EP3423229A2

EP3423229A2 - Device and method for roughening substrates

Info

Publication number: EP3423229A2
Application number: EP17706210.6A
Authority: EP
Inventors: Gerhard Flores; Martin Freitag; Wolfram Lohse
Original assignee: Gehring Technologies GmbH and Co KG
Current assignee: Gehring Technologies GmbH and Co KG
Priority date: 2016-02-29
Filing date: 2017-02-17
Publication date: 2019-01-09
Also published as: MX2018010368A; CN108698162A; WO2017148716A2; KR20180119591A; CN108698162B; KR102186359B1; WO2017148716A3; US11364571B2; DE102016103578A1; US20210213566A1; DE202016008441U1; DE102016103578B4

Abstract

The invention relates to a device for roughening cylinder bores using a beam tool and offering a very high level of process reliability even for a large quantity.

Description

Title: Device and method for roughening

substrates

Besehreibung

The invention relates to a method and an apparatus for producing roughened surfaces. These

roughened surfaces are thermally coated after roughening. The aim of the roughening is to achieve a high adhesive strength of the applied metallic or non-metallic layer. It is primarily about the application in cylinder bores in

Internal combustion engines. The thermal spray coatings are low friction and wear and allow the optimization of internal combustion engines, especially in terms of

Reduction of exhaust emissions. After roughening and thermal coating, a final honing operation takes place in several steps, which increase the spray-roughened surface a tribologically suitable topography changed advantageous.

DE 102009051717 A1 describes a process chain which contains a roughening by laser radiation and subsequent thermal coating.

EP 2799180 A2 describes a method for

Surface structuring, which the thermal

Coating precedes. The focus of this application is on the properties of the laser beam and their

Parameterization.

Likewise, DE 102014207263 AI exclusively describes laser-relevant features, in particular the design of the jet tool with a bifocal optics.

None of the cited references contains indications as to the roughening of cylinder bores in one

Mass production is feasible.

Disclosure of the invention

The object underlying the invention is to provide manufacturing equipment (devices), blasting tools and methods, which allow the roughening of a substrate surface, in particular the

Cylinder bores of an internal combustion engine,

fully automatic, reliable and with a cycle time of less than one minute.

This object is achieved by a device for roughening surfaces according to claim 1. This concept allows a compact design of the

Blasting tool.

The fact that the collimator is rotatably mounted on a carriage and does not participate in the rotational movement of the spindle, it can be simple, reliable and

low-loss manner, for example via a light guide to be connected to a beam source.

The fact that the focusing lens or the

Focusing optics is arranged in the jet tool and therefore participates the rotational movement of the spindle, the quality of the laser beam is improved. The transition between fixed collimator and rotating focusing lens is technically very simple: Because the collimator at least partially immersed in the spindle, can by a

simple labyrinth seal between the collimator and the rotatable spindle safely and reliably prevent laser beams from escaping in this transitional area, which is undesirable because it poses a danger to persons and property. In addition, the loss of

Barrier air is minimized, which is located within the spindle and the blasting tool.

Due to the co-rotating focusing optics or a co-rotating focusing lens, the centric position of the

Laser beam very accurately adhered to what the

Processing quality improved.

The procedure in the Z-axis direction and the rotation of the spindle ensures that the cylinder bore

roughened all over. For this purpose, it is necessary to tune the superposition of the rotational movement by a control / control so that defined feed movements are feasible. The rotation of the spindle motor is transferred to the spindle, which is structurally integrated into the compact spindle unit.

The independently applicable to the feed movement on the top deck surface can be applied masking, is seconded on a separate carriage. The masking is located on the underside of the Anleggewinkel.

The laser beam is fed into the alignable collimator, which transmits the divergent light beam

parallelized. If necessary, the collimator can be cooled with air or another gaseous or liquid fluid.

The collimator may be arranged vertically as shown. Another installation position is possible, but what

optical components for beam deflection requires.

Between the non-rotating collimator and the

rotating spindle is a small gap, so that only small blow-off losses occur. In addition, the gap is e.g. designed as a labyrinth seal, so that a look inside the spindle is not possible. The jet thus processed passes through the hollow spindle and enters the jet tool at the end of the spindle. in the

Beam tool is located at the spindle speed rotating focusing lens of focal length f, which focuses the beam on the surface of the bore. By doing

Beam tool is a beam deflection, which is designed as a mirror or prism so that no significant heating and no harmful thermal Fokusshift arises. The exit angle may differ from the normal direction to the tool axis, depending on the process engineering requirement. The beam passes through the Beam a baffled protective glass, so that no melting material can get into the jet tool and the contamination of the protective window remains low. The

Symmetrical mass distribution especially at the lower end of the jet tool improves concentricity even at high speeds. Nevertheless, an exact balancing of the jet tool is usually necessary.

It should be noted that the focus is adjustable. This can be done manually as well as automatically. The jet tool may be provided with an internal liquid or gas cooling system or externally with cooling fins for a

Convection cooling be executed.

In an advantageous embodiment of the invention, the jet tool and the workpiece to be machined relative to each other in the direction of a longitudinal axis of the

machining bore (Z-axis) movable, so that by a combination of a rotational movement of the spindle and the relative movement of the jet tool and workpiece, the part of the bore to be machined is achieved by the laser beam.

This relative movement can be characterized, for example

be realized that the device comprises a frame and a stand, wherein on the frame a

Workpiece receptacle is arranged, wherein at least one base plate is guided displaceably and positionable on the stand in the direction of an X-axis. By this arrangement, it is also possible to roughen one or more holes of a workpiece (for example, a cylinder block) by moving the jet tool in the direction of the Z-axis in the hole to be roughened. The deflection device in the jet tool can as

Mirror and / or be designed as a prism. Both

Embodiments build very compact and have only a relatively small mass, so that even high spindle speeds are possible without the spindle by the occurring

To deform centrifugal forces or otherwise

overburden. As a result, the performance of the blasting tool according to the invention is increased.

The device according to the invention is very flexible

concerning the arrangement of the collimator relative to the spindle or the blasting tool. Thus, a longitudinal axis of the collimator and a Z-axis of the device or a rotation axis of the jet tool can enclose an angle between 0 ° and 90 °. If necessary, a mirror or prism is placed between the collimator and the blasting tool.

To ensure that impurities can not get inside the spindle, is on a

Collimator opposite end of the tool provided a transparent to the laser beam window in the jet tool. Through this window, the laser beam exits the beam tool.

In addition, the jet tool has at least one

Barrier air channel and an outlet opening for the sealing air. The outlet for the sealing air is so

aligned so that the exiting the outlet opening blocking air prevents contamination from the window. As a result, a constant power or power density of the laser beam is achieved over a long period of operation. In other words: the intervals between the periodic

required cleanings of the window will be extended. Both contribute to the productivity of the

to increase jet tool according to the invention. The blocking air can be used at the same time for cooling the jet tool.

It has proved to be advantageous if the collimator via a light guide cable with a laser light source

connected is. Both the laser light source as well as the collimator and the light guide lead no

Rotary movements, what the structural design of the

Simplifies device and the jet tool and increases the reliability.

To ensure that the laser beam does not get out of the actual work area, a masking device is arranged on the base plate, which is guided in a displaceable and positionable manner in the direction of the Z-axis.

The masking device may comprise an annular element which is positioned approximately coaxially with the spindle and displaceable in the Z-axis direction. In addition, it may have a planar element, which is aligned orthogonal to the Z axis. This will be an optimal one

Coverage of the laser beam is achieved so that persons and / or objects are protected in the vicinity of the jet tool.

To a consistently high quality of the

To ensure beam tool, a measuring device for measuring the emerging from the window of the jet tool laser beam is provided on the stand or the frame. This measuring device measures above all the

Power density of the laser beam. When the measured Power density is below a predetermined threshold, then it can be concluded that the window of the spindle is contaminated by impurities and the window must be cleaned. After cleaning, the power of the laser beam returns to 100% of its original value.

Measuring devices for measuring the power density of a laser beam are available on the market. In connection with the claimed invention, it should be noted that the measuring device during the machining process

(Roughening a hole) from the working area of the

moved out beam tool according to the invention.

If the power density of the laser beam is to be measured, the measuring device is positioned so that it is at a certain distance from the window of the laser beam

Beam tool is located. The distance between the

Measuring device and the jet tool is chosen so that the focal point of the laser beam is not where the measuring device is located. Rather, the measuring device is so far away from the spindle that the laser beam impinges with a larger area than at the focal point and thus with a significantly lower power density on the measuring device. Then, the measurement of the power density can be done quickly and easily, without the measuring device is damaged by the high power density of the laser beam.

In a further advantageous embodiment, a cleaning device for the window of the jet tool is provided on the stand or the frame, wherein the

Cleaning device, a housing having at least one opening and at least one nozzle for a cleaning medium, in particular gas such as C0 ₂ , a liquid or dry ice, and that the opening in the

Housing and also allowed in the jet tool, but at least the window of the jet tool in the housing. This makes it possible, with a cleaning medium, preferably dry ice, to remove impurities on the window of the spindle effectively and reliably, so that after cleaning process again the full performance of the jet tool is made. During the

Cleaning process, the spindle can be rotated and / or the jet tool in the direction of the Z-axis relative to the cleaning device to be moved so that all areas of the window are cleaned evenly well.

The cleaning device is arranged displaceably and positionable on a guide, so that it during the roughening process from the working area of

Blasting tool can be moved. Only when the window of the blasting tool has to be cleaned, the

Cleaning device so in the work area of the

Strahlwerkzeugs positioned that by moving the jet tool in the direction of the Z-axis at least the window of the jet tool in the opening of the

Retracts cleaning device and it can be cleaned there, for example, with dry ice.

In order to minimize the air pollution in the environment of the device according to the invention and at the same time

Pollution of the window by evaporation and

To minimize partial melting of the surface of the bore to be machined impurities, a suction device is provided which has at least two suction lines, wherein preferably for each roughened in a workpiece bore a separate suction line is provided. The suction device has a central suction fan, which is connected to all suction lines.

According to the invention it is provided that in each suction line a closure member, such as a

Closure flap, is arranged. Basically, the suction lines are closed and only at the

Suction lines, which are connected to a hole that is being roughened, the closure members are open in the suction line.

So if, for example, four holes are present in the workpiece and only one hole is roughened at once, then three Abbsaugleitungen are closed and only one hole is connected to the exhaust fan. As a result, the power requirement of the suction fan is minimized without adversely affecting the efficiency of the suction device

affect.

The transitions between the holes to be machined and the suction lines are designed so that the

Pressure losses are minimized. They can be designed, for example, as confusers or diffusers.

In a further advantageous embodiment is a

Handling device provided which the finished workpieces from the inventive

Device takes out and touches a new workpiece on the workpiece holder. The workpieces themselves may have so-called index holes. Alternatively, it is also possible that the workpieces on a base frame

be received and this base frame has index holes that cooperate with complementary arranged pins of the workpiece holder of the device according to the invention so that the holes to be machined Workpiece are positioned exactly. This is important to achieve a consistent quality of bore machining.

If the axis of rotation of the jet tool does not coincide with the axis of the bore to be machined, then during one revolution of the spindle, the laser beam is more or less focused when it hits the surface to be machined of the bore. Accordingly, the power density of the laser beam is different, resulting in different processing results. That is undesirable. Therefore, the sufficiently accurate

Positioning of the holes relative to the axis of rotation of the spindle of the jet tool important for a process-safe mass production. A special advantage of

According to the invention by a laser beam can be seen in the fact that the requirements of the

Positioning accuracy are not particularly high, since the laser beam within the Rayleighlänge quasi a

has constant intensity. The Rayleigh length is under the process conditions about 0.6 - 0.8 mm. A

Positioning accuracy of ± 0.3 - 0.4 mm is therefore sufficient. Such accuracy is easily achieved by a modern machine tool.

Because the jet tool is movable in the direction of the X-axis, a very accurate positioning of the spindle can be made relative to the bore.

Production-related deviations of the positioning of the bore in the workpiece to be machined can be compensated. The above mentioned

Positioning accuracy of the jet train relative to the center of the bore to be machined is easy

achieved, even if the blasting tool only in the direction of X-axis and not in the direction of the Y-axis is movable. This results in a comparatively simple and cost-effective design of the invention

Manufacturing device.

The invention also relates to a method for roughening substrate surfaces with a device having one of the preceding claims, said method being the

Process steps include:

- placing the masking device on the

Face of the hole whose surface is to be roughened,

- Retracting the spindle into the hole as well

- Turn the spindle

- And / or method of the spindle (27) and / or the

Workpiece (11) in the Z-axis direction, so that the laser beam with a defined feed to

machining surface of the bore (61) in the form of a helix or in the form of several juxtaposed rings aufraut.

This very simple procedure allows a rapid and reliable machining of a bore.

It is possible to keep the laser beam on all the time even when the laser beam is moved over an opening in the bore to be machined, and whenever the laser beam is to be processed outside

Bore is to cover the laser beam by a shield so that the laser beam no damage to the people working there or the existing there

Equipment causes. This facilitates the control of the roughening process. Should holes be processed with additional ventilation holes or recesses for the connecting rod, so it is not necessary to turn off the beam in the area of interruptions, because of

Laser beam defocused on a workpiece surface at a greater distance than on the hole to be machined.

Due to the lower beam intensity, no roughening process takes place there.

Alternatively, the laser beam can be switched on exactly when it hits a surface to be roughened. This saves energy and reduces the effort for

Shields.

The shield is arranged at such a distance from the spindle or the window of the jet tool that the laser beam defocused on the

Shielding occurs and as a result, the power density of the laser beam is so low that the shield is not damaged.

Furthermore, it is provided that the suction device sucks the air offset with residues from the laser processing from the bore being processed. This first, the air in the immediate vicinity of the device according to the invention is improved and the window of the laser tool is less dirty. This improves the process stability of the roughening process and can lengthen the intervals after which the power of the laser beam must be measured. This increases the productivity of the device according to the invention.

In a further advantageous embodiment of the

According to the invention, it is provided that after predetermined intervals, for example after a one or more parameters of the beam quality, in particular the power density of the laser beam, are measured and depending on the result of this measurement either the processing is continued directly or the window of the jet tool is cleaned to the performance of the laser beam again to the original value.

This process procedure, which is dependent on the result of the measurement of the laser beam, on the one hand ensures optimum productivity and on the other hand ensures that the

Processing results remain constant even with very large quantities.

Further advantages and advantageous embodiments of the invention are the following drawings, whose

Description and claims removed. All features disclosed in the drawings, their description and claims may be inventive in their own right or in any combination with one another.

drawing

Show it:

Figure 1 is an overall view of the invention

Contraption,

Figures 2 and 3 details of the invention

Beam tool,

FIG. 4 a schematic representation of the measuring device for measuring the performance of the laser beam,

Figure 5 is a schematic representation of a

cleaning device according to the invention, Figure 6 shows a detail of the suction device according to the invention and

Figure 7 shows an embodiment of a handling device according to the invention.

Description of the embodiments

In the figure 1 is an embodiment of a

inventive device 1 shown in an isometric and somewhat simplified. It comprises a frame 3 and a stand 5. On the frame 3 are a

Workpiece holder 7 and a handling device 9 is arranged. The handling device 9 may, as indicated in Figure 1, be designed as an exchange gripper.

The workpieces 11 are in this embodiment

Cylinder blocks of four engine

Cylinder bores (without reference number).

On the stand 5, two spindles 27 are arranged on base plates 13 in these embodiments, which are movable and positionable in the direction of the X-axis. For this purpose, a guide and a drive and measuring devices for detecting the position of the base plates 13 are present. These linear guides and drives are known from the prior art and are therefore not explained in detail.

Arranged on the spindles 27 are blasting tools 33, which will be explained in more detail below in connection with FIGS. 2 and 3. The blasting tools 33 can be operated independently of each other and moved along the X-axis and the Z-axis. This makes it possible, at the same time or offset in time, several more Holes in one or more workpieces 11 to

to edit .

Between the beam tools 33, a measuring device 17 for measuring the power density or the laser beam is arranged. This measuring device will be explained in more detail in connection with FIG.

At the in the left end of the stator 5 is largely obscured by the left beam tool 33 a

Cleaning device 19 is present, which will be explained in more detail in connection with FIG.

FIG. 2 shows a detail of FIG. 1, namely a

Blasting tool 33 which is connected to the spindle 27 and is movable in the direction of a Z-axis.

On the base plate 13 is a linear guide 21st

arranged. The linear guide also includes a

Linear drive and sensors for detecting the position of the jet tool along the Z-axis. These components are known from the prior art and because of

Clarity not shown individually.

On the linear guide 21, a carriage 29 is arranged. The carriage 29 is movable in the direction of the Z-axis. The carriage 29 carries a collimator 25 and a

Drive 23 for the spindle 27. The collimator 25 is connected in this embodiment via an elbow 22 fixed to the carriage 29. The beam source and a

Optical fiber, which the collimator 25 with light

are not shown in Figure 2, so that the collimator 25 is clearly visible. The collimator 25 protrudes partially into the spindle 27, which is mounted rotatably mounted on the carriage 29. A rotary drive for the spindle 27 is provided with the reference numeral 31. The rotary drive 31 is also attached to the carriage 29.

In FIG. 2 below the spindle, a jet tool 33 is connected to the spindle 27. At the lower end of the jet tool 33 in FIG. 2, a deflection device and a window are arranged (see FIG. 3). The

Deflection device and the window are largely hidden in the figure 2 by a masking device 35.

The masking device 35 is on a separate

Carriage 37 guided on the guide 21 and can in

Direction of the Z-axis are moved independently of the jet tool 33. The masking device 35 is an annular structure which is concentric to the longitudinal axis of the spindle 27 or of the jet tool 33

is positioned. The masking device 35 is preferably made of copper because copper is the energy of

Laser beam can absorb well and because of its good thermal conductivity, this energy dissipates quickly.

In the figure 3, the end of the spindle 27 is only indicated. The spindle 27 terminates with a flange 41 on the

Blasting tool 33 is attached. The jet tool 33 is shown partially cut.

In the beam tool 33, a focusing lens 39 is arranged. The focusing lens 39 focuses the light of a laser beam 55, which is rectified by the collimator 25, onto a focal point F which is outside the focal point F

Beam tool is located. Where the focal point F is the surface of the bore 61 to be machined.

Thus, when the spindle 27 and with it the jet tool 33 performs a revolution about the Z-axis, a circular or annular region of the bore is hit by the laser beam 55 and roughened according to the invention. If now together with the rotation of the spindle 27, the jet tool 33 is moved in the direction of the Z-axis, resulting in a

helical or helical line. Along this line, the focus of the laser beam 55 travels over the hole to be roughened 61. Alternatively, a "ring" of the

Bore surface are machined and then that

Blasting tool in the direction of the Z-axis around the

Machining width of the jet tool 33 are moved. This process is repeated until the whole too

machining surface of the bore 61 is roughened.

If the central axis of the bore 61 to be machined and the axis of rotation of the spindle 27 coincide, then over the entire circumference of the bore results in a uniform action of the laser beam and consequently a very uniform result of the laser machining of the bore.

Also for this reason it is important that the

Beam tool 33 can be moved and positioned in the direction of the X-axis. For then the axis of rotation of the jet tool 33 can optimally to the longitudinal axis of

machining bore 61 can be aligned. This can be supported if necessary by measuring devices which detect the exact position of the bore to be machined, so that an optimal

Processing quality is guaranteed, even if the Holes 61 in the workpiece 11 due to manufacturing certain position tolerances.

In the figure 3, a flange 41 is visible. This flange is part of the tool spindle 27. About this flange, the jet tool 33 is screwed to the spindle 27. The jet tool 33 is replaceable, so that depending on the length of the bore to be machined and / or

Diameter of the bore to be machined a suitable blasting tool 33 can be attached to the spindle 27.

By means of pins 43 of an upper adjusting ring 45, a lower adjusting ring 47 and another

Adjusting ring 49, the focusing lens 39 in the desired position relative to the flange 41 of the spindle

positioned. This makes it possible to determine the location of the

Focal point F to change. That way that can

Blasting tool 33 are adapted to different bore diameter. The distance of the focal point F from the axis of rotation of the spindle 27 is usually set so that it coincides with the surface of the bore 61 to be machined.

A spring 51 compensates for temperature fluctuations, so that a play-free installation of the focusing lens 39 is ensured.

At the lower end of the jet tool 33 is a

Turning 53 arranged, which in this

Embodiment consists of a deflection mirror. However, it is also possible that the deflecting device 53 comprises a prism. The laser beam 55 is getting thinner, starting from the focusing lens 39, until it finally reaches the focal point F. Naturally, the power density is highest there.

The laser beam 55 leaves the beam tool 33 through a window 57, which is transparent to the laser beam and prevents impurities from entering the inside of the laser beam

Beam tool 33 can get.

At the upper end of the jet tool 33 in FIG. 3, a blocking air inlet 59 is shown. The sealing air passes through the interior of the jet tool to the lower end of the same and occurs there via a nozzle (not visible in Figure 3) so that an air curtain is placed over the outside of the window 57 and consequently no

Contamination or very few

Contaminants reach the surface of the window 57. Such impurities, when deposited on the window 57 reduces the power density or the power of the laser beam at the focal point F and thus also the work result of the jet tool

deteriorated. Therefore, the blocking air supply 59 is an effective means to increase process reliability.

In the figure 3 is very schematically a bore 61st

indicated. From Figure 3 it is clear that the

Longitudinal axis of the bore 61 and the longitudinal axis of the spindle 27 and the jet tool 33 coaxial with each other and that the focal point F is where the surface of the bore 61 is located. So if that

Beam tool 33 is rotated once through 360 °, the focal point F moves on a circular path once over the bore 61 and there causes the desired roughening of the surface. Now, if this rotational movement is combined with a feed direction in the direction of the Z-axis, then there is a helix on which the focus F travels over the surface of the bore 61, so that the entire surface of the

Hole 61 can be roughened. It goes without saying that the feed rate and the rotational speed of the spindle 27 must be coordinated so that the entire surface of the bore 61 is roughened.

To ensure that the power of the laser beam 55 in the focus F remains constant, a measuring device 63 is provided on the device according to the invention, the

for example, can be arranged on the stand 5.

In the figure 4 is such a measuring device 63rd

shown schematically. A measuring field of the measuring device is designated by the reference numeral 65. It is so

aligned so that the laser beam 55 orthogonally hits the measuring field 65. That is why the

Measuring device 63 is tilted.

The measuring device 63 is movable in the direction of a double arrow 67, so that a distance R at the window of the

Beam tool and the measuring field 65 is adjustable. In the position shown in Figure 4 is the

Measuring device 63 outside the processing area, that is behind the base plate 13. If now the power of the laser beam 55 is to be measured, then the

Measuring device 63 in the figure 4 in the direction of

Double arrow 67 moves to the top right until the distance R has the desired value. It is important to ensure that the measuring field 65 is not in the focal point F of the laser beam, because then the power density of the laser beam 55 is so high that the measuring field 65 is damaged. Therefore, therefore, the measuring field 65 is positioned so that the laser beam 55 is not at its maximum

Power density impinges on the measuring field 65, but has a power density that causes no damage to the measuring field 65.

In the measuring field 65, the power density of the

Laser beam 55 determined. When the power density

is below a predetermined threshold, then there are too many contaminants on the window 57 and the window 57 needs to be cleaned.

In FIG. 5, one suitable for this is

Cleaning device 69 shown. The

Cleaning device 69 comprises a housing 71 with an opening 73. Furthermore, there is a supply opening 74 for the cleaning medium, preferably dry ice.

The cleaning device 69 is movable in the direction of an X-axis, so that the cleaning device 69 is brought outside the working range of the jet tool 33, when the laser roughened a hole. FIG. 5 shows the position of the cleaning device 69 in which the jet tool 33 or the window 57 at the lower end of the jet tool 33 can be cleaned. The window 57 is just visible in the opening 73 of the housing 71.

If the window 57 is to be cleaned, it will run

Blasting tool 33 even deeper into the housing 71 a. The window 57 is aligned so that it is directly from the cleaning medium, which passes through the supply port 75 into the interior of the housing 71, is applied.

It is particularly preferred if as a cleaning medium Dry ice is used because this dry ice has a very good cleaning effect and evaporates without leaving any residue. The remaining contaminants fall down and can be collected and removed at the lower end of the housing 71.

In order for the window 57 to be cleaned evenly, it may be advantageous to use the blasting tool 22 during the process

To move cleaning operation in the direction of the Z-axis and / or to rotate about the Z-axis.

In the figure 6 is a part in the inventive

Suction device shown. In this

Embodiment are four holes 61 in one

Cylinder block (workpiece) available. At the lower end of the bores 61 each have a suction line 77 is attached. In each suction line 77, a closure member 79, for example. Provided in the form of a butterfly valve. Each bore 61 of the workpiece 11 is associated with a suction line 77. If, for example, in the second hole from the right one

Laser processing takes place, then the closure member 79 of the suction line 77 is opened and at the

Laser processing resulting vapors and impurities can be sucked through the suction line 69.

The upper ends 84 of the suction lines 77 in FIG. 6 are designed, for example as confusers, that the

Pressure losses in the transition region between the bore 61 and the suction line 77 are minimal.

Since in the other holes 61 at the in FIG. 6

illustrated embodiment, no laser processing takes place at the same time, the closure members 79 of the suction line 77 are closed. This will be the required volume flow or the energy consumption of a suction fan reduced and the suction of the

Impurities in the second bore from the right in FIG. 6 become more effective.

In the figure 7 is a handling device 81st

shown schematically. It is designed as an exchange gripper. The workpieces 11 are using

Pads 83 deposited on the workpiece holders 7 and accurately positioned by indexing devices. After the workpieces 11 have been processed, they are removed from the workpiece holders 7 by the handling device 81 and new unprocessed workpieces 11 are placed on the workpiece holders 7.

Claims

claims

Device for roughening surfaces comprising at least one carriage (29), each carriage

(29) carries at least one collimator (25) and at least one rotatably driven spindle (27) and wherein on each spindle (27) a jet tool (33) is fixed, characterized in that the jet tool

(33) a focusing lens (39) or a

Focusing optics and a deflecting device (53) comprises that the deflecting device (53) at one of the collimator (25) opposite end of the

Beam tool (33) is arranged, and that the focusing lens (39) or the focusing optics participates the rotational movement of the jet tool (33).

Apparatus according to claim 1, characterized in that the jet tool (33) and a workpiece to be machined (11) relative to each other in the direction of an X-axis are displaceable.

Apparatus according to claim 1 or 2, characterized

characterized in that it comprises a frame (3) and a stand (5), that on the frame (3) a workpiece holder (7) is arranged, that on the stand (5) at least one base plate (13) in

Direction of an X-axis displaceable and positionable out, and that the at least one carriage (29) on the base plate (13) is guided displaceably in the direction of an X-axis.

Device according to one of the preceding claims, characterized in that the deflection device (53) comprises a mirror and / or a prism.

5. Device according to one of the preceding claims, characterized in that a longitudinal axis of the collimator (25) and a Z-axis of the device form an angle between 0 ° and 90 °.

6. Device according to one of the preceding claims, characterized in that between an output of the collimator (25) and the jet tool (33), a mirror and / or a prism is arranged, the or the laser beam parallel to the Z-axis

aligns.

7. Device according to one of the preceding claims, characterized in that the spindle (27) at its the collimator (25) opposite end for the laser beam (55) transparent window (57), that the spindle (27) at least one sealing air channel (59) and an outlet opening for the sealing air, wherein from the outlet opening

escaping air prevents dirt from the window (57).

8. Device according to one of the preceding claims, characterized in that the jet tool (33) has a cooling, in particular a convection cooling or a liquid cooling.

9. Device according to one of the preceding claims, characterized in that the collimator (25) via a light guide cable with a laser light source

connected is.

10. Device according to one of the preceding claims, characterized in that on the base plate (13) a masking device (35) is displaceably and positionably guided in the direction of a Z-axis.

11. The device according to claim 10, characterized in that the masking device (35) coaxial with the spindle (27) is displaceable.

12. Device according to one of the preceding claims, characterized in that on the stand (5) or the frame (3) has a measuring device (63) for measuring the out of the window (57) of the jet tool (15) exiting laser beam (55) is.

13. The apparatus according to claim 12, characterized in that the measuring device (63) is guided on a guide that a distance (R) between the

Measuring device (63) and the spindle (27) is adjustable.

14. Device according to one of the preceding claims, characterized in that on the stand (5) or the frame (3) a cleaning device (69) is arranged, that the cleaning device (69) has a housing (71) with at least one opening (73 ) and at least one supply (75) for a cleaning medium, in particular a gas, such as CO 2, a

Liquid or dry ice, and that the opening (73) is the immersion of the spindle (27),

but at least the window (57) of the spindle (27), allowed in the housing (71).

15. The apparatus according to claim 14, characterized in that the cleaning device (69) is guided on a guide, so that the cleaning device (69) If necessary coaxially to a longitudinal axis spindle (27) can be positioned.

16. Device according to one of the preceding claims, characterized in that the accuracy with which the jet tool (33) relative to the

machining bore (61) is smaller than the Rayleighlange the laser beam (55).

17. Device according to one of the preceding claims, characterized in that on the stand (5) or the frame (3), a suction device is provided, and that the suction device at least two

Suction lines (77), but preferably for each in a workpiece (11) to be roughened bore (61) has a separate suction line (77), and that the suction device comprises a suction fan, which is connected to all suction lines (77).

18. The apparatus according to claim 17, characterized in that in each suction line (77) has a controllable

Closing device, in particular a closure flap (79), is present.

19. Device according to one of the preceding claims, characterized in that it has a

Handling device (81), and that the handling device (81) to be processed

Workpieces (11) transported into the working area of the device and the machined workpieces (11) transported from the working area of the device.

20. The apparatus according to claim 19, characterized in that the handling device (81) is designed as a turning gripper.

21. A method for roughening substrate surfaces with a device according to any one of the preceding

Claims characterized by the following

Process steps:

- placing the masking device (35) on the

Bore (61) whose surface is to be roughened,

- Retraction of the jet tool (33) in the bore

(61),

- Rotating the jet tool (33) and / or feed of the jet tool (33) in the Z-axis direction.

22. The method according to claim 21, characterized in that the beam source during the entire

Roughing process is turned on.

23. The method according to claim 21 or 22, characterized

characterized in that the beam source is switched off when the entire bore (61) or the desired part of the bore (61) is roughened.

24. The method according to any one of claims 21 to 23, characterized in that the suction device sucks the offset with the residues of the laser processing air during machining from the bore (61) being processed.

25. The method according to claim 24, characterized in that only the air from the or in-progress holes (61) is sucked.

26. The method according to any one of claims 21 to 25, characterized in that at regular intervals the at least the window (57) at the top of the spindle (27) is moved into the working area of the measuring device (63), and that then the outgoing from the window (57) laser beam (55) is measured.

27. Method according to claim 26, characterized in that, depending on the result of the measurement of the

Laser beam (55) the window (57) of the jet tool (33) without intervening cleaning step immediately for roughening holes (61) is used.

28. Method according to claim 26, characterized in that, depending on the result of the measurement of the

Laser beam (55) the window (57) of the jet tool (15) is cleaned.