ES8505480A1 - Perfeccionamientos en un dispositivo para la deteccion de fallos superficiales. - Google Patents
Perfeccionamientos en un dispositivo para la deteccion de fallos superficiales.Info
- Publication number
- ES8505480A1 ES8505480A1 ES531768A ES531768A ES8505480A1 ES 8505480 A1 ES8505480 A1 ES 8505480A1 ES 531768 A ES531768 A ES 531768A ES 531768 A ES531768 A ES 531768A ES 8505480 A1 ES8505480 A1 ES 8505480A1
- Authority
- ES
- Spain
- Prior art keywords
- light
- article
- optical system
- diffraction
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
UN DISPOSITIVO PARA LA DETERMINACION DE FALLOS, PARA OBJETOS PLANOS.UTILIZANDO UN OBJETO QUE PRESENTE CARACTERISTICAS DE DIFRACCION DE LA LUZ, EL TRAZO LUMINOSO (12), ESTA DISPUESTO, SENSIBLEMENTE DE FORMA PERPENDICULAR A LA ESTRUCTURA (13) QUE PROVOCA LA DIFRACCION DE LA LUZ. LA OPTICA CILINDRICA (14) DETECTA ADEMAS DEL ORDEN DE DIFRACCION NULO, POR LO MENOS EL PRIMER ORDEN DE DIFRACCION DE LA LUZ EMITIDA POR EL OBJETO. TAMBIEN LA LUZ DEL PRIMER ORDEN DE DIFRACCION, SE REPRESENTA SOBRE UN FOTORRECEPTOR PROPIO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3314620 | 1983-04-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
ES531768A0 ES531768A0 (es) | 1985-05-16 |
ES8505480A1 true ES8505480A1 (es) | 1985-05-16 |
Family
ID=6197080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES531768A Expired ES8505480A1 (es) | 1983-04-22 | 1984-04-18 | Perfeccionamientos en un dispositivo para la deteccion de fallos superficiales. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4632546A (es) |
EP (1) | EP0123929B1 (es) |
JP (2) | JPS6089735A (es) |
DE (1) | DE3472300D1 (es) |
ES (1) | ES8505480A1 (es) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3446355C2 (de) * | 1984-12-19 | 1986-11-06 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Optisches Fehlersuchgerät |
DE3518832A1 (de) * | 1985-05-24 | 1986-11-27 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Oberflaechenbeschaffenheitsfeststellungs-lichtabtastvorrichtung mit einem lichtkonzentrator |
DE3534019A1 (de) * | 1985-09-24 | 1987-04-02 | Sick Optik Elektronik Erwin | Optische bahnueberwachungsvorrichtung |
DE3709500A1 (de) * | 1985-09-24 | 1988-10-06 | Sick Optik Elektronik Erwin | Optische bahnueberwachungseinrichtung mit zeilenkameras mit gerichteter beleuchtung |
DE8700520U1 (de) * | 1987-01-12 | 1987-03-12 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Scanner zur optischen Abtastung von Objekten, insbesondere Aufzeichnungsplatten |
GB2202627A (en) * | 1987-03-23 | 1988-09-28 | Sick Optik Elektronik Erwin | Optical arrangement in web monitoring device |
US4868404A (en) * | 1987-04-23 | 1989-09-19 | Hajime Industries, Ltd. | Surface inspection apparatus using a mask system to monitor uneven surfaces |
NL8802404A (nl) * | 1988-09-30 | 1990-04-17 | Meyn Bv | Werkwijze en inrichting voor het door middel van doorstraling controleren van voedselprodukten. |
US5027418A (en) * | 1989-02-13 | 1991-06-25 | Matsushita Electric Industrial Co., Ltd. | Electro-optical inspection apparatus for printed-circuit boards with components mounted thereon |
US4972091A (en) * | 1989-05-16 | 1990-11-20 | Canadian Patents And Development Limited/Societe Canadienne Des Brevets Et D'exploitation Limitee | Method and apparatus for detecting the presence of flaws in a moving sheet of material |
US4943734A (en) * | 1989-06-30 | 1990-07-24 | Qc Optics, Inc. | Inspection apparatus and method for detecting flaws on a diffractive surface |
JPH0695075B2 (ja) * | 1990-03-16 | 1994-11-24 | 工業技術院長 | 表面性状検出方法 |
FR2688064B1 (fr) * | 1992-07-22 | 1997-10-17 | Scanera Sc | Dispositif de detection de defauts de materiaux fibreux |
US5661561A (en) * | 1995-06-02 | 1997-08-26 | Accu-Sort Systems, Inc. | Dimensioning system |
DE19528519A1 (de) * | 1995-08-03 | 1997-02-06 | Tzn Forschung & Entwicklung | Vorrichtung zur Detektion streifenförmiger Oberflächenfehler |
US6853446B1 (en) * | 1999-08-16 | 2005-02-08 | Applied Materials, Inc. | Variable angle illumination wafer inspection system |
US6596996B1 (en) * | 2001-07-24 | 2003-07-22 | The Board Of Regents For Oklahoma State University | Optical spectral reflectance sensor and controller |
TWI238409B (en) * | 2001-07-27 | 2005-08-21 | Hamamatsu Metrix Co Ltd | Combined optical sensing assembly and disc testing devices developed thereby |
DE10137340A1 (de) * | 2001-07-31 | 2003-02-20 | Heidelberger Druckmasch Ag | Verfahren und Vorrichtung zur Erkennung von Fremdkörpern und Oberflächendefekten auf einer transparenten Vorlage sowie zur Korrektur von dadurch verursachten Bildfehlern einer Abbildung der Vorlage |
JP2003247957A (ja) * | 2002-02-26 | 2003-09-05 | Matsushita Electric Ind Co Ltd | 表面異物検査装置 |
US7130036B1 (en) | 2003-09-16 | 2006-10-31 | Kla-Tencor Technologies Corp. | Methods and systems for inspection of an entire wafer surface using multiple detection channels |
GB2429764A (en) * | 2005-08-30 | 2007-03-07 | Imp College Innovations Ltd | A scanning device using a first optical system with a first focal length and a second optical system with a second focal length |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3474254A (en) * | 1968-02-26 | 1969-10-21 | Sick Erwin | Photoelectronic apparatus for scanning textile material |
DE2200222A1 (de) * | 1972-01-04 | 1973-07-12 | Ibm Deutschland | Vorrichtung zur bestimmung der oberflaechenguete |
DE2211654A1 (de) * | 1972-03-10 | 1973-09-20 | Paul Lippke | Einrichtung zum pruefen bewegter bahnen aus papier, kunststoff- oder metallfolien und dgl |
US3790286A (en) * | 1972-04-21 | 1974-02-05 | Phillips Petroleum Co | Carbon black testing by analyzing non-specularly reflected polarized light |
JPS5611894B2 (es) * | 1973-09-26 | 1981-03-17 | ||
JPS5637499B2 (es) * | 1973-11-15 | 1981-09-01 | ||
DE2611539C3 (de) * | 1976-03-18 | 1982-09-09 | Agfa-Gevaert Ag, 5090 Leverkusen | Verfahren zum Erkennen und Orten von sich in Längsrichtung einer laufenden Materialbahn erstreckenden Fehlern |
US4030835A (en) * | 1976-05-28 | 1977-06-21 | Rca Corporation | Defect detection system |
DE2627609A1 (de) * | 1976-06-19 | 1977-12-29 | Ibm Deutschland | Interferometrisches verfahren |
US4180830A (en) * | 1977-06-28 | 1979-12-25 | Rca Corporation | Depth estimation system using diffractive effects of the grooves and signal elements in the grooves |
JPS5414789A (en) * | 1977-07-05 | 1979-02-03 | Mitsubishi Electric Corp | Surface inspecting apparatus |
US4197011A (en) * | 1977-09-22 | 1980-04-08 | Rca Corporation | Defect detection and plotting system |
DE2800351B2 (de) * | 1978-01-04 | 1979-11-15 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Optische Vorrichtung zur Bestimmung des Lichtaustrittswinkels bei einer mit einem Lichtfleck abgetasteten Materialbahn |
JPS5594145A (en) * | 1979-01-12 | 1980-07-17 | Hitachi Ltd | Method of and device for inspecting surface of article |
JPS54118891A (en) * | 1978-03-08 | 1979-09-14 | Fuji Electric Co Ltd | Surface deffct inspecting device |
JPS5587907A (en) * | 1978-12-27 | 1980-07-03 | Fuji Photo Film Co Ltd | Device for continuously inspecting surface of object |
US4352564A (en) * | 1980-05-30 | 1982-10-05 | Rca Corporation | Missing order defect detection apparatus |
JPS6038592B2 (ja) * | 1980-06-16 | 1985-09-02 | 石川島播磨重工業株式会社 | 高速回転機器の従動機器側シ−ル構造 |
US4395122A (en) * | 1981-04-29 | 1983-07-26 | Rca Corporation | Defect detection system |
-
1984
- 1984-03-30 DE DE8484103553T patent/DE3472300D1/de not_active Expired
- 1984-03-30 EP EP84103553A patent/EP0123929B1/de not_active Expired
- 1984-04-13 US US06/599,890 patent/US4632546A/en not_active Expired - Fee Related
- 1984-04-16 JP JP59076406A patent/JPS6089735A/ja active Pending
- 1984-04-18 ES ES531768A patent/ES8505480A1/es not_active Expired
-
1992
- 1992-11-24 JP JP080727U patent/JPH064655U/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
ES531768A0 (es) | 1985-05-16 |
JPS6089735A (ja) | 1985-05-20 |
DE3472300D1 (en) | 1988-07-28 |
EP0123929B1 (de) | 1988-06-22 |
EP0123929A3 (en) | 1985-12-04 |
JPH064655U (ja) | 1994-01-21 |
US4632546A (en) | 1986-12-30 |
EP0123929A2 (de) | 1984-11-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FD1A | Patent lapsed |
Effective date: 19970612 |