FR1603217A - - Google Patents

Info

Publication number
FR1603217A
FR1603217A FR1603217DA FR1603217A FR 1603217 A FR1603217 A FR 1603217A FR 1603217D A FR1603217D A FR 1603217DA FR 1603217 A FR1603217 A FR 1603217A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1603217A publication Critical patent/FR1603217A/fr
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/34Gas-filled discharge tubes operating with cathodic sputtering
FR1603217D 1968-10-15 1968-10-15 Expired FR1603217A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR170008 1968-10-15
FR170009 1968-10-15
FR170007 1968-10-15

Publications (1)

Publication Number Publication Date
FR1603217A true FR1603217A (en) 1971-03-22

Family

ID=27244897

Family Applications (3)

Application Number Title Priority Date Filing Date
FR1594667D Expired FR1594667A (en) 1968-10-15 1968-10-15
FR1594668D Expired FR1594668A (en) 1968-10-15 1968-10-15
FR1603217D Expired FR1603217A (en) 1968-10-15 1968-10-15

Family Applications Before (2)

Application Number Title Priority Date Filing Date
FR1594667D Expired FR1594667A (en) 1968-10-15 1968-10-15
FR1594668D Expired FR1594668A (en) 1968-10-15 1968-10-15

Country Status (3)

Country Link
DE (1) DE1951735A1 (en)
FR (3) FR1594667A (en)
GB (1) GB1284781A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2512270A1 (en) * 1981-02-23 1983-03-04 Sablev Leonid CONSUMABLE CATHODE FOR ELECTRIC ARC METAL EVAPORATOR

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850312B2 (en) * 1981-02-18 1983-11-09 株式会社日立製作所 sputtering equipment
GB2228948A (en) * 1989-02-28 1990-09-12 British Aerospace Fabrication of thin films from a composite target
GB9901093D0 (en) * 1999-01-20 1999-03-10 Marconi Electronic Syst Ltd Method of making coatings
US6635154B2 (en) * 2001-11-03 2003-10-21 Intevac, Inc. Method and apparatus for multi-target sputtering

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2512270A1 (en) * 1981-02-23 1983-03-04 Sablev Leonid CONSUMABLE CATHODE FOR ELECTRIC ARC METAL EVAPORATOR

Also Published As

Publication number Publication date
FR1594667A (en) 1970-06-08
DE1951735A1 (en) 1970-04-30
FR1594668A (en) 1970-06-08
GB1284781A (en) 1972-08-09

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Legal Events

Date Code Title Description
ST Notification of lapse