Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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DOLGOV VALENTIN
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DOLGOV VALENTIN
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Application filed by DOLGOV VALENTINfiledCriticalDOLGOV VALENTIN
Priority to FR7238728ApriorityCriticalpatent/FR2204890B1/fr
Publication of FR2204890A1publicationCriticalpatent/FR2204890A1/fr
Application grantedgrantedCritical
Publication of FR2204890B1publicationCriticalpatent/FR2204890B1/fr
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
H01L21/67005—Apparatus not specifically provided for elsewhere
H01L21/67011—Apparatus for manufacture or treatment
