FR1483391A - Method and apparatus for forming deposits under high vacuum - Google Patents
Method and apparatus for forming deposits under high vacuumInfo
- Publication number
- FR1483391A FR1483391A FR65535A FR65535A FR1483391A FR 1483391 A FR1483391 A FR 1483391A FR 65535 A FR65535 A FR 65535A FR 65535 A FR65535 A FR 65535A FR 1483391 A FR1483391 A FR 1483391A
- Authority
- FR
- France
- Prior art keywords
- under high
- high vacuum
- deposits under
- forming deposits
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR65535A FR1483391A (en) | 1966-06-15 | 1966-06-15 | Method and apparatus for forming deposits under high vacuum |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR65535A FR1483391A (en) | 1966-06-15 | 1966-06-15 | Method and apparatus for forming deposits under high vacuum |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1483391A true FR1483391A (en) | 1967-06-02 |
Family
ID=8610979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR65535A Expired FR1483391A (en) | 1966-06-15 | 1966-06-15 | Method and apparatus for forming deposits under high vacuum |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1483391A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2218652A1 (en) * | 1973-02-20 | 1974-09-13 | Thomson Csf | |
FR2472619A1 (en) * | 1979-12-18 | 1981-07-03 | Ulvac Corp | VACUUM SPRAY COATING APPARATUS |
DE3511141A1 (en) * | 1985-03-27 | 1986-10-23 | Siemens AG, 1000 Berlin und 8000 München | ION BEAM MATERIAL MACHINING SYSTEM WITH NEUTRALIZATION DEVICE |
-
1966
- 1966-06-15 FR FR65535A patent/FR1483391A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2218652A1 (en) * | 1973-02-20 | 1974-09-13 | Thomson Csf | |
FR2472619A1 (en) * | 1979-12-18 | 1981-07-03 | Ulvac Corp | VACUUM SPRAY COATING APPARATUS |
DE3511141A1 (en) * | 1985-03-27 | 1986-10-23 | Siemens AG, 1000 Berlin und 8000 München | ION BEAM MATERIAL MACHINING SYSTEM WITH NEUTRALIZATION DEVICE |
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