FR2156125A1 - Etching semiconductors - in vessel with forced liquid circulation - Google Patents

Etching semiconductors - in vessel with forced liquid circulation

Info

Publication number
FR2156125A1
FR2156125A1 FR7235505A FR7235505A FR2156125A1 FR 2156125 A1 FR2156125 A1 FR 2156125A1 FR 7235505 A FR7235505 A FR 7235505A FR 7235505 A FR7235505 A FR 7235505A FR 2156125 A1 FR2156125 A1 FR 2156125A1
Authority
FR
France
Prior art keywords
vessel
liquid circulation
forced liquid
etching semiconductors
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7235505A
Other languages
English (en)
French (fr)
Other versions
FR2156125B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2156125A1 publication Critical patent/FR2156125A1/fr
Application granted granted Critical
Publication of FR2156125B1 publication Critical patent/FR2156125B1/fr
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/08Apparatus, e.g. for photomechanical printing surfaces
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G3/00Apparatus for cleaning or pickling metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Sampling And Sample Adjustment (AREA)
FR7235505A 1971-10-07 1972-10-06 Etching semiconductors - in vessel with forced liquid circulation Granted FR2156125A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7113748A NL7113748A (enrdf_load_stackoverflow) 1971-10-07 1971-10-07

Publications (2)

Publication Number Publication Date
FR2156125A1 true FR2156125A1 (en) 1973-05-25
FR2156125B1 FR2156125B1 (enrdf_load_stackoverflow) 1976-03-26

Family

ID=19814194

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7235505A Granted FR2156125A1 (en) 1971-10-07 1972-10-06 Etching semiconductors - in vessel with forced liquid circulation

Country Status (5)

Country Link
JP (1) JPS4846271A (enrdf_load_stackoverflow)
DE (1) DE2248185A1 (enrdf_load_stackoverflow)
FR (1) FR2156125A1 (enrdf_load_stackoverflow)
IT (1) IT975163B (enrdf_load_stackoverflow)
NL (1) NL7113748A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2331631A1 (fr) * 1975-11-12 1977-06-10 Struers Ks Dispositif de polissage electrolytique

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2331631A1 (fr) * 1975-11-12 1977-06-10 Struers Ks Dispositif de polissage electrolytique

Also Published As

Publication number Publication date
NL7113748A (enrdf_load_stackoverflow) 1973-04-10
DE2248185A1 (de) 1973-04-12
IT975163B (it) 1974-07-20
JPS4846271A (enrdf_load_stackoverflow) 1973-07-02
FR2156125B1 (enrdf_load_stackoverflow) 1976-03-26

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Legal Events

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