FI20041229A0 - Kapacitiv sensor och förfarande för framställning av kapacitiv sensor - Google Patents
Kapacitiv sensor och förfarande för framställning av kapacitiv sensorInfo
- Publication number
- FI20041229A0 FI20041229A0 FI20041229A FI20041229A FI20041229A0 FI 20041229 A0 FI20041229 A0 FI 20041229A0 FI 20041229 A FI20041229 A FI 20041229A FI 20041229 A FI20041229 A FI 20041229A FI 20041229 A0 FI20041229 A0 FI 20041229A0
- Authority
- FI
- Finland
- Prior art keywords
- capacitive sensor
- making
- sensor
- making capacitive
- capacitive
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
- G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
- G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
- G01P3/483—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable capacitance detectors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
- Gyroscopes (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20041229A FI119785B (sv) | 2004-09-23 | 2004-09-23 | Kapacitiv sensor och förfarande för framställning av kapacitiv sensor |
PCT/FI2005/050318 WO2006032729A1 (en) | 2004-09-23 | 2005-09-15 | A capacitive sensor and a method for manufacturing the capacitive sensor |
CNA2005800322663A CN101027542A (zh) | 2004-09-23 | 2005-09-15 | 电容性传感器和用于制造电容性传感器的方法 |
JP2007532914A JP2008513800A (ja) | 2004-09-23 | 2005-09-15 | 容量性センサーおよび該容量性センサーを製造する方法 |
EP05787808A EP1809997A4 (en) | 2004-09-23 | 2005-09-15 | CAPACITIVE SENSOR AND METHOD FOR PRODUCING THE CAPACITIVE SENSOR |
US11/232,922 US7555950B2 (en) | 2004-09-23 | 2005-09-23 | Capacitive sensor and a method for manufacturing the capacitive sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20041229A FI119785B (sv) | 2004-09-23 | 2004-09-23 | Kapacitiv sensor och förfarande för framställning av kapacitiv sensor |
FI20041229 | 2004-09-23 |
Publications (3)
Publication Number | Publication Date |
---|---|
FI20041229A0 true FI20041229A0 (sv) | 2004-09-23 |
FI20041229A FI20041229A (sv) | 2006-03-24 |
FI119785B FI119785B (sv) | 2009-03-13 |
Family
ID=33041562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20041229A FI119785B (sv) | 2004-09-23 | 2004-09-23 | Kapacitiv sensor och förfarande för framställning av kapacitiv sensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US7555950B2 (sv) |
EP (1) | EP1809997A4 (sv) |
JP (1) | JP2008513800A (sv) |
CN (1) | CN101027542A (sv) |
FI (1) | FI119785B (sv) |
WO (1) | WO2006032729A1 (sv) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8008070B2 (en) * | 2007-12-07 | 2011-08-30 | METAMEMS Corp. | Using coulomb forces to study charateristics of fluids and biological samples |
US7946174B2 (en) * | 2007-12-07 | 2011-05-24 | METAMEMS Corp. | Decelerometer formed by levitating a substrate into equilibrium |
US8531848B2 (en) * | 2007-12-07 | 2013-09-10 | METAMEMS Corp. | Coulomb island and Faraday shield used to create adjustable Coulomb forces |
US20090149038A1 (en) * | 2007-12-07 | 2009-06-11 | Metamems Llc | Forming edge metallic contacts and using coulomb forces to improve ohmic contact |
US8018009B2 (en) * | 2007-12-07 | 2011-09-13 | METAMEMS Corp. | Forming large planar structures from substrates using edge Coulomb forces |
US7863651B2 (en) * | 2007-12-07 | 2011-01-04 | METAMEMS Corp. | Using multiple coulomb islands to reduce voltage stress |
US8159809B2 (en) * | 2007-12-07 | 2012-04-17 | METAMEMS Corp. | Reconfigurable system that exchanges substrates using coulomb forces to optimize a parameter |
US7812336B2 (en) * | 2007-12-07 | 2010-10-12 | METAMEMS Corp. | Levitating substrate being charged by a non-volatile device and powered by a charged capacitor or bonding wire |
US7728427B2 (en) * | 2007-12-07 | 2010-06-01 | Lctank Llc | Assembling stacked substrates that can form cylindrical inductors and adjustable transformers |
US7965489B2 (en) * | 2007-12-07 | 2011-06-21 | METAMEMS Corp. | Using coulomb forces to form 3-D reconfigurable antenna structures |
US20100317124A1 (en) * | 2008-08-25 | 2010-12-16 | Yong Hyup Kim | Metal-containing nanomembranes for molecular sensing |
DE102009001924A1 (de) * | 2009-03-27 | 2010-09-30 | Robert Bosch Gmbh | Drucksensor |
US8567495B2 (en) * | 2010-10-20 | 2013-10-29 | Chevron U.S.A. Inc. | System and method for detecting pressure in a subterranean environment |
KR101999720B1 (ko) * | 2012-11-20 | 2019-07-16 | 삼성디스플레이 주식회사 | 기판 정전기 검사 장치 및 기판 제조 방법 |
KR101489302B1 (ko) | 2013-07-31 | 2015-02-04 | 전자부품연구원 | 압력센서 |
US9464951B2 (en) * | 2013-10-16 | 2016-10-11 | Sercel Inc. | Method and apparatus for electrical gap setting for a piezoelectric pressure sensor |
JP6330055B2 (ja) * | 2014-11-11 | 2018-05-23 | 株式会社日立製作所 | 加速度センサ |
US10101230B2 (en) * | 2015-09-16 | 2018-10-16 | Sensata Technologies, Inc. | Reduction of non-linearity errors in automotive pressure sensors |
GB2567017A (en) * | 2017-09-29 | 2019-04-03 | Cirrus Logic Int Semiconductor Ltd | MEMS devices and processes |
Family Cites Families (37)
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FR1327719A (fr) * | 1960-07-01 | 1963-05-24 | Onera (Off Nat Aerospatiale) | Perfectionnements aux capteurs manométriques à variation de capacité électrique |
US4415948A (en) * | 1981-10-13 | 1983-11-15 | United Technologies Corporation | Electrostatic bonded, silicon capacitive pressure transducer |
US4422243A (en) * | 1982-05-24 | 1983-12-27 | Brunson Instrument Co. | Dual axis capacitive inclination sensor |
FR2614986B1 (fr) * | 1987-05-07 | 1989-08-18 | Otic Fischer & Porter | Structure de cellule capacitive pour la mesure des pressions differentielles |
US4998179A (en) * | 1989-02-28 | 1991-03-05 | United Technologies Corporation | Capacitive semiconductive sensor with hinged diaphragm for planar movement |
US5180986A (en) * | 1989-05-22 | 1993-01-19 | Schaevitz Sensing Systems, Inc. | Two axis capacitive inclination sensor |
US5044202A (en) * | 1989-09-18 | 1991-09-03 | Texas Instruments Incorporated | Pressure transducer apparatus |
US5442962A (en) | 1993-08-20 | 1995-08-22 | Setra Systems, Inc. | Capacitive pressure sensor having a pedestal supported electrode |
US5738731A (en) * | 1993-11-19 | 1998-04-14 | Mega Chips Corporation | Photovoltaic device |
US5381299A (en) * | 1994-01-28 | 1995-01-10 | United Technologies Corporation | Capacitive pressure sensor having a substrate with a curved mesa |
US5646349A (en) * | 1994-02-18 | 1997-07-08 | Plan B Enterprises, Inc. | Floating mass accelerometer |
JPH0850142A (ja) * | 1994-08-04 | 1996-02-20 | Mitsubishi Electric Corp | 半導体加速度センサ及びその製造方法 |
JP3114006B2 (ja) * | 1994-08-29 | 2000-12-04 | セイコーインスツルメンツ株式会社 | 半導体装置、及び、その製造方法 |
DE19547642A1 (de) * | 1994-12-20 | 1996-06-27 | Zexel Corp | Beschleunigungssensor und Verfahren zu dessen Herstellung |
JP3114570B2 (ja) * | 1995-05-26 | 2000-12-04 | オムロン株式会社 | 静電容量型圧力センサ |
JPH0943083A (ja) * | 1995-08-02 | 1997-02-14 | Omron Corp | 静電容量型圧力センサ及びそれを用いた血圧計,圧力測定装置並びにガスメータ |
JPH09145740A (ja) * | 1995-09-22 | 1997-06-06 | Denso Corp | 加速度センサ |
JPH09257617A (ja) * | 1996-03-21 | 1997-10-03 | Matsushita Electric Ind Co Ltd | 圧力センサ及びこれを用いたガス異常監視装置 |
JPH10308645A (ja) * | 1997-05-08 | 1998-11-17 | Toyo Commun Equip Co Ltd | Atカット水晶振動子及びその製造方法 |
US6556417B2 (en) * | 1998-03-10 | 2003-04-29 | Mcintosh Robert B. | Method to construct variable-area capacitive transducers |
US6661637B2 (en) * | 1998-03-10 | 2003-12-09 | Mcintosh Robert B. | Apparatus and method to angularly position micro-optical elements |
US6151967A (en) * | 1998-03-10 | 2000-11-28 | Horizon Technology Group | Wide dynamic range capacitive transducer |
US6658938B2 (en) * | 1998-03-10 | 2003-12-09 | Mcintosh Robert B. | Electret transducer |
US6496348B2 (en) * | 1998-03-10 | 2002-12-17 | Mcintosh Robert B. | Method to force-balance capacitive transducers |
JP3417855B2 (ja) * | 1998-11-05 | 2003-06-16 | 株式会社日立製作所 | 赤外センサ |
US6388299B1 (en) | 1998-12-10 | 2002-05-14 | Honeywell Inc. | Sensor assembly and method |
US6267009B1 (en) * | 1998-12-14 | 2001-07-31 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same |
US6552840B2 (en) * | 1999-12-03 | 2003-04-22 | Texas Instruments Incorporated | Electrostatic efficiency of micromechanical devices |
WO2002028766A2 (en) * | 2000-10-03 | 2002-04-11 | Honeywell International Inc. | Method of trimming micro-machined electromechanical sensors (mems) devices |
WO2002079814A2 (en) * | 2000-12-19 | 2002-10-10 | Coventor Incorporated | Method for fabricating a through-wafer optical mems device having an anti-reflective coating |
WO2003016919A1 (en) * | 2001-08-20 | 2003-02-27 | Honeywell International Inc. | Micro-machined electromechanical system (mems) accelerometer device having arcuately shaped flexures |
DE10235046A1 (de) * | 2002-07-31 | 2004-02-12 | Endress + Hauser Gmbh + Co. Kg | Kapazitiver Drucksensor |
US6825968B2 (en) * | 2002-10-11 | 2004-11-30 | Exajoule, Llc | Micromirror systems with electrodes configured for sequential mirror attraction |
US6798560B2 (en) * | 2002-10-11 | 2004-09-28 | Exajoula, Llc | Micromirror systems with open support structures |
FI119528B (sv) | 2003-02-11 | 2008-12-15 | Vti Technologies Oy | Kapacitiv accelerationsgivarkonstruktion |
US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
JP2005321257A (ja) * | 2004-05-07 | 2005-11-17 | Alps Electric Co Ltd | 静電容量型圧力センサ |
-
2004
- 2004-09-23 FI FI20041229A patent/FI119785B/sv not_active IP Right Cessation
-
2005
- 2005-09-15 JP JP2007532914A patent/JP2008513800A/ja active Pending
- 2005-09-15 CN CNA2005800322663A patent/CN101027542A/zh active Pending
- 2005-09-15 WO PCT/FI2005/050318 patent/WO2006032729A1/en active Application Filing
- 2005-09-15 EP EP05787808A patent/EP1809997A4/en not_active Withdrawn
- 2005-09-23 US US11/232,922 patent/US7555950B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN101027542A (zh) | 2007-08-29 |
US7555950B2 (en) | 2009-07-07 |
FI20041229A (sv) | 2006-03-24 |
US20060213269A1 (en) | 2006-09-28 |
FI119785B (sv) | 2009-03-13 |
EP1809997A1 (en) | 2007-07-25 |
EP1809997A4 (en) | 2010-06-02 |
WO2006032729A1 (en) | 2006-03-30 |
JP2008513800A (ja) | 2008-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG | Patent granted |
Ref document number: 119785 Country of ref document: FI |
|
PC | Transfer of assignment of patent |
Owner name: MURATA ELECTRONICS OY |
|
MM | Patent lapsed |