EP3574719A1 - Systeme de generation d'un jet plasma d'ions metalliques - Google Patents
Systeme de generation d'un jet plasma d'ions metalliquesInfo
- Publication number
- EP3574719A1 EP3574719A1 EP18705434.1A EP18705434A EP3574719A1 EP 3574719 A1 EP3574719 A1 EP 3574719A1 EP 18705434 A EP18705434 A EP 18705434A EP 3574719 A1 EP3574719 A1 EP 3574719A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- metal
- tube
- generating
- plasma
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/54—Plasma accelerators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/02—Circuits or systems for supplying or feeding radio-frequency energy
- H05H2007/022—Pulsed systems
Definitions
- the present invention relates to a system for generating a plasma jet.
- Plasma generating systems of a metal from a solid block of this metal are known. Such systems are used to deposit a metal coating on a substrate, particularly a thin film coating. These systems produce essentially neutral metal vapors, that is to say metal atoms of which only a part is ionized.
- such a system comprises a vacuum chamber in which is placed a metal block which is brought to a positive potential to become an anode, a cathode which generates electrons, and a substrate for receiving a coating of this metal.
- the system further comprises a series of magnets which are intended to guide the metal ions formed by vaporization of the metal.
- the electrons beamed by the cathode are attracted to the anode metal block.
- a part of the block melts and transforms into a metallic gas.
- the atoms of this gas are then partially ionized by the flow of electrons emitted by the cathode and form a plasma of positive ions of metal and electrons.
- These positive metal ions are accelerated to the cathode and to the substrate which is also placed at a negative potential.
- the cathode is generally annular in shape, so that the ions, guided by the series of magnets arranged around the path between the metal block and the substrate, pass through the cathode and impact the substrate to form a metal coating.
- the electron emitter is placed in the path of the flow of metal ions, and is therefore gradually damaged by this flow, in particular because of an undesirable deposit of metal ions which is formed on the emitter.
- the life of the transmitter, and consequently the plasma generation system, is reduced.
- a magnet cooling device must be integrated into the system to prevent the magnets from being heated above their Curie temperature under the influence of plasma.
- the present invention aims to remedy these disadvantages.
- the invention aims to propose a system for generating a plasma jet comprising metal ions that is capable of generating a directional flow whose life is improved, whose manufacture is simplified, and which operates without magnets.
- the system for generating a plasma jet comprises a tube of electrically insulating material containing a metal in solid form at ambient temperature and an anode in contact with this metal, a generator connected to the anode suitable for to create a positive electric potential at this anode, a heating element adapted to heat a portion of the metal at a heating temperature Te sufficient to vaporize this part of the metal, an electron source located outside the tube and outside the longitudinal axis of the tube, and being able to generate a flow of electrons capable of ionizing the vapor of the metal to form metal ions, so that the metal ions thus produced are able to be repelled and thus accelerated by this potential and ejected out of the tube by the downstream end of the tube, and being neutralized for a part by electrons to form a flow of plasma, the system working without magnets, without acceleration grid.
- the electron source being located outside the tube and out of its longitudinal axis, is not damaged by the plasma beam.
- the lifespan of the plasma generation system is therefore increased.
- the metal used has an atomic mass greater than or equal to that of gold or has a melting temperature less than or equal to that of gold.
- the system according to the invention can operate with a metal whose melting temperature is lower than other metals, because the system
- SUBSTITUTE SHEET RULE 26 does not use a concentrated electron beam whose characteristic is to heat the metal very strongly and thus evaporate it too quickly, unlike existing systems.
- the heating element surrounds the downstream part of the tube.
- the tube is ceramic, providing electrical and thermal insulation.
- the anode is distinct from the metal contained in the tube.
- the electron source comprises the heating element.
- the electron source comprises an external electron emitter distinct from the heating element.
- the invention also relates to a method for generating plasma, which comprises the following steps:
- a tube of electrically insulating material, containing a metal in solid form at room temperature, an anode in contact with this metal, an electric generator connected to this anode, and an electron source located outside the anode are provided.
- the process does not use magnets, no acceleration grid, and no gas as the initial source of material to be ionized.
- the generator provides a continuous electric current.
- the generator provides pulses generating an electric current.
- FIG. 2 is a view in longitudinal section of another embodiment of the system according to the invention.
- FIG. 3 is a graph showing the evolution as a function of time of certain quantities when the system according to the invention operates with a series of electrical pulses.
- the terms “inside” and “outside” denote the region inside and outside the tube, respectively.
- the terms “upstream” and “downstream” refer to the parts of the tube and the metal cylinder with respect to the direction of flow of the ions in the tube.
- the system according to the invention comprises a tube 10, which contains a metal cylinder 20 which supplies the metal atoms immediately ionized by the high current density of electrons whose expulsion from the tube constitutes the jet plasma.
- this metal is called “plasma metal” in order to distinguish it from other metals used in the system.
- the tube 10 is made of a material whose melting temperature is higher than the melting temperature Tf of the plasma metal 20.
- the tube 10 is ceramic. This ceramic is for example an aluminum oxide, or a boron nitride.
- the tube 10 is electrically insulating.
- a heating element 40 surrounds at least the downstream portion 12 of the tube 10. This heating element 40 is supplied by a heating source 42. For example, the heating element 40 surrounds the entire tube 10. The heating element is for example a filament wound around the tube 10 helically to form a turn.
- the system according to the invention also comprises an electron source 60.
- This source of electrons is necessary to balance the positive charge of the ions emitted by the plasma metal 20, so that the particles emitted by the system and used for the propulsion are generally electrically neutral, downstream of the cylinder.
- the heating element 40 emits electrons, and so is the entire electron source 60. This is the case when the heating element 40 is a filament. This filament is for example tungsten.
- the heating element 40 is the only source of electrons 60, the manufacture of the system is simplified since the system does not include a separate electron source.
- the heating element 40 is a cathode (negatively charged).
- the heating element 40 does not emit electrons.
- an electron source 60 separate from the heating element 40, and external to the tube 10, is necessary. This situation is shown in FIG. 2.
- the heating element 40 is a ring which surrounds the downstream part 12 of the tube 10.
- the electron source 60 is an external emitter 62, which is a cathode located near the downstream end 15 of the downstream portion 12 of the tube 10, or an arc generator.
- the external transmitter 62 is the only cathode of the system.
- the heating element 40 is for example made of a material such as a Ni-Cr alloy (for example Nichrome®), a Fe-Cr-Al alloy (such as Kanthal®), or a cupro.
- both the heating element 40 and the external emitter 62 are a cathode.
- the electron source 60 is then composed of the heating element 40 and the external emitter 62.
- the electron source is located outside the tube 10 and out of the longitudinal axis of the tube 10.
- the heating element 40 is for example made of a material such as lanthanum hexaboride, cerium hexaboride, or mixtures of oxides of barium, strontium, and of calcium.
- the heating element 40 is surrounded by an electrical insulator.
- the system has an anode (positively charged) which is in contact with the plasma metal when the metal is in solid form.
- the anode 30 is in contact with the plasma metal 20 located in the tube 10.
- the anode 30 is distinct from the plasma metal 20 and is located inside the tube 10.
- the anode 30 is made of a conductive material which remains solid during the operation of the system of generating a plasma jet.
- the anode 30 is a metal with a melting temperature much higher than that of the plasma metal 20.
- the anode is tungsten, tantalum, molybdenum, rhenium, or an alloy of these metals.
- the anode 30 is a wire which extends in the center of the plasma metal cylinder 20, from its upstream end to its downstream end.
- An electric generator 50 is connected to the anode 30 and maintains the positive electrical potential at the anode 30.
- the anode 30 can have any geometry, for example one or more son embedded in the plasma metal 20, or a grid embedded in the plasma metal 20, or a grid which lines the inner face of the tube 10. Whatever its geometry the anode 30 is always in contact with the plasma metal 20, which makes it possible to maintain the arrival of the flow of electrons in the plasma metal 20.
- This embodiment has the advantage that the electrical potential is maintained on the plasma metal even when a portion of the plasma metal is in the liquid phase.
- Another advantage is that in case of formation of metal droplets downstream of the plasma metal cylinder 20 during its partial vaporization, the electrical connection to the anode 30 is still achieved. Indeed, these droplets are likely to disturb this electrical connection.
- the anode 30 is formed by the plasma metal itself.
- anode in contact with the metal we cover the embodiment where the anode is an element distinct from the metal and in contact with the metal, and the embodiment where the anode is formed by the metal. .
- the supply of the plasma metal cylinder 20 is continuous, that is to say that the cylinder 20 slides in the tube 10 from upstream to downstream so that its solid downstream end is is still substantially at the same position in the tube 10 as the plasma metal 20 located at the downstream end 15 of the tube 10 is vaporized.
- the plasma metal cylinder 20 is supplied from a coil.
- Plasma metal 20 is solid at ambient temperature and pressure (about 20 ° C, 1 atmosphere).
- the plasma generation system according to the invention preferably uses a plasma metal whose atomic mass is greater than or equal to that of gold (whose atomic mass is 197), or whose melting point is lower or equal to that of gold (1064 ° C).
- the metals plasmas are chosen from lead (atomic mass of 207, melt temperature of 327 ° C.), bismuth (atomic mass of 208, melt temperature of 271 ° C.), tin (melt 232 ° C), zinc (melting temperature of 420 ° C), tellurium (melting temperature of 450 ° C), indium (melting temperature of 156 ° C), thallium (atomic mass of 204 ° C). melting temperature 303 ° C).
- the melting temperature of the plasma metal 20 is less than 500 ° C.
- the plasma metal 20 has an atomic mass greater than or equal to that of gold, and a melting temperature is less than or equal to that of gold.
- these metals have a lower melting temperature than other metals.
- the heating temperature necessary to melt these metals which is at most of the order of the melting temperature Tf of the metal, is then lower, which makes it possible to dispense with a cooling device of the tube 10.
- the power required to heat the plasma metal 20 and produce the ions is lower, which means a lower energy expenditure.
- the only ions are metal ions.
- the system according to the invention can be used in a space vehicle propulsion system.
- the ejection of the plasma generates a moment that can be used for the propulsion (see below the description of the propulsion systems).
- more plasma metal 20 has a high atomic mass (especially if it is higher to that of xenon (of atomic mass 131), the more the pulse generated during the expulsion of this metal is greater than that generated when xenon is used, for the same ionization state.
- a metal with a high atomic mass has a lower initial ionization potential than other materials.
- it is 6.1 eV for thallium, 7.4 eV for lead, and 9.2 eV for gold, which is lower than the ionization potential of xenon (12.1 eV).
- the probability of ionizing these metals is higher than that of ionizing xenon.
- a metal with a high atomic mass has a higher probability of being doubly ionized, i.e. it loses two electrons to form metal ions.
- an ion of this metal is more accelerated than ions losing only a single electron, as generally the case for Xenon.
- the double ionization potentials of lead (15 eV), thallium (20.4 eV) and gold (20.2 eV) are lower than the double ionization potential of Xenon (21 eV).
- the invention also relates to a plasma generation method, the operation of which is described below.
- the plasma metal cylinder 20, in solid form, is placed in the tube 10.
- the plasma metal 20 is then heated by the heating element 40, powered by the heating source 42, to a heating temperature Te sufficient to vaporize the downstream end of the plasma metal cylinder 20.
- the heating temperature Te is therefore much higher than the ambient temperature.
- the plasma metal 20 is placed at a non-zero positive potential by the generator 50 (either directly or via the anode 30 in contact with the plasma metal 20).
- the metal gas produced by this vaporization is ionized by the electrons emitted by the electron source 60 (which is either the heating element 40 or the external emitter 62, or both). These metal ions are repelled by the metal cylinder 20 because they are of the same positive charge, and are accelerated towards the downstream end 15 of the tube 10. These metal ions, which form a plasma, further collide with the emitted electrons by the electron source 60 so that the plasma stream 70 emitted by the tube 10 at its downstream end 15 is partly a stream of electrically neutral metal particles, in part a flow of metal ions, partly a flow of electrons.
- the flow propagation direction 70 is indicated by an arrow in FIGS. 1 and 2.
- the metal ions are accelerated and ejected from the tube 10, and during their ejection part of these metal ions is neutralized by collision with the electrons emitted by the electron source 60. These metal ions which are neutralized are converted into metal particles electrically neutral.
- the system according to the invention does not have an ion acceleration grid, unlike the HC thrusters (see below). Indeed, these grids are useless because the ions are repelled by the anode and accelerated under a sufficiently high positive voltage (see explanation below). Thus, the manufacture of the system is simplified.
- the system according to the invention does not have magnets, unlike the HE boosters (see below).
- the system does not use a magnetic field generated by magnets to act on the electrons, or the ions ejected from the metal.
- the system is therefore simpler and less expensive to manufacture.
- the system according to the invention is therefore more compact than other systems according to the prior art.
- the length of the system is of the order of 10 cm, and its diameter is less than 1 cm, for example equal to 0.5 cm.
- the tube 10 Since the tube 10 is heated when the system is operating, the metal vapor particles that could have deposited on the inner surface of the downstream portion of the tube 10 will be easily vaporized and will peel off the surface during a future operation. Thus, the tube 10 is not fouled by deposits.
- the system according to the invention operates in direct current generated by the generator 50, which avoids interference with the electronic components possibly located near the system that could occur if radio frequency or high frequencies are used. .
- the potential provided to the anode 30 by the generator 50 is of the order of several hundred volts.
- the intensity of the current is of the order of 1 Ampere and more, which can reach for example 5A or more in impulse mode.
- the system operates with a series of electrical pulses (pulsed current), using a pulse generator.
- This mode has the advantage of providing a higher thrust in the case where the system according to the invention is used in a space vehicle propulsion system (see below).
- the pulse generator is powered by the generator 50.
- the tests carried out by the inventors show that it is possible to reach a stable current of 2 A (amperes) with an average voltage jump of 2 kV (kilovolts), which gives a power at each pulse of 4 kW (kiloWatts) per pulse.
- the duration of the pulse is variable between 10 and a few hundred s. In the example of operation given in FIG. 3, the duration of the pulse is approximately 40 (microseconds).
- the curve referenced S represents the signal of the pulse (in Volts)
- the curve referenced V represents the discharge potential at the anode (in kiloVolts)
- the curve referenced I represents the discharge current at the anode (in Amperes ).
- the duration of the pulse is 40 ⁇ (microseconds), the unit on the abscissa axis of FIG. 3 being in ⁇ .
- the system allows the efficient transfer of moment to heavy ions, the greater the greater the voltage applied to the anode.
- the system according to the invention does not operate in the arc mode. standard.
- the voltage initially supplied is of the order of several thousand volts, and is maintained at a few hundred volts after formation of the arc (phenomenon of rupture or breakdown).
- the high value of this voltage (voltage) even after breakdown is due to the downstream output formation of the tube 10 of a plasma sphere whose surface is the boundary of the shock wave generated by the expansion of the ion flux in the vacuum.
- this boundary is highly electrically charged, which contributes to accelerate the metal ions ejected by the plasma metal cylinder 20.
- it will be called "anomalous arc".
- the metal ions are naturally repelled by the anode, and in stationary regime the plasma self-maintains with heating maintained by the discharge current (Le., The electrons of the plasma which join the anode), especially for high current regimes.
- the formation of a perennial anomalous arc in the vacuum is maintained between the cathode and the anode.
- an external electron emitter 62 will be used as the electron source only to emit electrons for neutralizing the ion plasma towards the downstream end 15 of the tube 10.
- This operating mode of the plasma generation system has the advantage that in stationary mode the electron source 60, in this case the external transmitter 62, can operate at a lower power consumption.
- the plasma generating system (and method) according to the invention is used in a propulsion system of a space vehicle, the ejection of the plasma used for the propulsion of this vehicle.
- thruster For the space propulsion of a space vehicle, such as a satellite, known Hall effect thrusters (or thruster Hall Effect Thruster).
- This thruster comprises an annular space with a bottom at one end, and open at the other end, in which a magnetic field is established.
- a cathode which emits electrons, is located at the open end of the annular space often operating with a gas supply (hollow cathode).
- the bottom of the annular space is an anode, through which are injected xenon atoms or other propellant gas, often stored in liquefied form.
- the Electrons emitted by the cathode are trapped at the entrance of the annular space by the magnetic field, where they accumulate, a portion of the electrons continuing their paths to the anode.
- Propulsive gas atoms are ionized by collision with the electrons in the annulus, and accelerated by the electric field towards the open end of this space. At the exit of this space, the ions are neutralized by crossing the cloud of electrons and ejected out of the space in the form of a zero charge plasma. The ejection of this plasma provides propulsion to the spacecraft.
- a gas is injected through a tube (hollow cylinder) forming the anode, whose inner surface is covered with a material that emits electrons when heated (thermionic emission).
- heating the tube causes ionization of the gas as it passes through the tube.
- the ions thus formed are then accelerated by the potential difference between the anode and the cathode which is located at the end of the tube which is opposite to that by which the gas is injected.
- the thruster HC has drawbacks.
- the thruster HC operates with a low potential difference (about 30 V) and therefore a low intrinsic thrust.
- Further acceleration of ions to achieve higher thrust requires voltages of several hundred volts, which involves the use of polarized grids. These grids are placed downstream of the tube. This complicates the propulsion system. In addition these grids, being subject to the flow of accelerated ions, wear out, which decreases their long-term effectiveness.
- the propulsion system is simplified because it is not necessary to deposit a coating of additional material, electron source, on the inner face of the tube. Indeed, the electron source is located outside the tube.
- the initial source (precursor material) of material for the ions is, at ambient temperature, not a gas, nor a liquid, but a solid.
- the precursor material that is used by the system according to the invention before the start of its operation, and therefore before the heating of this precursor material is a solid metal.
- the acceleration potential of the ions of the propulsion system is greater than that of the HC thrusters and the ions are accelerated under a sufficiently high voltage (see explanation above), which makes it possible to dispense with the use of polarized grids. and therefore to reduce the weight of the system, and increasing its effectiveness.
- the system therefore works without acceleration grids.
- the system operates without magnets and therefore without a magnetic field, unlike HE boosters.
- the system is therefore simpler and less expensive to manufacture.
- the system according to the invention is therefore more compact than other systems according to the prior art.
- the length of the system is of the order of 10 cm, and its diameter is less than 1 cm, for example equal to 0.5 cm.
- the system according to the invention can also be used for other applications, such as the production of multicharged heavy ions for particle accelerators, or for heavy ion thermonuclear fusion.
- the system according to the invention thus advantageously replaces the existing systems for producing heavy ions, which use magnetic fields.
- the pulses provided by the generator are of high power, of the order of several hundred kV.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1750750A FR3062545B1 (fr) | 2017-01-30 | 2017-01-30 | Systeme de generation d'un jet plasma d'ions metalliques |
| PCT/FR2018/050205 WO2018138458A1 (fr) | 2017-01-30 | 2018-01-30 | Systeme de generation d'un jet plasma d'ions metalliques |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP3574719A1 true EP3574719A1 (fr) | 2019-12-04 |
| EP3574719B1 EP3574719B1 (fr) | 2022-04-20 |
Family
ID=59253595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP18705434.1A Active EP3574719B1 (fr) | 2017-01-30 | 2018-01-30 | Systeme de generation d'un jet plasma d'ions metalliques |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10863612B2 (fr) |
| EP (1) | EP3574719B1 (fr) |
| FR (1) | FR3062545B1 (fr) |
| WO (1) | WO2018138458A1 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110732301B (zh) * | 2019-11-08 | 2021-07-13 | 天津双微电子科技有限公司 | 液态汽化等离子体结构 |
| CN118273902B (zh) * | 2024-04-17 | 2025-09-16 | 哈尔滨工业大学 | 一种微阴极电弧推力器 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4328667A (en) * | 1979-03-30 | 1982-05-11 | The European Space Research Organisation | Field-emission ion source and ion thruster apparatus comprising such sources |
| DE10130464B4 (de) * | 2001-06-23 | 2010-09-16 | Thales Electron Devices Gmbh | Plasmabeschleuniger-Anordnung |
| US6769241B2 (en) * | 2001-07-09 | 2004-08-03 | W. E. Research Llc | Description of methods to increase propellant throughput in a micro pulsed plasma thruster |
| DE10153723A1 (de) * | 2001-10-31 | 2003-05-15 | Thales Electron Devices Gmbh | Plasmabeschleuniger-Anordnung |
| HUP0400808A2 (hu) * | 2004-04-19 | 2005-11-28 | Dr.Kozéky László Géza | Fémgőz ívű plazmafáklya és annak alkalmazása a metallurgiában, a plazmaenergiás pirolízisben és vitrifikációban, és más anyagátalakító eljárásokban |
| US7701145B2 (en) * | 2007-09-07 | 2010-04-20 | Nexolve Corporation | Solid expellant plasma generator |
| DE102007044074B4 (de) * | 2007-09-14 | 2011-05-26 | Thales Electron Devices Gmbh | Elektrostatische Ionenbeschleunigeranordnung |
| US9603233B2 (en) * | 2010-11-11 | 2017-03-21 | Schlumberger Technology Corporation | Particle accelerator with a heat pipe supporting components of a high voltage power supply |
| FR3040442B1 (fr) * | 2015-08-31 | 2019-08-30 | Ecole Polytechnique | Propulseur ionique a grille avec propergol solide integre |
-
2017
- 2017-01-30 FR FR1750750A patent/FR3062545B1/fr not_active Expired - Fee Related
-
2018
- 2018-01-30 WO PCT/FR2018/050205 patent/WO2018138458A1/fr not_active Ceased
- 2018-01-30 US US16/479,903 patent/US10863612B2/en active Active
- 2018-01-30 EP EP18705434.1A patent/EP3574719B1/fr active Active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018138458A1 (fr) | 2018-08-02 |
| US10863612B2 (en) | 2020-12-08 |
| FR3062545B1 (fr) | 2020-07-31 |
| EP3574719B1 (fr) | 2022-04-20 |
| FR3062545A1 (fr) | 2018-08-03 |
| US20190373711A1 (en) | 2019-12-05 |
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