FI20041106A - Micromechanical switch with integrated component - Google Patents
Micromechanical switch with integrated component Download PDFInfo
- Publication number
- FI20041106A FI20041106A FI20041106A FI20041106A FI20041106A FI 20041106 A FI20041106 A FI 20041106A FI 20041106 A FI20041106 A FI 20041106A FI 20041106 A FI20041106 A FI 20041106A FI 20041106 A FI20041106 A FI 20041106A
- Authority
- FI
- Finland
- Prior art keywords
- integrated component
- micromechanical switch
- micromechanical
- switch
- integrated
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20041106A FI20041106A (en) | 2004-08-24 | 2004-08-24 | Micromechanical switch with integrated component |
PCT/FI2005/000363 WO2006021612A1 (en) | 2004-08-24 | 2005-08-24 | Micro mechanical clutch and a component integrated thereto |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20041106A FI20041106A (en) | 2004-08-24 | 2004-08-24 | Micromechanical switch with integrated component |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20041106A0 FI20041106A0 (en) | 2004-08-24 |
FI20041106A true FI20041106A (en) | 2006-02-25 |
Family
ID=32922127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20041106A FI20041106A (en) | 2004-08-24 | 2004-08-24 | Micromechanical switch with integrated component |
Country Status (2)
Country | Link |
---|---|
FI (1) | FI20041106A (en) |
WO (1) | WO2006021612A1 (en) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6277666B1 (en) * | 1999-06-24 | 2001-08-21 | Honeywell Inc. | Precisely defined microelectromechanical structures and associated fabrication methods |
US6466102B1 (en) * | 1999-10-05 | 2002-10-15 | National Research Council Of Canada | High isolation micro mechanical switch |
US6621387B1 (en) * | 2001-02-23 | 2003-09-16 | Analatom Incorporated | Micro-electro-mechanical systems switch |
US6750078B2 (en) * | 2001-11-02 | 2004-06-15 | Intel Corporation | MEMS switch having hexsil beam and method of integrating MEMS switch with a chip |
US6621392B1 (en) * | 2002-04-25 | 2003-09-16 | International Business Machines Corporation | Micro electromechanical switch having self-aligned spacers |
KR100485787B1 (en) * | 2002-08-20 | 2005-04-28 | 삼성전자주식회사 | Micro Electro Mechanical Structure RF swicth |
AU2002331725A1 (en) * | 2002-08-26 | 2004-03-11 | International Business Machines Corporation | Diaphragm activated micro-electromechanical switch |
FR2845075B1 (en) * | 2002-09-27 | 2005-08-05 | Thales Sa | ELECTROSTATIC ACTUATOR MICROCONTUTERS WITH LOW RESPONSE TIME AND POWER SWITCHING AND METHOD OF MAKING SAME |
-
2004
- 2004-08-24 FI FI20041106A patent/FI20041106A/en not_active Application Discontinuation
-
2005
- 2005-08-24 WO PCT/FI2005/000363 patent/WO2006021612A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2006021612A1 (en) | 2006-03-02 |
FI20041106A0 (en) | 2004-08-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FD | Application lapsed |