FI941861A - PECVD:n avulla kasvatetut epähomogeeniset ohuet kalvot - Google Patents

PECVD:n avulla kasvatetut epähomogeeniset ohuet kalvot Download PDF

Info

Publication number
FI941861A
FI941861A FI941861A FI941861A FI941861A FI 941861 A FI941861 A FI 941861A FI 941861 A FI941861 A FI 941861A FI 941861 A FI941861 A FI 941861A FI 941861 A FI941861 A FI 941861A
Authority
FI
Finland
Prior art keywords
pecvd
thin films
films grown
inhomogeneous
inhomogeneous thin
Prior art date
Application number
FI941861A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI941861A0 (fi
Inventor
John F Wager
Sung Kyoo Lim
Jae Hwa Ryu
Original Assignee
Gold Star Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gold Star Co filed Critical Gold Star Co
Publication of FI941861A0 publication Critical patent/FI941861A0/fi
Publication of FI941861A publication Critical patent/FI941861A/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/345—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Optical Integrated Circuits (AREA)
FI941861A 1993-04-22 1994-04-21 PECVD:n avulla kasvatetut epähomogeeniset ohuet kalvot FI941861A (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US5240993A 1993-04-22 1993-04-22

Publications (2)

Publication Number Publication Date
FI941861A0 FI941861A0 (fi) 1994-04-21
FI941861A true FI941861A (fi) 1994-10-23

Family

ID=21977432

Family Applications (1)

Application Number Title Priority Date Filing Date
FI941861A FI941861A (fi) 1993-04-22 1994-04-21 PECVD:n avulla kasvatetut epähomogeeniset ohuet kalvot

Country Status (3)

Country Link
JP (1) JPH0748673A (ja)
KR (1) KR940025404A (ja)
FI (1) FI941861A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009193975A (ja) * 2006-05-22 2009-08-27 Alps Electric Co Ltd 発光装置およびその製造方法

Also Published As

Publication number Publication date
KR940025404A (ko) 1994-11-19
FI941861A0 (fi) 1994-04-21
JPH0748673A (ja) 1995-02-21

Similar Documents

Publication Publication Date Title
DE69419828D1 (de) Brillenartiger Anzeigeapparat
NO982991L (no) Veksthormon-sekretagoguer
DE69431333D1 (de) GaN-Einkristall
DE69432815D1 (de) Wachstumsfaktor-8
DE69429273D1 (de) Dipergierbarer film
FI945996A0 (fi) L-aspartyyli-D-alfa-Aminoalkanoyyli-(S)-N-alfa-Alkyylibentsyyliamidit, jotka ovat käyttökelpoisia keinotekoisina makeutusaineina
NO955141D0 (no) Reguleringsanordning for stol
DE69604455D1 (de) Einkristallziehvorrichtung
FI951667A (fi) Liuosviljelykasvualusta
FI941861A (fi) PECVD:n avulla kasvatetut epähomogeeniset ohuet kalvot
DE69606449D1 (de) Züchtung von Silizium-Einkristall
DE69603484D1 (de) Kunststofffolien
KR950013396U (ko) 수중안경
KR940022683U (ko) 단결정 성장장치
KR970002716U (ko) 액정표시소자
KR950015213U (ko) 액정표시장치에 의한 키보드
KR970011600U (ko) 보안경
KR950005242U (ko) 파종기
KR970013616U (ko) 절단기능을 갖는 테이프 홀다
KR940021496U (ko) 소형카세트용 이어폰
KR950005254U (ko) 두채재배 용기의 압지 세척장치
KR960034573U (ko) 이쑤시개가 부설된 성냥개비
KR970008194U (ko) 도수있는 안경렌즈를 부착한 물안경
FI950223A0 (fi) Bioreaktor
KR940021569U (ko) 연화재배용 포트

Legal Events

Date Code Title Description
FD Application lapsed