ES2183284T3 - Procedimiento y dispositivo de decapado. - Google Patents

Procedimiento y dispositivo de decapado.

Info

Publication number
ES2183284T3
ES2183284T3 ES98201092T ES98201092T ES2183284T3 ES 2183284 T3 ES2183284 T3 ES 2183284T3 ES 98201092 T ES98201092 T ES 98201092T ES 98201092 T ES98201092 T ES 98201092T ES 2183284 T3 ES2183284 T3 ES 2183284T3
Authority
ES
Spain
Prior art keywords
anode
substrate
face
width
magnetic circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES98201092T
Other languages
English (en)
Inventor
Brande Pierre Vanden
Alain Weymeersch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ArcelorMittal Liege Upstream SA
Original Assignee
Cockerill Sambre SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cockerill Sambre SA filed Critical Cockerill Sambre SA
Application granted granted Critical
Publication of ES2183284T3 publication Critical patent/ES2183284T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Optics & Photonics (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Weting (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • ing And Chemical Polishing (AREA)
  • Thin Magnetic Films (AREA)

Abstract

LA INVENCION SE REFIERE A UN PROCEDIMIENTO Y DISPOSITIVO PARA EL DECAPADO EN CONTINUO DE AL MENOS UNA DE LAS CARAS DE UN SUSTRATO (1). CONSISTE EN DESPLAZAR DICHO SUSTRATO (1) SIGUIENDO UNA DIRECCION DETERMINADA ENTRE UN ANODO (8), CON RESPECTO AL CUAL ESTA POLARIZADO NEGATIVAMENTE, Y AL MENOS UN CIRCUITO MAGNETICO (2) DISPUESTO FRENTE A DICHO ANODO (8), CON LA CARA QUE VA A DECAPARSE ORIENTADA HACIA EL ANODO (8), Y CREAR, EN LA PROXIMIDAD DE DICHA CARA, UN PLASMA (10) EN UN GAS, DE FORMA QUE SE GENEREN RADICALES Y/O IONES QUE ACTUEN SOBRE ESTA ULTIMA, UTILIZANDO MEDIOS QUE PERMITAN ADAPTAR EL ANCHO DEL CAMPO DE ACCION DEL CIRCUITO MAGNETICO AL ANCHO DE LA ZONA QUE SE VA A DECAPAR DEL SUSTRATO (1).
ES98201092T 1997-04-10 1998-04-02 Procedimiento y dispositivo de decapado. Expired - Lifetime ES2183284T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE9700329A BE1011098A3 (fr) 1997-04-10 1997-04-10 Procede et dispositif de decapage.

Publications (1)

Publication Number Publication Date
ES2183284T3 true ES2183284T3 (es) 2003-03-16

Family

ID=3890458

Family Applications (1)

Application Number Title Priority Date Filing Date
ES98201092T Expired - Lifetime ES2183284T3 (es) 1997-04-10 1998-04-02 Procedimiento y dispositivo de decapado.

Country Status (8)

Country Link
US (1) US6066241A (es)
EP (1) EP0878565B1 (es)
AT (1) ATE223520T1 (es)
BE (1) BE1011098A3 (es)
DE (1) DE69807571T2 (es)
DK (1) DK0878565T3 (es)
ES (1) ES2183284T3 (es)
PT (1) PT878565E (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10252178A1 (de) * 2002-11-09 2004-05-27 Sms Demag Ag Verfahren und Vorrichtung zum Entzundern und/oder Reinigen eines Metallstrangs
EP1783815A1 (fr) * 2005-11-07 2007-05-09 ARCELOR France Procédé et installation d'avivage sous vide par pulvérisation magnétron d'une bande métallique
EP1783814A1 (fr) * 2005-11-07 2007-05-09 ARCELOR France Procédé et installation d'avivage sous vide par pulvérisation magnétron d'une bande métallique
US20090145747A1 (en) * 2005-11-07 2009-06-11 Acrelormittal France Method and installation for the vacuum colouring of a metal strip by means of magnetron sputtering
JP5828770B2 (ja) * 2012-01-24 2015-12-09 株式会社神戸製鋼所 真空成膜装置
FR3088346A1 (fr) * 2018-11-14 2020-05-15 Safran Aircraft Engines Procede de decapage d’une piece de turbomachine

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175125A (ja) * 1983-03-24 1984-10-03 Toshiba Corp ドライエツチング装置
FR2592520B1 (fr) * 1985-12-27 1988-12-09 Atelier Electro Thermie Const Dispositif de creation d'un champ magnetique glissant, en particulier pour gravure ionique rapide sous champ magnetique
US4896813A (en) * 1989-04-03 1990-01-30 Toyo Kohan Co., Ltd. Method and apparatus for cold rolling clad sheet
US5082542A (en) * 1990-08-02 1992-01-21 Texas Instruments Incorporated Distributed-array magnetron-plasma processing module and method
US5079481A (en) * 1990-08-02 1992-01-07 Texas Instruments Incorporated Plasma-assisted processing magneton with magnetic field adjustment
KR100297358B1 (ko) * 1991-07-23 2001-11-30 히가시 데쓰로 플라즈마에칭장치
JPH0768620B2 (ja) * 1991-09-30 1995-07-26 中外炉工業株式会社 金属ストリップの表面清浄化装置
US5262030A (en) * 1992-01-15 1993-11-16 Alum Rock Technology Magnetron sputtering cathode with electrically variable source size and location for coating multiple substrates
US5399253A (en) * 1992-12-23 1995-03-21 Balzers Aktiengesellschaft Plasma generating device

Also Published As

Publication number Publication date
DK0878565T3 (da) 2003-01-06
ATE223520T1 (de) 2002-09-15
PT878565E (pt) 2002-12-31
EP0878565B1 (fr) 2002-09-04
DE69807571T2 (de) 2003-04-17
US6066241A (en) 2000-05-23
EP0878565A1 (fr) 1998-11-18
BE1011098A3 (fr) 1999-04-06
DE69807571D1 (de) 2002-10-10

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