FI920182A7 - Laite kaasujen kosteusasteen mittaamiseksi - Google Patents

Laite kaasujen kosteusasteen mittaamiseksi Download PDF

Info

Publication number
FI920182A7
FI920182A7 FI920182A FI920182A FI920182A7 FI 920182 A7 FI920182 A7 FI 920182A7 FI 920182 A FI920182 A FI 920182A FI 920182 A FI920182 A FI 920182A FI 920182 A7 FI920182 A7 FI 920182A7
Authority
FI
Finland
Prior art keywords
gases
humidity
measuring
Prior art date
Application number
FI920182A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI920182A0 (fi
Inventor
Axel Richter
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Publication of FI920182A0 publication Critical patent/FI920182A0/fi
Publication of FI920182A7 publication Critical patent/FI920182A7/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FI920182A 1989-07-17 1990-05-11 Laite kaasujen kosteusasteen mittaamiseksi FI920182A7 (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3923595A DE3923595C1 (enrdf_load_stackoverflow) 1989-07-17 1989-07-17
PCT/DE1990/000337 WO1991001494A1 (de) 1989-07-17 1990-05-11 Vorrichtung zum messen des feuchtigkeitsgrades von gasen

Publications (2)

Publication Number Publication Date
FI920182A0 FI920182A0 (fi) 1992-01-16
FI920182A7 true FI920182A7 (fi) 1992-01-16

Family

ID=6385208

Family Applications (1)

Application Number Title Priority Date Filing Date
FI920182A FI920182A7 (fi) 1989-07-17 1990-05-11 Laite kaasujen kosteusasteen mittaamiseksi

Country Status (4)

Country Link
EP (1) EP0483155A1 (enrdf_load_stackoverflow)
DE (1) DE3923595C1 (enrdf_load_stackoverflow)
FI (1) FI920182A7 (enrdf_load_stackoverflow)
WO (1) WO1991001494A1 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI96640C (fi) * 1993-08-23 1996-07-25 Vaisala Oy Menetelmä suhteellisen kosteuden mittaamiseksi, etenkin radiosondeissa
NZ276188A (en) * 1993-10-19 1996-11-26 Jury Gennadievich Usanov Moisture gauge; details of structure and method of producing it
FI99164C (fi) * 1994-04-15 1997-10-10 Vaisala Oy Menetelmä kastepisteen tai kaasupitoisuuden mittaamiseksi sekä laitteisto jäätymisen ennakoimista varten
FR2720161B1 (fr) * 1994-05-20 1996-08-02 Isen Rech Procédé de fabrication d'un capteur de mesure de vapeur, capteur de mesure obtenu par le procédé et procédé d'utilisation de ce capteur.
EP1236038B1 (de) * 1999-12-08 2005-11-23 Sensirion AG Kapazitiver sensor
DE10065026A1 (de) 2000-12-23 2002-07-04 Bosch Gmbh Robert Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren
DE10146321B4 (de) * 2001-09-20 2008-08-14 Robert Bosch Gmbh Sensorbaustein mit einem Sensorelement, das von einem Heizelement umgeben ist
DE102007024199B4 (de) * 2007-05-24 2015-06-25 Robert Bosch Gmbh Herstellungsverfahren eines mikromechanischen Bauelements mit porösifizierter Membran
EP2565635B1 (en) 2011-09-02 2017-11-15 Sensirion AG Sensor chip and method for manufacturing a sensor chip

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3523244A (en) * 1967-11-01 1970-08-04 Panametrics Device for measurement of absolute humidity
US4080564A (en) * 1975-10-02 1978-03-21 Matsushita Electric Industrial Co., Ltd. Humidity sensitive resistor device
US4057823A (en) * 1976-07-02 1977-11-08 International Business Machines Corporation Porous silicon dioxide moisture sensor and method for manufacture of a moisture sensor
DE3416945A1 (de) * 1984-05-08 1985-11-14 Sauter-Cumulus GmbH, 7800 Freiburg Feuchtigkeitssensor und verfahren zu seiner herstellung
DE3606500A1 (de) * 1986-02-28 1987-09-03 Karl Heinz Prof Dr Rer Haerdtl Selektiver gassensor fuer brennbare gase
DE3711511C1 (de) * 1987-04-04 1988-06-30 Hartmann & Braun Ag Verfahren zur Bestimmung der Gaskonzentrationen in einem Gasgemisch und Sensor zur Messung der Waermeleitfaehigkeit

Also Published As

Publication number Publication date
FI920182A0 (fi) 1992-01-16
EP0483155A1 (de) 1992-05-06
DE3923595C1 (enrdf_load_stackoverflow) 1990-12-20
WO1991001494A1 (de) 1991-02-07

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Legal Events

Date Code Title Description
FD Application lapsed