetement anti-erosion et anti-abrasion | |
| EP0884403A1 (fr) | Materiau multicouches à revetement anti-erosion, anti-abrasion, et anti-usure sur substrat en aluminium, en magnesium ou en leurs alliages. | |
| US5702829A (en) | Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material | |
| US4676994A (en) | Adherent ceramic coatings | |
| US6372299B1 (en) | Method for improving the oxidation-resistance of metal substrates coated with thermal barrier coatings | |
| CN111005002B (zh) | 一种压气机叶片耐冲蚀防腐蚀自洁涂层的制备方法 | |
| AU6774381A (en) | Columnar grain ceramic thermal barrier coatings | |
| FR2745590A1 (fr) | Revetement de barriere thermique a sous-couche amelioree et pieces revetues par une telle barriere thermique | |
| Badini et al. | Cyclic oxidation in burner rig of TiAlN coating deposited on Ti-48Al-2Cr-2Nb by reactive HiPIMS | |
| CA2205052C (en) | Method of producing reactive element modified-aluminide diffusion coatings | |
| US6881452B2 (en) | Method for improving the TBC life of a single phase platinum aluminide bond coat by preoxidation heat treatment | |
| FR2833971A1 (fr) | Revetement formant barriere thermique. | |
| EP0990716B1 (fr) | Revetement de barrière thermique | |
| JP4122387B2 (ja) | 複合硬質皮膜、その製造方法及び成膜装置 | |
| Torabi et al. | Modeling, microstructural characterization, mechanical and corrosion properties of the CrN/CrAlN multilayer coating produced by physical vapor deposition. | |
| CA2356305C (fr) | Formation d'un revetement aluminiure incorporant un element reactif, sur un substrat metallique | |
| FR2565525A1 (fr) | Revetements a surface de resistance mecanique elevee pour articles en superalliage | |
| FR2682400A1 (fr) | Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche. | |
| Sagalovych et al. | Vacuum-plasma protective coating for turbines blades. | |
| JP2934599B2 (ja) | 高温耐食性複合表面処理方法 | |
| FR2833972A1 (fr) | Revetement formant barriere thermique en zircone stabilisee avec de l'oxyde d'hafnium. | |
| CN115413313B (zh) | 活塞环及其制造方法 | |
| Oh et al. | Wear behaviors of ceramics TiN, TiC and TiCN with arc ion plating | |
| Wei et al. | Erosion resistance of thick nitride and carbonitride coatings deposited using plasma enhanced magnetron sputtering | |
| CA2508821C (fr) | Procede de fabrication ou de reparation d'un revetement sur un substrat metallique |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| TP | Transmission of property | ||
| AU | Other action affecting the ownership or exploitation of an industrial property right | ||
| TP | Transmission of property |