FI115572B - Micromanipulator for the positioning/localization of operating instrument includes actuator implemented as linear motor to produce axial direction of motion for the micromanipulator and located on same longitudinal axis as bender - Google Patents

Abstract

Micromanipulator for the positioning/localization of an operating instrument includes an actuator implemented as a linear motor to produce an axial direction of motion for the micromanipulator and located on the same longitudinal axis as a bender coupled with it. Micromanipulator for the positioning/localization of an operating instrument (1) with it includes electrical actuators (2) for controlling movement of the instrument in a single- or multi-axial system of coordinates, e.g. in the direction of an x-, y-, and/or z-axis, and for providing an elongated structure for the micromanipulator. At least one of the actuators enabling the positioning/localization of the operating instrument to provide at least one of its desired directions of motion, is implemented as a piezoelectric bender. The actuator producing an axial direction of motion for the micromanipulator and located on the same longitudinal axis as a bender (2'a) coupled with it is implemented as a linear motor (2'b).

Description

115572

Control arrangement with micromanipulator

The present invention relates to a control arrangement in connection with a micromanipulator 5 for positioning / positioning the associated operating means by controlling its motion via electrical actuators in the micromanipulator in one or more axis coordinates such as x, / or in the z-axis direction. Specifically, to provide a substantially elongated structure of the micromanipulator, one or more actuators for positioning or positioning the operating means, to accomplish at least one of its 15 desired directions of movement, are provided by a piezoelectric actuator, such as one or more piezoelectric ).

20

Today, micromanipulators of the type described above are typically used, for example, in microscopic use, wherein the desired operating dimension of the operating means coupled to the micromanipulator is typically between 0.5 µm and 10 mm. Today, ·; ·: The solutions used are based on the micromanipulator · / · / for all desired directions of movement. · · ·. solutions implemented by rollers or electric motors. One solution of this type can be found, for example, in Japanese Patent Publication No. 832 3656, wherein the applied electric motors are provided with a linear motion produced by the rotational motion of the rotor by means of a sufficiently frequency-inclined gear-tooth bar arrangement.

35 On the other hand, prior art solutions can also be found utilizing piezoelectric motors operating on ultrasonic frequency, which produce a vibration wave when electrically activating the piezoelectric material.

Em. The disadvantage of solutions of the type described in JP 8323656, which are based on a very conventional technique, is that it is not possible to form them into entities of sufficient size for the use of several devices. On the other hand, the latter types of piezoelectric ultrasonic electric motors today have the disadvantage of controlling the motion produced by them, in particular, which makes it impossible to utilize these types of solutions with sufficient precision, especially in the case of load modifications. situa- tions.

Indeed, due to the relatively undeveloped state of current micromanipulator technology, it is possible today, particularly in microscope use, to operate simultaneously up to two micromanipulators generally located on opposite sides of the operating site.

For this reason, when operating with different injectable media: 25 or using different operating tools, such as. : If pipettes or needles are to be changed, the • • instrument must be disassembled with additional cleaning, if necessary, before a new medium or operating device for the next procedure can be installed. Therefore, operation based on the use of micro-manipulators is today quite laborious and unnecessarily inefficient, since due to the space problem 35, it is not possible to utilize a sufficient number of simultaneous micromanipulators.

3, 115572

On the other hand, Finnish patent application 20012410, "Micromanipulator", discloses a significantly improved solution compared to the above-mentioned prior art, in which, in order to enable the substantially elongated structure of piezoelectric bender. In Figures 1 and 2, two such alternatives are shown as preferred examples. conditions for micromanipulator construction.

Due to the elongated structure provided by the above solution, firstly, it is possible to place a sufficient number of micromanipulators for use in, e.g., microscopic work such that . Another key aspect is that! this type of micromanipulator does not necessarily require the same amount of exact micromanipulation in electric motor designs as: 25 in current solutions, because most micromanipulator movements are possible: • to produce piezoelectric materials, ·. whereby the deflection or elongation produced by them can be followed by the existing technique 30, in particular by applying a micromanipulator in a manner that enables continuous feedback control.

* · 'However, in this context, there is still a need · ... to improve the accuracy of the axial motion produced specifically for this type of micromanipulator 11a, which in itself is not feasible to control this type of micromanipulator 4 115572 satisfactorily with conventional motion control mechanics and using automation.

The purpose of the control arrangement 5 according to the present invention is to provide a decisive improvement in particular on the above problem and thus to raise substantially the state of the art. To accomplish this purpose, the control arrangement according to the invention in conjunction with the micromanipulator 10 is characterized in that the control arrangement, particularly for stabilizing the axial movement produced by the micromanipulator, comprises a substantially axially-oriented rolling slide arrangement.

15

The main advantages of the control arrangement according to the invention are, in particular, the improvement in the precision of the micromanipulator that it provides, as well as the simplicity of its operation and micromanipulator construction, which is due in particular to the Piet electric actuators utilized in the invention. A roller bearing slide arrangement according to the invention, such as e.g.

The ball or roller bearing axial bearing enables: · 25 to further provide an advantageously long ·; ·: conical structure in which its longitudinal movement, in particular, is significantly better controlled than all prior art solutions.

In particular, when comparing a micromanipulator implemented with conventional control systems 30 and e.g. piezoelectric benders with a control arrangement according to the invention, it can be clearly seen from the tables shown in Figures 7a and 7b that the accuracy of the axial movement 35

The micromanipulator of the original construction has a maximum movement accuracy variation of maximum noin about 60 µm when it is possible to reduce the maximum to about 5 µm by the present invention. The control arrangement according to the invention thus has the possibility to provide even more precise positioning of the micromanipulator, which is of central importance especially in operations requiring precise operation.

Advantageous applications of the control arrangement according to the invention are disclosed in the dependent claims.

In the following description, the invention will be illustrated in detail with reference to the accompanying drawings, in which! 15! Figure 1 illustrates the general principle of a 20 micromanipulator based on piezoelectric actuators, in particular in Finnish Patent Application No. 20012410, Figure 2; Fig. 3 is an exploded view of a preferred subassembly of a micro-manipulator having a control arrangement according to the invention; Figures 4a and 4b show a preferred embodiment of the invention. Figs. 5a and 5b show two different embodiments of a roller bearing skid arrangement of the control arrangement according to the invention; 7a and 7b 15 show axial motion accuracy of a micromanipulator without control arrangement according to the invention (Fig. 7a) and axial motion accuracy of a micromanipulator 20 with a control arrangement according to the invention (Fig. 7b).

The invention relates to a control arrangement in connection with a micro-manipulator which is a micro-manipulator; 25 for positioning / positioning the associated operating means 1 by controlling its motion through electrical actuators 2 in the micromanipulator in a single or multiple axis co-ordination such as x, y-30 and / or z-axis. In particular, one or more actuators 2 for positioning or positioning the operating means 1 '·', in order to provide a substantially elongated structure of the stator; 2 ', in order to realize at least one desired direction of movement, is provided, for example, by the principle known per se from Finnish Patent Application 20012410 shown in Figures 1 and 2 by one or more piezoelectric actuators such as piezoelectric bender 2'a and Piezoelectric Bender / or with a piezoelectric Stack Actuator 2'b. Specifically, the control arrangement 5 for stabilizing the axial x motion produced by the micromanipulator includes a substantially axially arranged rolling bearing sliding arrangement L.

In a preferred embodiment of the invention, the actuator of the micromanipal 10 generating axial movement x, such as, for example, as shown in Figure 3, is actuated by an electric motor 2'b of the same longitudinal axis x as the piezoelectric bender 2'a connected thereto. - with the Stack Actuator 2'c (Piezoelectric Stack Actuator). At least an alignment member K, such as a ball or the like, is disposed between the axial direction x spindle end 2 'bp of the electric motor 2'b to provide a controlled point-to-point application of a force acting between said parts. In particular, in the embodiment shown in Fig. 3, an intermediate frame VR is provided at the motor shaft end, which modifies the rotational movement of the axial motor shaft; 25 axial motion. In such a solution, the aforementioned ball K is placed. to the mating surface therein so as to provide point contact with the stacking actuator 2'c as a preferred application via a silicone plate SL.

Further, the parts designated by the reference numerals SH in Figure 3 are intended specifically for mounting the spring S. Further, the components designated by the reference numerals MH are holders of the electric motor 2'b, which are bolted together. The part designated by the reference number SP, in turn, is a silicone plate, which is intended to reduce the frictional motion of the intermediate body VR. Reference numeral 8 115572 R denotes the base plate of a micromanipulator and the reference frame BH a support frame fixed thereto, by means of which the radial bearing BB of the electric motor spindle is supported. The parts TR1 and TR2, in turn, are mounting plates for mounting, for example, the piezoelectric bender 2'a used in the type of solution shown in Figures 4a and 4b.

As a preferred embodiment of the control arrangement according to the invention, it further comprises mechanical elastic members such as one or more spring, elastic polymer, silicone dampers and / or the like in particular to eliminate the effects of inertia, friction, play and / or the like. The type 15 solution shown in Figures 4a and 4b utilizes a flexible polymeric dampener, unlike the spring arrangement shown in Fig. 3, however, the position of which is not clearly shown in Figs. The construction of Figures 4a and 4b also differs in some other respects from the embodiment shown in Figure 3 20, where utilized tracking means 3 for tracking axial movement x or rotation of an electric motor spindle, for example, by a j shift or rotation sensor such as an LVDT, PSD, * optoelectronic linear or rotary encoder, a Hall sensor and / or the like.

In a particularly preferred embodiment, the roller bearing slider assembly L is implemented with a ball bearing slider axial bearing LI (Ball 30 Bearing Slide), exemplified in Figure 5a. On the other hand, the roller-mounted skid arrangement L can also be implemented, for example, with an axial bearing L2 (Crossed Roller Bearing) with a roller bearing slide as shown in Fig. 5b.

35 'A particularly preferred embodiment is a stepper motor or pulse motor 2'b of the micromanipulator, in particular allowing a simplified micromanipulator structure according to FIG. feedback-position detectors embedded in polymerization.

In the control arrangement according to the invention, it is also possible to use, for example, a piezoelectric motor, for example, as a motor for a micromanipulator, or alternatively, for example, a motor made of magnetic 10 magnetic memory material. Motors of the type described above are not described in the accompanying drawings.

In particular, as disclosed in Finnish Patent Application 20012410, each piezoelectric bend 2'a belonging to a micro-manipulator may be provided with, for example, the principle shown in Fig. 2 with tracking members 3, such as elongation sensors 3a 20 or the like, bending motion. On the other hand, this feedback also enables further feedback control of the micromanipulator, which makes it possible to eliminate the change in the electrical properties of the piezoelectric material (including the hysteresis phenomenon) as a function of time.

In particular, the arrangement shown in Fig. 2 has tracking means 3 for tracking axial movement 30 generated by the electric motor 2'b; 3b disposed on substantially the same longitudinal axis x and opposed to the operating gap 1 on the electric motor 2'b.

A slider assembly 2'b3 extending axially through the motor housing 2'b2 is connected to the opposed flange 2'b of the electric motor 2'b on the opposite flange of the opener means 1; 3b for sensor body 3bl. Specifically, when comparing the micromanipulators of the invention with the control arrangement 10115572 shown in Figures 3 and 4a, 4b with the control arrangement 10 115572 of the present invention, by means of a roller-skid arrangement between the body members and the movable components thereof.

It will be understood that the invention is not limited to the foregoing or described embodiments, but may be modified within the scope of the present invention according to the particular needs and applications. First, of course, it is obvious that the operating device to be connected to the mik-15 gangulator may, unlike the injection needle shown, be e.g. a mechanical actuator suitable for operation, such as a gripper or the like, attached by suitable arrangements to, for example, a piezoelectric stacking actuator 20 or a bending head. In some of the embodiments shown, all interconnections between the parts are arranged with subframes therebetween, but in this context it is of course also possible to utilize partially disassembled mounting arrangements such as a piezoelectric stacker or piezoelectric benders. It will, of course, be understood that, for example, the process medium used in conjunction with the operating device used can be guided to it by techniques known per se, so that this section is not addressed as an irrelevant aspect of this application.

I ·

Claims (8)

1. A control device in connection with a micromanipulator, which micromanipulator is intended to position / locate a saraband with its associated operative tool (1) by controlling its movement by means of electrical means (2) present in the micromanipulator. in a coordinate system with one or more axes, such as along an x, y and / or z axis, in particular to enable the substantially long-shaped structure of the micromanipulator one or more means (2; 2 ') which allows the operating tool (1) location or location, to perform at least one of its desired directions of movement, is provided by a piezoelectric bend (2'a) (Piezoelectric Bender) and / or a piezoelectric stacking means (2 '). b) (Piezoelectric Stack Actuator), characterized in that the control device, which is intended specifically to stabilize the axially directed (x) movement carried out by the micromanipulator, roller bearing (L) arranged laterally in the axial direction (x). I i A control device according to claim 1 in connection with a micromanipulator, wherein one, as in the same: longitudinal axis (x) of a pie- connected to the same; zoelectric bend (2a'2) existing member performing. The axial direction of travel of the micromanipulator (x) is provided with an electric motor (2'b), the axial direction of motion, which is mediated through it, is 'arranged finely adjustable with a piezoelectric stack' (gauge (2'c)). Piezoelectric Stack Actuator), characterized in that between the axial direction of the electric motor (2'b), the end (2'bp) of the electric motor and the piezoelectric stacking means, ··, 35 (2'c), is provided with at least one directional means. (K), such as a ball or equivalent, to direct the force acting between the aforementioned parts in a controlled manner according to the point contact principle. Control device according to claim 1 or 2, characterized in that mechanically resilient member (s), such as one or more springs, resilient polymer, silicone dampers and / or the like, to eliminate the effect of inertia in particular, friction, clearance and / or equivalent. Control device according to any of the above claims 1-3, characterized in that the roller bearing slide device (L) has been realized by a ball bearing slide bearing (Li) equipped with a ball bearing slide. Control device according to any of the above claims 1-4, characterized in that the roller-bearing slide device (L) has been realized through a roller bearing roller bearing (L2) equipped with a roller-bearing slide. 20 Control device according to any of the above claims 1-5, characterized in that the electric motor (2'b) of the micromanipulator is a stepping or pulse motor. 25 Control device according to any of the above claims 1 - 5, characterized in that the motor belonging to the micromanipulator is a motor having; made by piezoelectric elements (Piezoelectric Motor). «1 8. Control device according to some of the above ...! Claims 1 to 5, characterized in that it relates to; The micromanipulator associated with the motor has been made of magnetic magnetic material (Magnetic Shape Memory Mate material *). »»