FR2663021B1 - Procede de preparation de couches minces d'oxydes de metaux de transition. - Google Patents

Procede de preparation de couches minces d'oxydes de metaux de transition.

Info

Publication number
FR2663021B1
FR2663021B1 FR9007226A FR9007226A FR2663021B1 FR 2663021 B1 FR2663021 B1 FR 2663021B1 FR 9007226 A FR9007226 A FR 9007226A FR 9007226 A FR9007226 A FR 9007226A FR 2663021 B1 FR2663021 B1 FR 2663021B1
Authority
FR
France
Prior art keywords
preparation
transition metal
metal oxides
thin layers
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9007226A
Other languages
English (en)
Other versions
FR2663021A1 (fr
Inventor
Gillet Pierre-Alain
Fourquet Jean-Louis
Germain
Bohnke Odile
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR9007226A priority Critical patent/FR2663021B1/fr
Publication of FR2663021A1 publication Critical patent/FR2663021A1/fr
Application granted granted Critical
Publication of FR2663021B1 publication Critical patent/FR2663021B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G1/00—Methods of preparing compounds of metals not covered by subclasses C01B, C01C, C01D, or C01F, in general
    • C01G1/02—Oxides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/14—Methods for preparing oxides or hydroxides in general
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/77—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by unit-cell parameters, atom positions or structure diagrams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
FR9007226A 1990-06-11 1990-06-11 Procede de preparation de couches minces d'oxydes de metaux de transition. Expired - Fee Related FR2663021B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9007226A FR2663021B1 (fr) 1990-06-11 1990-06-11 Procede de preparation de couches minces d'oxydes de metaux de transition.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9007226A FR2663021B1 (fr) 1990-06-11 1990-06-11 Procede de preparation de couches minces d'oxydes de metaux de transition.

Publications (2)

Publication Number Publication Date
FR2663021A1 FR2663021A1 (fr) 1991-12-13
FR2663021B1 true FR2663021B1 (fr) 1992-09-11

Family

ID=9397468

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9007226A Expired - Fee Related FR2663021B1 (fr) 1990-06-11 1990-06-11 Procede de preparation de couches minces d'oxydes de metaux de transition.

Country Status (1)

Country Link
FR (1) FR2663021B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69839438D1 (de) * 1997-07-15 2008-06-19 Sony Corp Sekundärzelle mit nichtwässrigem elekrtolyten

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54160256A (en) * 1978-06-09 1979-12-18 Asahi Glass Co Ltd Electrochromatic element
US4693906A (en) * 1985-12-27 1987-09-15 Quantex Corporation Dielectric for electroluminescent devices, and methods for making
US4753916A (en) * 1986-09-17 1988-06-28 E. I. Du Pont De Nemours And Company Metal oxides of molybdenum or molybdenum and tungsten

Also Published As

Publication number Publication date
FR2663021A1 (fr) 1991-12-13

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Legal Events

Date Code Title Description
ST Notification of lapse