EP4713109A1 - Filter assemblies and related systems and related methods - Google Patents

Filter assemblies and related systems and related methods

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Publication number
EP4713109A1
EP4713109A1 EP24811693.1A EP24811693A EP4713109A1 EP 4713109 A1 EP4713109 A1 EP 4713109A1 EP 24811693 A EP24811693 A EP 24811693A EP 4713109 A1 EP4713109 A1 EP 4713109A1
Authority
EP
European Patent Office
Prior art keywords
psi
filter assembly
membrane
ion exchange
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24811693.1A
Other languages
German (de)
French (fr)
Inventor
Jad Ali Jaber
Cesar Lopez Gonzalez
Ashutosh Shrikant BHABHE
Siddarth Sampath
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of EP4713109A1 publication Critical patent/EP4713109A1/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08—Selective adsorption, e.g. chromatography
    • B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
    • B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction, e.g. ion-exchange, ion-pair, ion-suppression or ion-exclusion
    • B01D15/361—Ion-exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08—Selective adsorption, e.g. chromatography
    • B01D15/10—Selective adsorption, e.g. chromatography characterised by constructional or operational features
    • B01D15/18—Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to flow patterns
    • B01D15/1896—Membrane chromatography or membrane adsorbers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/58—Multistep processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/30—Polyalkenyl halides
    • B01D71/32—Polyalkenyl halides containing fluorine atoms
    • B01D71/36—Polytetrafluoroethylene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0283—Pore size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/20—Specific permeability or cut-off range
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/42—Ion-exchange membranes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

Filter assemblies are provided. A filter assembly comprises a retentive membrane. The retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether using an air flow porosimeter at 22°C. A filter assembly comprises an ion exchange membrane. The ion exchange membrane has: A) a bubble point of less than 50 psi as measured in isopropyl alcohol using an air flow porosimeter at 22 °C; and/or B) a dye binding capacity of 2 μg/cm2 to 100 μg/cm2 as measured according to the Methylene Blue Dye Binding Testing Method. Related systems and related methods, among other things, are also provided.

Description

FILTER ASSEMBLIES AND RELATED SYSTEMS AND RELATED METHODS
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims priority to U.S. Provisional Patent Application No. 63/467,819, filed May 19, 2023, and titled “FILTER ASSEMBLIES AND RELATED METHODS;” the disclosure of which application is hereby incorporated herein by reference in its entirety.
FIELD
[0002] The present disclosure relates to filter assemblies, and related systems and related methods.
BACKGROUND
[0003] Fluids used in semiconductor manufacturing have impurities and thus require purification. Purifying fluids at an efficient and effective rate remains an ongoing challenge.
SUMMARY
[0004] Some embodiments relate to a filter assembly. In some embodiments, the filter assembly comprises a retentive membrane. In some embodiments, the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an airflow porosimeter at 22 °C. In some embodiments, the retentive membrane has a dye binding capacity of 2 pg/cm2 to 100 pg/cm2 as measured according to the Methylene Blue Dye BindingTesting Method. In some embodiments, the filter assembly comprises an ion exchange membrane. In some embodiments, the ion exchange membrane has a bubble point of less than 50 psi as measured in isopropyl alcohol using an air flow porosimeter at 22 °C. In some embodiments, the ion exchange membrane has a dye binding capacity of 2 pg/cm2 to 100 pg/cm2 as measured according to the Methylene Blue Dye BindingTesting Method. [0005] Some embodiments relate to a method. In some embodiments, the method comprises obtaining a filter assembly. In some embodiments, the filter assembly comprises a retentive membrane. In some embodiments, the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether (e.g., ethoxynonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C. In some embodiments, the retentive membrane has a dye binding capacity of 2 pg/cm2 to 100 pg/cm2 as measured accordingto the Methylene Blue Dye BindingTesting Method. In some embodiments, the filter assembly comprises an ion exchange membrane. In some embodiments, the ion exchange membrane has a bubble point of less than 50 psi as measured in isopropyl alcohol using an airflow porosimeter at 22 °C. In some embodiments, the ion exchange membrane has a dye binding capacity of 2 pg/cm2 to 100 pg/cm2 as measured accordingto the Methylene Blue Dye BindingTesting Method. In some embodiments, the method comprises obtaining a fluid comprising defect-causing particles. In some embodiments, the method comprises flowing the fluid through the filter assembly to remove at least a portion of the defect-causing particles from the fluid. [0006] Some embodiments relate to a filter assembly. In some embodiments, the filter assembly comprises a retentive membrane. In some embodiments, the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an airflow porosimeter at 22 °C. In some embodiments, the retentive membrane has a dye binding capacity of 2 pg/cm2 to 100 pg/cm2 as measured accordingto the Methylene Blue Dye BindingTesting Method. In some embodiments, the filter assembly comprises an ion exchange membrane. In some embodiments, the ion exchange membrane has a bubble point, when measured in isopropyl alcohol using an airflow porosimeter at 22 °C, and/or a dye binding capacity, when measured accordingto the Methylene Blue Dye BindingTesting Method, sufficient to result in a flow rate through the filter assembly of 0.1 L/min to 50 L/min. [0007] Some embodiments relate to a filter assembly. In some embodiments, the filter assembly comprises a retentive membrane. In some embodiments, the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an airflow porosimeter at 22 °C. In some embodiments, the retentive membrane has a dye binding capacity of 2 pg/cm2to 100 pg/cm2 as measured according to the Methylene Blue Dye BindingTesting Method. In some embodiments, the filter assembly comprises an ion exchange membrane. In some embodiments, the ion exchange membrane has a bubble point of less than 50 psi as measured in isopropyl alcohol using an airflow porosimeter at 22 °C. In some embodiments, the ion exchange membrane comprises ionomer particles, located on a fluid contact surface, in an amount sufficient to: A) exhibit a dye binding capacity of 2 pg/cm2to 100 pg/cm2 as measured according to the Methylene Blue Dye BindingTesting Method; and/or B) result in a flow rate through the filter assembly of 5 L/min to 50 L/min.
BRIEF DESCRIPTION OF THE DRAWING
[0008] Some embodiments of the disclosure are herein described, by way of example only, with reference to the accompanying drawings. With specific reference now to the drawings in detail, it is stressed that the embodiments shown are byway of example and for purposes of illustrative discussion of embodiments of the disclosure. In this regard, the description taken with the drawings makes apparent to those skilled in the art how embodiments of the disclosure may be practiced.
[0009] FIG. 1 is a schematic diagram of a filtration assembly, accordingto some embodiments.
[0010] FIG. 2 is a flowchart diagram of a method of filtration, accordingto some embodiments.
DETAILED DESCRIPTION
[0011] Among those benefits and improvements that have been disclosed, other objects and advantages of this disclosure will become apparent from the following description taken in conjunction with the accompanyingfigures. Detailed embodiments of the present disclosure are disclosed herein; however, it is to be understood that the disclosed embodiments are merely illustrative of the disclosure that may be embodied in various forms. In addition, each of the examples given regarding the various embodiments of the disclosure which are intended to be illustrative, and not restrictive. [0012] Any prior patents and publications referenced herein are incorporated by reference in their entireties.
[0013] Throughout the specification and claims, the following terms take the meanings explicitly associated herein, unless the context clearly dictates otherwise. The phrases "in one embodiment," “in an embodiment,” and "in some embodiments" as used herein do not necessarily referto the same embodiment(s), though it may. Furthermore, the phrases "in another embodiment" and "in some other embodiments" as used herein do not necessarily refer to a different embodiment, although it may. All embodiments of the disclosure are intended to be combinable without departingfrom the scope or spirit of the disclosure.
[0014] As used herein, the term "based on" is not exclusive and allows for being based on additional factors not described, unless the context clearly dictates otherwise. In addition, throughout the specification, the meaning of "a," "an," and "the" include plural references. The meaning of "in" includes "in" and "on."
[0015] FIG. 1 is a schematic diagram of a filtration assembly 100, according to some embodiments. As shown in FIG. 1, the filtration assembly 100 comprises a housing 110 having a fluid inlet 101 and a fluid outlet 102 in fluid communication with the fluid inlet 101 , an ion exchange membrane 120, and a retentive membrane 130. The ion exchange membrane 120 may be located in the housing 110 between the fluid inlet 101 and the fluid outlet 102. The retentive membrane 130 may be located in the housing 110 between the fluid inlet 101 and the fluid outlet 102. In some embodiments, the ion exchange membrane 120 is located upstream of the retentive membrane 130. In some embodiments, the ion exchange membrane 120 is located downstream of the retentive membrane 130. In some embodiments, at least one of the ion exchange membrane 120, the retentive membrane 130, or any combination thereof, is not included in the housing 110.
[0016] In some embodiments, the bubble point of a membrane refers to a measure of a maximum pore size in a membrane determined by employing a liquid (e.g., hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) (HFE), isopropyl alcohol (IPA)) as a wetting liquid. In some embodiments, the relationship between bubble point and pore size is express by the Washburn equation, or a modified version thereof (e.g., with pore size corrections) to account for different pore geometries. In some embodiments, the bubble point pressure relates to the retention capability of the membrane. Additional details for bubble point, among other things, are available in U.S. Patent No. 4,828,772, which is incorporated by reference herein in its entirety.
[0017] The ion exchange membrane 120 may have a bubble point of at least 10 psi. In some embodiments, unless otherwise provided herein, the bubble point of the ion exchange membrane 120 is measured in isopropyl alcohol (IPA) using an airflow porosimeter at 22 °C. In some embodiments, the ion exchange membrane 120 has a bubble point of 10 psi to 300 psi, or any subrange between 10 psi and 300 psi. For example, in some embodiments, the bubble point of the ion exchange membrane 120 may be 10 psi to 300 psi, 20 psi to 300 psi, 30 psi to 300 psi, 40 psi to 300 psi, 50 psi to 300 psi, 60 psi to 300 psi, 70 psi to 300 psi, 80 psi to 300 psi, 90 psi to 300 psi, 100 psi to 300 psi, 110 psi to 300 psi, 120 psi to 300 psi, 130 psi to 300 psi, 140 psi to 300 psi, 150 psi to 300 psi, 160 psi to 300 psi, 170 psi to 300 psi, 180 psi to 300 psi, 190 psi to 300 psi, 200 psi to 300 psi, 210 psi to 300 psi, 220 psi to 300 psi, 230 psi to 300 psi, 240 psi to 300 psi, 250 psi to 300 psi, 260 psi to 300 psi, 270 psi to 300 psi, 280 psi to 300 psi, or 290 psi to 300 psi. In some embodiments, the bubble point of the ion exchange membrane 120 may be 10 psi to 290 psi, 10 psi to 280 psi, 10 psi to 270 psi, 10 psi to 260 psi, 10 psi to 250 psi, 10 psi to 240 psi, 10 psi to 230 psi, 10 psi to 220 psi, 10 psi to 210 psi, 10 psi to 200 psi, 10 psi to 190 psi, 10 psi to 180 psi, 10 psi to 170 psi, 10 psi to 160 psi, 10 psi to 150 psi, 10 psi to 140 psi, 10 psi to 130 psi, 10 psi to 120 psi, 10 psi to 110 psi, 10 psi to 100 psi, 10 psi to 90 psi, 10 psi to 80 psi, 10 psi to 70 psi, 10 psi to 60 psi, 10 psi to 50 psi, 10 psi to 40 psi, 10 psi to 30 psi, or 10 psi to 20 psi.
[0018] The ion exchange membrane 120 may have a bubble point of 10 psi to 150 psi, or anysubrange between 10 psi and 150 psi. For example, in some embodiments, the bubble point of the ion exchange membrane 120 may be 20 psi to 150 psi, 30 psi to 150 psi, 40 psi to 150 psi, 50 psi to 150 psi, 60 psi to 150 psi, 70 psi to 150 psi, 80 psi to 150 psi, 90 psi to 150 psi, 100 psi to 150 psi, 110 psi to 150 psi, 120 psi to 150 psi, 130 psi to 150 psi, or 140 psi to 150 psi. In some embodiments, the bubble point of the ion exchange membrane 120 may be 10 psi to 140 psi, 10 psi to 130 psi, 10 psi to 120 psi, 10 psi to 110 psi, 10 psi to 100 psi, 10 psi to 90 psi, 10 psi to 80 psi, 10 psi to 70 psi, 10 psi to 60 psi, 10 psi to 50 psi, 10 psi to 40 psi, 10 psi to 30 psi, or 10 psi to 20 psi.
[0019] The ion exchange membrane 120 may have a thickness of the of 10 pm to 200 pm, or any subrange between 10 pm and 200 pm. For example, in some embodiments, the thickness of the ion exchange membrane 120 may be 20 pm to 200 pm, 30 pm to 200 pm, 40 pm to 200 pm, 50 pm to 200 pm, 60 pm to 200 pm, 70 pm to 200 pm, 80 pm to 200 pm, 90 pm to 200 pm, 100 pm to 200 pm, 110 pm to 200 pm, 120 pm to 200 pm, 130 pm to 200 pm, 140 pm to 200 pm, 150 pm to 200 pm, 160 pm to 200 pm, 170 pm to 200 pm, 180 pm to 200 pm, or 190 pm to 200 pm. In some embodiments, the thickness of the ion exchange membrane 120 may be 10 pm to 190 pm, 10 pm to 180 pm, 10 pm to 170 pm, 10 pm to 160 pm, 10 pm to 150 pm, 10 pm to 140 pm, 10 pm to 130 pm, 10 pm to 120 pm, 10 pm to 110 pm, 10 pm to 100 pm, 10 pm to 90 pm, 10 pm to 80 pm, 10 pm to 70 pm, 10 pm to 60 pm, 10 pm to 50 pm, 10 pm to 40 pm, 10 pm to 30 pm, or 10 pm to 20 pm.
[0020] In some embodiments, the ion exchange membrane 120 comprises at least one of an asymmetric membrane, a symmetric membrane, or any combination thereof.
[0021] The ion exchange membrane 120 may comprise at least one polymer. For example, in some embodiments, the ion exchange membrane 120 comprises at least one of fluoropolymer, polytetrafluoroethylene, any copolymer thereof, or any combination thereof. In some embodiments, the ion exchange membrane 120 comprises a tetrafluoroethylene (TFE) copolymer, such as, for example and without limitation, the tetrafluoroethylene (TFE) copolymers described in U.S. Patent No. 9,221 ,926, which is incorporated by reference herein in its entirety.
[0022] The ion exchange membrane 120 may have a modified surface. For example, in some embodiments, the surface of the ion exchange membrane is modified to increase a hydrophilicity of the ion exchange membrane 120. In some embodiments, the surface of the ion exchange membrane 120 is modified by a surface coating. In some embodiments, the surface of the ion exchange membrane 120 is modified by functional groups. In some embodiments, the functional groups are polar functional groups. In some embodiments, the surface of the ion exchange membrane is modified by an ionomer coating. In some embodiments, the ionomer coating comprises a perfluorosulfonic acid polymer. In some embodiments, when the ion exchange membrane 120 comprises the tetrafluoroethylene (TFE) copolymer, the surface of the ion exchange membrane 120 is not modified by the ionomer coating. In some embodiments, the ion exchange membrane 120 has a surface modified by an ionomer coating, such as, for example and without limitation, those described in U.S. Patent No. 6,179,132, which is incorporated by reference herein in its entirety.
[0023] A charge density on the surface of the ion exchange membrane 120 may be 2 pg/cm2 to 100 pg/cm2, or any subrange between 2 pg/cm2 to 100 pg/cm2. For example, in some embodiments, the charge density of the ion exchange membrane 120 may be 10 pg/cm2 to 100 pg/cm2, 20 pg/cm2 to 100 pg/cm2, 30 pg/cm2 to 100 pg/cm2, 40 pg/cm2 to 100 pg/cm2, 50 pg/cm2 to 100 pg/cm2, 60 pg/cm2 to 100 pg/cm2, 70 pg/cm2 to 100 pg/cm2, 80 pg/cm2 to 100 pg/cm2, or 90 pg/cm2 to 100 pg/cm2. In some embodiments, the charge density of the ion exchange membrane 120 may be 2 pg/cm2 to 90 pg/cm2, 2 pg/cm2 to 80 pg/cm2, 2 pg/cm2 to 70 pg/cm2, 2 pg/cm2 to 60 pg/cm2, 2 pg/cm2 to 50 pg/cm2, 2 pg/cm2 to 40 pg/cm2, 2 pg/cm2 to 30 pg/cm2, 2 pg/cm2 to 20 pg/cm2, or 2 pg/cm2 to 10 pg/cm2.
[0024] A dye binding capacity of the ion exchange membrane 120 may be 2 pg/cm2 to 100 pg/cm2, or any subrange between 2 pg/cm2 to 100 pg/cm2. In some embodiments, the dye binding capacity of the ion exchange membrane 120 may be 10 pg/cm2 to 100 pg/cm2, 20 pg/cm2 to 100 pg/cm2, 30 pg/cm2 to 100 pg/cm2, 40 pg/cm2 to 100 pg/cm2, 50 pg/cm2 to 100 pg/cm2, 60 pg/cm2 to 100 pg/cm2, 70 pg/cm2 to 100 pg/cm2, 80 pg/cm2 to 100 pg/cm2, or 90 pg/cm2 to 100 pg/cm2. In some embodiments, the charge density of the ion exchange membrane 120 may be 2 pg/cm2 to 90 pg/cm2, 2 pg/cm2 to 80 pg/cm2, 2 pg/cm2 to 70 pg/cm2, 2 pg/cm2 to 60 pg/cm2, 2 pg/cm2 to 50 pg/cm2, 2 pg/cm2 to 40 pg/cm2, 2 pg/cm2 to 30 pg/cm2, 2 pg/cm2 to 20 pg/cm2, or 2 pg/cm2 to 10 pg/cm2.
[0025] The dye binding capacity may be useful for quantifying the amount of negatively charged functional groups located on and/or within the internal and external structure of a porous membrane. In some embodiments, the dye binding capacity of a membrane is related to the amount of methylene blue dye (e.g., methylene blue dyes commercially available from Sigma) that binds to the membrane. In some embodiments, the dye binding capacity is measured according to the Methylene Blue Dye Binding Testing Method. That is, in some embodiments, the Methylene Blue Dye BindingTesting Method involves soaking a membrane (e.g., a membrane coated with ionomer particles) of known diameter (e.g., 47 mm) in a solution comprising a known weight percentage of the methylene blue dye (e.g., 0.00075 % by weight of the methylene blue dye) for a duration (e.g., 5 minutes to 2 hours), optionally with continuous stirring or mixing, at room temperature; and thereafter removing the membrane from the solution and measuringthe absorbance of the soaked membrane using a Cary spectrophotometer (commercially available from Agilent Technologies) operating at a wavelength of 656 nanometers (nm). The absorbance is compared to the absorbance of starting solution (before membrane soaking). Calibration curves are utilized to convert the dye solution absorbance data before and after soaking to the mass of methylene blue dye bound to the membrane per membrane unit area. The methylene blue dye, being cationic, will bind to the negatively charged membrane.
[0026] A surface energy of the surface of the ion exchange membrane 120 is 25 mN/m to 60 mN/m, or any subrange between 25 mN/m to 60 mN/m. For example, in some embodiments, the surface energy of the surface of the ion exchange membrane 120 is 25 mN/m to 60 mN/m, 30 mN/m to 60 mN/m, 35 mN/m to 60 mN/m, 40 mN/m to 60 mN/m, 45 mN/m to 60 mN/m, 50 mN/m to 60 mN/m, or 55 mN/m to 60 mN/m. In some embodiments, the surface energy of the surface of the ion exchange membrane 120 is 25 mN/m to 55 mN/m, 25 mN/m to 50 mN/m, 25 mN/m to 45 mN/m, 25 mN/m to 40 mN/m, 25 mN/m to 35 mN/m, or 25 mN/m to 30 mN/m.
[0027] In some embodiments, when a fluid comprising defect-causing particles is flowed through the filter assembly and then dispensed on a substrate, an amount of defectcausing particles dispensed onto the substrate, from the filter assembly, is at least 10% less than an amount of defect-causing particles dispensed onto a substrate, from a control filter assembly comprising an ion exchange membrane having a bubble point of 40 psi or greater as measured in isopropyl alcohol using an air flow porosimeter at 22 °C. In some embodiments, the amount of defect-causing particles dispensed onto the substrate, from the filter assembly, is 10% to 90%, 10% to 80%, 10% to 70%, 10% to 60%, 10% to 50%, 10% to 40%, 10% to 30%, 10% to 20%, 20% to 90%, 30% to 90%, 40% to 90%, 50% to 90%, 60% to 90%, 70% to 90%, or 80% to 90% less than the amount of defect-causing particles dispensed onto the substrate, from the control filter assembly. In some embodiments, the control filter assembly is a filter assembly comprising the same retentive membrane. In some embodiments, the control filter assembly is a filter assembly comprising the same retentive membrane and an ion exchange membrane that is same or similar to the ion exchange membrane of the filter assembly, except that the ion exchange membrane of the control filter assembly has a bubble point of 40 psi or greater as measured in isopropyl alcohol using an airflow porosimeter at 22 °C.
[0028] In some embodiments, the ion exchange membrane 120 has A) a bubble point, when measured in isopropyl alcohol using an air flow porosimeter at 22 °C, and B) a dye binding capacity, when measured accordingto the Methylene Blue Dye BindingTesting Method, sufficient to result in a flow rate through the filter assembly of 0.1 L/min to 50 L/min, or any subrange between 0.1 L/min and 50 L/min.
[0029] In some embodiments, the ion exchange membrane comprises ionomer particles, located on a fluid contact surface, in an amount sufficient to: A) exhibit a dye binding capacity of 2 pg/cm2 to 100 pg/cm2, or any subrange between 2 pg/cm2 and 100 pg/cm2, as measured accordingto the Methylene Blue Dye BindingTesting Method; and B) result in a flow rate through the filter assembly of 0.1 L/min to 50 L/min, or any subrange between 0.1 L/min and 50 L/min.
[0030] The retentive membrane 130 may have a bubble point of at least 20 psi. In some embodiments, unless otherwise provided herein, the bubble point of the retentive membrane 130 is measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) (HFE) using an airflow porosimeter at 22 °C. In some embodiments, the bubble point of the retentive membrane 130 is 20 psi to 300 psi in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)), or any subrange between 20 psi and 300 psi. For example, in some embodiments, the bubble point of the retentive membrane 130 may 30 psi to 300 psi, 40 psi to 300 psi, 50 psi to 300 psi, 60 psi to 300 psi, 70 psi to 300 psi, 80 psi to 300 psi, 90 psi to 300 psi, 100 psi to 300 psi, 110 psi to 300 psi, 120 psi to 300 psi, 130 psi to 300 psi, 140 psi to 300 psi, 150 psi to 300 psi, 160 psi to 300 psi, 170 psi to 300 psi, 180 psi to 300 psi, 190 psi to 300 psi, 200 psi to 300 psi, 210 psi to 300 psi, 220 psi to 300 psi, 230 psi to 300 psi, 240 psi to 300 psi, 250 psi to 300 psi, 260 psi to 300 psi, 270 psi to 300 psi, 280 psi to 300 psi, or 290 psi to 300 psi. In some embodiments, the bubble point of the retentive membrane 130 may be 20 psi to 290 psi, 20 psi to 280 psi, 20 psi to 270 psi, 20 psi to 260 psi, 20 psi to 250 psi, 20 psi to 240 psi, 20 psi to 230 psi, 20 psi to 220 psi, 20 psi to 210 psi, 20 psi to 200 psi, 20 psi to 190 psi, 20 psi to 180 psi, 20 psi to 170 psi, 20 psi to 160 psi, 20 psi to 150 psi, 20 psi to 140 psi, 20 psi to 130 psi, 20 psi to 120 psi, 20 psi to 110 psi, 20 psi to 100 psi, 20 psi to 90 psi, 20 psi to 80 psi, 20 psi to 70 psi, 20 psi to 60 psi, 20 psi to 50 psi, 20 psi to 40 psi, or 20 psi to 30 psi. In some embodiments, the bubble point of the retentive membrane 130 may be 40 psi to 200 psi, 50 psi to 200 psi, 60 psi to 200 psi, 70 psi to 200 psi, 80 psi to 200 psi, 90 psi to 200 psi, 100 psi to 200 psi, 110 psi to 200 psi, 120 psi to 200 psi, 130 psi to 200 psi, 140 psi to 200 psi, 150 psi to 200 psi, 160 psi to 200 psi, 170 psi to 200 psi, 180 psi to 200 psi, 190 psi to 200 psi, 40 psi to 190 psi, 40 psi to 180 psi, 40 psi to 170 psi, 40 psi to 160 psi, 40 psi to 150 psi, 40 psi to 140 psi, 40 psi to 130 psi, 40 psi to 120 psi, 40 psi to 110 psi, 40 psi to 100 psi, 40 psi to 90 psi, 40 psi to 80 psi, 40 psi to 70 psi, 40 psi to 60 psi, or 40 psi to 50 psi.
[0031] In some embodiments, the retentive membrane 130 has a bubble point of 50 psi to 150 psi, or any subrange between 50 psi and 150 psi. For example, in some embodiments, the bubble point of the retentive membrane 130 may be 60 psi to 150 psi, 70 psi to 150 psi, 80 psi to 150 psi, 90 psi to 150 psi, 100 psi to 150 psi, 110 psi to 150 psi, 120 psi to 150 psi, 130 psi to 150 psi, or 140 psi to 150 psi. In some embodiments, the bubble point of the retentive membrane 130 may be 50 psi to 140 psi, 50 psi to 130 psi, 50 psi to 120 psi, 50 psi to 110 psi, 50 psi to 100 psi, 50 psi to 90 psi, 50 psi to 80 psi, 50 psi to 70 psi, 50 psi to 60 psi, 70 psi to 120 psi, 75 psi to 120 psi, 80 psi to 120 psi, 85 psi to 120 psi, 90 psi to 120 psi, 95 psi to 120 psi, 100 psi to 120 psi, 105 psi to 120 psi, 110 psi to 120 psi, 115 psi to 120 psi, 70 psi to 115 psi, 70 psi to 110 psi, 70 psi to 105 psi, 70 psi to 100 psi, 70 psi to 95 psi, 70 psi to 90 psi, 70 psi to 85 psi, 70 psi to 80 psi, or 70 psi to 75 psi.
[0032] In some embodiments, the retentive membrane 130 has a thickness of 10 pm to 200 pm, or any subrange between 10 pm and 200 pm. For example, in some embodiments, the thickness of the retentive membrane 130 may be 20 pm to 200 pm, 30 pm to 200 pm, 40 pm to 200 pm, 50 pm to 200 pm, 60 pm to 200 pm, 70 pm to 200 pm, 80 pm to 200 pm, 90 pm to 200 pm, 100 pm to 200 pm, 110 pm to 200 pm, 120 pm to 200 pm, 130 pm to 200 pm, 140 pm to 200 pm, 150 pm to 200 pm, 160 pm to 200 pm, 170 pm to 200 pm, 180 pm to 200 pm, or 190 pm to 200 pm. In some embodiments, the thickness of the retentive membrane 130 may be 10 pm to 190 pm, 10 pm to 180 pm, 10 pm to 170 pm, 10 pm to 160 pm, 10 pm to 150 pm, 10 pm to 140 pm, 10 pm to 130 pm, 10 pm to 120 pm, 10 pm to 110 pm, 10 pm to 100 pm, 10 pm to 90 pm, 10 pm to 80 pm, 10 pm to 70 pm, 10 pm to 60 pm, 10 pm to 50 pm, 10 pm to 40 pm, 10 pm to 30 pm, or 10 pm to 20 pm.
[0033] In some embodiments, the retentive membrane 130 comprises at least one of fluoropolymer, polytetrafluoroethylene, any copolymer thereof, or any combination thereof. In some embodiments, the retentive membrane 130 comprises a tetrafluoroethylene (TFE) copolymer. In some embodiments, the retentive membrane 130 comprises a TFE copolymer, wherein the retentive membrane 130 does not have a modified surface (e.g., a surface modified by a coating).
[0034] In some embodiments, the retentive membrane 130 comprises at least one of an asymmetric membrane, a symmetric membrane, or any combination thereof.
[0035] In some embodiments, the retentive membrane 130 has a surface modified by a coating. For example, in some embodiments, the retentive membrane 130 has a surface modified using any surface modification process known in the art, such as, for example and without limitation, the surface modification process described in U.S. Patent No. 10,150,087 and U.S. Patent No. 7,833,419, which is incorporated by reference herein in its entirety. In some embodiments, the coating comprises at least one of a non-crosslinked perfluorosulfonic acid polymer, a crosslinked perfluorosulfonic acid polymer, or any combination thereof. In some embodiments, the retentive membrane 130 comprises a TFE copolymer, wherein the retentive membrane 130 does not have a modified surface (e.g., a surface modified by a coating).
[0036] In some embodiments, a charge density on the surface of the retentive membrane 130 is 2 pg/cm2 to 50 pg/cm2, or any subrange between 2 pg/cm2 to 50 pg/cm2. For example, in some embodiments, the charge density of the retentive membrane 130 may be 10 pg/cm2 to 50 pg/cm2, 15 pg/cm2 to 50 pg/cm2, 20 pg/cm2 to 50 pg/cm2, 25 pg/cm2 to 50 pg/cm2, 30 pg/cm2 to 50 pg/cm2, 35 pg/cm2 to 50 pg/cm2, 40 pg/cm2 to 50 pg/cm2, or 45 pg/cm2 to 50 pg/cm2. In some embodiments, the charge density of the ion exchange membrane 120 may be 2 pg/cm2 to 45 pg/cm2, 2 pg/cm2 to 40 pg/cm2, 2 pg/cm2 to 35 pg/cm2, 2 pg/cm2 to 30 pg/cm2, 2 pg/cm2 to 25 pg/cm2, 2 pg/cm2 to 20 pg/cm2, 2 pg/cm2 to 15 pg/cm2, or 2 pg/cm2 to 10 pg/cm2.
[0037] In some embodiments, a dye binding capacity of the retentive membrane 130 is 2 pg/cm2 to 100 pg/cm2, or any subrange between 2 pg/cm2 to 50 pg/cm2. For example, in some embodiments, the charge density of the retentive membrane 130 may be 10 pg/cm2 to 50 pg/cm2, 15 pg/cm2 to 50 pg/cm2, 20 pg/cm2 to 50 pg/cm2, 25 pg/cm2 to 50 pg/cm2, 30 pg/cm2 to 50 pg/cm2, 35 pg/cm2 to 50 pg/cm2, 40 pg/cm2 to 50 pg/cm2, or 45 pg/cm2 to 50 pg/cm2. In some embodiments, the charge density of the ion exchange membrane 120 may be 2 pg/cm2 to 45 pg/cm2, 2 pg/cm2 to 40 pg/cm2, 2 pg/cm2 to 35 pg/cm2, 2 pg/cm2 to 30 pg/cm2, 2 pg/cm2 to 25 pg/cm2, 2 pg/cm2 to 20 pg/cm2, 2 pg/cm2 to 15 pg/cm2, or 2 pg/cm2 to 10 pg/cm2.
[0038] In some embodiments, a surface energy of the surface of the retentive membrane 130 is 25 mN/m to 60 mN/m, or any subrange between 25 mN/m to 60 mN/m. For example, in some embodiments, the surface energy of the surface of the retentive membrane 130 is 25 mN/m to 60 mN/m, 30 mN/m to 60 mN/m, 35 mN/m to 60 mN/m, 40 mN/m to 60 mN/m, 45 mN/m to 60 mN/m, 50 mN/m to 60 mN/m, or 55 mN/m to 60 mN/m. In some embodiments, the surface energy of the surface of the retentive membrane 130 is 25 mN/m to 55 mN/m, 25 mN/m to 50 mN/m, 25 mN/m to 45 mN/m, 25 mN/m to 40 mN/m, 25 mN/m to 35 mN/m, or 25 mN/m to 30 mN/m. [0039] In some embodiments, when an aqueous solution is flowed through the filter assembly at a temperature of greater than 25 °C (e.g., 30 °C to 100 °C) and dispensed as a filtrate onto a silicon wafer, a number of particles dispensed onto the silicon wafer by the filtrate is at least 5% less than a number of particles dispensed onto a silicon wafer by a filtrate from a control filter assembly, wherein the control filter assembly has a bubble point of less than 10 psi as measured in isopropyl alcohol using an air flow porosimeter at 22 °C. In some embodiments, the number of particles dispensed onto the silicon wafer by the filtrate is at least 10% less, at least 20% less, at least 30% less, at least 40% less, at least 50% less, at least 60% less, at least 70% less, at least 80% less, or at least 90% less, relative to the performance of the control filter assembly.
[0040] In some embodiments, the retentive membrane 130 is located upstream of the ion exchange membrane 120. In some embodiments, the retentive membrane 130 is located downstream of the ion exchange membrane 120.
[0041] FIG. 2 is a flowchart diagram of a method of filtration 200, accordingto some embodiments. As shown in FIG. 2, the method of filtration 200 may comprise one or more of the following steps: a step 210 of obtaining a filter assembly; and a step 220 of flowing a fluid through the filter assembly. In some embodiments, the method of filtration 200 comprises obtaining a fluid.
[0042] At step 210, the method of filtration 200 may comprise obtaining a filter assembly. The filter assembly may comprise any of the filter assemblies disclosed herein. For example, in some embodiments, the filter assembly of step 210 may be the filter assembly 100 as described herein. That is, in some embodiments, the filter assembly comprises a housing having a fluid inlet and a fluid outlet in fluid communication with the fluid inlet; an ion exchange membrane, wherein the ion exchange membrane is located in the housing between the fluid inlet and the fluid outlet, wherein the ion exchange membrane has a bubble point of at least 10 psi as measured in isopropyl alcohol using an airflow porosimeter at 22 °C; and a retentive membrane, wherein the retentive membrane is located in the housing between the fluid inlet and the fluid outlet, wherein the retentive membrane has a bubble point of at least 20 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an airflow porosimeter at 22 °C.
[0043] At step 220, the method of filtration 200 may comprise flowing a fluid through the filter assembly, from the fluid inlet to the fluid outlet, to separate at least one impurity from the fluid. In some embodiments, step 220 comprises flowing a fluid comprising defectcausing particles, through a filter assembly containing a retentive membrane and an ion exchange membrane. In some embodiments, the flowing may comprise at least one of pumping, passing, injecting, feeding, drawing, supplying, delivering, or otherwise providing the fluid to the filter assembly. It will be appreciated thatthe manner in which the fluid is provided to the filter assembly is not particularly limited and may include any suitable technique known in the art.
[0044] In some embodiments, step 220 comprises flowing a fluid comprising defectcausing particles, through a filter assembly containing a retentive membrane and an ion exchange membrane. In some embodiments, for a given temperature and a given duration, flowing the fluid through the filter assembly removes a greater amount of defect-causing particles than flowing the fluid through a control filter assembly. In some embodiments, a control filter assembly refers to a filter assembly containing an ion exchange layer having a bubble point of less than 10 psi when measured in isopropyl alcohol using an airflow porosimeter at 22 °C. In some embodiments, the control filter assembly comprises a same orsimilar retentive membrane.
[0045] The fluid may comprise a solvent and at least one impurity. In some embodiments, the solvent comprises at least one organic solvent. In some embodiments, for example, the at least one organic solvent comprises at least one of an anhydrous organic solvent, a non-anhydrous organic solvent (e.g., an organic solvent comprising at least some water), or any combination thereof. In some embodiments, the at least one organic solvent comprises at least one of at least one alcohol (e.g., at least one of methanol, ethanol, isopropanol, ethyl lactate, ethylene glycol, propylene glycol monomethyl ether, cyclohexanol, or any combination thereof), at least one polar aprotic solvents (e.g., at least one of acetonitrile, acetone, dimethylformamide, N-methyl-2-pyrrolidone, propylene glycol monomethyl ether acetate, or any combination thereof), at least one aromatic solvent (e.g., at least one of benzene, polyarylethers, or any combination thereof), at least one non-polar solvent (e.g., hexamethyldisilazane), or any combination thereof. In some embodiments, the fluid comprises at least one of a metal, a polymer, or any combination thereof. In some embodiments, the fluid comprises an aqueous solution.
[0046] The impurity may comprise any undesirable substance or substance to be removed (e.g., filtered). In some embodiments, the impurity comprises particles. For example, in some embodiments, the impurity comprises at least one of a metal impurity, an organic impurity, or any combination thereof. In some embodiments, the impurity is in the form of at least one of an elemental metal, a metal cation, a salt compound, a metal complex, a metal particle, or any combination thereof. The metal of the metal impurity may comprise at least one of an alkali metal, an alkaline earth metal, a transition metal, a post-transition metal, a lanthanoid, or any combination thereof. In some embodiments, for example, the metal comprises or is selected from the group consisting of a transition metal. In some embodiments, the metal comprises or is selected from the group consisting of a Group VIB metal. In some embodiments, the metal comprises or is selected from the group consisting of at least one of chromium (Cr), molybdenum (Mo), tungsten (W), or any combination thereof. In some embodiments, the metal comprises or is selected from the group consisting of at least one of chromium (Cr), molybdenum (Mo), tungsten (W), iron (Fe), vanadium (V), or any combination thereof.
[0047] In some embodiments, the organic impurity comprises a C21-C30 hydrocarbon. In some embodiments, the organic impurity comprises a linear C21-C30 hydrocarbon.
[0048] The filter assembly removes at least 50% of the at least one impurity from the fluid. For example, in some embodiments, the filter assembly removes 5% to 99% of the at least one impurity from the fluid, or any subrange between 5% and 99%. In some embodiments, the filter assembly removes 50% to 99%, 55% to 99%, 60% to 99%, 65% to 99%, 70% to 99%, 75% to 99%, 80% to 99%, 85% to 99%, 90% to 99%, 95% to 99%, 50% to 95%, 50% to 90%, 50% to 85%, 50% to 80%, 50% to 75%, 50% to 70%, 50% to 65%, 50% to 60%, 10% to 30%, 15% to 20%, or 50% to 55%. In some embodiments, the filter assembly removes the at least one impurity in its entirety (e.g., removes 100% of the at least one impurity, or at least a sufficient amount such that the at least one impurity is not detectable or at least is present in trivial or negligible amounts). In some embodiments, the filter assembly substantially removes the at least one impurity. For example, in some embodiments, 5% or less of the at least one impurity remains in the fluid at the housing fluid outlet. In some embodiments, the percent of the impurity is based on a total volume of the fluid. In some embodiments, the percent of the impurity is based on a total weight of the fluid.
[0049] The filter assembly may remove at least 10% of defect-causing particles from a fluid. For example, in some embodiments, the filter assembly removes 10% to 90%, 10% to 80%, 10% to 70%, 10% to 60%, 10% to 50%, 10% to 40%, 10% to 30%, 10% to 20%, 20% to 90%, 30% to 90%, 40% to 90%, 50% to 90%, 60% to 90%, 70% to 90%, or 80% to 90% of the defect-causing particles from the fluid, or any subrange between 10% and 90%.
[0050] The flowing of the fluid through the filter assembly may comprise flowing the fluid at a flow rate through the filter assembly. In some embodiments, the flow rate of the fluid through the filter assembly is 0.1 L/min to 50 L/min, or any subrange between 0.1 L/min to 50 L/min. For example, in some embodiments, the flow rate of the fluid through the filter assembly may be 0.1 L/min to 50 L/min, 1 L/min to 50 L/min, 5 L/min to 50 L/min, 10 L/min to 50 L/min, 15 L/min to 50 L/min, 20 L/min to 50 L/min, 25 L/min to 50 L/min, 30 L/min to 50 L/min, 35 L/min to 50 L/min, 40 L/min to 50 L/min, or 45 L/min to 50 L/min. In some embodiments, the flow rate of the fluid through the filter assembly 100 may be 0.1 L/min to 45 L/min, 0.1 L/min to 40 L/min, 0.1 L/min to 35 L/min, 0.1 L/min to 30 L/min, 0.1 L/min to 25 L/min, 0.1 L/min to 20 L/min, 0.1 L/min to 15 L/min, 0.1 L/min to 10 L/min, 0.1 L/min to 5 L/min, 0.1 L/min to 4 L/min, 0.1 L/min to 3 L/min, 0.1 L/min to 2 L/min, 0.1 L/min to 1 L/min, 0.1 L/min to 0.8 L/min, 0.1 L/min to 0.6 L/min, 0.1 L/min to 0.5 L/min, or 0.1 L/min to 0.4 L/min.
[0051] The fluid may be flowed through the filter assembly at a temperature of 20 °C to 100 °C, or any subrange between 20 °C to 100 °C. For example, in some embodiments, the fluid is flowed through the filter assembly at a temperature of 30 °C to 100 °C, 35 °C to 100 °C, 40 °C to 100 °C, 45 °C to 100 °C, 50 °C to 100 °C, 55 °C to 100 °C, 60 °C to 100 °C, 65 °C to 100 °C, 70 °C to 100 °C, 75 °C to 100 °C, 80 °C to 100 °C, 85 °C to 100 °C, 90 °C to 100 °C, or 95 °C to 100 °C. In some embodiments, the fluid is flowed through the filter assembly at a temperature of 20 °C to 95 °C, 20 °C to 90 °C, 20 °C to 85 °C, 20 °C to 80 °C, 20 °C to 75 °C, 20 °C to 70 °C, 20 °C to 65 °C, 20 °C to 60 °C, 20 °C to 55 °C, 20 °C to 50 °C, 20 °C to 45 °C, 20 °C to 40 °C, 20 °C to 35 °C, 20 °C to 30 °C, or 20 °C to 25 °C. In some embodiments, the fluid is flowed through the filter assembly at a temperature of 15 °C to 30 °C, 20 °C to 30 °C, 20 °C to 25 °C, 15 °C to 25 °C, or 15 °C to 20 °C. In some embodiments, the fluid is flowed through the filter assembly at a temperature of 50 °C to 90 °C, 50 °C to 85 °C, 50 °C to 80 °C, 50 °C to 75 °C, 50 °C to 70 °C, 50 °C to 65 °C, 50 °C to 60 °C, 50 °C to 55 °C, 55 °C to 90 °C, 60 °C to 90 °C, 65 °C to 90 °C, 70 °C to 90 °C, 75 °C to 90 °C, 80 °C to 90 °C, 85 °C to 90 °C, 60 °C to 80 °C, or 65 °C to 75 °C.
[0052] A pressure drop across the filter assembly may be in a range of 1 kPa to 500 kPa, or any range or subrange between 1 kPa and 500 kPa. In some embodiments, for example, the pressure drop across the filter assembly is 10 kPa to 500 kPa, 20 kPa to 500 kPa, 30 kPa to 500 kPa, 40 kPa to 500 kPa, 50 kPa to 500 kPa, 100 kPa to 500 kPa, 150 kPa to 500 kPa, 200 kPa to 500 kPa, 250 kPa to 500 kPa, 300 kPa to 500 kPa, 350 kPa to 500 kPa, 400 kPa to 500 kPa, 450 kPa to 500 kPa, 1 kPa to 450 kPa, 1 kPa to 400 kPa, 1 kPa to 350 kPa, 1 kPa to 300 kPa, 1 kPa to 250 kPa, 1 kPa to 200 kPa, 1 kPa to 150 kPa, 1 kPa to 100 kPa, 1 kPa to 50 kPa, 1 kPa to 40 kPa, 1 kPa to 30 kPa, 1 kPa to 20 kPa, 1 kPa to 10 kPa, or 1 kPa to 5 kPa.
[0053] The flowing the fluid through the filter assembly may be performed during startup (i.e., prior to filtration) and/or duringfiltration (i.e., after startup). During startup, for example, the flowing the fluid through the filter assembly may reduce a defect-causing particle content of the fluid to a baseline level sufficient to start filtration. For example, in some embodiments, the defect-causing particle content of the fluid reflects the defectcausing particles present in and removed from the filtration assembly (e.g., via shedding and/or cleaning of the filter(s)), wherein the defect-causing particles are transferred from the filtration assembly to the fluid. That is, for example, a decrease in the defect-causing particle content of the fluid exitingthe filter assembly corresponds to a decrease in the presence of defect causing particles present in the filter assembly. In some embodiments, the defect-causing particle content of the fluid reflects the defect-causing particles present in the fluid itself (e.g., at least one contaminant present in the fluid prior to flowing through the filter assembly).
[0054] The flowing the fluid through the filter assembly may reduce a defect-causing particle content of the fluid by at least 50% within 5 hours. In some embodiments, flowing the fluid through the filter assembly reduces a defect-causing particle content of the fluid by at least 50%, at least 60%, at least 70%, at least 80%, or at least 90%, within 5 hours, within 4 hours, within 3 hours, within 2 hours, orwithin 1 hour. In some embodiments, flowing the fluid through the filter assembly reduces a defect-causing particle content of the fluid by at least 50%, at least 60%, at least 70%, at least 80%, or at least 90%, within 20 hours, within 19 hours, within 18 hours, within 17 hours, within 16 hours, within 15 hours, within 14 hours, within 13 hours, within 12 hours, within 11 hours, within 10 hours, within 9 hours, within 8 hours, within 7 hours, orwithin 6 hours.
[0055] The defect-causing particles have an average particle size of greater than 15 nm, up to 500 nm, or any subrange between 15 nm and 500 nm. For example, in some embodiments, the defect-causing particles have an average particle size of 15 nm to 450 nm, 15 nm to 400 nm 15 nm to 350 nm, 15 nm to 300 nm, 15 nm to 250 nm, 15 nm to 200 nm, 15 nm to 150 nm, 15 nm to 100 nm, 15 nm to 50 nm, 50 nm to 400 nm, 100 nm to 400 nm, 150 nm to 400 nm, 200 nm to 400 nm, 250 nm to 400 nm, 300 nm to 400 nm, or 350 nm to 400 nm. In some embodiments, the defect-causing particles comprise the impurity described above.
EXAMPLE
[0056] To evaluate the performance of the filter assemblies disclosed herein, various sample filter assemblies are prepared and compared to various comparative filter assemblies. Table 1 below provides a summary of the various sample and comparative filter assemblies. The sample filter assemblies include Sample A, Sample B, and Sample C. The comparative filter assemblies include Comparative 1 and Comparative 2. Each of the comparative and sample filter assemblies includes a polytetrafluoroethylene (PTFE) membrane as a retentive membrane and an ion exchange membrane having fluid contact surfaces coated with ionomer particles, with the exception that Comparative 1 includes only a retentive membrane and does not include an ion exchange membrane. The bubble point for each of the ion exchange membranes and the amount of ionomer particles located on contact surfaces of the ion exchange membranes are sufficient to achieve a desired flow through each filter assembly (e.g., without plugging).
[0057] Table 1
* Bubble point for the retentive membrane is measured in hydrofluoroether (e.g., ethoxynonafluorobutane HFE 7200 (available from 3M)) (HFE) using an airflow porosimeter at 22 °C.
** Bubble pointforthe ion exchange membrane is measured in isopropyl alcohol (IPA) using an air flow porosimeter at 22 °C.
[0058] Each of the sample and comparative membranes provided in Table 1 is evaluated in accordance with the following procedure: Testing involves using a single wafer cleaning tool, where a solution of 100% isopropyl alcohol (IPA) solution at room temperature and subsequently at high temperature (e.g., temperature above room temperature) is flowed through each filter assembly at a fixed flow rate (0.1 L/min to 50 L/min). The high temperature IPA solution is the filtrate that is dispensed onto a silicon wafer. Prior to dispensingthe filtrate on the silicon wafer, the silicon wafer is pre-scanned on a wafer defect inspection system capable of measuring defects > 15 nm (e.g., 15 nm to 500 nm) in size on the wafer surface. After dispensing the filtrate on the silicon wafer, the silicon wafer is scanned again to determine the number of particles (e.g., defects) on the wafer. [0059] When tested according to the procedure detailed above, an amount of defectcausing particles present on the silicon wafer is markedly reduced for each of Sample A, Sample B, and Sample C, relative to Comparative 1 , and Comparative 2. The amount of defect-causing particles present on the silicon wafer for Comparative 2 (5 psi BP in IPA) is similar to the amount of defect-causing particles present on the silicon wafer for Comparative 1 (no IEX membrane), or at least markedly inferiorto a performance of Sample A, Sample B, and Sample C. In addition, each of Sample A, Sample B, and Sample C results in 10% to 90% fewer particles on the silicon wafer than each of Comparative 1 , and Comparative 2. This improvement in the removal performance for Sample A, Sample B, and Sample C, relative to Comparative 1 , is unexpected for at least the reason that the larger pore size of the ion exchange layer was previously thought to have a minimal effect on particle count due to the comparatively much smaller pore size of the retentive membrane relative to the ion exchange layer. This improvement in the removal performance for Sample A, Sample B, and Sample C, relative to Comparative 2, demonstrates that the removal performance of a filter assembly depends on the bubble point of the ion exchange membrane.
ASPECTS
[0060] Various Aspects are described below. It is to be understood that any one or more of the features recited in the following Aspect(s) can be combined with any one or more other Aspect(s).
[0061] Aspect 1 . A filter assembly comprising: a housing having a fluid inlet and a fluid outlet in fluid communication with the fluid inlet; an ion exchange membrane, wherein the ion exchange membrane is located in the housing between the fluid inlet and the fluid outlet; wherein the ion exchange membrane has a bubble point of at least 10 psi as measured in isopropyl alcohol using an airflow porosimeter at 22 °C; and a retentive membrane, wherein the retentive membrane is Located in the housing between the fluid inlet and the fluid outlet; wherein the retentive membrane has a bubble point of at least 20 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C.
[0062] Aspect 2. The filter assembly according to Aspect 1 , wherein the ion exchange membrane comprises at Least one of fluoropolymer, polytetrafluoroethylene, any copolymer thereof, or any combination thereof.
[0063] Aspect 3. The filter assembly according to any one of Aspects 1 -2, wherein the bubble point of the ion exchange membrane is 10 psi to 300 psi as measured in isopropyl alcohol using an air flow porosimeter at 22 °C.
[0064] Aspect 4. The filter assembly according to any one of Aspects 1-3, wherein the bubble point of the ion exchange membrane is 20 psi to 150 psi as measured in isopropyl alcohol using an air flow porosimeter at 22 °C.
[0065] Aspect 5. The filter assembly according to any one of Aspects 1 -4, wherein a thickness of the ion exchange membrane is 10 pm to 200 pm.
[0066] Aspect 6. The filter assembly according to any one of Aspects 1 -5, wherein the ion exchange membrane has a surface modified by an ionomer coating.
[0067] Aspect 7. The filter assembly according to any one of Aspects 1-6, wherein the ionomer coating comprises a perfluorosulfonic acid polymer.
[0068] Aspect 8. The filter assembly according to Aspect 6, wherein a charge density on the surface of the ion exchange membrane is 2 pg/cm2 to 100 pg/cm2.
[0069] Aspect 9. The filter assembly according to Aspect 6, wherein a surface energy of the surface of the ion exchange membrane is 25 mN/m to 60 mN/m.
[0070] Aspect 10. The filter assembly accordingto any one of Aspects 1-9, wherein the retentive membrane comprises at least one of fluoropolymer, polytetrafluoroethylene, any copolymer thereof, or any combination thereof.
[0071] Aspect 11 . The filter assembly accordingto any one of Aspects 1-10, wherein the bubble point of the retentive membrane is 20 psi to 300 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C.
[0072] Aspect 12. The filter assembly according to any one of Aspects 1-11 , wherein the bubble point of the retentive membrane is 50 psi to 150 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C.
[0073] Aspect 13. The filter assembly according to any one of Aspects 1-12, wherein a thickness of the retentive membrane is 10 pm to 200 pm.
[0074] Aspect 14. The filter assembly according to any one of Aspects 1-13, wherein the retentive membrane has a surface modified by a coating.
[0075] Aspect 15. The filter assembly accordingto Aspect 14, wherein the coating comprises at least one of a non-crosslinked perfluorosulfonic acid polymer, a crosslinked perfluorosulfonic acid polymer, or any combination thereof.
[0076] Aspect 16. The filter assembly accordingto any one of Aspects 1-15, wherein a charge density on a surface of the retentive membrane is 2 pg/cm2 to 50 pg/cm2.
[0077] Aspect 17. The filter assembly accordingto any one of Aspects 1-16, wherein a surface energy of a surface of the retentive membrane is 25 mN/m to 60 mN/m.
[0078] Aspect 18. A method of filtration comprising: obtaining a filter assembly comprising: a housing having a fluid inlet and a fluid outlet in fluid communication with the fluid inlet; an ion exchange membrane, wherein the ion exchange membrane is located in the housing between the fluid inlet and the fluid outlet; wherein the ion exchange membrane has a bubble point of at least 10 psi as measured in isopropyl alcohol using an airflow porosimeter at 22 °C; a retentive membrane, wherein the retentive membrane is located in the housing between the fluid inlet and the fluid outlet; wherein the retentive membrane has a bubble point of at least 20 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from
3M)) using an air flow porosimeter at 22 °C; and flowing a fluid through the filter assembly, from the fluid inlet to the fluid outlet, to separate at least one impurity from the fluid.
[0079] Aspect 19. The method according to Aspect 18, wherein the fluid comprises at least one of a metal, a polymer, or any combination thereof.
[0080] Aspect 20. The method according to any one of Aspects 17-19, wherein the filter assembly removes at least 50% of the at least one impurity from the fluid.
[0081] Aspect 21 . The method accordingto any one of Aspects 17-20, wherein the fluid is flowed to the filter assembly at a flow rate of 5 L/min to 50 L/min.
[0082] Aspect 22. The method accordingto any one of Aspects 17-21 , wherein the fluid is flowed through the filter assembly at a temperature of 20 °C to 100 °C.
[0083] Aspect 23. A method comprising: flowing a fluid comprising defect-causing particles, through a filter assembly containing a retentive membrane and an ion exchange membrane, wherein the ion exchange membrane has a bubble point of at least 10 psi when measured in isopropyl alcohol using an airflow porosimeter at 22 °C; wherein, for a given temperature and a given duration, flowing the fluid through the filter assembly removes a greater amount of the defect-causing particles than flowing the fluid through a control filter assembly.
[0084] Aspect 24. The method accordingto Aspect 23, wherein the fluid is flowed through the filter assembly at a temperature of 20 °C to 25 °C.
[0085] Aspect 25. The method accordingto Aspect 24, wherein flowingthe fluid through the filter assembly reduces a defect-causing particle content of the fluid by at least 50% within 5 hours.
[0086] Aspect 26. The method accordingto Aspect 23, wherein the fluid is flowed through the filter assembly at a temperature of 50 °C to 90 °C. [0087] Aspect 27. The method accordingto Aspect 26, wherein flowingthe fluid through the filter assembly reduces a defect-causing particle content of the fluid by at least 50% within 20 hours.
[0088] Aspect 28. The method accordingto any one of Aspects 23-27, wherein the defectcausing particles have an average particle size of greater than 15 nm.
[0089] Aspect 29. A filter assembly comprising: a retentive membrane, wherein the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C; and an ion exchange membrane, wherein the ion exchange membrane has:
A) a bubble point of less than 50 psi as measured in isopropyl alcohol using an air flow porosimeter at 22 °C; and
B) a dye binding capacity of 2 pg/cm2 to 100 pg/cm2 as measured accordingto the
Methylene Blue Dye BindingTesting Method.
[0090] Aspect 30. A filter assembly comprising: a retentive membrane, wherein the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C; and an ion exchange membrane, wherein the ion exchange membrane has:
A) a bubble point, when measured in isopropyl alcohol using an airflow porosimeter at 22 °C, and
B) a dye binding capacity, when measured accordingto the Methylene Blue Dye
BindingTesting Method, sufficient to result in a flow rate through the filter assembly of 0.1 L/min to 50 L/min.
[0091] Aspect 31 . A filter assembly comprising: a retentive membrane, wherein the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C; and an ion exchange membrane, wherein the ion exchange membrane has a bubble point of less than 50 psi as measured in isopropyl alcohol using an airflow porosimeter at 22 °C; wherein the ion exchange membrane comprises ionomer particles, located on a fluid contact surface, in an amount sufficient to:
A) exhibit a dye binding capacity of 2 pg/cm2 to 100 pg/cm2 as measured according to the Methylene Blue Dye BindingTesting Method; and
B) result in a flow rate through the filter assembly of 5 L/min to 50 L/min.
[0092] Aspect 32. The filter assembly accordingto any one of Aspects 29-31 , wherein, when a fluid comprising defect-causing particles is flowed through the filter assembly and then dispensed on a substrate, an amount of defect-causing particles dispensed onto the substrate, from the filter assembly, is at least 10% less than an amount of defect-causing particles dispensed onto a substrate, from a control filter assembly comprising an ion exchange membrane having a bubble point of greater than 40 psi as measured in isopropyl alcohol using an air flow porosimeter at 22 °C.
[0093] Aspect 33. The filter assembly accordingto any one of Aspects 29-32, wherein the amount of defect-causing particles dispensed onto the substrate, from the filter assembly, is 10% to 90% less than the amount of defect-causing particles dispensed onto the substrate, from the control filter assembly.
[0094] Aspect 34. The filter assembly accordingto any one of Aspects 29-33, wherein the ion exchange membrane has a bubble point of 10 psi to 30 psi when measured in isopropyl alcohol using an air flow porosimeter at 22 °C.
[0095] Aspect 35. The filter assembly accordingto any one of Aspects 29-34, wherein the ion exchange membrane has a bubble point of 10 psi to 20 psi when measured in isopropyl alcohol using an air flow porosimeter at 22 °C. [0096] Aspect 36. The filter assembly according to any one of Aspects 29-35, wherein the ion exchange membrane has a dye binding capacity of 2 pg/cm2 to 80 pg/cm2 as measured accordingto the Methylene Blue Dye BindingTesting Method.
[0097] Aspect 37. The filter assembly accordingto any one of Aspects 29-36, wherein the ion exchange membrane has a dye binding capacity of 2 pg/cm2 to 50 pg/cm2 as measured accordingto the Methylene Blue Dye BindingTesting Method.
[0098] Aspect 38. The filter assembly accordingto any one of Aspects 29-37, wherein the ion exchange membrane has a surface energy of 25 mN/m to 60 mN/m.
[0099] Aspect 39. The filter assembly accordingto any one of Aspects 29-38, wherein the retentive membrane has a bubble point of 40 psi to 200 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C.
[0100] Aspect 40. The filter assembly accordingto any one of Aspects 29-39, wherein the retentive membrane has a bubble point of 40 psi to 150 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C.
[0101] Aspect 41 . The filter assembly accordingto any one of Aspects 29-40, wherein the retentive membrane has a bubble point of 40 psi to 125 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C.
[0102] Aspect 42. The filter assembly accordingto any one of Aspects 29-41 , wherein the retentive membrane is located upstream of the ion exchanger membrane.
[0103] Aspect 43. A method of filtration comprising: obtaining a filter assembly, wherein the filter assembly comprises: a retentive membrane, wherein the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from
3M)) using an air flow porosimeter at 22 °C; and an ion exchange membrane, wherein the ion exchange membrane has:
A) a bubble point of less than 50 psi as measured in isopropyl alcohol using an air flow porosimeter at 22 °C; and
B) a dye binding capacity of 2 pg/cm2 to 100 pg/cm2 as measured according to the Methylene Blue Dye BindingTesting Method; obtaining a fluid comprising defect-causing particles; and flowing the fluid through the filter assembly to remove at least a portion of the defect-causing particles from the fluid.
[0104] Aspect 44. The method according to Aspect 43, wherein the filter assembly removes at least 10% of the defect-causing particles from the fluid.
[0105] Aspect 45. The method according to any one of Aspects 43-44, wherein the filter assembly removes 10% to 90% of the defect-causing particles from the fluid.
[0106] Aspect 46. The method according to any one of Aspects 43-45, wherein the flowing comprises flowing the fluid through the filter assembly at a flow rate of 0.1 L/min to 50 L/min.
[0107] Aspect 47. The method according to any one of Aspects 43-46, wherein the flowing comprises flowing the fluid through the filter assembly at a temperature of 20 °C to 100 °C.
[0108] Aspect 48. The method according to any one of Aspects 43-47, wherein the ion exchange membrane has a bubble point of 10 psi to 30 psi when measured in isopropyl alcohol using an air flow porosimeter at 22 °C.
[0109] Aspect 49. The method according to any one of Aspects 43-48, wherein the retentive membrane has a bubble point of 40 psi to 200 psi as measured in hydrofluoroether (e.g., ethoxy-nonafluorobutane HFE 7200 (available from 3M)) using an air flow porosimeter at 22 °C.
[0110] It is to be understood that changes may be made in detail, especially in matters of the construction materials employed and the shape, size, and arrangement of parts without departing from the scope of the present disclosure. This Specification and the 1 embodiments described are examples, with the true scope and spirit of the disclosure being indicated by the claims that follow.

Claims

1 . A filter assembly comprising: a retentive membrane, wherein the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether using an air flow porosimeter at 22 °C; and an ion exchange membrane, wherein the ion exchange membrane has:
A) a bubble point of less than 50 psi as measured in isopropyl alcohol using an air flow porosimeter at 22 °C; and
B) a dye binding capacity of 2 pg/cm2 to 100 pg/cm2 as measured according to the Methylene Blue Dye BindingTesting Method.
2. The filter assembly of claim 1 , wherein, when a fluid comprising defect-causing particles is flowed through the filter assembly and then dispensed on a substrate, an amount of defect-causing particles dispensed onto the substrate, from the filter assembly, is at least 10% less than an amount of defect-causing particles dispensed onto a substrate, from a control filter assembly comprising an ion exchange membrane having a bubble point of greater than 40 psi as measured in isopropyl alcohol using an air flow porosimeter at 22 °C.
3. The filter assembly of claim 2, wherein the amount of defect-causing particles dispensed onto the substrate, from the filter assembly, is 10% to 90% less than the amount of defect-causing particles dispensed onto the substrate, from the control filter assembly.
4. The filter assembly of claim 1 , wherein the ion exchange membrane has a bubble point of 10 psi to 30 psi when measured in isopropyl alcohol using an air flow porosimeter at 22 °C.
5. The filter assembly of claim 1 , wherein the ion exchange membrane has a bubble point of 10 psi to 20 psi when measured in isopropyl alcohol using an air flow porosimeter at 22 °C.
6. The filter assembly of claim 1 , wherein the ion exchange membrane has a dye binding capacity of 2 pg/cm2 to 80 pg/cm2 as measured according to the Methylene Blue Dye BindingTesting Method.
7. The filter assembly of claim 1 , wherein the ion exchange membrane has a dye binding capacity of 2 pg/cm2 to 50 pg/cm2 as measured according to the Methylene Blue Dye BindingTesting Method.
8. The filter assembly of claim 1 , wherein the ion exchange membrane has a surface energy of 25 mN/m to 60 mN/m.
9. The filter assembly of claim 1 , wherein the retentive membrane has a bubble point of 40 psi to 200 psi as measured in hydrofluoroether using an air flow porosimeter at 22 °C.
10. The filter assembly of claim 1 , wherein the retentive membrane has a bubble point of 40 psi to 150 psi as measured in hydrofluoroether using an air flow porosimeter at 22 °C.
11 . The filter assembly of claim 1 , wherein the retentive membrane has a bubble point of 40 psi to 125 psi as measured in hydrofluoroether using an air flow porosimeter at 22 °C.
12. The filter assembly of claim 1 , wherein the retentive membrane is located upstream of the ion exchanger membrane.
13. A method of filtration comprising: obtaining a filter assembly, wherein the filter assembly comprises: a retentive membrane, wherein the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether using an air flow porosimeter at 22 °C; and an ion exchange membrane, wherein the ion exchange membrane has:
A) a bubble point of less than 50 psi as measured in isopropyl alcohol using an airflow porosimeter at 22 °C; and
B) a dye binding capacity of 2 pg/cm2 to 100 pg/cm2 as measured accordingto the Methylene Blue Dye BindingTesting Method; obtaining a fluid comprising defect-causing particles; and flowing the fluid through the filter assembly to remove at least a portion of the defect-causing particles from the fluid.
1 . The method of claim 13, wherein the filter assembly removes at least 10% of the defect-causing particles from the fluid.
15. The method of claim 13, wherein the filter assembly removes 10% to 90% of the defectcausing particles from the fluid.
16. The method of claim 13, wherein the flowing comprises flowing the fluid through the filter assembly at a flow rate of 0.1 L/min to 50 L/min.
17. The method of claim 16, wherein the flowing comprises flowing the fluid through the filter assembly at a temperature of 20 °C to 100 °C.
18. The method of claim 13, wherein the ion exchange membrane has a bubble point of 10 psi to 30 psi when measured in isopropyl alcohol using an air flow porosimeter at 22 °C.
19. The method of claim 13, wherein the retentive membrane has a bubble point of 40 psi to 200 psi as measured in hydrofluoroether using an air flow porosimeter at 22 °C.
20. A filter assembly comprising: a retentive membrane, wherein the retentive membrane has a bubble point of at least 40 psi as measured in hydrofluoroether using an air flow porosimeter at
22 °C; and an ion exchange membrane, wherein the ion exchange membrane has:
A) a bubble point, when measured in isopropyl alcohol using an airflow porosimeter at 22 °C, and
B) a dye binding capacity, when measured according to the Methylene Blue
Dye BindingTesting Method, sufficient to result in a flow rate through the filter assembly of 0.1 L/min to 50 L/min.
EP24811693.1A 2023-05-19 2024-05-17 Filter assemblies and related systems and related methods Pending EP4713109A1 (en)

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PCT/US2024/030053 WO2024243072A1 (en) 2023-05-19 2024-05-17 Filter assemblies and related systems and related methods

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CN101247880A (en) * 2005-08-26 2008-08-20 安格斯公司 Porous Membranes Containing Exchange Resins
KR101695998B1 (en) * 2009-04-13 2017-01-23 엔테그리스, 아이엔씨. Porous composite membrane
DE102011105525B4 (en) * 2011-06-24 2015-03-26 Sartorius Stedim Biotech Gmbh Process for separating biopolymer aggregates and viruses from a fluid
EP3463631B1 (en) * 2016-05-27 2024-09-04 Entegris, Inc. Coated porous polymeric membranes
JP7556061B2 (en) * 2020-06-23 2024-09-25 インテグリス・インコーポレーテッド Composite Filter Material
US20210394128A1 (en) * 2020-06-23 2021-12-23 Entegris, Inc. Composite filter media
EP4225479B1 (en) * 2020-10-09 2026-05-06 Entegris, Inc. Filtration membrane systems, and methods for producing purified water
KR20240122495A (en) * 2021-12-14 2024-08-12 엔테그리스, 아이엔씨. Liquid filter unit with filters arranged laterally and its operating method

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