FR2236270A1 - - Google Patents
Info
- Publication number
- FR2236270A1 FR2236270A1 FR7423284A FR7423284A FR2236270A1 FR 2236270 A1 FR2236270 A1 FR 2236270A1 FR 7423284 A FR7423284 A FR 7423284A FR 7423284 A FR7423284 A FR 7423284A FR 2236270 A1 FR2236270 A1 FR 2236270A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/061—Tipping system, e.g. by rotation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2334306A DE2334306B2 (de) | 1973-07-05 | 1973-07-05 | Vorrichtung zur Herstellung von epitaktischen Schichten auf Substraten aus Verbindungshalbleiter-Material |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2236270A1 true FR2236270A1 (fr) | 1975-01-31 |
FR2236270B1 FR2236270B1 (fr) | 1978-10-13 |
Family
ID=5886064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7423284A Expired FR2236270B1 (fr) | 1973-07-05 | 1974-07-04 |
Country Status (6)
Country | Link |
---|---|
US (1) | US3889635A (fr) |
JP (1) | JPS5738559B2 (fr) |
DE (1) | DE2334306B2 (fr) |
FR (1) | FR2236270B1 (fr) |
GB (1) | GB1433568A (fr) |
NL (1) | NL7409158A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2847091C3 (de) * | 1978-10-28 | 1982-03-25 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und Vorrichtung zur Herstellung von Ga↓1↓-↓x↓Al↓x↓ AS:Si-Epitaxieschichten |
US4597823A (en) * | 1983-09-12 | 1986-07-01 | Cook Melvin S | Rapid LPE crystal growth |
US4594128A (en) * | 1984-03-16 | 1986-06-10 | Cook Melvin S | Liquid phase epitaxy |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3522792A (en) * | 1967-11-14 | 1970-08-04 | Us Agriculture | Device for applying a coating of varying thickness |
DE1922528B2 (de) * | 1969-05-02 | 1971-09-30 | Streichgeraet zum herstellen von duennschichtchromato graphieplatten | |
US3791344A (en) * | 1969-09-11 | 1974-02-12 | Licentia Gmbh | Apparatus for liquid phase epitaxy |
US3664294A (en) * | 1970-01-29 | 1972-05-23 | Fairchild Camera Instr Co | Push-pull structure for solution epitaxial growth of iii{14 v compounds |
US3692592A (en) * | 1970-02-12 | 1972-09-19 | Rca Corp | Method and apparatus for depositing epitaxial semiconductive layers from the liquid phase |
US3697330A (en) * | 1970-03-27 | 1972-10-10 | Sperry Rand Corp | Liquid epitaxy method and apparatus |
-
1973
- 1973-07-05 DE DE2334306A patent/DE2334306B2/de active Granted
-
1974
- 1974-05-14 GB GB2120774A patent/GB1433568A/en not_active Expired
- 1974-07-03 US US485448A patent/US3889635A/en not_active Expired - Lifetime
- 1974-07-04 FR FR7423284A patent/FR2236270B1/fr not_active Expired
- 1974-07-05 NL NL7409158A patent/NL7409158A/xx unknown
- 1974-07-05 JP JP7725274A patent/JPS5738559B2/ja not_active Expired
Non-Patent Citations (1)
Title |
---|
NEANT * |
Also Published As
Publication number | Publication date |
---|---|
NL7409158A (nl) | 1975-01-07 |
DE2334306A1 (de) | 1975-01-30 |
JPS5039468A (fr) | 1975-04-11 |
DE2334306B2 (de) | 1978-08-03 |
DE2334306C3 (fr) | 1979-04-05 |
GB1433568A (fr) | 1976-04-28 |
JPS5738559B2 (fr) | 1982-08-16 |
FR2236270B1 (fr) | 1978-10-13 |
US3889635A (en) | 1975-06-17 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |