EP2816322A4 - Dispositif et procédé de mesure d'angle de rotation - Google Patents
Dispositif et procédé de mesure d'angle de rotationInfo
- Publication number
- EP2816322A4 EP2816322A4 EP13748811.0A EP13748811A EP2816322A4 EP 2816322 A4 EP2816322 A4 EP 2816322A4 EP 13748811 A EP13748811 A EP 13748811A EP 2816322 A4 EP2816322 A4 EP 2816322A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotational angle
- angle measurement
- measurement device
- measurement method
- rotational
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title 1
- 238000000691 measurement method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012030828 | 2012-02-15 | ||
JP2012245265 | 2012-11-07 | ||
PCT/JP2013/053215 WO2013122037A1 (fr) | 2012-02-15 | 2013-02-12 | Dispositif et procédé de mesure d'angle de rotation |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2816322A1 EP2816322A1 (fr) | 2014-12-24 |
EP2816322A4 true EP2816322A4 (fr) | 2015-12-16 |
EP2816322B1 EP2816322B1 (fr) | 2018-08-29 |
Family
ID=48984147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP13748811.0A Active EP2816322B1 (fr) | 2012-02-15 | 2013-02-12 | Dispositif et procédé de mesure d'angle de rotation |
Country Status (4)
Country | Link |
---|---|
US (2) | US9354088B2 (fr) |
EP (1) | EP2816322B1 (fr) |
JP (2) | JP5682802B2 (fr) |
WO (1) | WO2013122037A1 (fr) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5115872B2 (ja) * | 2010-10-27 | 2013-01-09 | 株式会社東京精密 | 角度測定方法及び角度測定システム |
JP6090656B2 (ja) * | 2012-02-15 | 2017-03-08 | 株式会社東京精密 | 回転角度測定装置及び回転角度測定方法 |
WO2013122037A1 (fr) * | 2012-02-15 | 2013-08-22 | 株式会社東京精密 | Dispositif et procédé de mesure d'angle de rotation |
JP6157171B2 (ja) * | 2013-03-28 | 2017-07-05 | シチズン時計株式会社 | ポリゴン加工装置およびポリゴン加工方法 |
JP6049519B2 (ja) * | 2013-03-28 | 2016-12-21 | シチズン時計株式会社 | ポリゴン加工装置およびポリゴン加工方法 |
US9134145B2 (en) * | 2013-04-03 | 2015-09-15 | Tokyo Seimitsu Co., Ltd. | Angle measuring method and angle measuring system |
CN103644838B (zh) * | 2013-11-06 | 2017-01-18 | 中联重科股份有限公司 | 回转角度测量机构、回转角度测量方法、装置及系统 |
CN103900463B (zh) * | 2014-04-25 | 2016-06-01 | 江西省智成测控技术研究所有限责任公司 | 一种自适应提高模拟输出角度的绝对测量精度的方法 |
US10088338B2 (en) * | 2014-07-28 | 2018-10-02 | Halliburton Energy Services, Inc. | Optical shaft twist angle measurement methods and systems |
CN109073371B (zh) | 2016-04-19 | 2020-06-02 | Abb瑞士股份有限公司 | 倾斜检测的设备及方法 |
JP6716425B2 (ja) * | 2016-11-01 | 2020-07-01 | 株式会社小野測器 | 回転角検出装置及びロータリエンコーダ |
CN107654579B (zh) * | 2017-10-12 | 2023-08-22 | 贵州群建精密机械有限公司 | 一种数据输出传动机构 |
JP7020862B2 (ja) * | 2017-10-26 | 2022-02-16 | 株式会社河合楽器製作所 | パラメータ制御装置及び制御方法 |
CN109798927B (zh) * | 2019-01-23 | 2022-05-13 | 长春理工大学 | 基于转角互逆的轴角编码器全量程精度检测装置 |
JP2020197452A (ja) * | 2019-06-03 | 2020-12-10 | 株式会社ミツトヨ | 光学式角度センサ |
CN115038560B (zh) * | 2020-03-17 | 2023-07-18 | 瑞德医疗机器股份有限公司 | 旋转位置检测单元 |
CN112621380B (zh) * | 2020-12-17 | 2022-05-27 | 珠海格力智能装备有限公司 | 回转轴精度检测设备和回转轴精度检测方法 |
KR102498838B1 (ko) * | 2021-06-30 | 2023-02-09 | 조선대학교산학협력단 | 회전체의 회전 운동 모션을 측정하는 방법 및 장치 |
CN117781994B (zh) * | 2024-02-27 | 2024-05-07 | 南京新紫峰电子科技有限公司 | 旋变传感器的测试方法、装置、介质 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5237390A (en) * | 1990-06-15 | 1993-08-17 | Renishaw Plc | Method and apparatus for measurement of angular displacement |
US6008901A (en) * | 1997-08-22 | 1999-12-28 | Canon Kabushiki Kaisha | Shape measuring heterodyne interferometer with multiplexed photodetector aaray or inclined probe head |
US20080148808A1 (en) * | 2006-11-17 | 2008-06-26 | Amo Automatisierung Messtechnik Optik Gmbh | Position measuring device |
EP2447677A2 (fr) * | 2010-10-27 | 2012-05-02 | Tokyo Seimitsu Co., Ltd. | Procédé de mesure d'angle et système de mesure d'angle |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE396108B (sv) | 1975-03-12 | 1977-09-05 | Akermans Verkstad Ab | Vinkelmetdon for grevarmen vid grevmaskiner |
JPH02272310A (ja) | 1989-04-14 | 1990-11-07 | Nikon Corp | 回転角度測定装置 |
JP2826876B2 (ja) * | 1990-01-16 | 1998-11-18 | 株式会社ソキア | 電子式測量機 |
JPH0632575Y2 (ja) | 1990-04-09 | 1994-08-24 | ロテック システムズ リミテッド | ロータリエンコーダ |
GB9119304D0 (en) | 1991-09-10 | 1991-10-23 | Renishaw Transducer Syst | Method and apparatus for calibration of angular displacement |
US5508806A (en) | 1995-02-13 | 1996-04-16 | Hewlett-Packard Company | Apparatus and method for making rotary calibrations of a machine tool table |
JPH095080A (ja) | 1995-06-19 | 1997-01-10 | Asahi Optical Co Ltd | 測量機 |
JP3698796B2 (ja) | 1996-03-12 | 2005-09-21 | オリンパス株式会社 | 角度検出装置、及び頭部搭載型映像表示装置 |
JP3192992B2 (ja) | 1996-08-27 | 2001-07-30 | 株式会社東京精密 | 工作機械の角度割出精度測定方法及びシステム |
JP3501639B2 (ja) | 1997-10-31 | 2004-03-02 | キヤノン株式会社 | 3次元形状測定装置 |
JP3356104B2 (ja) | 1999-03-29 | 2002-12-09 | 日本電気株式会社 | 移動ステージのローリング角度測定方法及び装置 |
JP2005292037A (ja) | 2004-04-02 | 2005-10-20 | Tokyo Seimitsu Co Ltd | 角度測定装置 |
JP2006047093A (ja) | 2004-08-04 | 2006-02-16 | Mitsutoyo Corp | 傾斜角度測定装置 |
JP4992078B2 (ja) | 2006-06-19 | 2012-08-08 | 国立大学法人東京農工大学 | 傾斜角測定装置、これを搭載した工作機械および工作機械の傾斜角校正方法 |
JP5198761B2 (ja) | 2006-12-11 | 2013-05-15 | 株式会社ミツトヨ | 回転変位補正装置、および、変位検出装置 |
NL1033040C2 (nl) | 2006-12-12 | 2008-06-18 | Iac Geometrische Ingenieurs B | Een methode voor de kalibratie van de hoek waarover een object geroteerd is om een rotatie-as zoals van een rondtafel. |
US7414547B2 (en) * | 2006-12-22 | 2008-08-19 | 3M Innovative Properties Company | Method and system for calibrating a rotary encoder and making a high resolution rotary encoder |
WO2013122037A1 (fr) * | 2012-02-15 | 2013-08-22 | 株式会社東京精密 | Dispositif et procédé de mesure d'angle de rotation |
JP5224206B2 (ja) | 2013-01-23 | 2013-07-03 | 株式会社東京精密 | 角度測定方法及び角度測定システム |
US9134145B2 (en) * | 2013-04-03 | 2015-09-15 | Tokyo Seimitsu Co., Ltd. | Angle measuring method and angle measuring system |
-
2013
- 2013-02-12 WO PCT/JP2013/053215 patent/WO2013122037A1/fr active Application Filing
- 2013-02-12 EP EP13748811.0A patent/EP2816322B1/fr active Active
- 2013-02-12 US US14/379,055 patent/US9354088B2/en active Active
- 2013-02-12 JP JP2013558688A patent/JP5682802B2/ja active Active
-
2015
- 2015-01-16 JP JP2015006937A patent/JP2015092189A/ja active Pending
-
2016
- 2016-04-26 US US15/138,786 patent/US9778075B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5237390A (en) * | 1990-06-15 | 1993-08-17 | Renishaw Plc | Method and apparatus for measurement of angular displacement |
US5237390B1 (en) * | 1990-06-15 | 1997-06-10 | Renishaw Plc | Method and apparatus for measurement of angular displacement |
US6008901A (en) * | 1997-08-22 | 1999-12-28 | Canon Kabushiki Kaisha | Shape measuring heterodyne interferometer with multiplexed photodetector aaray or inclined probe head |
US20080148808A1 (en) * | 2006-11-17 | 2008-06-26 | Amo Automatisierung Messtechnik Optik Gmbh | Position measuring device |
EP2447677A2 (fr) * | 2010-10-27 | 2012-05-02 | Tokyo Seimitsu Co., Ltd. | Procédé de mesure d'angle et système de mesure d'angle |
Non-Patent Citations (1)
Title |
---|
See also references of WO2013122037A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP2816322B1 (fr) | 2018-08-29 |
US9778075B2 (en) | 2017-10-03 |
JP5682802B2 (ja) | 2015-03-11 |
US20150036144A1 (en) | 2015-02-05 |
EP2816322A1 (fr) | 2014-12-24 |
JP2015092189A (ja) | 2015-05-14 |
JPWO2013122037A1 (ja) | 2015-05-11 |
US20160238413A1 (en) | 2016-08-18 |
WO2013122037A1 (fr) | 2013-08-22 |
US9354088B2 (en) | 2016-05-31 |
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