FR2434535B1 - Appareil d'alignement et de reconnaissance d'un objet par rapport a des lignes de reference, notamment pour la fabrication de semi-conducteurs - Google Patents

Appareil d'alignement et de reconnaissance d'un objet par rapport a des lignes de reference, notamment pour la fabrication de semi-conducteurs

Info

Publication number
FR2434535B1
FR2434535B1 FR7901746A FR7901746A FR2434535B1 FR 2434535 B1 FR2434535 B1 FR 2434535B1 FR 7901746 A FR7901746 A FR 7901746A FR 7901746 A FR7901746 A FR 7901746A FR 2434535 B1 FR2434535 B1 FR 2434535B1
Authority
FR
France
Prior art keywords
semiconductors
recognizing
aligning
relation
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7901746A
Other languages
English (en)
French (fr)
Other versions
FR2434535A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of FR2434535A1 publication Critical patent/FR2434535A1/fr
Application granted granted Critical
Publication of FR2434535B1 publication Critical patent/FR2434535B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/70—Determining position or orientation of objects or cameras
    • G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30204—Marker
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/20—Image preprocessing
    • G06V10/24—Aligning, centring, orientation detection or correction of the image
    • G06V10/245—Aligning, centring, orientation detection or correction of the image by locating a pattern; Special marks for positioning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Image Input (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR7901746A 1978-01-27 1979-01-24 Appareil d'alignement et de reconnaissance d'un objet par rapport a des lignes de reference, notamment pour la fabrication de semi-conducteurs Expired FR2434535B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2803653A DE2803653C3 (de) 1978-01-27 1978-01-27 Ausrichtvorrichtung

Publications (2)

Publication Number Publication Date
FR2434535A1 FR2434535A1 (fr) 1980-03-21
FR2434535B1 true FR2434535B1 (fr) 1986-06-27

Family

ID=6030582

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7901746A Expired FR2434535B1 (fr) 1978-01-27 1979-01-24 Appareil d'alignement et de reconnaissance d'un objet par rapport a des lignes de reference, notamment pour la fabrication de semi-conducteurs

Country Status (9)

Country Link
US (2) US4352125A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS54148326A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH (1) CH611059A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2803653C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ES (1) ES477151A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2434535B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2013365B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT1114484B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
PT (1) PT69143A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (33)

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JPS6016673B2 (ja) * 1978-12-25 1985-04-26 川崎重工業株式会社 サ−ボ系における被検体認識装置
DE2910580C3 (de) * 1979-03-17 1982-01-21 Texas Instruments Deutschland Gmbh, 8050 Freising Ausrichtvorrichtung
EP0041870B1 (en) * 1980-06-10 1986-12-30 Fujitsu Limited Pattern position recognition apparatus
DD158824A1 (de) * 1980-11-03 1983-02-02 Adelbrecht Schorcht Anordnung zur automatischen justierung mindestens eines gegenstandes
JPS57152073A (en) * 1981-03-16 1982-09-20 Ando Electric Co Ltd Original profiling reader
US4414573A (en) * 1981-04-08 1983-11-08 Ampex Corporation Pattern recognition circuit for reliably distinguishing between different portions of a diascope pattern during video camera setup
US4479145A (en) * 1981-07-29 1984-10-23 Nippon Kogaku K.K. Apparatus for detecting the defect of pattern
US4500968A (en) * 1982-06-29 1985-02-19 Domtar Inc. Paper machine wet line control
US4550374A (en) * 1982-11-15 1985-10-29 Tre Semiconductor Equipment Corporation High speed alignment method for wafer stepper
GB2131162B (en) * 1982-11-27 1986-04-30 Ferranti Plc Aligning objects
JPS59157505A (ja) * 1983-02-28 1984-09-06 Hitachi Ltd パタ−ン検査装置
JPS60122304A (ja) * 1983-11-09 1985-06-29 Shinetsu Eng Kk 自動寸法測定装置
EP0147493B1 (fr) * 1983-12-28 1988-09-07 International Business Machines Corporation Procédé et équipement pour l'alignement automatique d'un objet par rapport à une référence
US4688088A (en) * 1984-04-20 1987-08-18 Canon Kabushiki Kaisha Position detecting device and method
FR2570913B1 (fr) * 1984-09-24 1988-06-10 Aerospatiale Procede et dispositif d'aide au positionnement de pieces par superposition d'images
JPH0616013B2 (ja) * 1984-11-22 1994-03-02 肇産業株式会社 自動検査装置
JPH0666241B2 (ja) * 1985-10-14 1994-08-24 株式会社日立製作所 位置検出方法
US4651203A (en) * 1985-10-29 1987-03-17 At&T Technologies, Inc. Video controlled article positioning system
US4949390A (en) * 1987-04-16 1990-08-14 Applied Vision Systems, Inc. Interconnect verification using serial neighborhood processors
US4896206A (en) * 1987-12-14 1990-01-23 Electro Science Industries, Inc. Video detection system
US4998005A (en) * 1989-05-15 1991-03-05 General Electric Company Machine vision system
US5113565A (en) * 1990-07-06 1992-05-19 International Business Machines Corp. Apparatus and method for inspection and alignment of semiconductor chips and conductive lead frames
US5097602A (en) * 1990-07-09 1992-03-24 Westinghouse Electric Corp. Apparatus and method for automated inspection of a surface contour on a workpiece
JPH0724278B2 (ja) * 1991-01-10 1995-03-15 信越半導体株式会社 パターンシフト測定方法
US7843510B1 (en) 1998-01-16 2010-11-30 Ecole Polytechnique Federale De Lausanne Method and system for combining video sequences with spatio-temporal alignment
US6320624B1 (en) 1998-01-16 2001-11-20 ECOLE POLYTECHNIQUE FéDéRALE Method and system for combining video sequences with spatio-temporal alignment
JP2004500756A (ja) * 1999-11-24 2004-01-08 ダートフィッシュ　エルティーディー． ビデオシーケンスと時空正規化との調整および合成
CH694931A5 (de) * 2000-03-17 2005-09-15 Esec Trading Sa Einrichtung fuer die Montage von Halbleiterchips auf einem Substrat.
US7392287B2 (en) 2001-03-27 2008-06-24 Hemisphere Ii Investment Lp Method and apparatus for sharing information using a handheld device
US7112812B2 (en) * 2001-12-28 2006-09-26 Applied Materials, Inc. Optical measurement apparatus
DE102006003228A1 (de) * 2006-01-24 2007-08-02 Sick Ag Vorrichtung zur Überwachung eines Schutzfeldes
JP6534316B2 (ja) * 2015-08-25 2019-06-26 日機装株式会社 漏血検出装置およびそれを用いた漏血検出方法
KR102566136B1 (ko) 2016-10-14 2023-08-10 삼성전자주식회사 계측 시스템 및 이를 사용하는 스테이지 제어 장치

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US3515877A (en) * 1965-12-13 1970-06-02 John W Massing Electro-optical positioner
US3562423A (en) * 1967-08-15 1971-02-09 Univ Northwestern Dictorial tracking and recognition system which provides display of target identified by brilliance and spatial characteristics
CA968439A (en) * 1971-05-26 1975-05-27 Western Electric Company, Incorporated Video controlled positioning method and apparatus
US3899634A (en) * 1971-05-26 1975-08-12 Western Electric Co Video controlled positioning method and apparatus
GB1401179A (en) * 1971-09-22 1975-07-16 Image Analysing Computers Ltd Automated image analysis employing automatic fucussing
JPS5214112B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-02-22 1977-04-19
US3814845A (en) * 1973-03-01 1974-06-04 Bell Telephone Labor Inc Object positioning
JPS5425782B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-03-28 1979-08-30
GB1465293A (en) 1973-06-15 1977-02-23 Hitachi Ltd Automatic working machine
US3870814A (en) * 1973-09-11 1975-03-11 Mosler Safe Co Image positioning apparatus and method
US4078253A (en) 1974-03-04 1978-03-07 Kanebo Ltd. Pattern generating system
US3903363A (en) * 1974-05-31 1975-09-02 Western Electric Co Automatic positioning system and method
US3958740A (en) * 1974-07-08 1976-05-25 Dixon Automation, Inc. Automatic component assembly machine and method relating thereto
JPS5129563A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-30 1976-03-12 Mitsubishi Rayon Co
GB1516840A (en) 1975-07-30 1978-07-05 Mullard Ltd Automatic machine tool
US4000417A (en) 1975-08-25 1976-12-28 Honeywell Inc. Scanning microscope system with automatic cell find and autofocus
US3988535A (en) * 1975-11-04 1976-10-26 Western Electric Company, Inc. Automated positioning
US4041286A (en) * 1975-11-20 1977-08-09 The Bendix Corporation Method and apparatus for detecting characteristic features of surfaces
JPS52140278A (en) * 1976-05-19 1977-11-22 Hitachi Ltd Position detector
CH643959A5 (de) * 1978-04-14 1984-06-29 Siemens Ag Verfahren und vorrichtung zur automatischen lageerkennung von halbleiterchips.
US4253111A (en) * 1978-09-25 1981-02-24 Gca Corporation Apparatus for bonding leads to semiconductor chips

Also Published As

Publication number Publication date
GB2013365A (en) 1979-08-08
IT1114484B (it) 1986-01-27
DE2803653B2 (de) 1980-06-04
ES477151A1 (es) 1979-07-01
US4364086A (en) 1982-12-14
CH611059A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-05-15
JPS641832B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-12
GB2013365B (en) 1982-08-18
DE2803653C3 (de) 1986-05-28
JPS54148326A (en) 1979-11-20
DE2803653A1 (de) 1979-08-02
FR2434535A1 (fr) 1980-03-21
PT69143A (en) 1979-02-01
IT7947798A0 (it) 1979-01-26
US4352125A (en) 1982-09-28

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