FI872150A0 - Vakuumstyrning i aongoeverfoering. - Google Patents
Vakuumstyrning i aongoeverfoering.Info
- Publication number
- FI872150A0 FI872150A0 FI872150A FI872150A FI872150A0 FI 872150 A0 FI872150 A0 FI 872150A0 FI 872150 A FI872150 A FI 872150A FI 872150 A FI872150 A FI 872150A FI 872150 A0 FI872150 A0 FI 872150A0
- Authority
- FI
- Finland
- Prior art keywords
- vakuumstyrning
- aongoeverfoering
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/02—Feed or outlet devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/008—Feed or outlet control devices
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/01—Control of flow without auxiliary power
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Sampling And Sample Adjustment (AREA)
- Lubricants (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US1985/001780 WO1987001614A1 (en) | 1985-09-16 | 1985-09-16 | Vacuum vapor transport control |
Publications (2)
Publication Number | Publication Date |
---|---|
FI872150A FI872150A (fi) | 1987-05-15 |
FI872150A0 true FI872150A0 (fi) | 1987-05-15 |
Family
ID=22188846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI872150A FI872150A0 (fi) | 1985-09-16 | 1987-05-15 | Vakuumstyrning i aongoeverfoering. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4842827A (da) |
EP (1) | EP0236308A1 (da) |
JP (1) | JPS63500918A (da) |
DK (1) | DK240687D0 (da) |
FI (1) | FI872150A0 (da) |
NO (1) | NO872020D0 (da) |
WO (1) | WO1987001614A1 (da) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0382987A1 (en) * | 1989-02-13 | 1990-08-22 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Gas supplying apparatus |
DE69006809T2 (de) * | 1989-09-12 | 1994-09-15 | Shinetsu Chemical Co | Vorrichtung für die Verdampfung und Bereitstellung von Organometallverbindungen. |
NL9002164A (nl) * | 1990-10-05 | 1992-05-06 | Philips Nv | Werkwijze voor het voorzien van een substraat van een oppervlaktelaag vanuit een damp en een inrichting voor het toepassen van een dergelijke werkwijze. |
US5261452A (en) * | 1991-03-01 | 1993-11-16 | American Air Liquide | Critical orifice dilution system and method |
US5795784A (en) | 1996-09-19 | 1998-08-18 | Abbott Laboratories | Method of performing a process for determining an item of interest in a sample |
US5856194A (en) | 1996-09-19 | 1999-01-05 | Abbott Laboratories | Method for determination of item of interest in a sample |
US6663716B2 (en) * | 1998-04-14 | 2003-12-16 | Cvd Systems, Inc. | Film processing system |
US6342453B1 (en) * | 1999-12-03 | 2002-01-29 | Applied Materials, Inc. | Method for CVD process control for enhancing device performance |
US6473564B1 (en) * | 2000-01-07 | 2002-10-29 | Nihon Shinku Gijutsu Kabushiki Kaisha | Method of manufacturing thin organic film |
GB0018162D0 (en) * | 2000-07-26 | 2000-09-13 | Dow Corning Sa | Polymerisation reactor and process |
US20100129548A1 (en) * | 2003-06-27 | 2010-05-27 | Sundew Technologies, Llc | Ald apparatus and method |
WO2005003406A2 (en) * | 2003-06-27 | 2005-01-13 | Sundew Technologies, Llc | Apparatus and method for chemical source vapor pressure control |
US7680399B2 (en) * | 2006-02-07 | 2010-03-16 | Brooks Instrument, Llc | System and method for producing and delivering vapor |
US9468940B2 (en) | 2012-11-13 | 2016-10-18 | Cnh Industrial Canada, Ltd. | Adjustable orifice valve and calibration method for ammonia applicator system |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2232978A (en) * | 1939-12-04 | 1941-02-25 | Arthur E Smith | Ampule opener |
US3715189A (en) * | 1970-06-15 | 1973-02-06 | Secretary Of The Treasury | Qualitative analysis device |
US3723081A (en) * | 1971-11-26 | 1973-03-27 | Airco Inc | Break seal |
US4444734A (en) * | 1978-11-13 | 1984-04-24 | Hughes Aircraft Company | Process for pumping gases using a chemically reactive aerosol |
US4314837A (en) * | 1979-03-01 | 1982-02-09 | Corning Glass Works | Reactant delivery system method |
JPS5715795U (da) * | 1980-07-01 | 1982-01-27 | ||
US4341107A (en) * | 1980-10-14 | 1982-07-27 | Tylan Corporation | Calibratable system for measuring fluid flow |
EP0058571A1 (en) * | 1981-02-18 | 1982-08-25 | National Research Development Corporation | Method and apparatus for delivering a controlled flow rate of reactant to a vapour deposition process |
JPS5996258A (ja) * | 1982-11-26 | 1984-06-02 | Hitachi Ltd | 気体化装置 |
US4517220A (en) * | 1983-08-15 | 1985-05-14 | Motorola, Inc. | Deposition and diffusion source control means and method |
JPS6046373A (ja) * | 1983-08-22 | 1985-03-13 | Yanako Keisoku:Kk | 蒸着材料ガス化装置 |
-
1985
- 1985-09-16 WO PCT/US1985/001780 patent/WO1987001614A1/en not_active Application Discontinuation
- 1985-09-16 JP JP60504170A patent/JPS63500918A/ja active Pending
- 1985-09-16 EP EP85904752A patent/EP0236308A1/en not_active Withdrawn
-
1986
- 1986-12-30 US US06/948,120 patent/US4842827A/en not_active Expired - Lifetime
-
1987
- 1987-05-12 DK DK240687A patent/DK240687D0/da not_active Application Discontinuation
- 1987-05-14 NO NO1987872020A patent/NO872020D0/no unknown
- 1987-05-15 FI FI872150A patent/FI872150A0/fi not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
DK240687A (da) | 1987-05-12 |
NO872020L (no) | 1987-05-14 |
NO872020D0 (no) | 1987-05-14 |
WO1987001614A1 (en) | 1987-03-26 |
US4842827A (en) | 1989-06-27 |
FI872150A (fi) | 1987-05-15 |
JPS63500918A (ja) | 1988-04-07 |
DK240687D0 (da) | 1987-05-12 |
EP0236308A1 (en) | 1987-09-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FA | Application withdrawn |
Owner name: AIR PRODUCTS AND CHEMICALS INC. |