FR2304399A1 - Procede d'obtention par croissance cristalline en phase vapeur de monocristaux de nitrure de gallium - Google Patents

Procede d'obtention par croissance cristalline en phase vapeur de monocristaux de nitrure de gallium

Info

Publication number
FR2304399A1
FR2304399A1 FR7508613A FR7508613A FR2304399A1 FR 2304399 A1 FR2304399 A1 FR 2304399A1 FR 7508613 A FR7508613 A FR 7508613A FR 7508613 A FR7508613 A FR 7508613A FR 2304399 A1 FR2304399 A1 FR 2304399A1
Authority
FR
France
Prior art keywords
vapour phase
ammonia
partial pressure
hydrogen chloride
halide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7508613A
Other languages
English (en)
French (fr)
Other versions
FR2304399B1 (enrdf_load_stackoverflow
Inventor
Guy Jacob
Jean Hallais
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR7508613A priority Critical patent/FR2304399A1/fr
Priority to CA247,472A priority patent/CA1071068A/en
Priority to DE2609907A priority patent/DE2609907C2/de
Priority to GB10499/76A priority patent/GB1536586A/en
Priority to IT21264/76A priority patent/IT1058440B/it
Priority to US05/667,690 priority patent/US4144116A/en
Priority to JP51029398A priority patent/JPS51117199A/ja
Publication of FR2304399A1 publication Critical patent/FR2304399A1/fr
Application granted granted Critical
Publication of FR2304399B1 publication Critical patent/FR2304399B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G15/00—Compounds of gallium, indium or thallium
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Electroluminescent Light Sources (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7508613A 1975-03-19 1975-03-19 Procede d'obtention par croissance cristalline en phase vapeur de monocristaux de nitrure de gallium Granted FR2304399A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR7508613A FR2304399A1 (fr) 1975-03-19 1975-03-19 Procede d'obtention par croissance cristalline en phase vapeur de monocristaux de nitrure de gallium
CA247,472A CA1071068A (en) 1975-03-19 1976-03-09 Method of manufacturing single crystals by growth from the vapour phase
DE2609907A DE2609907C2 (de) 1975-03-19 1976-03-10 Verfahren zum epitaktischen Abscheiden von einkristallinem Galliumnitrid auf einem Substrat
GB10499/76A GB1536586A (en) 1975-03-19 1976-03-16 Method of manufacturing single crystals of gallium nitride by growth from the vapour phase
IT21264/76A IT1058440B (it) 1975-03-19 1976-03-16 Metodo per la produzione di singoli cristalli per crescita dalla fase vapore
US05/667,690 US4144116A (en) 1975-03-19 1976-03-17 Vapor deposition of single crystal gallium nitride
JP51029398A JPS51117199A (en) 1975-03-19 1976-03-19 Method of making single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7508613A FR2304399A1 (fr) 1975-03-19 1975-03-19 Procede d'obtention par croissance cristalline en phase vapeur de monocristaux de nitrure de gallium

Publications (2)

Publication Number Publication Date
FR2304399A1 true FR2304399A1 (fr) 1976-10-15
FR2304399B1 FR2304399B1 (enrdf_load_stackoverflow) 1977-11-18

Family

ID=9152782

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7508613A Granted FR2304399A1 (fr) 1975-03-19 1975-03-19 Procede d'obtention par croissance cristalline en phase vapeur de monocristaux de nitrure de gallium

Country Status (1)

Country Link
FR (1) FR2304399A1 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
FR2304399B1 (enrdf_load_stackoverflow) 1977-11-18

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Legal Events

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CA Change of address
CD Change of name or company name
ST Notification of lapse