FR2494840B1 - - Google Patents

Info

Publication number
FR2494840B1
FR2494840B1 FR8121976A FR8121976A FR2494840B1 FR 2494840 B1 FR2494840 B1 FR 2494840B1 FR 8121976 A FR8121976 A FR 8121976A FR 8121976 A FR8121976 A FR 8121976A FR 2494840 B1 FR2494840 B1 FR 2494840B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8121976A
Other languages
French (fr)
Other versions
FR2494840A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2494840A1 publication Critical patent/FR2494840A1/fr
Application granted granted Critical
Publication of FR2494840B1 publication Critical patent/FR2494840B1/fr
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
FR8121976A 1980-11-24 1981-11-24 Procede de mesure pour determiner l'epaisseur de couches minces au moyen d'un cristal oscillateur, notamment dans l'industrie optique et la fabrication des semi-conducteurs Granted FR2494840A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT571080A AT382963B (de) 1980-11-24 1980-11-24 Messverfahren zur bestimmung der dicke duenner schichten

Publications (2)

Publication Number Publication Date
FR2494840A1 FR2494840A1 (fr) 1982-05-28
FR2494840B1 true FR2494840B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-03-23

Family

ID=3578812

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8121976A Granted FR2494840A1 (fr) 1980-11-24 1981-11-24 Procede de mesure pour determiner l'epaisseur de couches minces au moyen d'un cristal oscillateur, notamment dans l'industrie optique et la fabrication des semi-conducteurs

Country Status (4)

Country Link
AT (1) AT382963B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3145309A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2494840A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2088058B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3700366A1 (de) * 1987-01-08 1988-07-21 Leybold Ag Einrichtung zum ermitteln der jeweiligen dicke von sich veraendernden material-schichten auf einem substrat waehrend des beschichtungsvorgangs
EP0284678B1 (en) * 1987-03-31 1992-06-03 Benjamin Gavish A device and method for monitoring small displacements of a peak in a frequency spectrum
DE3920052A1 (de) * 1989-06-20 1991-01-10 Peter Dipl Ing Berg Messsystem zur bestimmung von traeger masse sowie daraus resultierender physikalischer eigenschaften mit hilfe eines auch in betriebsfaellen hoher und/oder variabler daempfung arbeitenden oszillators
US5112642A (en) * 1990-03-30 1992-05-12 Leybold Inficon, Inc. Measuring and controlling deposition on a piezoelectric monitor crystal
US6370955B1 (en) * 1999-06-15 2002-04-16 Massachusetts Institute Of Technology High-temperature balance
RU2194248C2 (ru) * 1999-10-25 2002-12-10 Закрытое акционерное общество "КОМПОМАШ-ТЭК" Способ определения толщины покрытия детали
JP2005049236A (ja) * 2003-07-29 2005-02-24 Kansai Paint Co Ltd 電着特性測定装置と評価方法及び管理方法
RU2257510C1 (ru) * 2004-03-01 2005-07-27 Шухостанов Владимир Кистуевич Способ определения толщины слоя парафинов на внутренней стороне нефте- и газопроводов
DE102006006172B3 (de) * 2006-02-10 2007-09-27 Carl Zeiss Ag Schichtdickenmessgerät insbesondere für Beschichtungsanlagen und Beschichtungsanlage mit einem solchen Schichtdickenmessgerät
CN116121686B (zh) * 2022-11-24 2023-08-04 广东粤水电新能源装备有限公司 一种基于大数据的风电塔自动喷锌系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU167641B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-02-07 1975-11-28
HU170602B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-05-05 1977-07-28

Also Published As

Publication number Publication date
GB2088058B (en) 1984-09-05
DE3145309A1 (de) 1982-06-16
GB2088058A (en) 1982-06-03
ATA571080A (de) 1986-09-15
AT382963B (de) 1987-05-11
FR2494840A1 (fr) 1982-05-28

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Legal Events

Date Code Title Description
ST Notification of lapse