EP3638944B1 - Kraftfahrzeugscheinwerfer - Google Patents

Kraftfahrzeugscheinwerfer Download PDF

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Publication number
EP3638944B1
EP3638944B1 EP18731728.4A EP18731728A EP3638944B1 EP 3638944 B1 EP3638944 B1 EP 3638944B1 EP 18731728 A EP18731728 A EP 18731728A EP 3638944 B1 EP3638944 B1 EP 3638944B1
Authority
EP
European Patent Office
Prior art keywords
lever
motor vehicle
holder
projection
vehicle headlamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP18731728.4A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3638944A1 (de
Inventor
Stefan MITTERLEHNER
Matthias Mayer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZKW Group GmbH
Original Assignee
ZKW Group GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZKW Group GmbH filed Critical ZKW Group GmbH
Publication of EP3638944A1 publication Critical patent/EP3638944A1/de
Application granted granted Critical
Publication of EP3638944B1 publication Critical patent/EP3638944B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21SNON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S41/00Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
    • F21S41/20Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by refractors, transparent cover plates, light guides or filters
    • F21S41/25Projection lenses
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21SNON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S41/00Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
    • F21S41/60Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by a variable light distribution
    • F21S41/63Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by a variable light distribution by acting on refractors, filters or transparent cover plates
    • F21S41/635Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by a variable light distribution by acting on refractors, filters or transparent cover plates by moving refractors, filters or transparent cover plates
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21SNON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S41/00Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
    • F21S41/20Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by refractors, transparent cover plates, light guides or filters
    • F21S41/29Attachment thereof
    • F21S41/295Attachment thereof specially adapted to projection lenses
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21SNON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S41/00Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
    • F21S41/30Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by reflectors
    • F21S41/32Optical layout thereof
    • F21S41/36Combinations of two or more separate reflectors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21SNON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S41/00Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
    • F21S41/60Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by a variable light distribution
    • F21S41/67Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by a variable light distribution by acting on reflectors
    • F21S41/675Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by a variable light distribution by acting on reflectors by moving reflectors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V14/00Controlling the distribution of the light emitted by adjustment of elements
    • F21V14/06Controlling the distribution of the light emitted by adjustment of elements by movement of refractors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V17/00Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
    • F21V17/02Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages with provision for adjustment
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21YINDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00Light-generating elements of semiconductor light sources

Definitions

  • the invention relates to a motor vehicle headlight, comprising a light source, projection optics and a holder, the light source being connected to the holder and being set up to emit light in the direction of a projection axis by means of the projection optics.
  • the invention relates to a motor vehicle which comprises at least one motor vehicle headlight according to the invention.
  • the desire to be able to project a high-resolution, homogeneous light image onto the road is becoming more and more important.
  • the term "roadway” is used here for the sake of simplicity, because of course it depends on the local conditions whether a photograph is actually on the roadway or extends beyond it.
  • the light image in the sense used corresponds to a projection onto a vertical surface in accordance with the relevant standards that relate to vehicle lighting technology.
  • headlights have been developed, among other things, in which a variably controllable reflector surface is formed from a plurality of micromirrors and a light emission generated by a light source is reflected in the emission direction of the headlight.
  • Such lighting devices are advantageous in vehicle construction because of their very flexible lighting functions, since the illuminance can be individually controlled for different lighting areas and any lighting functions with different light distributions can be implemented, such as a low beam light distribution, a cornering light distribution, a city light distribution, a Motorway light light distribution, a cornering light light distribution, a high beam light distribution or the depiction of glare-free high beam.
  • DLP ® Digital Light Processing
  • the so-called Digital Light Processing (DLP ® ) projection technique is used for the micromirror arrangement, in which images are generated in that a digital image is modulated onto a beam of light.
  • the light beam is broken down into sub-areas by a rectangular arrangement of movable micromirrors, also referred to as pixels, and then reflected pixel by pixel either into the projection path or out of the projection path.
  • DMD Digital Micromirror Device
  • a DMD microsystem is a surface light modulator (spatial light modulator, SLM), which consists of micromirror actuators arranged in a matrix, ie tiltable reflecting surfaces, for example with an edge length of about 16 ⁇ m.
  • SLM surface light modulator
  • the mirror surfaces are constructed in such a way that they can be moved under the influence of electrostatic fields.
  • the angle of each micromirror can be adjusted individually and usually has two stable end states, between which it can be switched up to 5000 times within one second.
  • the individual micromirrors can each be controlled by pulse width modulation (PWM), for example, in order to map further states of the micromirrors in the main beam direction of the DMD arrangement, the time-averaged reflectivity of which lies between the two stable states of the DMD.
  • PWM pulse width modulation
  • the number of mirrors corresponds to the resolution of the projected image, whereby a mirror can represent one or more pixels.
  • DMD chips with high resolutions in the megapixel range are now available.
  • the technology on which the adjustable individual mirrors are based is Micro-Electro-Mechanical-Systems (MEMS) technology.
  • DMD Digital Micromirror Device
  • AMD Analog Micromirror Device
  • U.S. 2004/202008 A1 discloses a motor vehicle headlight known from the prior art.
  • the object of the invention is to overcome the disadvantages mentioned or to meet the requirements better than is possible with the prior art.
  • a possibility should be created to compensate for component and assembly tolerances and to be able to adjust optical elements with high precision.
  • a motor vehicle headlight of the type mentioned at the outset in that the projection optics are fastened in a frame, which is movably arranged in the holder, and also includes a lever which, by means of axis elements that form a pivot axis, which is transverse, preferably runs normal to the projection axis, is rotatably connected to the mount, and the frame has at least one lug, which is located between the mount and the lever, and the lever is set up to press on the at least one lug during a rotary movement about the pivot axis, and thereby displacing the frame in the holder along the projection axis.
  • the arrangement according to the invention ensures that the position of the at least one projection optics can be adjusted very finely by the at least one lever. According to the law of the lever, a large displacement of the force arm of the lever, which can be operated with little effort, can be transferred to a smaller displacement of the load arm, which can shift the position of the projection optics with greater force.
  • the invention has great advantages during assembly, since the vehicle headlight does not have to be dismantled into its individual parts to adjust the assemblies, or the assemblies do not have to be assembled successively in order to be able to be adjusted to one another. After complete assembly, it is possible to adjust an entire assembly. The extent of the adjustment can be observed in the resulting light pattern of the headlight.
  • At least one flexible, elastic spring element is arranged between the at least one nose and the holder.
  • a preload can be applied to the adjustment connection by means of a flexible spring element, as a result of which the adjustment connection can be set without play.
  • this creates a connection that can be fixed in any position, which means that the installation conditions can be taken into account very individually and precisely. These installation conditions can be caused by tolerances in the geometry or assembly of individual assemblies, which should be reduced or compensated for as best as possible. An installation situation of the headlight in a vehicle can also be taken into account in this way.
  • At least one connecting element which is preferably a screw, is also arranged between the bracket and the lever and is set up to connect the bracket and the lever to one another. It can thereby be achieved that the connection is finely adjustable.
  • the light source comprises at least one semiconductor light source, in particular an LED or a laser diode.
  • the projection optics comprise at least one optical lens and a controllable reflector, in particular a DMD, is arranged between the light source and the projection optics.
  • controllable reflectors in particular, the accuracy requirements for the entire optical arrangement are particularly high, which is why the arrangement according to the invention can be used very advantageously with a DMD, ie a controllable reflector using DLP® technology.
  • the mount includes a guide arranged parallel to the projection axis, which is set up to receive the at least one lug of the frame and to guide the at least one lug of the frame along the guide of the mount.
  • the guide improves the alignment of the projection optics during adjustment.
  • the lever is U-shaped and has two ends, with an opening for receiving axle elements being located at the two ends of the U-shaped lever, through which the pivot axis of the lever runs and at the U- shaped lever further an opening for receiving a connecting element, preferably an adjusting screw, is provided, with which the lever can be connected to the bracket.
  • a connecting element preferably an adjusting screw
  • the U-shaped lever is particularly favorable when the mount and the frame with the projection optics are to be adjustable and adjustable over a large distance.
  • a guide can be used to support this.
  • the U-shaped lever is particularly well suited because the lever can thus have a large lever length in order to achieve a large adjustment range, and the lever can be easily moved by enclosing the arrangement of bracket and frame and thereby blocking the beam path of the light uncircumcised.
  • the lever is ring-shaped and has at least one aperture for receiving at least one axle member through which the pivot axis passes, the aperture being tangential to the mean diameter of the annular lever therethrough. Furthermore an opening for receiving a connecting element, preferably an adjusting screw, is provided on the ring-shaped lever, with which the lever can be connected to the holder.
  • the ring-shaped lever preferably comprises at least one support, which is set up to press on the at least one lug, and the frame forms a common component with the at least one lug.
  • the ring-shaped lever is particularly favorable when the at least one holder and the frame with the projection optics are to be adjustable and displaceable over a small distance.
  • the ring-shaped lever forms a common component with the lug in order to simplify the structure.
  • additional optics are included, which have an optical axis and the additional optics are attached to the holder and the optical axis of the additional optics is preferably located coaxially in the projection axis.
  • the motor vehicle headlight comprises two projection optics with two projection axes and preferably two holders for accommodating the two projection optics. It can thereby be achieved that the optical parameters of the projection optics can be adjusted very flexibly. This is particularly advantageous when one of the two projection optics is located inside a housing and the other of the two projection optics is located outside of the housing. This allows gradual adjustment to be made as assembly progresses. The second projection optics located on the outside of the housing can then be adapted to the conditions when installed in a vehicle, while the first projection optics is no longer adjusted.
  • further projection optics can be provided in the form of additional optics, which are fastened in the holder.
  • additional optics By adjusting the additional optics with respect to the projection optics, the optical parameters of the overall optics, which are formed by one or more projection optics and additional optics, can be set particularly easily.
  • the two projection axes of the two projection optics are at an angle to one another, the angle preferably being located only in a horizontal plane in the installation position of the motor vehicle headlight and preferably between 0° and 10° amounts to.
  • a motor vehicle which comprises at least one motor vehicle headlight according to the invention.
  • the motor vehicle headlight according to the invention can be adapted and adjusted to the installation situation and position in a motor vehicle in a particularly simple manner.
  • a headlight contains many other parts that are not shown and that allow sensible use in a motor vehicle, such as in particular a car or motorcycle.
  • cooling devices for components, control electronics or other optical elements are not shown.
  • FIGS Figures 1 to 11 An installation position in a vehicle is not shown in a separate figure for a headlight according to the following description, since the installation position of the headlight according to the invention does not differ from the known prior art.
  • the adjustability gained by the headlight according to the invention when installed in a vehicle results from the description of the exemplary embodiments according to FIGS Figures 1 to 11 .
  • a motor vehicle headlight 101 comprising a light source 105, a first projection optics 102 and a second projection optics 202 and a first holder 106 and a second holder 206, the light source 105 being mechanically firmly connected to the holders 106 and 206. Furthermore, the light source 105 is set up to emit in the direction of a first projection axis 104 or a second projection axis 204 by means of the projection optics 102 and 202 .
  • the angle 304 is located in a horizontal plane, starting from an installation position of the headlight in a vehicle, and is between 0° and 10°, depending on the design.
  • An electronically controllable reflector 113 in the form of a micromirror arrangement is located between the light source 105 and the projection optics 102 and 202, which reflects the light emitted by the light source 105 in the direction of the projection axes 104 or 204 can reflect.
  • Those mirrors of the controllable reflector 113 which are controlled in such a way that the light is not reflected in the direction of the projection axis 104, the light can alternatively be reflected in the direction of an absorber 114.
  • two projection optics 102 and 202 with two projection axes 104, 204 are used, with the two projection axes 104, 204 running coaxially.
  • other components such as the holders 106, 206 for accommodating the two projection optics 102, 202, are also included twice in different designs.
  • only one projection optic can be used in a motor vehicle headlight, in order to make the structure more compact or more cost-effective, for example.
  • the embodiment shown is characterized by a particularly flexible adjustability of the optical parameters of the projection optics or the overall projection optics, which is formed by the two projection optics. It is clear that when installed in a vehicle, two motor vehicle headlights 101 can be installed.
  • the light source 105 is connected to a heat sink in order to dissipate the heat loss generated by the light source 105 .
  • the light source 105 can include one or more light-generating components such as semiconductor light sources, in particular LEDs or laser diodes, and primary optics, which include one or more optical lenses or diaphragms.
  • a means for light conversion from a first wavelength range to a second wavelength range, for example a conversion phosphor, can also be included.
  • the controllable reflector 113 is mounted here on a printed circuit board, which can include other electronic components for controlling the controllable reflector 113 or mechanical elements.
  • the projection optics 102 and 202 each include at least one optical lens.
  • lens systems that consist of an arrangement of multiple lenses or also additionally include screens that form projection optics 102 and 202.
  • the first projection optics 102 is fastened in a frame 103 which is movably arranged in the mount 106 .
  • a lever 107 is also included.
  • the frame 103 has here two lugs 110, which are located between the bracket 106 and the lever 107.
  • the second projection optics 202 is fastened in a frame 203 which is movably arranged in the mount 206 .
  • a lever 207 with two pressing elements 211 is also included.
  • the frame 203 here has lugs 210 which are located between the bracket 206 and the pressing elements 211 of the lever 207 .
  • a flexible, elastic spring element 209 is arranged between the nose 210 and the holder 206 in each case.
  • the frame 203 is fastened to the bracket 206 with a connecting element 212 .
  • FIG. 3 shows a section of the motor vehicle headlight 101 with elements for adjusting the first projection optics 102, which is fixed in the frame 103 and which is movably arranged in the holder 106. Also included is the lever 107 which is rotatably connected to the mount 106 by means of axle elements 115 which form a pivot axis 108 which runs transversely or normal to the projection axis 104 .
  • the frame 103 has two lugs 110 (only one lug can be seen in the figure) located between the bracket 106 and the lever 107 .
  • the lugs 110 are part of the frame 103.
  • the lever 107 is set up to press on the two lugs 110 during a rotary movement about the pivot axis 108, and thereby to move the frame 103 in the holder 106 along the projection axis 104.
  • a connecting element 112 is arranged between the holder 106 and the lever 107 and is set up to connect the holder 106 and the lever 107 to one another.
  • the connecting element 112 is preferably a screw, with which the frame can be aligned with the holder 106 by tightening it, in order to displace the projection optics 102 along the projection axis 104 and thereby optically adjust it.
  • the mount 106 includes a guide 111 arranged parallel to the projection axis 104 , which is set up to receive the lugs 110 of the frame 103 and to guide the lugs 110 of the frame 103 along the guide 111 of the mount 106 .
  • a flexible, elastic spring element 109 is arranged between the nose 110 and the holder 106 , against which the nose 110 can press when a force is exerted by the lever 107 .
  • the lever 107 is U-shaped and has two ends. At each of the two ends of the U-shaped lever 107 there is an opening in which the axle elements 115 can be inserted and the pivot axis 108 of the lever 107 runs. Also provided on the U-shaped lever 107 is an opening for receiving the connecting element 112, preferably an adjusting screw, with which the lever 107 can be connected to the holder 106.
  • FIG. 4 shows a front view of the projection optics 102 of the headlight 101, which is fixed in the frame 103, which is arranged in the holder 106.
  • the lever 107 and its pivot axis 108 can be seen.
  • FIG 5 shows the holder 106 with the lever 107 and its pivot axis 108.
  • the guide 111 which is formed by elements of the holder 107, can be seen. It is clear that each lug 110 is located in a corresponding guide 111 .
  • FIG. 6 shows the arrangement 3 in a bottom perspective view.
  • an adjustment distance 150 can be seen, by which the projection optics 102 can be adjusted in relation to the holder. The adjustment is made by shifting the projection optics 102 along the projection axis 104, with the lugs 110 being shifted in the respective guides 111.
  • FIGs 7a and 7b the adjustment of the arrangement of the headlight 101 is shown, in which the displacement of the projection optics 102 can be seen.
  • the U-shaped lever 107 has two ends, at each of which there are openings through which the pivot axis 108 extends and about which the lever 107 can pivot.
  • the middle of the lever is located between the two ends of the lever, at which another opening for receiving the connecting element 112 is located.
  • Figure 7a a first adjustment position of the arrangement of the headlight 101 can be seen, in which the center of the U-shaped lever 107 is in close contact with the holder 106 .
  • Figure 7b shows a second adjustment position of the arrangement of the headlight 101, in which the lever center of the U-shaped lever 107 has a greater distance, a second adjustment distance 151, from the holder 106 than in the first adjustment position.
  • FIG. 8 shows the arrangement of the headlight 101 for the first projection optics 102 in an exploded view.
  • the projection optics 102, the frame 103, the nose 110 and the projection axis 104 can be seen. Furthermore, the holder 106, the lever 107, two axle elements 115, the pivot axis 108, and the spring element 109 and the guide 111 are shown.
  • the projection optics 202 are fastened in a frame 203 which is movably arranged in the mount 206 . Also included is a lever 207 with two pressing elements 211 which is rotatably connected to the holder 206 by means of axis elements 215 which form a pivot axis 208 which runs transversely or normal to the projection axis 204 .
  • the frame 203 has two lugs 210 located between the bracket 206 and the lever 207 .
  • the lugs 210 are part of the frame 203.
  • the lever 207 is set up to press the lugs 210 with the pressing elements 211 during a rotational movement about the pivot axis 208, and thereby to move the frame 203 in the holder 206 along the projection axis 204.
  • the lever 207 and the pressing elements 211 form a common component, which is why the lever 207 can transmit an acting force to the lugs 210 directly.
  • Flexible, elastic spring elements 209 are arranged between the lugs 210 and the holder 206 in each case.
  • the lever 207 is adjustably connected to the bracket 206 via the connecting element 212 .
  • Lever 207 is annular in shape and has openings for receiving axle members 215 through which pivot axis 208 extends, the openings tangent to the mean diameter of the annular lever 207 therethrough. In the opposite area to that through which the pivot axis 208 runs, there is a lever center.
  • An opening for receiving the connecting element 212 preferably an adjusting screw, is provided on the ring-shaped lever 207, preferably in the middle of the lever, with which the lever 207 can be adjustably connected to the holder 206, and the ring-shaped lever 207 forms a common component with the pressing elements 211 .
  • a thread is provided in the holder 206 for receiving the connecting element 212 in the form of a screw.
  • FIG. 10 Another perspective view of the projection optics 202 of the headlight 101 is shown with its projection axis 204, which is fastened in the frame 203, which is arranged in the holder 206.
  • the lever 207 with its pivot axis 208 and pressing elements 211, as well as two lugs 210 of the frame 203 can be seen.
  • the connecting element 212 is arranged between the holder 206 and the lever 207 and is set up to connect the holder 206 and the lever 207 to one another in an adjustable or fixed manner.
  • FIG. 11 shows the arrangement of the 10 in an exploded view, in which in particular the axle elements 215 can be seen, as well as a spring element 209.
  • Additional optics 302 can also be seen, which have an optical axis and the additional optics 302 are arranged and fastened on the mount 206 .
  • the optical axis of the additional optics 302 is preferably located coaxially in the projection axis 204 .

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Lighting Device Outwards From Vehicle And Optical Signal (AREA)
EP18731728.4A 2017-06-14 2018-05-28 Kraftfahrzeugscheinwerfer Active EP3638944B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ATA50497/2017A AT519673B1 (de) 2017-06-14 2017-06-14 Kraftfahrzeugscheinwerfer
PCT/AT2018/060107 WO2018227221A1 (de) 2017-06-14 2018-05-28 Kraftfahrzeugscheinwerfer

Publications (2)

Publication Number Publication Date
EP3638944A1 EP3638944A1 (de) 2020-04-22
EP3638944B1 true EP3638944B1 (de) 2022-08-31

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EP18731728.4A Active EP3638944B1 (de) 2017-06-14 2018-05-28 Kraftfahrzeugscheinwerfer

Country Status (7)

Country Link
US (1) US11054104B2 (ko)
EP (1) EP3638944B1 (ko)
JP (1) JP6805373B2 (ko)
KR (1) KR102340609B1 (ko)
CN (1) CN110709640B (ko)
AT (1) AT519673B1 (ko)
WO (1) WO2018227221A1 (ko)

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JP2022042967A (ja) 2020-09-03 2022-03-15 信越化学工業株式会社 ポジ型レジスト材料及びパターン形成方法
JP2022123839A (ja) 2021-02-12 2022-08-24 住友化学株式会社 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法
JP2022164585A (ja) 2021-04-15 2022-10-27 住友化学株式会社 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法
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Publication number Publication date
WO2018227221A1 (de) 2018-12-20
EP3638944A1 (de) 2020-04-22
JP2020523762A (ja) 2020-08-06
AT519673A4 (de) 2018-09-15
JP6805373B2 (ja) 2020-12-23
CN110709640B (zh) 2022-05-03
US11054104B2 (en) 2021-07-06
KR102340609B1 (ko) 2021-12-20
CN110709640A (zh) 2020-01-17
KR20200015716A (ko) 2020-02-12
AT519673B1 (de) 2018-09-15
US20200217473A1 (en) 2020-07-09

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