EP4743826A1 - Aktuierbare spiegel-baugruppe - Google Patents

Aktuierbare spiegel-baugruppe

Info

Publication number
EP4743826A1
EP4743826A1 EP24740119.3A EP24740119A EP4743826A1 EP 4743826 A1 EP4743826 A1 EP 4743826A1 EP 24740119 A EP24740119 A EP 24740119A EP 4743826 A1 EP4743826 A1 EP 4743826A1
Authority
EP
European Patent Office
Prior art keywords
actionable
mirror set
mirror
actionable mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24740119.3A
Other languages
English (en)
French (fr)
Inventor
Markus Hauf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of EP4743826A1 publication Critical patent/EP4743826A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
EP24740119.3A 2023-07-13 2024-07-04 Aktuierbare spiegel-baugruppe Pending EP4743826A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102023206689.0A DE102023206689A1 (de) 2023-07-13 2023-07-13 Aktuierbare Spiegel-Baugruppe
PCT/EP2024/068926 WO2025012094A1 (de) 2023-07-13 2024-07-04 Aktuierbare spiegel-baugruppe

Publications (1)

Publication Number Publication Date
EP4743826A1 true EP4743826A1 (de) 2026-05-20

Family

ID=91856060

Family Applications (1)

Application Number Title Priority Date Filing Date
EP24740119.3A Pending EP4743826A1 (de) 2023-07-13 2024-07-04 Aktuierbare spiegel-baugruppe

Country Status (3)

Country Link
EP (1) EP4743826A1 (de)
DE (1) DE102023206689A1 (de)
WO (1) WO2025012094A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023206689A1 (de) 2023-07-13 2025-01-16 Carl Zeiss Smt Gmbh Aktuierbare Spiegel-Baugruppe

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6573978B1 (en) 1999-01-26 2003-06-03 Mcguire, Jr. James P. EUV condenser with non-imaging optics
DE10317667A1 (de) 2003-04-17 2004-11-18 Carl Zeiss Smt Ag Optisches Element für ein Beleuchtungssystem
DE102008009600A1 (de) 2008-02-15 2009-08-20 Carl Zeiss Smt Ag Facettenspiegel zum Einsatz in einer Projektionsbelichtungsanlage für die Mikro-Lithographie
NL2007886C2 (en) * 2011-11-29 2013-05-30 Innoluce B V Mems scanning micromirror.
DE102013204546A1 (de) * 2013-03-15 2014-09-18 Carl Zeiss Smt Gmbh Optisches Bauteil
DE102013008646B4 (de) * 2013-05-21 2020-06-10 Lt-Ultra Precision Technology Gmbh Adaptiver Spiegel für eine Laserbearbeitungsvorrichtung
DE102014201622A1 (de) * 2014-01-30 2015-08-20 Carl Zeiss Smt Gmbh Verfahren zum Herstellen eines Spiegelelements
DE102015204874A1 (de) 2015-03-18 2016-09-22 Carl Zeiss Smt Gmbh Einrichtung zur Verschwenkung eines Spiegel-Elements mit zwei Schwenk-Freiheitsgraden
DE102015226531A1 (de) 2015-04-14 2016-10-20 Carl Zeiss Smt Gmbh Abbildende Optik zur Abbildung eines Objektfeldes in ein Bildfeld sowie Projektionsbelichtungsanlage mit einer derartigen abbildenden Optik
DE102017220586A1 (de) 2017-11-17 2019-05-23 Carl Zeiss Smt Gmbh Pupillenfacettenspiegel, Beleuchtungsoptik und optisches System für eine Projek-tionsbelichtungsanlage
DE102021211626A1 (de) * 2021-10-14 2023-04-20 Carl Zeiss Smt Gmbh EUV-Mehrfachspiegelanordnung
DE102021214237A1 (de) 2021-12-13 2022-12-22 Carl Zeiss Smt Gmbh Beleuchtungsoptik für eine EUV-Projektionsbelichtungsanlage
DE102023206689A1 (de) 2023-07-13 2025-01-16 Carl Zeiss Smt Gmbh Aktuierbare Spiegel-Baugruppe

Also Published As

Publication number Publication date
WO2025012094A1 (de) 2025-01-16
DE102023206689A1 (de) 2025-01-16

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