FR2462780B1 - - Google Patents

Info

Publication number
FR2462780B1
FR2462780B1 FR8016605A FR8016605A FR2462780B1 FR 2462780 B1 FR2462780 B1 FR 2462780B1 FR 8016605 A FR8016605 A FR 8016605A FR 8016605 A FR8016605 A FR 8016605A FR 2462780 B1 FR2462780 B1 FR 2462780B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8016605A
Other languages
French (fr)
Other versions
FR2462780A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arris Technology Inc
Original Assignee
Arris Technology Inc
General Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arris Technology Inc, General Instrument Corp filed Critical Arris Technology Inc
Publication of FR2462780A1 publication Critical patent/FR2462780A1/en
Application granted granted Critical
Publication of FR2462780B1 publication Critical patent/FR2462780B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • H01L21/263Bombardment with radiation with high-energy radiation
    • H01L21/265Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H01L21/26513Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
    • H01L21/2652Through-implantation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/36Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Thyristors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
FR8016605A 1979-08-01 1980-07-28 METHOD FOR MANUFACTURING A HIGH BREAKING VOLTAGE P-N JUNCTION Granted FR2462780A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6267679A 1979-08-01 1979-08-01

Publications (2)

Publication Number Publication Date
FR2462780A1 FR2462780A1 (en) 1981-02-13
FR2462780B1 true FR2462780B1 (en) 1983-02-18

Family

ID=22044093

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8016605A Granted FR2462780A1 (en) 1979-08-01 1980-07-28 METHOD FOR MANUFACTURING A HIGH BREAKING VOLTAGE P-N JUNCTION

Country Status (5)

Country Link
JP (1) JPS5623742A (en)
DE (1) DE3028185A1 (en)
FR (1) FR2462780A1 (en)
GB (1) GB2056168A (en)
IT (1) IT1145411B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4369072A (en) * 1981-01-22 1983-01-18 International Business Machines Corp. Method for forming IGFET devices having improved drain voltage characteristics
JPS60117681A (en) * 1983-11-29 1985-06-25 Mitsubishi Electric Corp Semiconductor device
JPH063798B2 (en) * 1985-02-06 1994-01-12 日本電気株式会社 Method for manufacturing semiconductor device
JPH01147829A (en) * 1987-12-04 1989-06-09 Toshiba Corp Manufacture of semiconductor device
JP2706460B2 (en) * 1988-03-14 1998-01-28 富士通株式会社 Ion implantation method
JP4629809B2 (en) * 1996-03-27 2011-02-09 クリー,インコーポレイテッド Method of manufacturing a semiconductor device having a SiC semiconductor layer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT956828B (en) * 1971-08-05 1973-10-10 Rca Corp PROCESS FOR OBTAINING DIFFUSED SEMICONDUCTOR REGIO NI WITH A REDUCED NUMBER OF CRYSTAL DEFECTS
IL40189A0 (en) * 1971-09-09 1972-10-29 Trusty J Method and apparatus for preparing and analyzing serum samples
DE2304647C2 (en) * 1973-01-31 1984-06-28 Siemens AG, 1000 Berlin und 8000 München Method for producing a doped zone in a semiconductor body
JPS543479A (en) * 1977-06-09 1979-01-11 Toshiba Corp Semiconductor device and its manufacture

Also Published As

Publication number Publication date
IT1145411B (en) 1986-11-05
DE3028185A1 (en) 1981-02-26
JPS5623742A (en) 1981-03-06
GB2056168A (en) 1981-03-11
IT8049389A0 (en) 1980-07-31
FR2462780A1 (en) 1981-02-13

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Legal Events

Date Code Title Description
ST Notification of lapse