FR2156125A1 - Etching semiconductors - in vessel with forced liquid circulation - Google Patents
Etching semiconductors - in vessel with forced liquid circulationInfo
- Publication number
- FR2156125A1 FR2156125A1 FR7235505A FR7235505A FR2156125A1 FR 2156125 A1 FR2156125 A1 FR 2156125A1 FR 7235505 A FR7235505 A FR 7235505A FR 7235505 A FR7235505 A FR 7235505A FR 2156125 A1 FR2156125 A1 FR 2156125A1
- Authority
- FR
- France
- Prior art keywords
- vessel
- liquid circulation
- forced liquid
- etching semiconductors
- specimen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000005530 etching Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G3/00—Apparatus for cleaning or pickling metallic material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7113748A NL7113748A (enrdf_load_stackoverflow) | 1971-10-07 | 1971-10-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2156125A1 true FR2156125A1 (en) | 1973-05-25 |
| FR2156125B1 FR2156125B1 (enrdf_load_stackoverflow) | 1976-03-26 |
Family
ID=19814194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7235505A Granted FR2156125A1 (en) | 1971-10-07 | 1972-10-06 | Etching semiconductors - in vessel with forced liquid circulation |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS4846271A (enrdf_load_stackoverflow) |
| DE (1) | DE2248185A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2156125A1 (enrdf_load_stackoverflow) |
| IT (1) | IT975163B (enrdf_load_stackoverflow) |
| NL (1) | NL7113748A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2331631A1 (fr) * | 1975-11-12 | 1977-06-10 | Struers Ks | Dispositif de polissage electrolytique |
-
1971
- 1971-10-07 NL NL7113748A patent/NL7113748A/xx unknown
-
1972
- 1972-09-30 DE DE19722248185 patent/DE2248185A1/de active Pending
- 1972-10-04 IT IT7012672A patent/IT975163B/it active
- 1972-10-04 JP JP9914372A patent/JPS4846271A/ja active Pending
- 1972-10-06 FR FR7235505A patent/FR2156125A1/fr active Granted
Non-Patent Citations (1)
| Title |
|---|
| NEANT * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2331631A1 (fr) * | 1975-11-12 | 1977-06-10 | Struers Ks | Dispositif de polissage electrolytique |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7113748A (enrdf_load_stackoverflow) | 1973-04-10 |
| DE2248185A1 (de) | 1973-04-12 |
| IT975163B (it) | 1974-07-20 |
| JPS4846271A (enrdf_load_stackoverflow) | 1973-07-02 |
| FR2156125B1 (enrdf_load_stackoverflow) | 1976-03-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |