FR1499554A - Source de plasma alimentée en haute fréquence - Google Patents

Source de plasma alimentée en haute fréquence

Info

Publication number
FR1499554A
FR1499554A FR81761A FR81761A FR1499554A FR 1499554 A FR1499554 A FR 1499554A FR 81761 A FR81761 A FR 81761A FR 81761 A FR81761 A FR 81761A FR 1499554 A FR1499554 A FR 1499554A
Authority
FR
France
Prior art keywords
high frequency
plasma source
frequency powered
powered plasma
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR81761A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut fuer Plasmaphysik GmbH
Original Assignee
Institut fuer Plasmaphysik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut fuer Plasmaphysik GmbH filed Critical Institut fuer Plasmaphysik GmbH
Application granted granted Critical
Publication of FR1499554A publication Critical patent/FR1499554A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
FR81761A 1965-12-22 1966-10-27 Source de plasma alimentée en haute fréquence Expired FR1499554A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEJ29683A DE1261608B (de) 1965-12-22 1965-12-22 Hochfrequenz-Plasmagenerator

Publications (1)

Publication Number Publication Date
FR1499554A true FR1499554A (fr) 1967-10-27

Family

ID=7203674

Family Applications (1)

Application Number Title Priority Date Filing Date
FR81761A Expired FR1499554A (fr) 1965-12-22 1966-10-27 Source de plasma alimentée en haute fréquence

Country Status (5)

Country Link
BE (1) BE688340A (instruction)
DE (1) DE1261608B (instruction)
FR (1) FR1499554A (instruction)
LU (1) LU52055A1 (instruction)
NL (1) NL6615531A (instruction)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2059615A1 (instruction) * 1969-08-22 1971-06-04 Inst Fizicheskikh
FR2481838A1 (fr) * 1980-05-02 1981-11-06 Nippon Telegraph & Telephone Appareil de depot de plasma pour former une pellicule sur un substrat

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE758571A (fr) * 1969-11-06 1971-04-16 Euratom Generateur de plasma a haute frequence
FR2715019B1 (fr) * 1994-01-13 1996-04-05 Plasmion Dispositif pour former un plasma par application de micro-ondes afin de produire un faisceau d'ions.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2059615A1 (instruction) * 1969-08-22 1971-06-04 Inst Fizicheskikh
FR2481838A1 (fr) * 1980-05-02 1981-11-06 Nippon Telegraph & Telephone Appareil de depot de plasma pour former une pellicule sur un substrat

Also Published As

Publication number Publication date
DE1261608B (de) 1968-02-22
BE688340A (instruction) 1967-03-31
NL6615531A (instruction) 1967-06-23
LU52055A1 (instruction) 1966-11-28

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