FR2492164B1 - Procede de realisation simultanee de liaisons electriques multiples, notamment pour le raccordement electrique d'une micro-plaquette de semiconducteurs - Google Patents

Procede de realisation simultanee de liaisons electriques multiples, notamment pour le raccordement electrique d'une micro-plaquette de semiconducteurs

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Publication number
FR2492164B1
FR2492164B1 FR8022083A FR8022083A FR2492164B1 FR 2492164 B1 FR2492164 B1 FR 2492164B1 FR 8022083 A FR8022083 A FR 8022083A FR 8022083 A FR8022083 A FR 8022083A FR 2492164 B1 FR2492164 B1 FR 2492164B1
Authority
FR
France
Prior art keywords
electrical connection
paste
wafer
semiconductor micro
simultaneous realization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8022083A
Other languages
English (en)
French (fr)
Other versions
FR2492164A1 (fr
Inventor
Georges Florens
Philippe Jourdain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR8022083A priority Critical patent/FR2492164B1/fr
Priority to DE19813140348 priority patent/DE3140348A1/de
Priority to IE2380/81A priority patent/IE52529B1/en
Priority to GB8130757A priority patent/GB2090071B/en
Priority to JP56162908A priority patent/JPS5799750A/ja
Priority to US06/311,211 priority patent/US4442966A/en
Publication of FR2492164A1 publication Critical patent/FR2492164A1/fr
Application granted granted Critical
Publication of FR2492164B1 publication Critical patent/FR2492164B1/fr
Expired legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Wire Bonding (AREA)
  • Connections Effected By Soldering, Adhesion, Or Permanent Deformation (AREA)
  • Conductive Materials (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
FR8022083A 1980-10-15 1980-10-15 Procede de realisation simultanee de liaisons electriques multiples, notamment pour le raccordement electrique d'une micro-plaquette de semiconducteurs Expired FR2492164B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR8022083A FR2492164B1 (fr) 1980-10-15 1980-10-15 Procede de realisation simultanee de liaisons electriques multiples, notamment pour le raccordement electrique d'une micro-plaquette de semiconducteurs
DE19813140348 DE3140348A1 (de) 1980-10-15 1981-10-10 Verfahren zur gleichzeitigen herstellung mehrfacher elektrischer verbindungen, insbesondere zum elektrischen anschluss eines halbleiterbauelementes
IE2380/81A IE52529B1 (en) 1980-10-15 1981-10-12 Method of simultaneously manufacturing multiple electrical connections between two elements
GB8130757A GB2090071B (en) 1980-10-15 1981-10-12 Bonding with a conductive adhesive
JP56162908A JPS5799750A (en) 1980-10-15 1981-10-14 Method of forming electric connection
US06/311,211 US4442966A (en) 1980-10-15 1981-10-14 Method of simultaneously manufacturing multiple electrical connections between two electrical elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8022083A FR2492164B1 (fr) 1980-10-15 1980-10-15 Procede de realisation simultanee de liaisons electriques multiples, notamment pour le raccordement electrique d'une micro-plaquette de semiconducteurs

Publications (2)

Publication Number Publication Date
FR2492164A1 FR2492164A1 (fr) 1982-04-16
FR2492164B1 true FR2492164B1 (fr) 1987-01-23

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FR8022083A Expired FR2492164B1 (fr) 1980-10-15 1980-10-15 Procede de realisation simultanee de liaisons electriques multiples, notamment pour le raccordement electrique d'une micro-plaquette de semiconducteurs

Country Status (6)

Country Link
US (1) US4442966A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5799750A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3140348A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2492164B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2090071B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IE (1) IE52529B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3446789A1 (de) * 1984-12-21 1986-07-03 SEMIKRON Gesellschaft für Gleichrichterbau u. Elektronik mbH, 8500 Nürnberg Verfahren zum herstellen von halbleiterbauelementen
JPH0638437B2 (ja) * 1985-03-12 1994-05-18 カシオ計算機株式会社 半導体ペレツトの接合方法
US4684055A (en) * 1985-09-09 1987-08-04 Harris Corporation Method of selectively soldering the underside of a substrate having leads
US4859268A (en) * 1986-02-24 1989-08-22 International Business Machines Corporation Method of using electrically conductive composition
US4780371A (en) * 1986-02-24 1988-10-25 International Business Machines Corporation Electrically conductive composition and use thereof
JPH074995B2 (ja) * 1986-05-20 1995-01-25 株式会社東芝 Ｉｃカ−ド及びその製造方法
EP0264648B1 (en) * 1986-09-25 1993-05-05 Kabushiki Kaisha Toshiba Method of producing a film carrier
FR2618254B1 (fr) * 1987-07-16 1990-01-05 Thomson Semiconducteurs Procede et structure de prise de contact sur des plots de circuit integre.
EP0396522A3 (en) * 1989-05-05 1992-01-22 International Business Machines Corporation Universal electrical interconnection system and method
JPH03125443A (ja) * 1989-10-09 1991-05-28 Sharp Corp 実装基板の電極及び該実装基板の電極を有する液晶表示装置
US5056706A (en) * 1989-11-20 1991-10-15 Microelectronics And Computer Technology Corporation Liquid metal paste for thermal and electrical connections
US5611140A (en) * 1989-12-18 1997-03-18 Epoxy Technology, Inc. Method of forming electrically conductive polymer interconnects on electrical substrates
US5074947A (en) * 1989-12-18 1991-12-24 Epoxy Technology, Inc. Flip chip technology using electrically conductive polymers and dielectrics
US5076485A (en) * 1990-04-24 1991-12-31 Microelectronics And Computer Technology Corporation Bonding electrical leads to pads with particles
US4995551A (en) * 1990-04-24 1991-02-26 Microelectronics And Computer Technology Corporation Bonding electrical leads to pads on electrical components
MY129942A (en) * 1990-08-23 2007-05-31 Siemens Ag Method and apparatus for connecting a semiconductor chip to a carrier.
US5866951A (en) * 1990-10-12 1999-02-02 Robert Bosch Gmbh Hybrid circuit with an electrically conductive adhesive
DE4032397A1 (de) * 1990-10-12 1992-04-16 Bosch Gmbh Robert Verfahren zur herstellung einer hybriden halbleiterstruktur und nach dem verfahren hergestellte halbleiterstruktur
JPH05206379A (ja) * 1991-10-04 1993-08-13 Internatl Business Mach Corp <Ibm> マルチチップモジュールおよびその製造方法
US5193732A (en) * 1991-10-04 1993-03-16 International Business Machines Corporation Apparatus and methods for making simultaneous electrical connections
US5288007A (en) * 1991-10-04 1994-02-22 International Business Machine Corporation Apparatus and methods for making simultaneous electrical connections
US5170930A (en) * 1991-11-14 1992-12-15 Microelectronics And Computer Technology Corporation Liquid metal paste for thermal and electrical connections
US6077725A (en) * 1992-09-03 2000-06-20 Lucent Technologies Inc Method for assembling multichip modules
US5545589A (en) * 1993-01-28 1996-08-13 Matsushita Electric Industrial Co., Ltd. Method of forming a bump having a rugged side, a semiconductor device having the bump, and a method of mounting a semiconductor unit and a semiconductor device
US5766670A (en) * 1993-11-17 1998-06-16 Ibm Via fill compositions for direct attach of devices and methods for applying same
US5450290A (en) * 1993-02-01 1995-09-12 International Business Machines Corporation Printed circuit board with aligned connections and method of making same
US5445308A (en) * 1993-03-29 1995-08-29 Nelson; Richard D. Thermally conductive connection with matrix material and randomly dispersed filler containing liquid metal
US5328087A (en) * 1993-03-29 1994-07-12 Microelectronics And Computer Technology Corporation Thermally and electrically conductive adhesive material and method of bonding with same
CA2156941A1 (en) * 1995-08-21 1997-02-22 Jonathan H. Orchard-Webb Method of making electrical connections to integrated circuit
US5741430A (en) * 1996-04-25 1998-04-21 Lucent Technologies Inc. Conductive adhesive bonding means
US6558979B2 (en) * 1996-05-21 2003-05-06 Micron Technology, Inc. Use of palladium in IC manufacturing with conductive polymer bump
JP3030271B2 (ja) 1997-05-19 2000-04-10 富士通株式会社 半導体部品の実装方法
US6110760A (en) * 1998-02-12 2000-08-29 Micron Technology, Inc. Methods of forming electrically conductive interconnections and electrically interconnected substrates
US6580035B1 (en) 1998-04-24 2003-06-17 Amerasia International Technology, Inc. Flexible adhesive membrane and electronic device employing same
US6297564B1 (en) 1998-04-24 2001-10-02 Amerasia International Technology, Inc. Electronic devices employing adhesive interconnections including plated particles
US6406988B1 (en) 1998-04-24 2002-06-18 Amerasia International Technology, Inc. Method of forming fine pitch interconnections employing magnetic masks
US6108210A (en) * 1998-04-24 2000-08-22 Amerasia International Technology, Inc. Flip chip devices with flexible conductive adhesive
US6589376B1 (en) 1998-04-28 2003-07-08 International Business Machines Corporation Method and composition for mounting an electronic component and device formed therewith
US6136128A (en) * 1998-06-23 2000-10-24 Amerasia International Technology, Inc. Method of making an adhesive preform lid for electronic devices
US6428650B1 (en) 1998-06-23 2002-08-06 Amerasia International Technology, Inc. Cover for an optical device and method for making same
US6409859B1 (en) 1998-06-30 2002-06-25 Amerasia International Technology, Inc. Method of making a laminated adhesive lid, as for an Electronic device
US6399178B1 (en) 1998-07-20 2002-06-04 Amerasia International Technology, Inc. Rigid adhesive underfill preform, as for a flip-chip device
US6221752B1 (en) * 1998-08-20 2001-04-24 United Microelectronics Corp. Method of mending erosion of bonding pad
US6316289B1 (en) 1998-11-12 2001-11-13 Amerasia International Technology Inc. Method of forming fine-pitch interconnections employing a standoff mask
US6246587B1 (en) 1998-12-03 2001-06-12 Intermedics Inc. Surface mounted device with grooves on a termination lead and methods of assembly
US6535393B2 (en) * 1998-12-04 2003-03-18 Micron Technology, Inc. Electrical device allowing for increased device densities
US6255208B1 (en) 1999-01-25 2001-07-03 International Business Machines Corporation Selective wafer-level testing and burn-in
US6177729B1 (en) 1999-04-03 2001-01-23 International Business Machines Corporation Rolling ball connector
DE10117880B4 (de) * 2001-04-10 2009-01-29 Mühlbauer Ag Verfahren zum Vereinzeln von elektronischen Bauteilen aus einem Verbund
US7743963B1 (en) 2005-03-01 2010-06-29 Amerasia International Technology, Inc. Solderable lid or cover for an electronic circuit
JP2009246166A (ja) * 2008-03-31 2009-10-22 Fujitsu Ltd 電子部品パッケージおよび基板ユニット並びにプリント配線板およびその製造方法
JP5919282B2 (ja) * 2010-10-11 2016-05-18 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． マルチデバイスｏｌｅｄ
ITTO20110980A1 (it) * 2011-10-27 2013-04-28 St Microelectronics Srl Struttura incapsulante schermata e relativo metodo di fabbricazione
JP6507826B2 (ja) * 2015-04-28 2019-05-08 日立化成株式会社 導電性接合体および該接合体の製造方法
CN110744163B (zh) * 2019-11-11 2022-04-19 重庆理工大学 一种抗热迁移微焊点结构及其制备方法
CN112839439A (zh) * 2019-11-25 2021-05-25 Oppo（重庆）智能科技有限公司 印刷线路板组件及制备方法、电子设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD82790A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) *
US3463698A (en) * 1965-06-14 1969-08-26 Fuji Tsushinki Seizo Kk Laminated plate for electrical apparatus and method for making same
US3697308A (en) * 1969-11-10 1972-10-10 Trw Inc Boron reinforced polyimide composites
US3809797A (en) * 1971-11-16 1974-05-07 Du Pont Seal ring compositions and electronic packages made therewith
JPS5279773A (en) * 1975-12-26 1977-07-05 Seiko Epson Corp Bonding method of ic
CA1097495A (en) * 1976-05-24 1981-03-17 James H. Aumiller Electrically conductive adhesive
US4147669A (en) * 1977-03-28 1979-04-03 Rockwell International Corporation Conductive adhesive for providing electrical and thermal conductivity
DE2829917A1 (de) * 1978-07-07 1980-01-24 Semikron Gleichrichterbau Verfahren zum herstellen von halbleiterbauelementen
JPS5835367B2 (ja) * 1978-07-18 1983-08-02 ミツミ電機株式会社 回路素子基板及びその製造方法
US4233103A (en) * 1978-12-20 1980-11-11 The United States Of America As Represented By The Secretary Of The Air Force High temperature-resistant conductive adhesive and method employing same

Also Published As

Publication number Publication date
US4442966A (en) 1984-04-17
FR2492164A1 (fr) 1982-04-16
IE812380L (en) 1982-04-15
GB2090071B (en) 1984-05-23
GB2090071A (en) 1982-06-30
JPH0128502B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-06-02
JPS5799750A (en) 1982-06-21
IE52529B1 (en) 1987-12-09
DE3140348A1 (de) 1982-08-26

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