FR2262405B3 - - Google Patents
Info
- Publication number
- FR2262405B3 FR2262405B3 FR7406467A FR7406467A FR2262405B3 FR 2262405 B3 FR2262405 B3 FR 2262405B3 FR 7406467 A FR7406467 A FR 7406467A FR 7406467 A FR7406467 A FR 7406467A FR 2262405 B3 FR2262405 B3 FR 2262405B3
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/2633—Bombardment with radiation with high-energy radiation for etching, e.g. sputteretching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- High Energy & Nuclear Physics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Thyristors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7406467A FR2262405A1 (en) | 1974-02-26 | 1974-02-26 | Manufacture of fast switching semiconductors - uses RF heating, cleaning and doping processes use same vaccum chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7406467A FR2262405A1 (en) | 1974-02-26 | 1974-02-26 | Manufacture of fast switching semiconductors - uses RF heating, cleaning and doping processes use same vaccum chamber |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2262405A1 FR2262405A1 (en) | 1975-09-19 |
FR2262405B3 true FR2262405B3 (US20100223739A1-20100909-C00025.png) | 1976-12-03 |
Family
ID=9135454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7406467A Granted FR2262405A1 (en) | 1974-02-26 | 1974-02-26 | Manufacture of fast switching semiconductors - uses RF heating, cleaning and doping processes use same vaccum chamber |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2262405A1 (US20100223739A1-20100909-C00025.png) |
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1974
- 1974-02-26 FR FR7406467A patent/FR2262405A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2262405A1 (en) | 1975-09-19 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property |