EP4705820A1 - Apparatus for an optical imaging system, optical imaging system, method and computer program - Google Patents

Apparatus for an optical imaging system, optical imaging system, method and computer program

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Publication number
EP4705820A1
EP4705820A1 EP24728014.2A EP24728014A EP4705820A1 EP 4705820 A1 EP4705820 A1 EP 4705820A1 EP 24728014 A EP24728014 A EP 24728014A EP 4705820 A1 EP4705820 A1 EP 4705820A1
Authority
EP
European Patent Office
Prior art keywords
geometry element
measurement
user
geometry
trigger signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP24728014.2A
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German (de)
French (fr)
Inventor
Linqi JIAO
Dennis BREITSPRECHER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems CMS GmbH
Leica Instruments Singapore Pte Ltd
Original Assignee
Leica Microsystems CMS GmbH
Leica Instruments Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102023117091.0A external-priority patent/DE102023117091A1/en
Application filed by Leica Microsystems CMS GmbH, Leica Instruments Singapore Pte Ltd filed Critical Leica Microsystems CMS GmbH
Publication of EP4705820A1 publication Critical patent/EP4705820A1/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365Control or image processing arrangements for digital or video microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/0016Technical microscopes, e.g. for inspection or measuring in industrial production processes

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Examples relate to an apparatus for an optical imaging system, an optical imaging system, a method, and a computer program. Examples provide an apparatus for an optical imaging system, comprising one or more processors and one or more storage devices. The apparatus is configured to receive a first trigger signal indicative of a desire of a user of the optical imaging system to run a measurement. The measurement requires a first geometry element and a second geometry element. Further, the apparatus is configured to receive a second trigger signal indicative of the first geometry element and the second geometry element. Further, the apparatus is configured to determine a measurement parameter, based on the first trigger signal and the second trigger signal and control the measurement based on the measurement parameter.

Description

Apparatus for an Optical Imaging System, Optical Imaging System, Method and Computer Program
Technical field
Examples relate to an optical imaging system, such as an optical imaging system used in industrial settings to monitor and control a quality of a manufacturing process or work piece, and to an optical imaging system, a method, and a computer program.
Background
Optical imaging system are often used in industrial and manufacturing settings for the purpose of monitoring and controlling the quality of processes or work pieces. The optical imaging system may feature digital imaging systems, video capabilities, and precision measurement tools, which allow users to quickly and accurately inspect samples and work pieces, such like products, during or after the manufacturing process. In addition, they often have automated analysis systems that can provide real-time feedback to production lines, further streamlining the quality process control. A software component of the measurement set is typically established through the use of specialized software that is designed to work with the microscope. However, the software component may be not sufficient to provide a user an intuitive and easy option to set up a measurement. Thus, there may be a desire for an improved concept providing an intuitive and easy workflow to set up a measurement, e.g., a measurement for process control.
Summary
This desire is addressed by the subject-matter of the independent claims.
The concept proposed in the present disclosure is based on the insight, that a user experience can be increased by providing a single workflow to set up a measurement. The single workflow may be a flexible approach to generate a geometry element and/or to define/run a measurement of the geometry element. The single workflow may improve a user experi- ence, for example, redundant user interactions can be omitted. This may allow to reduce a number of selections the user has to make when setting up a measurement.
Examples provide an apparatus for an optical imaging system, comprising one or more processors and one or more storage devices. The apparatus is configured to receive a first trigger signal indicative of a desire of a user of the optical imaging system to run a measurement. The first trigger signal may be received from an input device. The measurement requires a first geometry element and a second geometry element. Further, the apparatus is configured to receive a second trigger signal indicative of the first geometry element and the second geometry element. The second trigger signal may be received from the input device. Further, the apparatus is configured to determine a measurement parameter, based on the first trigger signal and the second trigger signal and control the measurement based on the measurement parameter. The first trigger signal can be generated based on a selection of an icon by a user. The icon to be selected can be displayed on a display device used to display a view of a sample. The second trigger signal can be generated based on a selection of a geometry element and/or a creation of a geometry element by the user. The measurement comprises at least the first geometry element and the second geometry element. Both the first geometry element and the second geometry element are required to perform the measurement. For example, a distance between both the first geometry element and the second geometry element should be measured. The measurement parameter determined based on the first trigger signal and the second trigger signal may be indicative of a parameter of the measurement, e.g., a distance between the first geometry element and the second geometry elements to be measured. The apparatus may control the measurement by generating a control signal and transmitting the control signal to a processing circuitry responsible for performing the measurement. Receiving the second trigger signal indicative of the first geometry element and the second geometry element, which may be associated with a desired measurement, the apparatus can receive information about each geometry element required for the (desired) measurement. This may allow to determine the measurement parameter based on the first trigger signal and the second trigger signal in a facilitated way. In this way, a number of selections the user has to make can be reduced. Thus, a user experience can be increased.
In an example, the second trigger signal may be indicative of trigger data indicative of a selection of a pre-existing geometry element by the user. The apparatus may be further con- figured to compare the selected pre-existing geometry element with the first geometry element and/or the second geometry element. If the selected pre-existing geometry element matches the first geometry element or the second geometry element the apparatus may be further configured to map the selected pre-existing geometry element to the first geometry element or second geometry element. A pre-existing geometry element may be a geometry element displayed on a display device. For example, a pre-existing geometry element may be already defined. Thus, the pre-existing geometry element could be assigned to the measurement without creating a new geometry element. The trigger data may comprise data about a selection of the user of the pre-existing geometry element. For example the trigger data may comprise data about an intention of the user to use the pre-existing geometry element for the measurement. By comparing the selected pre-existing geometry element the apparatus can determine whether the pre-existing geometry element can be used for the measurement. If the selected pre-existing geometry element can be used for the measurement, the apparatus can map the selected pre-existing geometry element to the first geometry element or the second geometry element. This may allow a user to select a geometry elements for the measurement. In this way unnecessary creation of a geometry element can be avoided.
In an example, if the selected pre-existing geometry element does not match the first geometry element or the second geometry element, the apparatus may be further configured to discard the trigger data. For example, the apparatus may not use the trigger data. This may ensure that only data relevant for the measurement is processed by the apparatus.
In an example, the second trigger signal may be indicative of user data indicative of a desire of the user to generate a geometry element. The apparatus may be further configured to compare the desire of the user to generate a geometry element with the first geometry element and/or the second geometry element. If the desire of the user to generate a geometry element matches the first geometry element or the second geometry element the apparatus may be further configured to generate the first geometry element or the second geometry element based on the user data. By comparing the desire of the user to generate a geometry element the apparatus can determine whether the desire of the user can be used for the measurement. If the desire of the user to generate a geometry element can be used for the measurement, the apparatus can generate a geometry element according to the desire of the user. The generated geometry element can be the first geometry element or the second ge- ometry element. This may allow the user to generate a geometry element for the measurement in a facilitated way.
In an example, the user data may be further indicative of a position of the geometry element to be generated. In this way, the user can define the geometry element according to an actual need.
In an example, if the desire of the user to generate a geometry element does not match the first geometry element or the second geometry, the apparatus may be further configured to discard the user data. For example, the apparatus may not use the user data. This may ensure that only data relevant for the measurement is processed by the apparatus.
In an example, the apparatus may be further configured to determine an order to compare the selected pre-existing geometry or the desire of the user to generate a geometry element with the first geometry and the second geometry element. The order may be determined based on the first trigger signal. For example, the first trigger signal may be indicative of an order in which the first geometry element must be defined before the second geometry element. This may allow to provide a straightforward workflow. For example, an association of the selected pre-existing geometry element can be done following the order. In this way, a number of selection the user has to make can be reduced.
In an example, the first trigger signal may be indicative of a desired measurement process. In this way, the measurement process can be started after selection/creation of all required geometry elements. This may allow to reduce a number of selections the user has to make.
In an example, the apparatus may be further configured to receive a third trigger signal and generate the measurement parameter further based on the third trigger signal. The third trigger signal may be received from the input device. The third trigger signal may be indicative of selection of a measurement process by the user. In this way, the user can define the measurement process, e.g., select the measurement process from multiple measurement processes. This may allow to provide a straightforward workflow for set up of a measurement. In an example, the apparatus may be further configured to obtain a measurement result for the measurement and transmit a measurement signal indicative of the measurement result. In this way, the user can be informed about the measurement result.
Embodiments provide a method for an apparatus for an optical imaging system. The method comprises receiving a first trigger signal indicative of a desire of a user of the optical imaging system to run a measurement, the measurement requiring a first geometry element and a second geometry element. The method further comprises receiving a second trigger signal indicative of the first geometry element and the second geometry element. The method further comprises determining, based on the first trigger signal and the second trigger signal, a measurement parameter and controlling, based on the measurement parameter, the measurement.
Various examples of the present disclosure relate to a corresponding computer program with a program code for performing the above method when the computer program is executed on a processor.
Short description of the Figures
Some examples of apparatuses and/or methods will be described in the following by way of example only, and with reference to the accompanying figures, in which
Fig. 1 shows a schematic diagram of an example of an apparatus for an optical imaging system;
Fig. 2a-2d show different examples of a workflow for set up of a measurement;
Fig. 3 shows a schematic illustration of a system; and
Fig. 4 shows a flow chart of an example of a method.
Detailed Description Various examples will now be described more fully with reference to the accompanying drawings in which some examples are illustrated. In the figures, the thicknesses of lines, layers and/or regions may be exaggerated for clarity.
Fig. 1 shows a schematic diagram of an example of an apparatus 130 for an optical imaging system 100. The apparatus 130 is tasked with controlling various aspects of a microscope of the optical imaging system 100, which may be an optical imaging system 100 for process control in industrial settings, and of the entire optical imaging system 100 and/or with processing various types of sensor data of the optical imaging system 100. Consequently, the apparatus 130 may be implemented as a computer system, which interfaces with the various components of the optical imaging system 100, e.g., the sensor 122.
The apparatus 130 comprises, as shown in Fig. 1, one or more processors 134 and one or more storage devices 136. Optionally, the apparatus 130 further comprises one or more interfaces 132. The one or more processors 134 are coupled to the one or more storage devices 136 and to the optional one or more interfaces 132. In general, the functionality of the apparatus 130 may be provided by the one or more processors 134 (e.g., for determining the measurement parameter), in conjunction with the one or more interfaces 132 (for exchanging data, e.g., with an input device to receive the first trigger signal and the second trigger signal, the display device 330 to transmit a measurement signal) and/or with the one or more storage devices 136 (for storing and/or retrieving data).
The apparatus 130 is configured to receive a first trigger signal indicative of a desire of a user of the optical imaging system 100 to run a measurement. The first trigger signal may be received from an input device. Alternatively, the first trigger signal may be received from a storage device. The input device may be a keyboard and/or controller, which can include a mouse, trackball, touch screen, voice-recognition device, or any other device that permits a system user to input information into. For example, the input device may be associated with the display device. The display device may be used to display a sample 110. For example, the sample 110 may be displayed through a microscope (not shown) of the optical imaging system 100. A view of the sample may be acquired by a sensor 122. The sample 110 may be a sample under test. For example, the sample 110 may be a work piece of an industrial manufacturing process. For example, the optical imaging system 100 may be configured for a process control of the sample 110. The optical imaging system 100 may be designed for use in a laboratory environment. The optical imaging system 100 can be used to inspect the sample 110, such like a product, during the manufacturing process to ensure that it meets required specifications and standards.
The optical imaging system 100 may be equipped with features such as digital imaging (e.g., the sensor 122), video capabilities (e.g., a display device 330), and precision measurement tools, which allow users, such like technicians, to identify defects, monitor changes in a manufacturing process, and/or make adjustments as necessary to ensure product quality. In addition, many process control microscopes have automated systems that can quickly analyze images and provide feedback to production lines, further streamlining the quality process control. However, there may be a need for adjusting the measurement for process control, e.g., to compensate for systematic errors caused by changes in a manufacturing process or set up a measurement for a new work piece.
The first trigger signal can be generated based on the selection of an icon by the user. An icon may be a graphical symbol that represent a specific action or feature. An icon can be used alone or in combination with text to initiate an action. For example, the first trigger signal can be generated by selecting only one icon by the user (e.g., see Fig. 2 icon 280). Thus, the apparatus 130 may receive information about multiple geometry elements required for the measurement by only one selection the user has to make. In this way, a number of selections the user has to make can be reduced.
Further, since the apparatus 130 receives information about multiple geometry elements with the first trigger signal, an information about an actual geometry element, e.g., a shape, a dimension, may be required. Thus, the apparatus 130 is further configured to receive a second trigger signal indicative of the first geometry element and the second geometry element. The second trigger signal may be received from the input device or a storage device. The second trigger signal may be received after the first trigger signal. For example, the second trigger signal may define the first geometry element and the second geometry element required for the measurement.
The second trigger signal may comprise multiple sub second trigger signal. A first sub second trigger signal may be indicative of the first geometry element and a second sub second trigger signal may be indicative of the second geometry element. The first sub second trig- ger signal may be received before the second sub second trigger signal. Alternatively, the second trigger signal may be only one signal indicative of the first geometry element and the second geometry element.
Therefore, the second trigger signal may define the geometry elements required for the measurement indicated by the first trigger signal. Thus, the apparatus 130 is further configured to determine a measurement parameter. The measurement parameter is determined based on the first trigger signal and the second trigger signal. A measurement parameter may be a specific variable that is measured and optionally monitored to ensure that a process is operating within desired limits. The measurement parameter may be typically a key indicator of the performance of the process, and it is used to detect when the process is deviating from its normal operating range. By monitoring the measurement parameters of a process, it is possible to identify when the process is operating outside of its desired range, and to take corrective action to bring it back into compliance. The measurement parameter may be associated to the first geometry element and/or the second geometry element. For example, the measurement comprising the first geometry element and the second geometry element can be performed using only one measurement parameter (e.g., only one measurement process may be available). Thus, no further data may be required to determine the measurement parameter. Alternatively, the measurement comprising the first geometry element and the second geometry element can be performed with multiple measurement parameters (e.g., multiple measurement processes may be available). In this case the user may select a measurement process. The apparatus 130 may receive data indicative of the selected measurement process and may determine the measurement parameter based on the selected measurement process.
For example, the measurement may be an optical inspection such as surface inspection, texture analysis, defect detection, dimensional measurement. The measurement parameter may be part of the measurement. The measurement can involve the measurement of a parameter, e.g., the measurement parameter, such as length, width, height, diameter, radius, roughness, texture of the sample 110, e.g., a structure of the sample 110.
A dimensional measurement refers to a process of determining a size and dimension of a structure. For example, a dimensional measurements may be used to inspect and verify the size and dimensions of work pieces, e.g., the sample 110, during the manufacturing process. This is done to ensure that the work piece meets the required specifications and standards, and to detect any deviation or defect that may affect the quality or performance of the work piece. Dimensional measurements can be performed on a wide range of materials and work pieces, including metal parts, plastic components, and electronic devices. The measurement parameter may be a part of a dimensional measurement. For example, a selection of the measurement process may define the distance between the first geometry element and the second geometry element to be measured, e.g., from edge to edge or from to center to center.
Further, the apparatus 130 is configured to control the measurement. The measurement is controlled based on the measurement parameter. The apparatus 130 may generate a control signal. The apparatus 130 may transmit the control signal to another processor, e.g., a processor of the optical imaging system 100 to perform the measurement. Thus, the apparatus 130 may trigger the measurement. Alternatively, the apparatus 130 may perform the measurement, e.g., the one or more processors 134.
By use of the apparatus 130 a flexible approach to generate geometry elements and/or a measurement of a parameter of the geometry elements within a single workflow can be provided. For example, the single workflow may be initiated by the user by selecting only a single icon. Using the first trigger signal and the second trigger signal a workflow for the user to perform a measurement, e.g., including creating a geometry element and defining a measurement process, can be facilitated. Instead of first defining geometry elements by selecting separate icons and then selecting the corresponding measurement icon for defining the measurement process, the apparatus 130 may allow an intuitive and straightforward set up of a measurement.
For example, the user can select a pre-existing geometry element. Additionally or alternatively, the user can generate a new geometry element. Based on the second trigger signal the apparatus 130 can determine whether a pre-existing geometry element should be used or a new geometry elements should be generated. Thus, there is no need for the user to choose between using a pre-existing geometry element or creating a new geometry element. This may allow to reduce a number of selections the user has to make. For example, the apparatus 130 may recognize upon selection, e.g., clicking of user, whether a pre-existing geometry element was selected, or whether a geometry element should be generated. Therefore, the apparatus 130 can adjust the measurement accordingly. For example, if no geometry element is present at a first selection the apparatus 130 may associate the first selection with an intent of the user to generate geometry element. Thus, the apparatus 130 can generate a region of interest based the first selection and a second selection of the user. Further, the apparatus 130 may generate a geometry element, e.g., the first geometry element, in the region of interest. Alternatively, if a pre-existing geometry element is present at a first selection, the apparatus 130 may determine if the user intended to select the pre-existing geometry element. For example, the apparatus 130 may associate the preexisting geometry element with the first geometry element. In this case, the apparatus 130 may associate a second selection with an intent of the user to select or generate the second geometry element. In this way, a number of selections the user is to make can be reduced.
The proposed concept is built around two main components - the microscope, which comprises the optical components, and which may house the display device 330 being used to view the sample 110, and the apparatus 130, which is used to control the optical imaging system 100, process sensor data of the microscope, e.g., the sensor 122, and to control the measurement.
In general, an optical microscope system 100 comprises a microscope that is suitable for examining objects that are too small to be examined by the human eye (alone). For example, a microscope may provide an optical magnification of a sample, such as a sample 110 shown in Fig. 1. Thus, a structure of the sample 110, e.g., formed by a manufacturing step, can be magnified and measured with increased precision. In modem microscopes, the optical magnification is often provided for a camera or an imaging sensor, such as the optical imaging sensors 122 of the microscope. The microscope may further comprise one or more optical magnification components that are used to magnify a view of the sample 110, such as an objective.
There are a variety of different types of optical imaging systems. For example, the optical imaging system 100 may be used for process control. The optical imaging system 100 may comprise an optical system, a camera or detector and a monitor, such as the display device 330. The optical system may typically comprise optical parts, such like lenses, mirrors, or other optical components that work together to produce a high-resolution image, e.g., the live view, of the sample 110. The camera or detector, e.g., the sensor 122, may be used to acquire the live view, e.g., the live view of the sample 110 and converts it into a digital signal that can be displayed on the display device 330 and/or analyzed using a software, e.g., performed by the apparatus 130. The display device 330 may be used to display the live view acquired by the sensor 122, as well as any additional information such as measurement data or analyzes methods, e.g., to provide a user a graphical user interface to trigger a user selection to generate the first trigger signal and/or the second trigger signal. For example, the display device 330 may be used to display multiple icons to be selected by the user.
In an example, the second trigger signal may be indicative of trigger data indicative of a selection of a pre-existing geometry element by the user. The apparatus 130 may be further configured to compare the selected pre-existing geometry element with the first geometry element and/or the second geometry element. If the selected pre-existing geometry element matches the first geometry element or the second geometry element the apparatus 130 may be further configured to map the selected pre-existing geometry element to the first geometry element or second geometry element. For example, a pre-existing geometry element may be a geometry element displayed on a display device, e.g., the display device 330. The trigger data may allow the apparatus 130 to associate the pre-existing geometry element with the measurement. In this way, an unnecessary creation of a geometry element can be avoided which may reduce a number of selections the user has to make. For example, the user may select the pre-existing geometry element, e.g., by clicking on the pre-existing geometry element. Data about the clicking on the pre-existing geometry element may be part of the trigger data. Thus, the apparatus 130 may receive the information about the clicking on the pre-existing geometry element via the trigger data. The apparatus 130 can assign, based on the trigger data (and the first trigger signal defining the first geometry element and the second geometry element), the pre-existing geometry element to the first geometry element or the second geometry element of the measurement.
For example, if no first geometry element is defined for the measurement (and the selected pre-existing geometry element matches the required first geometry element), the apparatus 130 may associate the trigger data with the first geometry element. Thus, the apparatus 130 can map the selected pre-existing geometry element to the first geometry element. Alternatively, if the first geometry element is already defined for the measurement, the apparatus 130 may associate the trigger data with the second geometry element (if the selected preexisting geometry element matches the required second geometry element). Thus, the apparatus 130 can map the selected pre-existing geometry element to the second geometry element. In this way, the apparatus 130 can provide a single workflow to the user. Further, a number of selection the user has to make can be reduced.
In an example, if the selected pre-existing geometry element does not match the first geometry element or the second geometry element, the apparatus 130 may be further configured to discard the trigger data. In this way, the apparatus 130 can determine whether the trigger data is used for the measurement or not. For example, a user may select a pre-existing geometry element, which does not belong to the measurement. Thus, the apparatus 130 can discard the trigger data and can wait for other trigger data.
In an example, the second trigger signal is indicative of user data indicative of a desire of the user to generate a geometry element. The apparatus 130 may be further configured to compare the desire of the user to generate a geometry element with the first geometry element and/or the second geometry element. If the desire of the user to generate a geometry element matches the first geometry element or the second geometry element the apparatus 130 may be further configured to generate the first geometry element or the second geometry element based on the user data. In this way, the apparatus 130 can generate a geometry element in a facilitated way.
For example, the user data may be indicative of two selections of the user. A first selection may be done by the user before a second selection. The first selection may be a selection of a position on the sample 110, e.g., in a live image displayed on the display device 330. The second selection may be a selection of another position on the sample 110, e.g., in a live image displayed on the display device 330. Thus, the apparatus 130 may determine an intent of the user to generate a geometry element based on the first selection and the second selection. The apparatus can generate a region of interest to generate the geometry element. The region of interest can be generated based on the first selection and the second selection. The geometry element can be generated in the region of interest. Thus, the apparatus 130 may provide a user a single workflow to easily define a measurement, e.g., the geometry elements. For example, if the first geometry element is already defined or generated the apparatus 130 may associate the user data with the second geometry element. Thus the user data can be used to define or generate the second geometry element. The user data may be indicative for defining (e.g., selecting a pre-existing geometry element) and/or generating the first geometry element and/or the second geometry element.
In an example, the user data may be further indicative of a position of the geometry element to be generated. For example, as described above the user data may be used by the apparatus 130 to generate a region of interest. Thus, the user data can be indicative of the position of the geometry element since the geometry element can be generated inside of the region of interest. In this way, the user can select a position or region for the geometry element to be generated.
In an example, if the desire of the user to generate a geometry element does not match the first geometry element or the second geometry, the apparatus 130 may be further configured to discard the user data. In this way, the apparatus 130 can determine whether the user data is used for the measurement or not. For example, in a live view of the sample 110, a user can select an area where no geometry element can be generated. Thus, the apparatus 130 can discard the user data and can wait for another user data.
In an example, the apparatus 130 may be further configured to determine an order to compare the selected pre-existing geometry or the desire of the user to generate a geometry element with the first geometry and the second geometry element. The order may be determined based on the first trigger signal. For example, the first trigger signal may be indicative of an order of the required first geometry element and second geometry element. For example, in order to provide a single workflow, the apparatus 130 may need to define an order in which the first geometry element and the second geometry element are defined and/or generated. For example, the apparatus 130 can assign selections of the user to the first geometry element or second geometry element based on the order. For example, the first geometry element may need to be defined or generated before the second geometry element can be defined or generated. This may allow to ensure that the selection of the user is associated with or assigned to a correct geometry element. In this way, a number of selections a user has to make can be reduced. The order can be assigned to an icon the user may select. For example, the icon may show different geometry elements. An arrangement of the geometry elements may be indicative of the order. In this way, the icon can inform the user of the order in which the geometry elements must be defined or created. Data about the selection of the icon by the user may be part of the first trigger signal. In this way, the apparatus 130 may receive required information to determine the order to assign the selected pre-existing geometry element or the desire of the user to the respective geometry element. Further, the icon can inform the user about a sequence of the signal workflow provided by the apparatus 130.
In an example, the first trigger signal may be indicative of a desired measurement process. For example, the first trigger signal may be indicative of only one possible measurement process. Thus, the apparatus 130 can control the measurement after receiving the second trigger signal. The second trigger signal could be used by the apparatus 130 to determine the first geometry element at the second geometry element for the measurement. This may allow the apparatus 130 to control the measurement straightforward.
Alternatively, the user may choose between multiple measurement processes. In an example, the apparatus 130 may be further configured to receive, from the input device or a storage device, a third trigger signal and generate the measurement parameter further based on the third trigger signal. The third trigger signal may be indicative of selection of a measurement process by the user. The measurement process may define the actual measurement, e.g., an optical inspection such as surface inspection, a texture analysis, a defect detection, a dimensional measurement. Additionally or alternatively, the measurement process may define the measurement of a parameter, e.g., a distance between the first geometry element and second geometry element, a dimension of the first geometry element, a shape of the first geometry element. The measurement process may be also referred to as measurement feature. Thus, the third trigger signal may be indicative of a selection of the user of a certain parameter for the measurement, e.g., a measurement feature. For example, the user may select a parameter for the measurement after defining and/or generating the geometry elements. The data about the selection of a parameter for the measurement by the user may be part of the third trigger signal.
In an example, the apparatus 130 may be further configured to obtain a measurement result for the measurement and to transmit a measurement signal indicative of the measurement result. For example, the measurement signal may be transmitted to a display device or a storage device, such like a frame buffer. In this way, the user can be informed about the measurement result.
As shown in Fig. 1 the optional one or more interfaces 132 is coupled to the respective one or more processors 134 at the apparatus 130. In examples the one or more processors 134 may be implemented using one or more processing units, one or more processing devices, any means for processing, such as a processor, a computer or a programmable hardware component being operable with accordingly adapted software. Similar, the described functions of the one or more processors 134 may as well be implemented in software, which is then executed on one or more programmable hardware components. Such hardware components may comprise a general-purpose processor, a Digital Signal Processor (DSP), a microcontroller, etc. The one or more processors 134 is capable of controlling the one or more interfaces 132, so that any data transfer that occurs over the one or more interfaces 132 and/or any interaction in which the one or more interfaces 132 may be involved may be controlled by the one or more processors 134.
In an embodiment the apparatus 130 may comprise a memory, e.g., the one or more storage devices 136 and at least one or more processors 134 operably coupled to the memory and configured to perform the method described below.
In examples the one or more interfaces 132 may correspond to any means for obtaining, receiving, transmitting or providing analog or digital signals or information, e.g., any connector, contact, pin, register, input port, output port, conductor, lane, etc. which allows providing or obtaining a signal or information. The one or more interfaces 132 may be wireless or wireline and it may be configured to communicate, e.g., transmit or receive signals, information with further internal or external components.
The apparatus 130 may be a computer, processor, control unit, (field) programmable logic array ((F)PLA), (field) programmable gate array ((F)PGA), graphics processor unit (GPU), application-specific integrated circuit (ASICs), integrated circuits (IC) or system-on-a-chip (SoCs) system. The apparatus 130 may be part of the optical imaging system 100. Alternatively, the apparatus 130 may be external to optical imaging system 100, e.g., may be part of a display device 330. More details and aspects are mentioned in connection with the examples described below. The example shown in Fig. 1 may comprise one or more optional additional features corresponding to one or more aspects mentioned in connection with the proposed concept or one or more examples described below (e.g., Fig. 2 - 4).
Fig. 2a-2d show different examples of a workflow for set up of a measurement. Fig. 2a shows a prior art workflow. Fig. 2a shows two different icons 210, 212 for generating a geometry element and one icon 214 for generating or defining the measurement feature. For example, icon 210 is for generating a line , icon 212 is for generating a circle and icon 214 is for defining a line-to-circle measurement.
The workflow shown in Fig. 2a requires the user to select the icon 210 to generate a line. To define a region of interest for the line fit to generate the line the user further has to select two points on the sample, e.g., in the live view of the sample, in 220. After generating the line the user selects the icon 212 for generating a circle. To define a region of interest for the circle fit to generate the circle the user furthers has to select two points in the live view in 230. After generating the circle the user selects the icon 214 to define the measurement feature. The measurement feature may be aligned to circle measurement. To define the line and circle measurement the user further has to select in 240 the line, in 250 the circle and in 260 the desired measurement feature, e.g., a position measurement value. Thus, the number of selections the user has to make is at least 10. For example, the user has to click 10 times on different icons and/or positions of the live view/icon panel to run a measurement. For example, a cursor used by the user to perform a selection must move three times between live view and the icon panel. Thus, the user experience may be decreased by the number of required selections and/or by switching between the live view to define, for example, a region of interest and the icon panel, for example, to select a geometry element to be generated.
In contrast, the apparatus as described in Fig. 1 can be used to reduce the number of selections the user has to make. As can be seen in the Figs. 2b-2d the number of selections the user to make can be reduced based on the first trigger signal and the second trigger signal and the optionally third trigger signal. The icon 280 can be designed such that a defining/generation order of the geometry elements is from left-to-right (see the arrow 278 indicating the creation order of the geometry elements shown in icon 280). For example, the icon 280 may indicate that the user has first to define or generate the first geometry element 282, e.g., a line. After defining or generating the first geometry element 282 the user has second to define or generate the second geometry element 284. In this way, the user can be informed about the workflow supported or provided by the apparatus.
The apparatus may provide an “On-the-fly” workflow. The On-the-fly workflow may allow a direct definition of a generation of required geometry elements and a selection of the measurement feature in a single workflow. This may allow to reduce the number of selections the user has to make. For example, as shown in Fig. 2b the number of clicks is reduced to 6. Further, a cursor does only move one time between live image and icon panel. This may improve a user experience. As can be seen in Fig. 2b the user may have to select the icon 280 to initiate set up of the measurement. During set up of the measurement the user may define the measurement feature and the geometry elements on-the-fly. In 290 the user may select a region of interest for the line fit to generate the first geometry element, e.g., a line. In 292 the user may select a region of interest for the circle fit to generate the second geometry element, e.g., a circle. Data about the selection of the user in 292 and 294 may be part of the user data as described above. In 294 the user may select a measurement feature. Thus, the on-the-fly workflow may only require six selections the user has to make to set up the measurement. Therefore, the user can run a measurement by performing only six clicks.
Figs. 2c and 2d show alternatives, a mixed approach, in which one geometry element (pre)exists. Thus, the apparatus may distinguish between a selection of a pre-existing geometry element or a desire of the user to generate a new geometry element. For example, as can be seen in Figs. 2c and 2d the apparatus may adopt the workflow accordingly to the selection of the user (received by the second trigger signal).
Fig. 2c shows a workflow in which the second geometry element already (pre)exists. The user may start the workflow by selection of the icon 280. The icon 280 may be identical to the icon shown in Fig. 2b. In 290’ the user may select the region of interest for the line fit to generate the first geometry element, e.g., a line. Data about the selection 290’ may be part of the user data as described above. In 292’ the user may select the pre-existing geometry ele- ment as the second geometry element of the measurement. Data about the selection 292’ may be part of the trigger data as described above. Thus, the apparatus may map the preexisting geometry element to the second geometry element of the measurement. In 294’ the user may select the measurement feature. Thus, the on-the-fly workflow may only require five selections the user has to make to set up the measurement.
Fig. 2d shows a workflow in which the first geometry element already (pre)exists. The user may start the workflow by selection of the icon 280. The icon 280 may be identical to the icon shown in Fig. 2b or 2c. In 290” the user may select the pre-existing geometry element as the first geometry element of the measurement. Data about the selection 290” may be part of the trigger data as described above. Thus, the apparatus may map the pre-existing geometry element to the first geometry element of the measurement. In 292” the user may select the region of interest for the circle fit to generate the second geometry element, e.g., a circle. Data about the selection 292’ ’ may be part of the user data as described above. In 294” the user may select the measurement feature. Thus, the on-the-fly workflow may only require five selections the user has to make to set up the measurement.
More details and aspects are mentioned in connection with the examples described above and/or below. The example shown in Fig. 2 may comprise one or more optional additional features corresponding to one or more aspects mentioned in connection with the proposed concept or one or more examples described above (e.g., Fig. 1) and/or below (e.g., Fig. 3 - 4).
Some embodiments relate to an optical imaging system comprising an apparatus as described in connection with Fig. 1. Alternatively, an optical imaging system may be part of or connected to an apparatus as described in connection with Fig. 1.
Fig. 3 shows a schematic illustration of a system 300, e.g., an optical imaging system 300. The optical imaging system 300 may comprise an apparatus as described with reference to Fig. 1 and a display device 330. The display device 330 may be part of a computer system 320. For example, the microscope 310 may comprise or can be communicatively coupled to the apparatus. Alternatively, the computer system 320 may comprise the apparatus. The microscope 310 can be communicatively coupled to the display device 330. Thus, the appa- ratus can transmit the display signal from the microscope 310 to the display device 330 or a storage device, such like a frame buffer.
Fig. 3 shows a schematic illustration of a system 300 configured to perform a method described herein, e.g., with reference to Figs. 2 and 4. The system 300 comprises a microscope 310 and a computer system 320. The microscope may comprise the apparatus as described above, e.g., with reference to Fig. 1. The microscope 310 is configured to take images and is connected to the computer system 320. The computer system 320 is configured to execute at least a part of a method described herein. The computer system 320 may be configured to execute a machine learning algorithm. The computer system 320 and microscope 310 may be separate entities but can also be integrated together in one common housing. The computer system 320 may be part of a central processing system of the microscope 310 and/or the computer system 320 may be part of a subcomponent of the microscope 310, such as a sensor, an actor, a camera or an illumination unit, etc. of the microscope 310.
The computer system 320 may be a local computer device (e.g., personal computer, laptop, tablet computer or mobile phone) with one or more processors and one or more storage devices or may be a distributed computer system (e.g., a cloud computing system with one or more processors and one or more storage devices distributed at various locations, for example, at a local client and/or one or more remote server farms and/or data centers). The computer system 320 may comprise any circuit or combination of circuits. In one embodiment, the computer system 320 may include one or more processors which can be of any type. As used herein, processor may mean any type of computational circuit, such as but not limited to a microprocessor, a microcontroller, a complex instruction set computing (CISC) microprocessor, a reduced instruction set computing (RISC) microprocessor, a very long instruction word (VLIW) microprocessor, a graphics processor, a digital signal processor (DSP), multiple core processor, a field programmable gate array (FPGA), for example, of a microscope or a microscope component (e.g., camera) or any other type of processor or processing circuit. Other types of circuits that may be included in the computer system 320 may be a custom circuit, an application-specific integrated circuit (ASIC), or the like, such as, for example, one or more circuits (such as a communication circuit) for use in wireless devices like mobile telephones, tablet computers, laptop computers, two-way radios, and similar electronic systems. The computer system 320 may include one or more storage devices, which may include one or more memory elements suitable to the particular application, such as a main memory in the form of random access memory (RAM), one or more hard drives, and/or one or more drives that handle removable media such as compact disks (CD), flash memory cards, digital video disk (DVD), and the like. The computer system 320 may also include a display device, one or more speakers, and a keyboard and/or controller, which can include a mouse, trackball, touch screen, voice-recognition device, or any other device that permits a system user to input information into and receive information from the computer system 320.
More details and aspects are mentioned in connection with the examples described above and/or below. The example shown in Fig. 3 may comprise one or more optional additional features corresponding to one or more aspects mentioned in connection with the proposed concept or one or more examples described above (e.g., Fig. 1 - 2) and/or below (e.g., Fig. 4).
Fig. 4 show a flow chart of an example of a method 400. The method 400 for an optical imaging system comprises receiving 410 a first trigger signal indicative of a desire of a user of the optical imaging system to run a measurement. The measurement requiring a first geometry element and a second geometry element. Further, the method 400 comprises receiving 420a second trigger signal indicative of the first geometry element and the second geometry element. The first trigger signal may be received from an input device and/or a storage device. The second trigger signal may be received from an input device and/or a storage device. Further, the method 400 comprises determining 430, based on the first trigger signal and the second trigger signal, a measurement parameter and controlling 440, based on the measurement parameter, the measurement. The method 400 may be performed by an apparatus as described with reference to Fig. 1.
More details and aspects are mentioned in connection with the examples described above. The example shown in Fig. 4 may comprise one or more optional additional features corresponding to one or more aspects mentioned in connection with the proposed concept or one or more examples described above (e.g., Fig. 1 - 3).
Some or all of the method steps may be executed by (or using) a hardware apparatus, like for example, a processor, a microprocessor, a programmable computer or an electronic cir- cuit. In some embodiments, some one or more of the most important method steps may be executed by such an apparatus.
Depending on certain implementation requirements, embodiments of the invention can be implemented in hardware or in software. The implementation can be performed using a non- transitory storage medium such as a digital storage medium, for example a floppy disc, a DVD, a Blu-Ray, a CD, a ROM, a PROM, and EPROM, an EEPROM or a FLASH memory, having electronically readable control signals stored thereon, which cooperate (or are capable of cooperating) with a programmable computer system such that the respective method is performed. Therefore, the digital storage medium may be computer readable.
Some embodiments according to the invention comprise a data carrier having electronically readable control signals, which are capable of cooperating with a programmable computer system, such that one of the methods described herein is performed.
Generally, embodiments of the present invention can be implemented as a computer program product with a program code, the program code being operative for performing one of the methods when the computer program product runs on a computer. The program code may, for example, be stored on a machine readable carrier.
Other embodiments comprise the computer program for performing one of the methods described herein, stored on a machine readable carrier.
In other words, an embodiment of the present invention is, therefore, a computer program having a program code for performing one of the methods described herein, when the computer program runs on a computer.
A further embodiment of the present invention is, therefore, a storage medium (or a data carrier, or a computer-readable medium) comprising, stored thereon, the computer program for performing one of the methods described herein when it is performed by a processor. The data carrier, the digital storage medium or the recorded medium are typically tangible and/or non-transitionary. A further embodiment of the present invention is an apparatus as described herein comprising a processor and the storage medium. A further embodiment of the invention is, therefore, a data stream or a sequence of signals representing the computer program for performing one of the methods described herein. The data stream or the sequence of signals may, for example, be configured to be transferred via a data communication connection, for example, via the internet.
A further embodiment comprises a processing means, for example, a computer or a programmable logic device, configured to, or adapted to, perform one of the methods described herein.
A further embodiment comprises a computer having installed thereon the computer program for performing one of the methods described herein.
A further embodiment according to the invention comprises an apparatus or a system configured to transfer (for example, electronically or optically) a computer program for performing one of the methods described herein to a receiver. The receiver may, for example, be a computer, a mobile device, a memory device or the like. The apparatus or system may, for example, comprise a file server for transferring the computer program to the receiver.
In some embodiments, a programmable logic device (for example, a field programmable gate array) may be used to perform some or all of the functionalities of the methods described herein. In some embodiments, a field programmable gate array may cooperate with a microprocessor in order to perform one of the methods described herein. Generally, the methods are preferably performed by any hardware apparatus.
If some aspects have been described in relation to a device or system, these aspects should also be understood as a description of the corresponding method and vice versa. For example, a block, device or functional aspect of the device or system may correspond to a feature, such as a method step, of the corresponding method. Accordingly, aspects described in relation to a method shall also be understood as a description of a corresponding block, a corresponding element, a property or a functional feature of a corresponding device or a corresponding system.
The following claims are hereby incorporated in the detailed description, wherein each claim may stand on its own as a separate example. It should also be noted that although in the claims a dependent claim refers to a particular combination with one or more other claims, other examples may also include a combination of the dependent claim with the subject matter of any other dependent or independent claim. Such combinations are hereby explicitly proposed, unless it is stated in the individual case that a particular combination is not intended. Furthermore, features of a claim should also be included for any other independent claim, even if that claim is not directly defined as dependent on that other independent claim.
The aspects and features described in relation to a particular one of the previous examples may also be combined with one or more of the further examples to replace an identical or similar feature of that further example or to additionally introduce the features into the further example.
List of reference Signs
100 optical imaging system
110 sample
122 sensor
130 apparatus
132 interface
134 processor
136 storage device
210, 212, 214 icon
220, 230 selection region of interest
240, 250 selection geometry element
260 selection measurement feature
278 creation order of geometry elements
280 icon
282 first geometry element
284 second geometry element
290, 290’, 292, 292” selection region of interest
290”, 292’ selection geometry element
294, 294, 294’ ’ selection measurement feature
300 system
310 microscope
320 computer system
330 display device
400 method
410 receiving a first trigger signal
420 receiving a second trigger signal
430 determining a measurement parameter
440 controlling the measurement

Claims

Claims
1. An apparatus (130) for an optical imaging system, comprising one or more processors (134) and one or more storage devices (136), wherein the apparatus (130) is configured to: receive a first trigger signal indicative of a desire of a user of the optical imaging system to run a measurement, the measurement requiring a first geometry element and a second geometry element; receive a second trigger signal indicative of the first geometry element and the second geometry element; determine, based on the first trigger signal and the second trigger signal, a measurement parameter; and control, based on the measurement parameter, the measurement.
2. The apparatus (130) according to claim 1, wherein the second trigger signal is indicative of trigger data indicative of a selection of a pre-existing geometry element by the user; and wherein the apparatus (130) is further configured to: compare the selected pre-existing geometry element with at least one of the first geometry element or the second geometry element; and if the selected pre-existing geometry element matches the first geometry element or the second geometry element, map the selected pre-existing geometry element to the first geometry element or second geometry element.
3. The apparatus (130) according to claim 2, wherein if the selected pre-existing geometry element does not match the first geometry element or the second geometry element, the apparatus (130) is further configured to discard the trigger data.
4. The apparatus (130) according any one of the preceding claims, wherein the second trigger signal is indicative of user data indicative of a desire of the user to generate a geometry element, and wherein the apparatus (130) is further configured to: compare the desire of the user to generate a geometry element with at least one of the first geometry element or the second geometry element; and if the desire of the user to generate a geometry element matches the first geometry element or the second geometry element, generate the first geometry element or the second geometry element based on the user data.
5. The apparatus (130) according to claim 4, wherein the user data is further indicative of a position of the geometry element to be generated.
6. The apparatus (130) according to claim 4 or 5, wherein if the desire of the user to generate a geometry element does not match the first geometry element or the second geometry, the apparatus (130) is further configured to discard the user data.
7. The apparatus (130) according to any one of the claims 2-6, wherein the apparatus (130) is further configured to: determine, based on the first trigger signal, an order to compare the selected preexisting geometry or the desire of the user to generate a geometry element with the first geometry and the second geometry element.
8. The apparatus (130) according to any one of the preceding claims, wherein the first trigger signal is indicative of a desired measurement process.
9. The apparatus (130) according to any one of the preceding claims, where the apparatus (130) is further configured to: receive a third trigger signal, the third trigger signal indicative of selection of a measurement process by the user; and generate the measurement parameter further based on the third trigger signal.
10. The apparatus (130) according to any one of the preceding claims, wherein the apparatus (130) is further configured to: obtain a measurement result for the measurement; and transmit a measurement signal indicative of the measurement result.
11. An optical system (100), comprising an apparatus (130) according to any one of the preceding claims.
12. A method (400) for an apparatus for an optical imaging system, comprising: receiving (410) a first trigger signal indicative of a desire of a user of the optical imaging system to run a measurement, the measurement requiring a first geometry element and a second geometry element; receiving (420) a second trigger signal indicative of the first geometry ele- ment and the second geometry element; determining (430), based on the first trigger signal and the second trigger signal, a measurement parameter; and controlling (440), based on the measurement parameter, the measurement.
13. A computer program having a program code for performing a method according to claim 12 when the program is executed on processor.
EP24728014.2A 2023-05-04 2024-05-04 Apparatus for an optical imaging system, optical imaging system, method and computer program Pending EP4705820A1 (en)

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DE102023117091.0A DE102023117091A1 (en) 2023-05-04 2023-06-28 Apparatus for an optical imaging system, optical imaging system, method and computer program
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