EP4743389A1 - Procédé de fabrication de composants horlogers en silicium sur une plaquette soi - Google Patents
Procédé de fabrication de composants horlogers en silicium sur une plaquette soiInfo
- Publication number
- EP4743389A1 EP4743389A1 EP24742243.9A EP24742243A EP4743389A1 EP 4743389 A1 EP4743389 A1 EP 4743389A1 EP 24742243 A EP24742243 A EP 24742243A EP 4743389 A1 EP4743389 A1 EP 4743389A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- silicon
- soi wafer
- watch components
- producing watch
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00865—Multistep processes for the separation of wafers into individual elements
- B81C1/00873—Multistep processes for the separation of wafers into individual elements characterised by special arrangements of the devices, allowing an easier separation
-
- G—PHYSICS
- G04—HOROLOGY
- G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
- G04B13/00—Gearwork
- G04B13/02—Wheels; Pinions; Spindles; Pivots
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/008—Manufacture of substrate-free structures separating the processed structure from a mother substrate
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- G—PHYSICS
- G04—HOROLOGY
- G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
- G04B17/00—Mechanisms for stabilising frequency
- G04B17/04—Oscillators acting by spring tension
- G04B17/06—Oscillators with hairsprings, e.g. balance
- G04B17/066—Manufacture of the spiral spring
-
- G—PHYSICS
- G04—HOROLOGY
- G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
- G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
- G04D3/0069—Watchmakers' or watch-repairers' machines or tools for working materials for working with non-mechanical means, e.g. chemical, electrochemical, metallising, vapourising; with electron beams, laser beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0133—Wet etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH000742/2023A CH720935A1 (fr) | 2023-07-11 | 2023-07-11 | Procédé de fabrication de composants horlogers en silicium sur une plaquette SOI |
| PCT/EP2024/069445 WO2025012302A1 (fr) | 2023-07-11 | 2024-07-10 | Procédé de fabrication de composants horlogers en silicium sur une plaquette soi |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP4743389A1 true EP4743389A1 (fr) | 2026-05-20 |
Family
ID=87419137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP24742243.9A Pending EP4743389A1 (fr) | 2023-07-11 | 2024-07-10 | Procédé de fabrication de composants horlogers en silicium sur une plaquette soi |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP4743389A1 (fr) |
| CH (1) | CH720935A1 (fr) |
| WO (1) | WO2025012302A1 (fr) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5121283B2 (ja) * | 2007-04-04 | 2013-01-16 | キヤノン株式会社 | 面外角度付構造部を有する構造体の作製方法 |
| JP6514993B2 (ja) * | 2015-08-25 | 2019-05-15 | シチズン時計株式会社 | 時計部品の製造方法 |
| JP6736365B2 (ja) | 2016-06-10 | 2020-08-05 | シチズン時計株式会社 | 時計部品の製造方法 |
| EP3543795A1 (fr) | 2018-03-20 | 2019-09-25 | Patek Philippe SA Genève | Procede de fabrication de composants horlogers en silicium |
| EP3543796A1 (fr) * | 2018-03-21 | 2019-09-25 | Nivarox-FAR S.A. | Procede de fabrication d'un spiral en silicium |
| CH716605A1 (fr) | 2019-09-16 | 2021-03-31 | Richemont Int Sa | Procédé de fabrication d'une pluralité de résonateurs sur une plaquette. |
-
2023
- 2023-07-11 CH CH000742/2023A patent/CH720935A1/fr unknown
-
2024
- 2024-07-10 EP EP24742243.9A patent/EP4743389A1/fr active Pending
- 2024-07-10 WO PCT/EP2024/069445 patent/WO2025012302A1/fr not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2025012302A1 (fr) | 2025-01-16 |
| CH720935A1 (fr) | 2025-01-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: UNKNOWN |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |