FR2398300A1 - Dispositif pour l'analyse d'un echantillon par bombardement electromagnetique - Google Patents

Dispositif pour l'analyse d'un echantillon par bombardement electromagnetique

Info

Publication number
FR2398300A1
FR2398300A1 FR7821774A FR7821774A FR2398300A1 FR 2398300 A1 FR2398300 A1 FR 2398300A1 FR 7821774 A FR7821774 A FR 7821774A FR 7821774 A FR7821774 A FR 7821774A FR 2398300 A1 FR2398300 A1 FR 2398300A1
Authority
FR
France
Prior art keywords
sample
analyzing
lt
gt
apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7821774A
Other languages
English (en)
Other versions
FR2398300B3 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE19772732961 priority Critical patent/DE2732961A1/de
Priority to DE19772739829 priority patent/DE2739829C2/de
Application filed by Leybold AG filed Critical Leybold AG
Publication of FR2398300A1 publication Critical patent/FR2398300A1/fr
Application granted granted Critical
Publication of FR2398300B3 publication Critical patent/FR2398300B3/fr
Application status is Expired legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252Tubes for spot-analysing by electron or ion beams; Microanalysers

Abstract

<P>Dispositif pour l'analyse d'un échantillon par bombardement électromagnétique, puis étude des particules émises par l'échantillon à l'aide d'un analyseur de masse, logé dans une enceinte sous vide. </P><P>Une couche conductrice 11 est disposée au voisinage de l'échantillon 8.</P>
FR7821774A 1977-07-21 1978-07-21 Expired FR2398300B3 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19772732961 DE2732961A1 (de) 1977-07-21 1977-07-21 Anordnung zur analyse einer probe durch beschuss mit elektromagnetischer strahlung
DE19772739829 DE2739829C2 (fr) 1977-09-03 1977-09-03

Publications (2)

Publication Number Publication Date
FR2398300A1 true FR2398300A1 (fr) 1979-02-16
FR2398300B3 FR2398300B3 (fr) 1981-04-17

Family

ID=25772374

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7821774A Expired FR2398300B3 (fr) 1977-07-21 1978-07-21

Country Status (2)

Country Link
FR (1) FR2398300B3 (fr)
GB (1) GB2001471B (fr)

Also Published As

Publication number Publication date
FR2398300B3 (fr) 1981-04-17
GB2001471B (en) 1982-03-10
GB2001471A (en) 1979-01-31

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Legal Events

Date Code Title Description
ST Notification of lapse