EP4743259A1 - Polishing tools and associated methods - Google Patents

Polishing tools and associated methods

Info

Publication number
EP4743259A1
EP4743259A1 EP24731035.2A EP24731035A EP4743259A1 EP 4743259 A1 EP4743259 A1 EP 4743259A1 EP 24731035 A EP24731035 A EP 24731035A EP 4743259 A1 EP4743259 A1 EP 4743259A1
Authority
EP
European Patent Office
Prior art keywords
associated methods
polishing tools
polishing
tools
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24731035.2A
Other languages
German (de)
French (fr)
Inventor
Max Schneckenburger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Netherlands BV
Original Assignee
ASML Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Netherlands BV filed Critical ASML Netherlands BV
Publication of EP4743259A1 publication Critical patent/EP4743259A1/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/247—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass using reciprocating grinding tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B24B41/047—Grinding heads for working on plane surfaces
    • B24B41/0475—Grinding heads for working on plane surfaces equipped with oscillating abrasive blocks, e.g. mounted on a rotating head

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
EP24731035.2A 2023-07-11 2024-06-11 Polishing tools and associated methods Pending EP4743259A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP23184618.9A EP4491327A1 (en) 2023-07-11 2023-07-11 Polishing tool and associated methods
PCT/EP2024/066032 WO2025011845A1 (en) 2023-07-11 2024-06-11 Polishing tool and associated methods

Publications (1)

Publication Number Publication Date
EP4743259A1 true EP4743259A1 (en) 2026-05-20

Family

ID=87245703

Family Applications (2)

Application Number Title Priority Date Filing Date
EP23184618.9A Withdrawn EP4491327A1 (en) 2023-07-11 2023-07-11 Polishing tool and associated methods
EP24731035.2A Pending EP4743259A1 (en) 2023-07-11 2024-06-11 Polishing tools and associated methods

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP23184618.9A Withdrawn EP4491327A1 (en) 2023-07-11 2023-07-11 Polishing tool and associated methods

Country Status (3)

Country Link
EP (2) EP4491327A1 (en)
CN (1) CN121568811A (en)
WO (1) WO2025011845A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8601095A (en) * 1986-04-29 1987-11-16 Philips Nv POSITIONING DEVICE.
DE19962247A1 (en) * 1999-12-22 2001-09-20 Agie Sa Motion transmission device
US6817104B2 (en) * 2002-05-15 2004-11-16 Sumitomo Heavy Industries, Ltd. X-Y stage apparatus
CN102059576B (en) * 2010-11-25 2012-02-08 西安理工大学 Two-axis linear movement micro-drive device
ES2981961T3 (en) * 2013-12-13 2024-10-14 Luca Toncelli Machine for smoothing and/or polishing slabs of stone material, such as natural or agglomerated stone, ceramics and glass

Also Published As

Publication number Publication date
CN121568811A (en) 2026-02-24
WO2025011845A1 (en) 2025-01-16
EP4491327A1 (en) 2025-01-15

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Legal Events

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