ES2080526T3 - Valvula micromecanica para dispositivos de dosificacion micromecanicos. - Google Patents
Valvula micromecanica para dispositivos de dosificacion micromecanicos.Info
- Publication number
- ES2080526T3 ES2080526T3 ES92923356T ES92923356T ES2080526T3 ES 2080526 T3 ES2080526 T3 ES 2080526T3 ES 92923356 T ES92923356 T ES 92923356T ES 92923356 T ES92923356 T ES 92923356T ES 2080526 T3 ES2080526 T3 ES 2080526T3
- Authority
- ES
- Spain
- Prior art keywords
- valve
- membrane
- micromechanical
- channel
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0044—Electric operating means therefor using thermo-electric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0048—Electric operating means therefor using piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0051—Electric operating means therefor using electrostatic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0086—Medical applications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Dispersion Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Micromachines (AREA)
- Multiple-Way Valves (AREA)
- Reciprocating Pumps (AREA)
Abstract
EL OBJETIVO DE LA INVENCION ES PERMITIR QUE PEQUEÑAS DOSIS DE SUSTANCIAS PUEDAN SER SUMINISTRADAS Y CORTADAS DURANTE UN PERIODO VARIABLE DE TIEMPO DE MANERA FIABLE Y CON UN FUNCIONAMIENTO ESTABLE. LA NUEVA VALVULA ELECTROMECANICA, TIENE ESENCIALMENTE TRES CAPAS (1,2,3) SUPERPUESTAS. LA CAPA CENTRAL ESTA DISEÑADA COMO UNA MEMBRANA DE VALVULA (2), Y LA CAPA SUPERIOR ESTA DISEÑADA COMO UNA DELGADA MEMBRANA DE IMPULSION (3). UN ELEMENTO ACTUADOR (4) PARA CONTROLAR LA VALVULA SE ENCUENTRA DISPUESTO SOBRE LA MEMBRANA DE IMPULSION (3). LA MEMBRANA DE LA VALVULA (2) TIENE EN AMBAS CARAS UNAS ESTRUCTURAS DE ADMISION Y EXTRACCION EN FORMA DE CANAL Y CAMARA, UN TALADRO CENTRAL (9), CUYA AREA CENTRAL ESTA ASEGURADA DE MANERA NO SEPARABLE A LA MEMBRANA DE IMPULSION (3) Y UNIDA DE FORMA SEPARABLE A LA CAPA INFERIOR (1), SIN DISMINUIR EL FLUJO DE SUSTANCIA A TRAVES DE LA CANAL DE ADMISION (5), LA CAMARA DE ADMISION (6), EL TALADRO (9), Y EN ESTADO ACTIVO, A TRAVES DE LA CAMARA DE SALIDA (6) Y EL CANAL DESALIDA (8).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4138491A DE4138491C2 (de) | 1991-11-23 | 1991-11-23 | Mikromechanisches Ventil für mikromechanische Dosiereinrichtungen |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2080526T3 true ES2080526T3 (es) | 1996-02-01 |
Family
ID=6445391
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES92923356T Expired - Lifetime ES2080526T3 (es) | 1991-11-23 | 1992-11-19 | Valvula micromecanica para dispositivos de dosificacion micromecanicos. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5538221A (es) |
EP (1) | EP0613535B1 (es) |
JP (1) | JPH07501124A (es) |
DE (2) | DE4138491C2 (es) |
DK (1) | DK0613535T3 (es) |
ES (1) | ES2080526T3 (es) |
WO (1) | WO1993010385A1 (es) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4342849A1 (de) * | 1993-12-10 | 1995-06-14 | Rainer Dr Habil Hintsche | Anordnung und Verfahren zur Mikrodosierung |
DE19511022C1 (de) * | 1995-03-28 | 1996-06-20 | Hahn Schickard Ges | Mikromechanisches Ventil für Mikrodosiereinrichtungen |
US6126140A (en) * | 1997-12-29 | 2000-10-03 | Honeywell International Inc. | Monolithic bi-directional microvalve with enclosed drive electric field |
MXPA02002500A (es) | 2000-07-07 | 2004-09-10 | Baxter Int | Sistema medico, metodo y aparato utilizando sensores micro-electromecanicos. |
DE10048376C2 (de) | 2000-09-29 | 2002-09-19 | Fraunhofer Ges Forschung | Mikroventil mit einem normalerweise geschlossenen Zustand |
US20040120836A1 (en) * | 2002-12-18 | 2004-06-24 | Xunhu Dai | Passive membrane microvalves |
EP1874457A1 (en) * | 2005-04-26 | 2008-01-09 | Aviza Technology, Ltd. | Microfluidic structures and how to make them |
CN101842736A (zh) * | 2007-08-08 | 2010-09-22 | 新加坡科技研究局 | 电光设备及其制备方法 |
DE102009007317A1 (de) * | 2009-02-03 | 2010-08-12 | Continental Automotive Gmbh | Ventil |
DE102016014946A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Druckkopf zur Applikation eines Beschichtungsmittels auf ein Bauteil |
DE102016014955A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Beschichtungseinrichtung und entsprechendes Beschichtungsverfahren |
DE102016014947A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Druckkopf zur Applikation eines Beschichtungsmittels |
DE102016014953A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Lackieranlage und entsprechendes Lackierverfahren |
DE102016014951A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Beschichtungseinrichtung und zugehöriges Betriebsverfahren |
DE102016014919A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Applikationsvorrichtung und Verfahren zum Applizieren eines Beschichtungsmittels |
DE102016014944A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Beschichtungsverfahren und entsprechende Beschichtungseinrichtung |
DE102016014948A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Druckkopf und zugehöriges Betriebsverfahren |
DE102016014952A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Beschichtungseinrichtung zur Beschichtung von Bauteilen |
DE102016014943A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Druckkopf mit Temperiereinrichtung |
DE102016014956A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Beschichtungseinrichtung und zugehöriges Betriebsverfahren |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3814150A1 (de) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | Ventilanordnung aus mikrostrukturierten komponenten |
US4826131A (en) * | 1988-08-22 | 1989-05-02 | Ford Motor Company | Electrically controllable valve etched from silicon substrates |
CH679555A5 (es) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd | |
DE3919876A1 (de) * | 1989-06-19 | 1990-12-20 | Bosch Gmbh Robert | Mikroventil |
DE3936647C1 (es) * | 1989-11-03 | 1990-10-31 | Jas Ag Jet Age Systems, Kloten, Ch | |
DE4035852A1 (de) * | 1990-11-10 | 1992-05-14 | Bosch Gmbh Robert | Mikroventil in mehrschichtenaufbau |
US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
-
1991
- 1991-11-23 DE DE4138491A patent/DE4138491C2/de not_active Expired - Fee Related
-
1992
- 1992-11-19 JP JP5500704A patent/JPH07501124A/ja not_active Withdrawn
- 1992-11-19 WO PCT/DE1992/000976 patent/WO1993010385A1/de active IP Right Grant
- 1992-11-19 DK DK92923356.7T patent/DK0613535T3/da active
- 1992-11-19 EP EP92923356A patent/EP0613535B1/de not_active Expired - Lifetime
- 1992-11-19 DE DE59204154T patent/DE59204154D1/de not_active Expired - Fee Related
- 1992-11-19 ES ES92923356T patent/ES2080526T3/es not_active Expired - Lifetime
- 1992-11-19 US US08/240,736 patent/US5538221A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5538221A (en) | 1996-07-23 |
WO1993010385A1 (de) | 1993-05-27 |
DE4138491C2 (de) | 1995-07-20 |
DK0613535T3 (da) | 1996-03-04 |
DE4138491A1 (de) | 1993-05-27 |
EP0613535A1 (de) | 1994-09-07 |
EP0613535B1 (de) | 1995-10-25 |
JPH07501124A (ja) | 1995-02-02 |
DE59204154D1 (de) | 1995-11-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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