EP4179562A1 - Small-volume uhv ion-trap package and method of forming - Google Patents
Small-volume uhv ion-trap package and method of formingInfo
- Publication number
- EP4179562A1 EP4179562A1 EP21837680.4A EP21837680A EP4179562A1 EP 4179562 A1 EP4179562 A1 EP 4179562A1 EP 21837680 A EP21837680 A EP 21837680A EP 4179562 A1 EP4179562 A1 EP 4179562A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ion
- uhv
- trap
- enclosure
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
- H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
- H01J49/164—Laser desorption/ionisation, e.g. matrix-assisted laser desorption/ionisation [MALDI]
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N10/00—Quantum computing, i.e. information processing based on quantum-mechanical phenomena
- G06N10/40—Physical realisations or architectures of quantum processors or components for manipulating qubits, e.g. qubit coupling or qubit control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/424—Three-dimensional ion traps, i.e. comprising end-cap and ring electrodes
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/20—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating for confining charged particles or handling confined charged particles, e.g. ion traps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
Definitions
- This disclosure relates generally to quantum computing and, more specifically, to housings for ion traps capable of supporting an ultra-high vacuum environment.
- Optical frequencies of lasers driving near resonant processes should be stabilized to a part in 10 10 range to properly utilize these transitions for qubit manipulation and read-out.
- Quantum logic gates are often driven using Raman transition, where two far-detuned non-co-propagating beams with precise frequency difference intersect at the location of the ion. Beam path-length and pointing fluctuations of these Raman beams lead to optical phase and intensity fluctuations at the ions, which results in imperfect gates.
- the trapped-ion system and the optical elements used for the delivery of the laser beams should be stable against environment noise such as temperature fluctuations, air currents and mechanical vibrations.
- the present disclosure enables extremely compact ion-trap systems that can operate at non-cryogenic temperatures in ultra-high vacuum, and that can have system volume less than or equal to 10 cubic centimeters (cc).
- An illustrative embodiment in accordance with the present disclosure is an ion-trap system comprising an enclosure that encloses an ion trap in a high-vacuum chamber having a volume of approximately 2 cm 3 .
- the enclosure includes a plurality of piece parts that includes a chip carrier on which the ion trap is mounted, a housing, and a lid, where every joint between piece parts of the enclosure is made using a UHV seal that would be suitable for use in a UHV deposition system while located in an environment having a pressure that is less than or equal to 10 9 Torr. Because the enclosure is sealed while in an ultra-high vacuum state to establish its baseline pressure, the ion-trap system is cryogenic-cooling-system-free.
- the chamber and total system can have very small volumes and the ion trap can operate at temperatures above cryogenic temperatures.
- the enclosure is fluidically coupled with a vacuum pump prior to being sealed in the UHV environment such that the vacuum pump can further reduce the pressure in the chamber to far below 10 10 Torr.
- the enclosure includes one or more windows for providing a view port, optical access for a photo-ionization laser signal for loading the ion trap with ions, optical access for a laser signal for ablating material to produce an atomic flux within the chamber, providing one or more laser signals used to initialize, manipulate and readout the trapped ion qubits, and/or collect scattered photons from the trapped ion qubits for imaging and qubit state detection.
- An embodiment in accordance with the present disclosure is an ion-trap system comprising: an ion trap disposed on a chip carrier; and an enclosure that encloses the ion trap in a first chamber, wherein the enclosure includes a plurality of piece parts that includes the chip carrier and a housing, and wherein the piece parts of the plurality thereof are joined with a plurality of seals that consists of UHV seals; wherein the first chamber has a pressure that is less than or equal to 10 10 Torr; wherein the first chamber has an internal volume that is less than or equal to 10 cm 3 ; and wherein the ion-trap system has an operating temperature that is greater than or equal to -50 °C.
- an ion-trap system comprising: an ion trap disposed on a chip carrier; and an enclosure that encloses the ion trap in a first chamber, wherein the enclosure includes a plurality of piece parts comprising the chip carrier and a housing; a plurality of seals that consists of UHV seals, wherein plurality of seals join the piece parts of the plurality thereof; and an ion pump that is joined with the enclosure via a first UHV seal; wherein the first chamber has a pressure that is less than or equal to 10 10 Torr; wherein the ion-trap system is cryosorption-pump- free; and wherein the ion-trap system is configured to enable an operating temperature that is greater than or equal to -50 °C.
- Yet another embodiment in accordance with the present disclosure is a method for forming an ion-trap system, the method comprising: locating an ion trap in a first environment having a first pressure that is less than or equal to 10 9 Torr, wherein the ion trap is located within a chamber of an enclosure that includes a plurality of piece parts that are joined with a plurality of seals that consists of UHV seals, the chamber being open to the first environment; and forming a first UHV seal to close the chamber off from the first environment while the ion trap and enclosure are located in the first environment.
- FIG. 1 shows a block diagram of an illustrative ion-trap system in accordance with the present disclosure.
- FIGS. 2A-B depict schematic drawings of top and sectional views, respectively, of an ion-trap package in accordance with the illustrative embodiment.
- FIG. 3 depicts operations of a method suitable for forming an ion-trap package in accordance with the illustrative embodiment.
- FIG. 4 depicts a block diagram of a UHV assembly system in accordance with the present disclosure.
- FIG. 5 depicts operations of a method for monitoring the pressure inside an ion-trap system in accordance with the present disclosure.
- FIG. 6A depicts a simulation of a double-well potential in accordance with the present disclosure.
- FIG. 6B depicts a plot of the position of a trapped ion between the wells of a double-well potential as a function of time in accordance with the present disclosure.
- FIG. 7 depicts operations of an alternative method for monitoring the pressure inside an ion-trap system in accordance with the present disclosure.
- FIG. 8A depicts the first and second chain configurations used to estimate collision energy for the six-ion chain of method 700.
- FIG. 8B depicts a histogram of the time intervals between ion-reordering events.
- any block diagrams herein represent conceptual views of illustrative circuitry embodying the principles of the disclosure.
- any flow charts, flow diagrams, state transition diagrams, pseudo code, and the like represent various processes which may be substantially represented in computer readable medium and so executed by a computer or processor, whether or not such computer or processor is explicitly shown.
- processors may be provided through the use of dedicated hardware as well as hardware capable of executing software in association with appropriate software.
- the functions may be provided by a single dedicated processor, by a single shared processor, or by a plurality of individual processors, some of which may be shared.
- processor or “controller” should not be construed to refer exclusively to hardware capable of executing software, and may implicitly include, without limitation, digital signal processor (DSP) hardware, network processor, application specific integrated circuit (ASIC), field programmable gate array (FPGA), read-only memory (ROM) for storing software, random access memory (RAM), and non-volatile storage.
- DSP digital signal processor
- ASIC application specific integrated circuit
- FPGA field programmable gate array
- ROM read-only memory
- RAM random access memory
- non-volatile storage Other hardware, conventional and/or custom, may also be included.
- UHV seal is defined as a seal that is substantially impermeable to small- molecule gases, such a hydrogen, helium, and the like.
- a UHV seal in accordance with the present disclosure is capable of maintaining a pressure differential of at least 10 10 Torr across a barrier in which it is located, such as an UHV environment within a chamber sealed using only UHV seals.
- Examples of UHV seals suitable for use in accordance with the present disclosure include, compressible metal flanges, UHV-compatible solders (e.g., indium, gold-tin, etc.), weld joints, and the like.
- UHV seal explicitly excludes a vacuum "pinch-off tube", such as those used in prior-art ion trap systems, wherein a tube used to evacuate a chamber and is sealed by mechanical crimping the tube and/or sealing it with solder after a vacuum pressure has been established in the chamber.
- non-UHV seal is defined as a seal that is not suitable for use in a UHV deposition system and/or that is not substantially impermeable to small- molecule gases, such as hydrogen or helium.
- non-UHV seals include pinch-off tubes, compressible gaskets made of non-metal materials, non-UHV-compatible solder seals, and the like.
- FIG. 1 shows a block diagram of an illustrative ion-trap system in accordance with the present disclosure.
- Ion-trap system 100 includes ion-trap package 102, ion pump 104, ablation laser 106, and ionization laser 108.
- Ion pump 104 is a compact, conventional ion pump that is fluidically coupled with ion-trap package 102.
- Ablation laser 106 is a pulsed laser source suitable for providing ablation signal 114 to material within ion-trap package 102 to generate an atomic flux. As discussed below, optical access for ablation signal 114 to the material to be ablated is enabled by the inclusion of a window in ion-trap package 102.
- ablation laser 106 is a Q-switched Nd:YAG pulsed laser having a wavelength of 1064 nm that provides 8-ns wide pulses having 0.3 mJ pulse energy; however, other laser sources can be used in ablation laser 106.
- Laser module 108 includes conventional laser sources for providing laser signal 116, which includes wavelengths suitable for ionizing neutral atoms within ion-trap package 102, Doppler cooling and detection, and optical re-pumping.
- laser module 108 includes continuous wave (CW) lasers having wavelengths of 355 nm, 391 nm, 399 nm, 370 nm, 638 nm, and 935 nm.
- CW continuous wave
- RF port 110 and DC port 112 are conventional electrical feed-throughs for enabling external electrical connections for RF and DC electrical signals to the electrodes of ion trap 202.
- FIGS. 2A-B depict schematic drawings of top and sectional views, respectively, of an ion-trap package in accordance with the illustrative embodiment.
- the sectional view shown in FIG. 2B is taken through line a-a shown in FIG. 2A.
- Ion-trap package 102 includes ion trap 202 and enclosure 204, which encloses the ion trap within an ultra-high vacuum (UHV) environment.
- UHV ultra-high vacuum
- FIG. 3 depicts operations of a method suitable for forming an ion-trap package in accordance with the illustrative embodiment.
- Method 300 is described with continuing reference to FIG. 1 and 2A-B, as well as reference to FIG. 4.
- Method 300 begins with operation 301, wherein ion trap 202 is affixed and wire bonded to conventional chip carrier 206.
- Ion trap 202 is a conventional micromachined surface ion trap.
- surface ion traps suitable for use in accordance with the teachings of the present disclosure include the Sandia National Laboratories HOA 2.0 ion trap, and the like.
- a micromachined surface ion trap includes a plurality of electrodes disposed in two one-dimensional arrays on the surface of a substrate such that the electrodes define linear trap region TR between the linear arrays.
- the longitudinal axis of trap region TR defines trap axis TA.
- the electrodes of ion trap 202 are electrically coupled with bond pads, which are wire bonded to RF port 110 and DC port 112 (not shown in FIGS. 2A-B) to enable a desired arrangement of RF and DC electrical signals at the ion trap.
- Enclosure 204 includes a plurality of piece parts comprising chip carrier 206 and housing 208, which includes sidewall 208A and lid 208B.
- housing 208 is a unitary structure that includes contiguous portions that define sidewall 208A and lid 208B.
- housing 208 is machined from a solid block of material, thereby forming a single continuous element that includes sidewall 208A and lid 208B.
- enclosure 204 also includes windows 214-1 through 214-3, which are mounted in sidewall 208B, and window 214-4, which is mounted in lid 208B.
- Windows 214-1 through 214-4 are affixed within housing 208 via UHV seals 210-1 through 210-4, respectively, such that the windows and UHV seals are substantially impermeable to small-molecule gasses, such as hydrogen, helium, etc.
- windows 214-1 through 214-4 are made of a single-crystal material that also mitigates diffusion of small-molecule gasses.
- each window is sealed to housing 208 via a UHV seal made by first forming a braze joint on the window and then e-beam welding the braze joint to the housing.
- UHV seals 210-5 and 210-6 are joined to lid 208B and ion pump 104 at UHV seals 210-5 and 210-6, respectively.
- Each of UHV seals 210-5 and 210-6 is also substantially impermeable to small-molecule gasses, such as hydrogen, helium, etc.
- each of UHV seals 210-5 and 210-6 is a weld joint.
- chip carrier 206 and the partially assembled enclosure comprising housing 208 and ion pump 104 are loaded into UHV assembly system 400.
- FIG. 4 depicts a block diagram of a UHV assembly system in accordance with the present disclosure.
- UHV assembly system 400 is an alignment/joining system that is capable of aligning separate components and joining them while they are under UHV conditions.
- UHV assembly system 400 includes UHV chamber 402, pump 404, alignment system 406, joining system 408, and load lock 410.
- UHV chamber 402 is an environmental chamber capable of maintaining a pressure of less than or equal to 10 9 Torr.
- the chip carrier, housing, and ion pump are placed into the UHV chamber 402 via load lock 404, which is a conventional portal through which piece parts can be loaded into UHV chamber 402 without significant degradation of its UHV environment.
- Pump 406 is a conventional UHV pump configured to evacuate UHV chamber to a pressure that is less than or equal to 10 9 Torr.
- Alignment system 408 is a six-degree of freedom alignment system capable of achieving and maintaining a high-precision alignment between multiple piece parts.
- a surface treatment such as ion sputtering, and the like, is applied to at least one surface within chamber 212.
- a plurality of surface treatments is performed including Argon-ion beam treatment, plasma treatment, and thermal treatment.
- getter surface 220 is formed on lid 208B.
- a conventional getter such as a non-evaporable getter (NEG) is located within chamber 212.
- NEG non-evaporable getter
- chip carrier 206 and housing 208 are aligned.
- chip carrier 206 and housing 208 are aligned and joined such that trap axis TR is oriented along the ion pump direction and trap axis TA is oriented at angle, Q, relative to the direction of propagation of ablation signal 114.
- Q is equal to approximately 45° such that the ablation signal crosses trap region TR at a diagonal.
- Optical access for ablation signal 114 is enabled by window 214-1, which allows the ablation signal to access material 218 in crucible 216 to ablate the material and generate an atomic flux.
- material 218 is ytterbium (Yb).
- each of UHV seals 210-1 through 210-6 is a laser- weld joint.
- at least one of UHV seals 210-1 through 210-6 is a different UHV seal, such as a compressible metal flange (e.g., a copper flange, etc.), brazing joint, or UHV-compatible solder ring comprising a material suitable for use in UHV systems such as, without limitation, indium, gold-tin, and the like.
- UHV seal 210-7 is a solder seal comprising indium.
- the formation of UHV seal 210-7 completes enclosure 204, thereby sealing ion trap 202 within chamber 212 with an internal UHV environment equivalent to that within UHV chamber 402.
- chamber 212 contains an environment in which the pressure is less than or equal to 10 9 .
- enclosure 204 has overall dimensions of approximately 130 mm by 100 mm by 70 mm. As will be apparent to one skilled in the art after reading this Specification, however, these dimensions are merely exemplary and enclosure 204 can have any practical physical dimensions without departing from the scope of the present disclosure.
- joining system 410 is an indium-sealing system configured to operate in a UHV environment and UHV seal 210-7 is an indium solder ring.
- joining system 410 includes a laser-welding system, soldering system and/or system for compressing a compressible metal flange analogous to those used in UHV deposition systems, such as molecular beam epitaxy (MBE) systems, atomic layer epitaxy (ALE) systems, and the like.
- MBE molecular beam epitaxy
- ALE atomic layer epitaxy
- the piece parts of enclosure 204 to be joined are provided with groove rings and frames that interlock to ensure a reliable seal when welded or joined via a compressible metal flange and/or UHV-compatible solder.
- more of the enclosure assembly is completed within the UHV chamber itself ⁇ e.g., at least one of windows 214-1 through 214-3 and/or the lid is joined to sidewall 208A, and or sidewall 208A is joined with chip carrier 206, etc.).
- fully or partially assembled enclosure 204 is joined with ion pump 104 while they are both located within the UHV chamber.
- cryogenic temperatures e.g., greater than or equal to -50 °C
- chamber 212 has a volume of only approximately 2 cm 3 .
- the volume of chamber 212 is other than 2 cm 3 ; however, it is preferably less than 10 cm 3 .
- the pressure in chamber 212 is reduced to lO -10 Torr or less.
- ion pump 104 is engaged to reduce the pressure within chamber 104 to 2xl0 n Torr or less.
- the quality of the vacuum in a trapped-ion system dictates the lifetime of an ion chain.
- the elastic-collision rate between the residual background gas molecules and the trapped ions is a critical parameter of a trapped ion-based quantum computer, since these collisions with sufficient kinetic-energy transfer can significantly disrupt a trapped ion chain.
- the level of vacuum must be in the UHV regime (preferably approximately 10 11 Torr or better).
- the pressure inside chamber 212 can be measured (or estimated) by monitoring the behavior of one or more trapped ions.
- FIG.5 depicts operations of a method for monitoring the pressure inside an ion-trap system in accordance with the present disclosure.
- Method 500 begins with operation 501, wherein a double-well potential is created in ion trap 202.
- FIG.6A depicts a simulation of a double-well potential in accordance with the present disclosure.
- Plot 600 depicts ion potential as a function of axial position for conditions wherein the height of the potential barrier between wells W1 and W2, whose minima are significantly lower than the average energy transfer from a collision event (/.e., collision energy).
- the potential barrier height, BH is controlled to be 50 peV, which approximately 40 times lower than the average collision energy ⁇ E>Q, which is given by: where nrn and m m are the mass of the ion and the background gas molecule in the trap, respectively, v is the relative velocity between the ion and the background gas molecule, Q is the scattering angle, and Em is the initial kinetic energy of a background gas molecule.
- the ion is 174 Yb + and the background gas molecules are H2; therefore, Equation (1) provides an estimated average collision energy ⁇ Ei>e of approximately 2 meV. Under these conditions, every collision event would be expected to randomize the ion location.
- the position of a single trapped ion is monitored between wells W1 and W2.
- the position of the trapped ion is determined by imaging the ion location on an electron multiplying CCD (EMCCD) camera to determine which of the two wells contains the ion.
- EMCCD electron multiplying CCD
- FIG.6B depicts a plot of the position of a trapped ion between the wells of a double-well potential as a function of time in accordance with the present disclosure.
- Plot 602 depicts sample traces of the total EMCCD signal counts for pixels in the regions where the minima of the two potential wells are located (designated as Region 1 and Region 2), which indicates the position of the ion as a function of time (/.e., the transition rate).
- the rate at which the ion transitions between wells W1 and W2 is determined. This transition rate is extracted from plot 602. In the depicted example, the transition rate is 1 event per 32 minutes. The actual collision rate is expected to be roughly twice the measured transition rate, since an ion will eventually be Doppler cooled into either well after a collision.
- the pressure in chamber 212 is estimated based on the extracted collision rate.
- the relationship between collision rate, g, and pressure in chamber 212 is given by: where P is the pressure in chamber 212, Q is the net charge of the trapped ion, T is temperature, a is the polarizability of the background molecule, and so is the vacuum permittivity.
- the pressure in a UHV chamber is estimated based on the reordering rate of ions in a chain of ions held in an ion trap.
- FIG. 7 depicts operations of an alternative method for monitoring the pressure inside an ion-trap system in accordance with the present disclosure.
- Method 700 begins with operation 701, wherein isotopes of ions having at least one property different from one another are selected for inclusion in a chain of ions to be trapped in ion trap 202. Selecting ions with a different property enables the order of the ions in the ion chain to be determined.
- the isotopes are selected as ions of 174 Yb + and 172 Yb + , which will manifest as bright ions and dark ions, respectively, in ion-trap system 100.
- the differing property selected for the multiple isotopes is different than brightness. Examples of other properties that can be selected to differentiate isotopes in accordance with the present disclosure include, without limitation, ion species, ion isotopes, etc.
- a chain of the selected ions is trapped in ion trap 202.
- the ion chain includes four ions of 174 Yb + and two ions of 172 Yb + . It should be noted that the small difference in the mass of the isotopes can typically be neglected as it does not significantly change the expected energy barrier of 2.2 meV.
- FIG. 8A depicts the first and second chain configurations used to estimate collision energy for the six-ion chain of method 700.
- w c , g is equal to 2.7 MHz and w z is equal to 0.32 MHz.
- the energy difference between the first and second chain configurations can be determined as approximately 2.2 meV.
- a reordering event can be expected to occur when the ion chain gains energy in excess of about 2.2 meV due to a collision event. This value is close to the estimated average energy exchange in a single collision event as given by Equation (1) above. It can be expected, therefore, that one of two collision events will lead to a reordering event because roughly half of the background molecules will have energy greater than 2.2 meV.
- the order of the ions in the ion chain are monitored via an EMCCD camera.
- FIG. 8B depicts a histogram of the time intervals between ion-reordering events.
- Plot 800 shows reordering interval times, in time bins of 2 minutes, for ion-chain reordering events recorded over a 15-hour period.
- the pressure in chamber 212 is estimated based on the reordering rate of the ion chain.
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Abstract
Description
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063049842P | 2020-07-09 | 2020-07-09 | |
| PCT/US2021/041143 WO2022011290A1 (en) | 2020-07-09 | 2021-07-09 | Small-volume uhv ion-trap package and method of forming |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP4179562A1 true EP4179562A1 (en) | 2023-05-17 |
| EP4179562A4 EP4179562A4 (en) | 2024-05-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP21837680.4A Pending EP4179562A4 (en) | 2020-07-09 | 2021-07-09 | Small-volume uhv ion-trap package and method of forming |
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| EP (1) | EP4179562A4 (en) |
| CN (1) | CN115956282B (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4324710A1 (en) * | 1993-07-23 | 1995-01-26 | Forschungszentrum Juelich Gmbh | Method of making an encapsulated detector |
| US6838666B2 (en) * | 2003-01-10 | 2005-01-04 | Purdue Research Foundation | Rectilinear ion trap and mass analyzer system and method |
| CN102927978B (en) * | 2012-10-29 | 2014-12-24 | 华南师范大学 | Chip-type atom gyroscope and rotation measuring method thereof |
| EP3049736B1 (en) * | 2013-09-23 | 2020-08-19 | D-Wave Systems Inc. | Systems and methods for cryogenic refrigeration |
| GB201409074D0 (en) * | 2014-05-21 | 2014-07-02 | Thermo Fisher Scient Bremen | Ion ejection from a quadrupole ion trap |
| GB2531336B (en) * | 2014-10-17 | 2019-04-10 | Thermo Fisher Scient Bremen Gmbh | Method and apparatus for the analysis of molecules using mass spectrometry and optical spectroscopy |
| US10755913B2 (en) * | 2017-07-18 | 2020-08-25 | Duke University | Package comprising an ion-trap and method of fabrication |
-
2021
- 2021-07-09 EP EP21837680.4A patent/EP4179562A4/en active Pending
- 2021-07-09 CN CN202180048590.3A patent/CN115956282B/en active Active
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| Publication number | Publication date |
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| CN115956282B (en) | 2025-11-28 |
| EP4179562A4 (en) | 2024-05-15 |
| CN115956282A (en) | 2023-04-11 |
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