FR2496914B3 - - Google Patents

Info

Publication number
FR2496914B3
FR2496914B3 FR8123586A FR8123586A FR2496914B3 FR 2496914 B3 FR2496914 B3 FR 2496914B3 FR 8123586 A FR8123586 A FR 8123586A FR 8123586 A FR8123586 A FR 8123586A FR 2496914 B3 FR2496914 B3 FR 2496914B3
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8123586A
Other languages
French (fr)
Other versions
FR2496914A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of FR2496914A1 publication Critical patent/FR2496914A1/fr
Application granted granted Critical
Publication of FR2496914B3 publication Critical patent/FR2496914B3/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR8123586A 1980-12-18 1981-12-17 Utilisation de couches contenant du chrome, dans la fabrication de photomasques Granted FR2496914A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH936680 1980-12-18

Publications (2)

Publication Number Publication Date
FR2496914A1 FR2496914A1 (fr) 1982-06-25
FR2496914B3 true FR2496914B3 (enrdf_load_stackoverflow) 1983-11-10

Family

ID=4351232

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8123586A Granted FR2496914A1 (fr) 1980-12-18 1981-12-17 Utilisation de couches contenant du chrome, dans la fabrication de photomasques

Country Status (5)

Country Link
JP (1) JPS57172343A (enrdf_load_stackoverflow)
DE (1) DE3147644A1 (enrdf_load_stackoverflow)
FR (1) FR2496914A1 (enrdf_load_stackoverflow)
GB (1) GB2090016B (enrdf_load_stackoverflow)
NL (1) NL8105495A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770947A (en) * 1987-01-02 1988-09-13 International Business Machines Corporation Multiple density mask and fabrication thereof
KR950002172B1 (ko) * 1991-06-13 1995-03-14 금성일렉트론주식회사 편광자를 사용한 편광노광장치 및 편광마스크 제조방법
RU2206115C1 (ru) * 2002-01-08 2003-06-10 Закрытое акционерное общество "Элма-Фотма" Фотошаблонная заготовка

Also Published As

Publication number Publication date
FR2496914A1 (fr) 1982-06-25
NL8105495A (nl) 1982-07-16
JPS57172343A (en) 1982-10-23
GB2090016B (en) 1984-07-18
DE3147644A1 (de) 1982-11-18
GB2090016A (en) 1982-06-30

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Legal Events

Date Code Title Description
ST Notification of lapse