FR2389928B1 - - Google Patents

Info

Publication number
FR2389928B1
FR2389928B1 FR7813229A FR7813229A FR2389928B1 FR 2389928 B1 FR2389928 B1 FR 2389928B1 FR 7813229 A FR7813229 A FR 7813229A FR 7813229 A FR7813229 A FR 7813229A FR 2389928 B1 FR2389928 B1 FR 2389928B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7813229A
Other versions
FR2389928A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Massachusetts Institute of Technology
Original Assignee
Massachusetts Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Massachusetts Institute of Technology filed Critical Massachusetts Institute of Technology
Publication of FR2389928A1 publication Critical patent/FR2389928A1/fr
Application granted granted Critical
Publication of FR2389928B1 publication Critical patent/FR2389928B1/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049Technique, e.g. interferometric
FR7813229A 1977-05-03 1978-05-03 Expired FR2389928B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/793,259 US4200395A (en) 1977-05-03 1977-05-03 Alignment of diffraction gratings

Publications (2)

Publication Number Publication Date
FR2389928A1 FR2389928A1 (fr) 1978-12-01
FR2389928B1 true FR2389928B1 (fr) 1984-09-14

Family

ID=25159493

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7813229A Expired FR2389928B1 (fr) 1977-05-03 1978-05-03

Country Status (6)

Country Link
US (1) US4200395A (fr)
JP (1) JPS53137673A (fr)
CA (1) CA1093297A (fr)
DE (1) DE2819400A1 (fr)
FR (1) FR2389928B1 (fr)
GB (1) GB1601409A (fr)

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JPS5612728A (en) * 1979-07-12 1981-02-07 Nippon Kogaku Kk <Nikon> Alignmening device for ic projection exposure equipment
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JPS59104128A (ja) * 1982-12-06 1984-06-15 Nippon Telegr & Teleph Corp <Ntt> 2重回折格子による位置合せ法および位置合せ装置
FR2538923A1 (fr) * 1982-12-30 1984-07-06 Thomson Csf Procede et dispositif d'alignement optique de motifs dans deux plans rapproches dans un appareil d'exposition comprenant une source de rayonnement divergent
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US6309580B1 (en) * 1995-11-15 2001-10-30 Regents Of The University Of Minnesota Release surfaces, particularly for use in nanoimprint lithography
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KR102125450B1 (ko) * 2013-12-05 2020-06-22 엘지이노텍 주식회사 광변환부재 및 이를 포함하는 조명장치
US10592080B2 (en) 2014-07-31 2020-03-17 Microsoft Technology Licensing, Llc Assisted presentation of application windows
US10678412B2 (en) 2014-07-31 2020-06-09 Microsoft Technology Licensing, Llc Dynamic joint dividers for application windows
US10254942B2 (en) 2014-07-31 2019-04-09 Microsoft Technology Licensing, Llc Adaptive sizing and positioning of application windows
US9535253B2 (en) 2015-02-09 2017-01-03 Microsoft Technology Licensing, Llc Display system
US9429692B1 (en) 2015-02-09 2016-08-30 Microsoft Technology Licensing, Llc Optical components
US10018844B2 (en) 2015-02-09 2018-07-10 Microsoft Technology Licensing, Llc Wearable image display system
US10317677B2 (en) 2015-02-09 2019-06-11 Microsoft Technology Licensing, Llc Display system
US9827209B2 (en) 2015-02-09 2017-11-28 Microsoft Technology Licensing, Llc Display system
US11086216B2 (en) 2015-02-09 2021-08-10 Microsoft Technology Licensing, Llc Generating electronic components
US9513480B2 (en) 2015-02-09 2016-12-06 Microsoft Technology Licensing, Llc Waveguide
US9423360B1 (en) * 2015-02-09 2016-08-23 Microsoft Technology Licensing, Llc Optical components
US10451412B2 (en) 2016-04-22 2019-10-22 Kla-Tencor Corporation Apparatus and methods for detecting overlay errors using scatterometry
KR20190031542A (ko) 2016-07-21 2019-03-26 에이에스엠엘 네델란즈 비.브이. 타겟을 측정하는 방법, 기판, 메트롤로지 장치, 및 리소그래피 장치
WO2019141479A1 (fr) * 2018-01-17 2019-07-25 Asml Netherlands B.V. Procédé de mesure d'une cible et appareil de métrologie
EP3514628A1 (fr) * 2018-01-18 2019-07-24 ASML Netherlands B.V. Procédé de mesure d'une cible et appareil de métrologie
WO2019166190A1 (fr) * 2018-02-27 2019-09-06 Stichting Vu Appareil de métrologie et procédé de détermination d'une caractéristique d'une ou plusieurs structures sur un substrat
EP3531191A1 (fr) * 2018-02-27 2019-08-28 Stichting VU Appareil de métrologie et procédé pour déterminer une caractéristique d'une ou de plusieurs structures sur un substrat
KR102466584B1 (ko) * 2019-01-28 2022-11-11 케이엘에이 코포레이션 모아레 타겟 및 반도체 디바이스들의 편심의 측정에 이를 사용하기 위한 방법

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Also Published As

Publication number Publication date
CA1093297A (fr) 1981-01-13
GB1601409A (en) 1981-10-28
US4200395A (en) 1980-04-29
FR2389928A1 (fr) 1978-12-01
DE2819400C2 (fr) 1993-07-29
JPS6228576B2 (fr) 1987-06-22
JPS53137673A (en) 1978-12-01
DE2819400A1 (de) 1978-11-09

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